JP5950042B2 - ガス供給管および熱処理装置 - Google Patents
ガス供給管および熱処理装置 Download PDFInfo
- Publication number
- JP5950042B2 JP5950042B2 JP2015522732A JP2015522732A JP5950042B2 JP 5950042 B2 JP5950042 B2 JP 5950042B2 JP 2015522732 A JP2015522732 A JP 2015522732A JP 2015522732 A JP2015522732 A JP 2015522732A JP 5950042 B2 JP5950042 B2 JP 5950042B2
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- pipe
- supply pipe
- gas
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/12—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Thermal Sciences (AREA)
- Heat Treatment Of Articles (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Tunnel Furnaces (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013129549 | 2013-06-20 | ||
JP2013129549 | 2013-06-20 | ||
PCT/JP2014/064844 WO2014203733A1 (ja) | 2013-06-20 | 2014-06-04 | ガス供給管および熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5950042B2 true JP5950042B2 (ja) | 2016-07-13 |
JPWO2014203733A1 JPWO2014203733A1 (ja) | 2017-02-23 |
Family
ID=52104473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015522732A Active JP5950042B2 (ja) | 2013-06-20 | 2014-06-04 | ガス供給管および熱処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5950042B2 (zh) |
KR (1) | KR101782824B1 (zh) |
CN (1) | CN105324621B (zh) |
WO (1) | WO2014203733A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101941649B1 (ko) * | 2017-11-24 | 2019-01-23 | 주식회사 엘지화학 | 편광판 및 이를 포함하는 화상 표시 장치 |
JP7216537B2 (ja) * | 2018-12-13 | 2023-02-01 | オリンパス株式会社 | 加熱炉 |
JP2021173419A (ja) * | 2020-04-17 | 2021-11-01 | 中外炉工業株式会社 | 連続式加熱炉に用いるプッシャ装置およびそれを備える連続式加熱炉 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05340676A (ja) * | 1992-06-08 | 1993-12-21 | Murata Mfg Co Ltd | バッチ式焼成炉 |
JP2002299273A (ja) * | 2001-04-04 | 2002-10-11 | Sharp Corp | 半導体基板用熱処理装置 |
JP2009068739A (ja) * | 2007-09-12 | 2009-04-02 | Sumitomo Metal Mining Co Ltd | 連続焼成炉 |
JP2012225620A (ja) * | 2011-04-22 | 2012-11-15 | Panasonic Corp | 熱処理装置 |
JP2012225557A (ja) * | 2011-04-19 | 2012-11-15 | Panasonic Corp | 熱処理装置 |
JP2013120027A (ja) * | 2011-12-08 | 2013-06-17 | Panasonic Corp | 二重管式熱交換器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000039114A (ja) * | 1998-07-22 | 2000-02-08 | Tokyo Gas Co Ltd | ラジアントチューブバーナ装置とそれを用いた間接加熱装置 |
JP2000079462A (ja) * | 1998-09-07 | 2000-03-21 | Maruyasu Industries Co Ltd | 熱交換器 |
JP2006189249A (ja) | 2006-03-01 | 2006-07-20 | Matsushita Electric Ind Co Ltd | 二重管熱交換器 |
JP2009019784A (ja) * | 2007-07-10 | 2009-01-29 | Sumitomo Metal Mining Co Ltd | 連続焼成炉 |
KR101250626B1 (ko) * | 2010-08-10 | 2013-04-03 | 삼성전기주식회사 | 세라믹 소성로 |
CN202836268U (zh) * | 2012-08-29 | 2013-03-27 | 洛阳麦达斯铝业有限公司 | 管道式换热器及换热设备 |
-
2014
- 2014-06-04 CN CN201480034939.8A patent/CN105324621B/zh active Active
- 2014-06-04 JP JP2015522732A patent/JP5950042B2/ja active Active
- 2014-06-04 WO PCT/JP2014/064844 patent/WO2014203733A1/ja active Application Filing
- 2014-06-04 KR KR1020157033603A patent/KR101782824B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05340676A (ja) * | 1992-06-08 | 1993-12-21 | Murata Mfg Co Ltd | バッチ式焼成炉 |
JP2002299273A (ja) * | 2001-04-04 | 2002-10-11 | Sharp Corp | 半導体基板用熱処理装置 |
JP2009068739A (ja) * | 2007-09-12 | 2009-04-02 | Sumitomo Metal Mining Co Ltd | 連続焼成炉 |
JP2012225557A (ja) * | 2011-04-19 | 2012-11-15 | Panasonic Corp | 熱処理装置 |
JP2012225620A (ja) * | 2011-04-22 | 2012-11-15 | Panasonic Corp | 熱処理装置 |
JP2013120027A (ja) * | 2011-12-08 | 2013-06-17 | Panasonic Corp | 二重管式熱交換器 |
Also Published As
Publication number | Publication date |
---|---|
KR20160003781A (ko) | 2016-01-11 |
CN105324621B (zh) | 2017-06-13 |
CN105324621A (zh) | 2016-02-10 |
JPWO2014203733A1 (ja) | 2017-02-23 |
WO2014203733A1 (ja) | 2014-12-24 |
KR101782824B1 (ko) | 2017-09-28 |
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