JP5950042B2 - ガス供給管および熱処理装置 - Google Patents

ガス供給管および熱処理装置 Download PDF

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Publication number
JP5950042B2
JP5950042B2 JP2015522732A JP2015522732A JP5950042B2 JP 5950042 B2 JP5950042 B2 JP 5950042B2 JP 2015522732 A JP2015522732 A JP 2015522732A JP 2015522732 A JP2015522732 A JP 2015522732A JP 5950042 B2 JP5950042 B2 JP 5950042B2
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JP
Japan
Prior art keywords
gas supply
pipe
supply pipe
gas
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015522732A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2014203733A1 (ja
Inventor
敦 瀬川
敦 瀬川
泰志 多田
泰志 多田
祥 松岡
祥 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of JP5950042B2 publication Critical patent/JP5950042B2/ja
Publication of JPWO2014203733A1 publication Critical patent/JPWO2014203733A1/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/12—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases, or liquids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Thermal Sciences (AREA)
  • Heat Treatment Of Articles (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Tunnel Furnaces (AREA)
JP2015522732A 2013-06-20 2014-06-04 ガス供給管および熱処理装置 Active JP5950042B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013129549 2013-06-20
JP2013129549 2013-06-20
PCT/JP2014/064844 WO2014203733A1 (ja) 2013-06-20 2014-06-04 ガス供給管および熱処理装置

Publications (2)

Publication Number Publication Date
JP5950042B2 true JP5950042B2 (ja) 2016-07-13
JPWO2014203733A1 JPWO2014203733A1 (ja) 2017-02-23

Family

ID=52104473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015522732A Active JP5950042B2 (ja) 2013-06-20 2014-06-04 ガス供給管および熱処理装置

Country Status (4)

Country Link
JP (1) JP5950042B2 (ko)
KR (1) KR101782824B1 (ko)
CN (1) CN105324621B (ko)
WO (1) WO2014203733A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101941649B1 (ko) * 2017-11-24 2019-01-23 주식회사 엘지화학 편광판 및 이를 포함하는 화상 표시 장치
JP7216537B2 (ja) * 2018-12-13 2023-02-01 オリンパス株式会社 加熱炉
JP2021173419A (ja) * 2020-04-17 2021-11-01 中外炉工業株式会社 連続式加熱炉に用いるプッシャ装置およびそれを備える連続式加熱炉

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340676A (ja) * 1992-06-08 1993-12-21 Murata Mfg Co Ltd バッチ式焼成炉
JP2002299273A (ja) * 2001-04-04 2002-10-11 Sharp Corp 半導体基板用熱処理装置
JP2009068739A (ja) * 2007-09-12 2009-04-02 Sumitomo Metal Mining Co Ltd 連続焼成炉
JP2012225620A (ja) * 2011-04-22 2012-11-15 Panasonic Corp 熱処理装置
JP2012225557A (ja) * 2011-04-19 2012-11-15 Panasonic Corp 熱処理装置
JP2013120027A (ja) * 2011-12-08 2013-06-17 Panasonic Corp 二重管式熱交換器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000039114A (ja) * 1998-07-22 2000-02-08 Tokyo Gas Co Ltd ラジアントチューブバーナ装置とそれを用いた間接加熱装置
JP2000079462A (ja) * 1998-09-07 2000-03-21 Maruyasu Industries Co Ltd 熱交換器
JP2006189249A (ja) 2006-03-01 2006-07-20 Matsushita Electric Ind Co Ltd 二重管熱交換器
JP2009019784A (ja) * 2007-07-10 2009-01-29 Sumitomo Metal Mining Co Ltd 連続焼成炉
KR101250626B1 (ko) * 2010-08-10 2013-04-03 삼성전기주식회사 세라믹 소성로
CN202836268U (zh) * 2012-08-29 2013-03-27 洛阳麦达斯铝业有限公司 管道式换热器及换热设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340676A (ja) * 1992-06-08 1993-12-21 Murata Mfg Co Ltd バッチ式焼成炉
JP2002299273A (ja) * 2001-04-04 2002-10-11 Sharp Corp 半導体基板用熱処理装置
JP2009068739A (ja) * 2007-09-12 2009-04-02 Sumitomo Metal Mining Co Ltd 連続焼成炉
JP2012225557A (ja) * 2011-04-19 2012-11-15 Panasonic Corp 熱処理装置
JP2012225620A (ja) * 2011-04-22 2012-11-15 Panasonic Corp 熱処理装置
JP2013120027A (ja) * 2011-12-08 2013-06-17 Panasonic Corp 二重管式熱交換器

Also Published As

Publication number Publication date
KR20160003781A (ko) 2016-01-11
CN105324621B (zh) 2017-06-13
CN105324621A (zh) 2016-02-10
JPWO2014203733A1 (ja) 2017-02-23
WO2014203733A1 (ja) 2014-12-24
KR101782824B1 (ko) 2017-09-28

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