JP5927791B2 - 搬送車 - Google Patents

搬送車 Download PDF

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Publication number
JP5927791B2
JP5927791B2 JP2011153883A JP2011153883A JP5927791B2 JP 5927791 B2 JP5927791 B2 JP 5927791B2 JP 2011153883 A JP2011153883 A JP 2011153883A JP 2011153883 A JP2011153883 A JP 2011153883A JP 5927791 B2 JP5927791 B2 JP 5927791B2
Authority
JP
Japan
Prior art keywords
cassette
transport vehicle
plate member
mapping sensor
flat plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011153883A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013021166A (ja
Inventor
田中　博
博 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP2011153883A priority Critical patent/JP5927791B2/ja
Priority to CN201210128532.4A priority patent/CN102874530B/zh
Priority to KR1020120064950A priority patent/KR101526436B1/ko
Priority to TW101124729A priority patent/TWI526381B/zh
Publication of JP2013021166A publication Critical patent/JP2013021166A/ja
Application granted granted Critical
Publication of JP5927791B2 publication Critical patent/JP5927791B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
JP2011153883A 2011-07-12 2011-07-12 搬送車 Expired - Fee Related JP5927791B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011153883A JP5927791B2 (ja) 2011-07-12 2011-07-12 搬送車
CN201210128532.4A CN102874530B (zh) 2011-07-12 2012-04-27 搬送车
KR1020120064950A KR101526436B1 (ko) 2011-07-12 2012-06-18 반송차
TW101124729A TWI526381B (zh) 2011-07-12 2012-07-10 Transport car

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011153883A JP5927791B2 (ja) 2011-07-12 2011-07-12 搬送車

Publications (2)

Publication Number Publication Date
JP2013021166A JP2013021166A (ja) 2013-01-31
JP5927791B2 true JP5927791B2 (ja) 2016-06-01

Family

ID=47476100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011153883A Expired - Fee Related JP5927791B2 (ja) 2011-07-12 2011-07-12 搬送車

Country Status (4)

Country Link
JP (1) JP5927791B2 (zh)
KR (1) KR101526436B1 (zh)
CN (1) CN102874530B (zh)
TW (1) TWI526381B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101421573B1 (ko) * 2013-02-15 2014-07-22 주식회사 신성에프에이 카세트 크레인의 맵핑 모듈
CN104952776B (zh) * 2015-04-24 2019-04-26 沈阳拓荆科技有限公司 一款加热盘检验及拆装时存放专用车

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63271951A (ja) * 1987-04-28 1988-11-09 Nippon Signal Co Ltd:The ウエ−ハ搬送装置
JPH042036U (zh) * 1990-04-19 1992-01-09
JP2931922B2 (ja) * 1990-09-03 1999-08-09 東京エレクトロン株式会社 熱処理工程におけるアンローディング方法及び熱処理装置
JP3959778B2 (ja) * 1997-04-14 2007-08-15 神鋼電機株式会社 無人搬送台車
KR100563456B1 (ko) * 1997-04-14 2006-05-25 아시스트 신꼬, 인코포레이티드 무인반송대차 및 그 장치
JP2000238904A (ja) * 1999-02-18 2000-09-05 Sumitomo Heavy Ind Ltd スタッカクレーン
JP2001274224A (ja) * 2000-03-27 2001-10-05 Mitsubishi Electric Corp 基板カセット装置
JP4276810B2 (ja) * 2002-02-15 2009-06-10 東京エレクトロン株式会社 無人搬送車
US7153079B2 (en) * 2001-09-18 2006-12-26 Murata Kikai Kabushiki Kaisha Automated guided vehicle
JP3927798B2 (ja) * 2001-12-03 2007-06-13 東京エレクトロン株式会社 移載装置
JP4502127B2 (ja) * 2005-04-01 2010-07-14 株式会社ダイフク カセット保管及び被処理板の処理設備
JP4706902B2 (ja) * 2005-04-11 2011-06-22 村田機械株式会社 搬送車及び物品の移載方法
JP4297145B2 (ja) * 2006-09-21 2009-07-15 村田機械株式会社 移載装置
JP2008118014A (ja) * 2006-11-07 2008-05-22 Toshiba Matsushita Display Technology Co Ltd 基板収容カセット
JP2009051307A (ja) * 2007-08-24 2009-03-12 Asyst Technologies Japan Inc 無人搬送車、該無人搬送車を備えた搬送移載システム、及び搬送移載方法

Also Published As

Publication number Publication date
KR101526436B1 (ko) 2015-06-05
CN102874530A (zh) 2013-01-16
TWI526381B (zh) 2016-03-21
JP2013021166A (ja) 2013-01-31
KR20130008456A (ko) 2013-01-22
CN102874530B (zh) 2016-11-02
TW201305032A (zh) 2013-02-01

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