JP5733279B2 - 電子部品及びその製法、並びにそれに用いる封止材料ペースト - Google Patents
電子部品及びその製法、並びにそれに用いる封止材料ペースト Download PDFInfo
- Publication number
- JP5733279B2 JP5733279B2 JP2012167905A JP2012167905A JP5733279B2 JP 5733279 B2 JP5733279 B2 JP 5733279B2 JP 2012167905 A JP2012167905 A JP 2012167905A JP 2012167905 A JP2012167905 A JP 2012167905A JP 5733279 B2 JP5733279 B2 JP 5733279B2
- Authority
- JP
- Japan
- Prior art keywords
- sealing material
- glass
- electronic component
- oxide
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000003566 sealing material Substances 0.000 title claims description 131
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000011521 glass Substances 0.000 claims description 164
- 239000000758 substrate Substances 0.000 claims description 147
- 238000002844 melting Methods 0.000 claims description 107
- 230000008018 melting Effects 0.000 claims description 64
- 239000002245 particle Substances 0.000 claims description 57
- 239000000945 filler Substances 0.000 claims description 51
- 239000011347 resin Substances 0.000 claims description 42
- 229920005989 resin Polymers 0.000 claims description 42
- 230000002093 peripheral effect Effects 0.000 claims description 35
- 125000006850 spacer group Chemical group 0.000 claims description 33
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 32
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 24
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 19
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 19
- 230000007704 transition Effects 0.000 claims description 17
- 239000011787 zinc oxide Substances 0.000 claims description 16
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 15
- 239000000292 calcium oxide Substances 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 13
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 12
- 239000002904 solvent Substances 0.000 claims description 11
- 239000011230 binding agent Substances 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 10
- 238000005304 joining Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 229910000166 zirconium phosphate Inorganic materials 0.000 claims description 9
- LEHFSLREWWMLPU-UHFFFAOYSA-B zirconium(4+);tetraphosphate Chemical compound [Zr+4].[Zr+4].[Zr+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LEHFSLREWWMLPU-UHFFFAOYSA-B 0.000 claims description 9
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 8
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910001392 phosphorus oxide Inorganic materials 0.000 claims description 6
- 229910052714 tellurium Inorganic materials 0.000 claims description 6
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 6
- VSAISIQCTGDGPU-UHFFFAOYSA-N tetraphosphorus hexaoxide Chemical compound O1P(O2)OP3OP1OP2O3 VSAISIQCTGDGPU-UHFFFAOYSA-N 0.000 claims description 6
- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 6
- 229910000174 eucryptite Inorganic materials 0.000 claims description 5
- 229910019142 PO4 Inorganic materials 0.000 claims description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 4
- SSWAPIFTNSBXIS-UHFFFAOYSA-N dioxido(dioxo)tungsten;iron(2+) Chemical compound [Fe+2].[O-][W]([O-])(=O)=O SSWAPIFTNSBXIS-UHFFFAOYSA-N 0.000 claims description 4
- OJLGWNFZMTVNCX-UHFFFAOYSA-N dioxido(dioxo)tungsten;zirconium(4+) Chemical compound [Zr+4].[O-][W]([O-])(=O)=O.[O-][W]([O-])(=O)=O OJLGWNFZMTVNCX-UHFFFAOYSA-N 0.000 claims description 4
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 4
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 4
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 4
- 239000010452 phosphate Substances 0.000 claims description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000010304 firing Methods 0.000 description 12
- 239000011368 organic material Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 238000004455 differential thermal analysis Methods 0.000 description 10
- 238000002834 transmittance Methods 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical group CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 6
- 239000000975 dye Substances 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229920000515 polycarbonate Polymers 0.000 description 6
- 239000004417 polycarbonate Substances 0.000 description 6
- 239000001856 Ethyl cellulose Substances 0.000 description 5
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical group CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920001249 ethyl cellulose Polymers 0.000 description 5
- 235000019325 ethyl cellulose Nutrition 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000003685 thermal hair damage Effects 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000005357 flat glass Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
- 229940088601 alpha-terpineol Drugs 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004017 vitrification Methods 0.000 description 2
- 229910000502 Li-aluminosilicate Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- OCVXZQOKBHXGRU-UHFFFAOYSA-N iodine(1+) Chemical compound [I+] OCVXZQOKBHXGRU-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910001456 vanadium ion Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10018—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising only one glass sheet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10082—Properties of the bulk of a glass sheet
- B32B17/10119—Properties of the bulk of a glass sheet having a composition deviating from the basic composition of soda-lime glass, e.g. borosilicate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
- B32B17/10788—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing ethylene vinylacetate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
- B32B3/06—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions for securing layers together; for attaching the product to another member, e.g. to a support, or to another product, e.g. groove/tongue, interlocking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/18—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of discrete sheets or panels only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0008—Electrical discharge treatment, e.g. corona, plasma treatment; wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0036—Heat treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/16—Drying; Softening; Cleaning
- B32B38/164—Drying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
- B32B7/14—Interconnection of layers using interposed adhesives or interposed materials with bonding properties applied in spaced arrangements, e.g. in stripes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J101/00—Adhesives based on cellulose, modified cellulose, or cellulose derivatives
- C09J101/08—Cellulose derivatives
- C09J101/16—Esters of inorganic acids
- C09J101/18—Cellulose nitrate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J101/00—Adhesives based on cellulose, modified cellulose, or cellulose derivatives
- C09J101/08—Cellulose derivatives
- C09J101/26—Cellulose ethers
- C09J101/28—Alkyl ethers
-
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Description
このため、WO3、MoO3、MnO2、ZnO、BaO、SrO、CaOの含有は、一長一短であり、V2O5、TeO2、Fe2O3及びP2O5からなるベース組成の特性を十分に配慮した上で含有させる成分とその含有量を決定する必要がある。
透明基板1にガラス基板を用いる場合には、焼成炉或いは400〜1100nmの波長範囲にあるレーザ7の照射によって、封止材料5に含まれる低融点ガラスを軟化流動させ、透明基板1へ焼成、形成する。透明基板1に樹脂基板を用いる場合には、樹脂の耐熱性が低く、焼成炉を使用できないため、上記レーザ7の照射によって封止材料5を透明基板1の外周部に焼成、形成する。
TCryは、ガラスが結晶化を開始する温度である。結晶化は、ガラスの軟化流動性を阻害するため、極力、TCryをTSより高温側にすることが望ましい。
フィラー粒子の含有量は、G12の低融点ガラス100体積部に対しFeWO4とZrO(PO4)2を含むZr2(WO4)(PO4)2フィラー粒子を15体積部、Nb2O5フィラー粒子を10体積部とした。先ずは、透明基板1の外周部とスペーサ6の片面にディスペンサー法にて幅3mmで封止材料ペーストをそれぞれ塗布し、乾燥した。乾燥後、大気中420℃−15分間焼成し、封止材料5を透明基板1に、封止材料5’をスペーサに形成した。その際の焼成膜厚はそれぞれ約15μmであった。封止材料5’を形成したスペーサ6を透明基板2に設置し、加重をかけるとともに大気中420℃-15分で加熱することによって、封止材料5’でスペーサ6と透明基板2を接着した。その際に角の気密性を確保するために、スペーサ6同士のつなぎ目に上記G12の低融点ガラスペーストを施し、同時に焼成した。以上のように作製した透明基板1と2の間に、封止材料5とスペーサ6が向き合うようにして、タブ線で接続したいくつかの両面受光セルを設置し、EVAシートによって張り合わせた。次に透明基板1側より波長が805nmの半導体レーザを15mm/秒の速度で外周部を移動させ、透明基板1と2をスペーサ6を介して封止材料5と5’で接合した。気密性、接着性ともに良好であった。樹脂の封止材料に比べ、より長期的な信頼性が確保できることは言うまでもない。
3:有機部材
5:封止材料
6:スペーサ
7、7’:レーザ
8:ガラス焼結体
Claims (22)
- 2枚の透明基板の間に有機部材を有し、前記2枚の透明基板の外周部を低融点ガラスを含む封止材料で接合した電子部品であって、前記低融点ガラスが酸化バナジウム、酸化テルル、酸化鉄及び酸化リンを含み、次の酸化物換算でV2O5+TeO2+Fe2O3+P2O5≧90質量%であり、V2O5>TeO2>Fe2O3>P2O5(質量%)であることを特徴とする電子部品。
- 請求項1に記載された電子部品において、前記低融点ガラスがさらに酸化タングステン、酸化モリブデン、酸化マンガン、酸化亜鉛、酸化バリウム、酸化ストロンチウム、酸化カルシウムのうちいずれか1種以上を含み、次の酸化物換算でWO3+MoO3+MnO2+ZnO+BaO+SrO+CaO≦10質量%であることを特徴とする電子部品。
- 請求項1又は2に記載された電子部品において、前記低融点ガラスが次の酸化物換算でV2O5が35〜50質量%、TeO2が20〜35質量%、Fe2O3が10〜20質量%、P2O5が4〜15質量%、であることを特徴とする電子部品。
- 請求項1ないし3のいずれかに記載された電子部品において、前記封止材料に400〜1100nmの波長範囲にあるレーザを照射することによって、前記封止材料に含まれる前記低融点ガラスが軟化流動することを特徴とする電子部品。
- 請求項1ないし4のいずれかに記載された電子部品において、前記低融点ガラスの転移点が350℃以下及び軟化点が410℃以下であることを特徴とする電子部品。
- 請求項1ないし5のいずれかに記載された電子部品において、前記低融点ガラスの30〜250℃の熱膨張係数が100×10-7/℃以下であることを特徴とする電子部品。
- 請求項1ないし6のいずれかに記載された電子部品において、前記封止材料にフィラー粒子が含まれ、前記フィラー粒子がリン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)、酸化ニオブ(Nb2O5)、β-ユークリプタイト(LiAlSiO4)のうち1種以上であることを特徴とする電子部品。
- 請求項7に記載された電子部品において、前記フィラー粒子がリン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)であり、さらにタングステン酸鉄(FeWO4)とリン酸ジルコニウム(ZrO(PO4)2)とを含むことを特徴とする電子部品。
- 請求項7又は8に記載された電子部品において、前記フィラー粒子の含有量が前記低融点ガラス100体積部に対し、35体積部以下であることを特徴とする電子部品。
- 請求項1ないし9のいずれかに記載された電子部品において、前記2枚の透明基板の外周部を接合する前記封止材料の厚みが20μm以下であることを特徴とする電子部品。
- 請求項1ないし9のいずれかに記載された電子部品において、前記2枚の透明基板の間隔が100μm以上であり、前記2枚の透明基板の外周部がスペーサを介して前記封止材料で接合され、前記2枚の透明基板の各々と前記スペーサとを接合する前記封止材料の厚みが20μm以下であることを特徴とする電子部品。
- 請求項11に記載された電子部品において、前記透明基板と前記スペーサがガラス製又は樹脂製であることを特徴とする電子部品。
- 低融点ガラスと樹脂バインダーと溶剤とを含む封止材料ペーストであって、前記低融点ガラスが酸化バナジウム、酸化テルル、酸化鉄及び酸化リンを含み、次の酸化物換算でV2O5+TeO2+Fe2O3+P2O5≧90質量%であり、V2O5>TeO2>Fe2O3>P2O5(質量%)であることを特徴とする封止材料ペースト。
- 請求項13に記載された封止材料ペーストにおいて、前記低融点ガラスがさらに酸化タングステン、酸化モリブデン、酸化マンガン、酸化亜鉛、酸化バリウム、酸化ストロンチウム、酸化カルシウムのうちいずれか1種以上を含み、次の酸化物換算でWO3+MoO3+MnO2+ZnO+BaO+SrO+CaO≦10質量%であることを特徴とする封止材料ペースト。
- 請求項13又は14に記載された封止材料ペーストにおいて、前記低融点ガラスが次の酸化物換算でV2O5が35〜50質量%、TeO2が20〜35質量%、Fe2O3が10〜20質量%、P2O5が4〜15質量%、であることを特徴とする封止材料ペースト。
- 請求項13ないし15のいずれかに記載された封止材料ペーストにおいて、フィラー粒子が含まれ、前記フィラー粒子がリン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)、酸化ニオブ(Nb2O5)、β-ユークリプタイト(LiAlSiO4)のうち1種以上であることを特徴とする封止材料ペースト。
- 請求項16に記載された封止材料ペーストにおいて、前記フィラー粒子がリン酸タングステン酸ジルコニウム(Zr2(WO4)(PO4)2)であり、さらにタングステン酸鉄(FeWO4)とリン酸ジルコニウム(ZrO(PO4)2)とを含むことを特徴とする封止材料ペースト。
- 請求項16又は17に記載された封止材料ペーストにおいて、前記フィラー粒子の含有量が前記低融点ガラスの粉末100体積部に対し、35体積部以下であることを特徴とする封止材料ペースト。
- 2枚の透明基板の間に有機部材を有し、前記2枚の透明基板の外周部を低融点ガラスを含む封止材料で接合した電子部品の製法において、
請求項13ないし18のいずれかに記載した封止材料ペーストをガラス製の前記透明基板の外周部に塗布する工程と、前記封止材料ペーストを乾燥後に焼成炉或いは400〜1100nmの波長範囲にあるレーザの照射で焼成し、封止材料を形成する工程と、前記ガラス製の透明基板の前記封止材料が形成された面と他のガラス製又は樹脂製の前記透明基板とを対向させて2枚の前記透明基板を固定する工程と、400〜1100nmの波長範囲にあるレーザを前記透明基板越しに前記封止材料へ照射する工程と、前記低融点ガラスを軟化流動させる工程とを有することを特徴とする電子部品の製法。 - 2枚の透明基板の間に有機部材を有し、前記2枚の透明基板の外周部を低融点ガラスを含む封止材料で接合した電子部品の製法において、
請求項13ないし18のいずれかに記載した封止材料ペーストを樹脂製の透明基板の外周部に塗布する工程と、前記封止材料ペーストを乾燥後に400〜1100nmの波長範囲にあるレーザの照射で焼成し、封止材料を形成する工程と、前記樹脂製の透明基板の前記封止材料が形成された面と他のガラス製又は樹脂製の前記透明基板とを対向させて2枚の前記透明基板を固定する工程と、400〜1100nmの波長範囲にあるレーザを前記透明基板越しに前記封止材料へ照射する工程と、前記低融点ガラスを軟化流動させる工程とを有することを特徴とする電子部品の製法。 - 2枚の透明基板の間に有機部材を有し、前記2枚の透明基板の外周部を低融点ガラスを含む封止材料で接合した電子部品の製法において、
請求項13ないし18のいずれかに記載した封止材料ペーストを棒状のガラススペーサの少なくとも前記透明基板との接合面に塗布する工程と、前記封止材料ペーストを乾燥後に焼成炉或いは400〜1100nmの波長範囲にあるレーザの照射で焼成し、封止材料を形成する工程と、前記ガラススペーサをガラス製又は樹脂製の前記2枚の透明基板の外周部の間に固定する工程と、400〜1100nmの波長範囲にあるレーザを前記透明基板越しに前記封止材料へ照射する工程と、前記低融点ガラスを軟化流動させる工程とを有することを特徴とする電子部品の製法。 - 2枚の透明基板の間に有機部材を有し、前記2枚の透明基板の外周部を低融点ガラスを含む封止材料で接合した電子部品の製法において、
請求項13ないし18のいずれかに記載した封止材料ペーストを棒状の樹脂スペーサの少なくとも前記透明基板との接合面に塗布する工程と、前記封止材料ペーストを乾燥後に400〜1100nmの波長範囲にあるレーザの照射で焼成し、封止材料を形成する工程と、前記樹脂スペーサをガラス製又は樹脂製の前記2枚の透明基板の外周部の間に固定する工程と、400〜1100nmの波長範囲にあるレーザを前記透明基板越しに前記封止材料へ照射する工程と、前記低融点ガラスを軟化流動させることを特徴とする電子部品の製法。
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