JP5122192B2 - 半導体素子実装装置 - Google Patents
半導体素子実装装置 Download PDFInfo
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- JP5122192B2 JP5122192B2 JP2007176209A JP2007176209A JP5122192B2 JP 5122192 B2 JP5122192 B2 JP 5122192B2 JP 2007176209 A JP2007176209 A JP 2007176209A JP 2007176209 A JP2007176209 A JP 2007176209A JP 5122192 B2 JP5122192 B2 JP 5122192B2
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- elastomer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
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- B30B5/02—Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
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Description
シート部材を水平に張架して保持するシート保持部と、
上記張架された状態の上記シート部材で、上記半導体素子の上面を加圧するように、上記シート保持部を下降させる保持部昇降装置と、
その加圧面に配置されたエラストマーと、上記エラストマーを加熱する加熱部とを備える加熱加圧ツールと、
上記シート部材を介して上記エラストマーにて上記半導体素子の上面を加圧するとともに、上記エラストマーを介して上記半導体素子及び上記樹脂材料を加熱するように、上記加熱加圧ツールを下降させるツール昇降装置とを備え、
上記加熱加圧ツールは、上記エラストマーがその内側に配置される凹部を、上記加圧面に有する剛体部を備え、
上記エラストマーは、上記剛体部の上記凹部の中央に配置される第1のエラストマーと、上記凹部において上記第1のエラストマーの周囲に配置される第2のエラストマーとを備え、上記第1のエラストマーは上記第2のエラストマーよりも高い硬度を有する、半導体素子実装装置を提供する。
本発明の第2態様によれば、上記半導体素子は、突起電極数が100〜1000である、第1態様に記載の半導体素子実装装置を提供する。
本発明の第3態様によれば、上記シート部材が樹脂シートである、第1態様または第2態様に記載の半導体素子実装装置を提供する。
本発明の第4態様によれば、上記シート部材を介して、上記エラストマーにて、上記半導体素子の上面および側面ならびに上記樹脂材料を押圧する、第1態様から第3態様のいずれか1つに記載の半導体素子実装装置を提供する。
本発明の第5態様によれば、上記シート部材の弾性率は、上記エラストマーの弾性率より低い、第1態様から第4態様のいずれか1つに記載の半導体素子実装装置を提供する。
2 回路基板
3 樹脂シート
4 アルミ電極
5 バンプ
6 基板電極
9 実装装置
10 加熱加圧ツール
11 凹部
12 ツール本体部
13 エラストマー
14 加熱ヒータ
15 ステージ
20 平行度矯正装置
21 保護テープ
22 ホルダ
Claims (8)
- 基板上に熱硬化性樹脂材料を介して配置された半導体素子を、加熱加圧ツールにて押圧して実装する半導体素子実装装置において、
シート部材を水平に張架して保持するシート保持部と、
上記張架された状態の上記シート部材で、上記半導体素子の上面を加圧するように、上記シート保持部を下降させる保持部昇降装置と、
その加圧面に配置されたエラストマーと、上記エラストマーを加熱する加熱部とを備える加熱加圧ツールと、
上記シート部材を介して上記エラストマーにて上記半導体素子の上面を加圧するとともに、上記エラストマーを介して上記半導体素子及び上記樹脂材料を加熱するように、上記加熱加圧ツールを下降させるツール昇降装置とを備え、
上記加熱加圧ツールは、上記エラストマーがその内側に配置される凹部を、上記加圧面に有する剛体部を備え、
上記エラストマーは、上記剛体部の上記凹部の中央に配置される第1のエラストマーと、上記凹部において上記第1のエラストマーの周囲に配置される第2のエラストマーとを備え、上記第1のエラストマーは上記第2のエラストマーよりも高い硬度を有する、半導体素子実装装置。 - 上記半導体素子は、突起電極数が100〜1000である、請求項1に記載の半導体素子実装装置。
- 上記シート部材が樹脂シートである、請求項1または2に記載の半導体素子実装装置。
- 上記シート部材を介して、上記エラストマーにて、上記半導体素子の上面および側面ならびに上記樹脂材料を押圧する、請求項1から3のいずれか1項に記載の半導体素子実装装置。
- 上記シート部材の弾性率は、上記エラストマーの弾性率より低い、請求項1から4のいずれか1項に記載の半導体素子実装装置。
- 上記第1のエラストマーは、上記第2のエラストマーよりも高い熱伝導性を有する、請求項1から5のいずれか1項に記載の半導体素子実装装置。
- 上記加熱加圧ツールによる上記半導体素子の加熱加圧状態において、上記第1のエラストマーが上記半導体素子に上面を、上記シート部材を介して加圧するように配置され、上記第2のエラストマーが、上記半導体素子の周囲へ拡がるように配置される上記樹脂材料を、上記シート部材を介して加圧するように配置される、請求項1から6のいずれか1項に記載の半導体素子実装装置。
- 上記剛体部における上記凹部の縁部が、上記加熱加圧ツールの加圧高さ位置を上記基板表面との当接により規制する加圧位置規制部である、請求項1から7のいずれか1項に記載の半導体素子実装装置。
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JP2007176209A JP5122192B2 (ja) | 2007-07-04 | 2007-07-04 | 半導体素子実装装置 |
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