JP4977316B2 - 工作物のプラズマ処理方法および装置 - Google Patents
工作物のプラズマ処理方法および装置 Download PDFInfo
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- JP4977316B2 JP4977316B2 JP2004507562A JP2004507562A JP4977316B2 JP 4977316 B2 JP4977316 B2 JP 4977316B2 JP 2004507562 A JP2004507562 A JP 2004507562A JP 2004507562 A JP2004507562 A JP 2004507562A JP 4977316 B2 JP4977316 B2 JP 4977316B2
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- plasma
- workpiece
- chamber
- branch
- internal space
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
- B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
- B08B9/426—Grippers for bottles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C49/00—Blow-moulding, i.e. blowing a preform or parison to a desired shape within a mould; Apparatus therefor
- B29C49/42—Component parts, details or accessories; Auxiliary operations
- B29C49/4205—Handling means, e.g. transfer, loading or discharging means
- B29C49/42069—Means explicitly adapted for transporting blown article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D23/00—Details of bottles or jars not otherwise provided for
- B65D23/02—Linings or internal coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/0004—Use of compounding ingredients, the chemical constitution of which is unknown, broadly defined, or irrelevant
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- C—CHEMISTRY; METALLURGY
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C—CHEMISTRY; METALLURGY
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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Description
さらに本発明は、工作物を受容するための少なくとも1つの排気可能なプラズマチャンバーを有し、プラズマチャンバーが処理ステーションの領域に配置され、該プラズマチャンバーがチャンバー底部とチャンバーカバーと側部のチャンバー壁とによって画成され、且つ工作物を位置決めするための少なくとも1つの保持要素を有している、工作物をプラズマ処理するための装置にも関わる。
図1はプラズマモジュール(1)を示している。プラズマモジュール(1)は回転するプラズマホイール(2)を備えている。プラズマホイール(2)の周囲に沿って多数のプラズマステーション(3)が配置されている。プラズマステーション(3)は処理対象である工作物(5)を受容するためのキャビティまたはプラズマチャンバー(17)を備えている。
Claims (51)
- 中空体状の工作物をプラズマステーション(3)の少なくとも部分的に排気可能なプラズ
マチャンバー(17)のなかへ挿入し、プラズマチャンバー(17)の内部で前記工作物
(5)を保持要素(28)により位置決めしてその内部空間をコーティングするようにし
た、前記工作物をプラズマ処理するための方法において、
回転するプラズマホイール(2)によって担持されているプラズマステーション(3)の1つのチャンバー台座(30)上に載置された少なくとも2つのプラズマチャンバー(17)内の個々の前記工作物(5)の内部空間に、コーティングに必要な少なくとも1つのプロセスガスを同時に供給するため、プロセスガスの流動を、少なくとも1つの第1の分岐部(55-1)を介して少なくとも2つの部分流に分岐させるとともに、チャンバー台座(30)内部に設けた少なくとも1つの第2の分岐部(55-2,55-3)を介して、前記工作物(5)の内部空間および前記工作物(5)を取り囲むプラズマチャンバー(17)の内部空間に第1の負圧を提供する工程と、前記工作物(5)の内部空間に第1の負圧よりも相対的に低いほぼ0.1mbarまたはほぼ0.3mbarの第2の負圧を提供する工程とを、前記少なくとも1つの第2の分岐部(55-2,55-3)に接続可能な第1次および第2次の真空弁(60,61)を切換え制御することにより行うことを特徴とする方法。 - 分岐(55)を鉛直方向において行うことを特徴とする、請求項1に記載の方法。
- 分岐(55)を水平方向において行うことを特徴とする、請求項1に記載の方法。
- プラズマチャンバー(17)の内部空間(4)の排気をチャンバー底部(29)を通じて行なうことを特徴とする、請求項1から3までのいずれか一つに記載の方法。
- チャンバー底部(29)を通じてプロセスガスを供給することを特徴とする、請求項1から4までのいずれか一つに記載の方法。
- プロセスガスを長棒(36)を通じて前記工作物(5)の内部空間のなかへ供給することを特徴とする、請求項1から5までのいずれか一つに記載の方法。
- 少なくとも1つのプロセスガスを少なくとも1つの前記第1の分岐部(55-1)により少なくとも2つの長棒(36)内へ誘導することを特徴とする、請求項1から6までのいずれか一つに記載の方法。
- 前記第1の分岐部(55-1)および第2の分岐部(55-2,55-3)により通気の供給を分岐させることを特徴とする、請求項1から7までのいずれか一つに記載の方法。
- チャンバーカバー(31)の領域でマイクロ波発生器(19)により発生させたマイクロ波をプラズマチャンバー(17)の内部空間(4)内へ導入することを特徴とする、請求項1から8までのいずれか一つに記載の方法。
- 熱可塑性プラスチックから成る前記工作物(5)を処理することを特徴とする、請求項1から9までのいずれか一つに記載の方法。
- 前記工作物(5)として容器を処理することを特徴とする、請求項1から10までのいずれか一つに記載の方法。
- 前記工作物(5)として飲料物のボトルを処理することを特徴とする、請求項1から11までのいずれか一つに記載の方法。
- 少なくとも1つのプラズマステーション(3)を回転するプラズマホイール(2)により供給位置から排出位置へ移送することを特徴とする、請求項1から12までのいずれか一つに記載の方法。
- マイクロ波の供給を分岐させることを特徴とする、請求項1から13までのいずれか一つに記載の方法。
- 前記コーティングとしてプラズマコーティングを実施することを特徴とする、請求項1から14までのいずれか一つに記載の方法。
- プラズマ重合処理を実施することを特徴とする、請求項1から15までのいずれか一つに記載の方法。
- プラズマにより少なくとも部分的に有機物質を析出させることを特徴とする、請求項1から16までのいずれか一つに記載の方法。
- 1つの共通のプラズマチャンバー(17)で少なくとも2つの前記工作物(5)を同時に処理することを特徴とする、請求項1から17までのいずれか一つに記載の方法。
- プラズマ処理としてプラズマ殺菌を実施することを特徴とする、請求項1から18までのいずれか一つに記載の方法。
- プラズマ処理として前記工作物(5)の内部空間(4)で該工作物の内面の表面活性処理を実施することを特徴とする、請求項1から19までのいずれか一つに記載の方法。
- プラズマステーション(3)と、該プラズマステーション(3)に設けられる、中空体状の工作物を受容するための少なくとも1つの排気可能なプラズマチャンバー(17)とを有し、該プラズマチャンバー(17)がチャンバー底部(29)とチャンバーカバー(31)と側部のチャンバー壁(18)とによって画成され、且つ前記工作物(5)を位置決めするための少なくとも1つの保持要素(28)を有している、前記工作物(5)の内部空間をプラズマ処理するための装置において、
回転するプラズマホイール(2)によって担持されているプラズマステーション(3)が、少なくとも2つのプラズマチャンバー(17)を載置するための1つのチャンバー台座(30)を有し、コーティングに必要な少なくとも1つのプロセスガスを供給するプロセスガス供給源と前記工作物(5)の内部空間とに接続可能な少なくとも1つの第1の分岐部(55-1)と、負圧源と前記工作物(5)の内部空間および前記工作物(5)を取り囲むプラズマチャンバー(17)の内部空間とに接続可能であるようにチャンバー台座(30)内部に配置される少なくとも1つの第2の分岐部(55-2,55-3)とが設けられ、第2の分岐部(55-2,55-3)は、前記工作物(5)の内部空間および前記工作物(5)を取り囲むプラズマチャンバー(17)の内部空間に第1の負圧を提供するための第1次真空弁(60)と、第1の負圧に対し相対的に低いほぼ0.1mbarまたはほぼ0.3mbarの第2の負圧を前記工作物(5)の内部空間に提供するための第2次真空弁(61)とに切換え接続可能であることを特徴とする装置。 - 第1の分岐部(55-1)または第2の分岐部(55-2,55-3)がプロセスガスまたは負圧を鉛直方向に分岐させることを特徴とする、請求項21に記載の装置。
- 第1の分岐部(55-1)または第2の分岐部(55-2,55-3)がプロセスガスまたは負圧を水平方向に分岐させることを特徴とする、請求項21に記載の装置。
- プラズマチャンバー(17)を排気するため、チャンバー台座(30)内に、負圧源に接続されている少なくとも1つの真空管路が配置されていることを特徴とする、請求項21から23までのいずれか一つに記載の装置。
- チャンバー台座(30)内に、プロセスガスを供給するための少なくとも1つの管路が配置されていることを特徴とする、請求項21から24までのいずれか一つに記載の装置。
- プロセスガスを前記工作物(5)の内部空間内へ供給するため、長棒(36)がチャンバー底部(29)に対し相対的に位置決め可能に配置されていることを特徴とする、請求項21から25までのいずれか一つに記載の装置。
- 少なくとも1つの第2の分岐部(55-2,55-3)が少なくとも2つのプラズマチャンバー(17)の内部空間に直接に接続されていることを特徴とする、請求項21から26までのいずれか一つに記載の装置。
- 少なくとも1つの第1の分岐部(55-1)が少なくとも2つの前記工作物(5)の内部空間を連通させるための連結管路(54)に接続されていることを特徴とする、請求項21から27までのいずれか一つに記載の装置。
- 少なくとも1つの第1の分岐部(55-1)が少なくとも2つの長棒(36)に接続されていることを特徴とする、請求項26に記載の装置。
- 少なくとも1つの第1および第2の分岐部(55-2,55-3)が少なくとも1つの通気供給部に接続されていることを特徴とする、請求項21から29までのいずれか一つに記載の装置。
- チャンバーカバー(31)の領域にマイクロ波発生器(19)が配置されていることを特徴とする、請求項21から30までのいずれか一つに記載の装置。
- 前記工作物(5)をコーティングするため、プラズマステーション(3)が熱可塑性プラスチックから形成されていることを特徴とする、請求項21から31までのいずれか一つに記載の装置。
- プラズマステーション(3)が容器状の前記工作物(5)をコーティングするために構成されていることを特徴とする、請求項21から32までのいずれか一つに記載の装置。
- プラズマステーション(3)が飲料物のボトルの形態の前記工作物(5)をコーティングするために構成されていることを特徴とする、請求項21から33までのいずれか一つに記載の装置。
- 少なくとも2つのプラズマチャンバー(17)を提供するために設けられるチャンバー壁(18)が位置決め可能に配置されていることを特徴とする、請求項21から34までのいずれか一つに記載の装置。
- マイクロ波発生器(19)から発生したマイクロ波を分岐させることを特徴とする、請求項31に記載の装置。
- 第1次真空弁(60)が少なくとも一時的に前記工作物(5)の内部空間とプラズマチャンバー(17)の内部空間との双方を1つの共通の負圧供給部に接続させることを特徴とする、請求項21から36までのいずれか一つに記載の装置。
- 第2次真空弁(61)が少なくとも一時的に前記工作物(5)の内部空間のみを負圧源と連結させることを特徴とする、請求項21から37までのいずれか一つに記載の装置。
- 少なくとも1つの第1の分岐部(55-1)が前記工作物(5)の内部空間を周囲圧と連通させるための工作物脱気弁(64)に接続されていることを特徴とする、請求項21から38までのいずれか一つに記載の装置。
- 少なくとも1つの第2の分岐部(55-2,55-3)がプラズマチャンバー(17)の内部空間を周囲圧と連通させるためのチャンバー脱気弁(61)に接続されていることを特徴とする、請求項21から39までのいずれか一つに記載の装置。
- 少なくとも1つの第1の分岐部(55-1)が第1次プロセスガス弁(66)に接続されていることを特徴とする、請求項21から40までのいずれか一つに記載の装置。
- 少なくとも1つの第1の分岐部(55-1)が第2次プロセスガス弁(67)に接続されていることを特徴とする、請求項21から41までのいずれか一つに記載の装置。
- 少なくとも1つの第2の分岐部(55-2,55-3)がプロセス真空弁(62)に接続されていることを特徴とする、請求項21から42までのいずれか一つに記載の装置。
- 少なくとも1つの第2の分岐部(55-2,55-3)がチャンバー真空弁(63)に接続されていることを特徴とする、請求項21から43までのいずれか一つに記載の装置。
- 少なくとも1つの第1および第2の分岐部(55-2,55-3)が鉛直方向においてチャンバー底部(29)の下方に配置されていることを特徴とする、請求項21から44までのいずれか一つに記載の装置。
- 少なくとも1つの第2の分岐部(55-2,55-3)がチャンバー台座(30)とともに1つの共通の部材を形成していることを特徴とする、請求項21から45までのいずれか一つに記載の装置。
- 複数個の前記弁のうち少なくとも2つの弁(59)が1つの共通の弁ブロックの領域に配置されていることを特徴とする、請求項21から46までのいずれか一つに記載の装置。
- 第1の分岐部が弁ブロックの領域に配置されていることを特徴とする、請求項47に記載の装置。
- 前記少なくとも2つの弁(59)と第1の分岐部(55-1)とを備えた弁ブロックが鉛直方向においてチャンバー台座(30)の下方に配置されていることを特徴とする、請求項47または48に記載の装置。
- 弁ブロックが第1の分岐部(55-1)とともに1つの共通の部材を形成していることを特徴とする、請求項47から49までのいずれか一つに記載の装置。
- 前記少なくとも2つの弁(59)のうち少なくとも1つの弁が電磁制御弁として構成されていることを特徴とする、請求項47から50までのいずれか一つに記載の装置。
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2003
- 2003-05-09 WO PCT/DE2003/001505 patent/WO2003100125A1/de active Application Filing
- 2003-05-09 EP EP03755077.9A patent/EP1507890B1/de not_active Expired - Lifetime
- 2003-05-09 AU AU2003232621A patent/AU2003232621A1/en not_active Abandoned
- 2003-05-09 JP JP2004507562A patent/JP4977316B2/ja not_active Expired - Lifetime
- 2003-05-09 US US10/515,610 patent/US8961688B2/en active Active
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Publication number | Publication date |
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EP1507890B1 (de) | 2015-09-02 |
US20050233077A1 (en) | 2005-10-20 |
JP2005527080A (ja) | 2005-09-08 |
WO2003100125A1 (de) | 2003-12-04 |
US8961688B2 (en) | 2015-02-24 |
EP1507890A1 (de) | 2005-02-23 |
AU2003232621A1 (en) | 2003-12-12 |
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