JP4649561B2 - 両面表示可能なディスプレイを有する反射ディスプレイデバイス - Google Patents
両面表示可能なディスプレイを有する反射ディスプレイデバイス Download PDFInfo
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Description
いくつかのアプリケーションでは、デバイスの両側に、表示可能なディスプレイ領域を含むディスプレイデバイスを持つことは有用である。例えば、薄い形状を保持しながら、両側にイメージを生成することができるパネルディスプレーを有することは特に有利でありうる。背中合わせに単に2つのディスプレイデバイスを配置することにより両面ディスプレイを生成することができるが、これは比較的厚いか扱いにくいデバイスに終わる場合がある。したがって、薄いか最小の形状を保持しながら、2つのイメージを生成することができるデバイスは有用になりえる。これらのデバイスは様々な方法で達成することができる。
図9及び図10に示す実施形態を製造する最初のステップは、図1に示す実施形態のために上述されたものに類似している。この製造工程はまた、一般に、本明細書において参照によりその全体が組み込まれている米国特許5,835,255号(特許文献1)に記載されている。一般に、第1の基板500a、第1のサポート部504a、第1の部分反射層502a、誘電層508a、及び可動層506を反射面710に堆積することができる。
完成の後、両面反射ディスプレイは、方向510a,510bの両方から表示可能である。ディスプレイが方向510aから見られる場合、506,502aに関連した行電極及び列電極(例えば、可動層と1つの部分反射層)は、ミラーを、上述したように、弛緩された中心位置801と、駆動すなわちアクチュエートされた、部分反射層502aにより近い位置800との間で移動させるために適切に駆動される。この移動は矢印602として示される。このアクチュエート状態によって、キャビティ498aがつぶれる。いくつかの実施形態では、光が方向510aから入り、キャビティ498aがつぶれていない場合、光が反射面710に当たり、部分反射層502aを通り抜け、キャビティから出て行く。光が方向510aから入り、キャビティ498aがつぶれている場合、光は、キャビティから出ることが阻止される。他の実施形態では、光が吸収されるのではなく、選択された光が反射される。
上述したデバイスは、単一のサポートスタック510を持つことができるが、単一のサポートスタックは必ずしも必要とは限らない。図11に示す実施形態では、単一の基板500aの両側が、2方向510a,510bから表示可能なデバイスで使用される。このデバイスは、基板500aによって分離されるサポート部又はスタック510,610を有する。
Claims (35)
- 透明な第1の基板と、
前記第1の基板に対して実質的に平行であり、前記第1の基板から一定間隔で配置される透明な第2の基板と、
前記第1の基板と前記第2の基板とを結合する少なくとも1つのサポートスタックと、
前記第1の基板に結合された第1の部分反射層と、
前記第2の基板に結合され、前記第1の部分反射層に対して実質的に平行であり、前記第1の部分反射層から一定間隔で配置され、前記第1の部分反射層との間にキャビティを規定する第2の部分反射層と、
前記少なくとも1つのサポートスタックによってサポートされ、前記第1及び第2の部分反射層に対してほぼ垂直な方向に沿って前記キャビティ内で移動可能な少なくとも1つの可動層と、
前記少なくとも1つの可動層に結合され、前記少なくとも1つの可動層とともに前記キャビティ内で移動し、前記第1の部分反射層との間に第1のサブキャビティを規定する第1の反射面と、
前記少なくとも1つの可動層に結合され、前記少なくとも1つの可動層とともに前記キャビティ内で移動し、前記第2の部分反射層との間に第2のサブキャビティを規定する第2の反射面とを備え、
前記第1の反射面は、第1の非アクチュエート位置から第1のアクチュエート位置へ、前記第1の部分反射層へ向かう方向に移動可能であり、前記第2の反射面は、第2の非アクチュエート位置から第2のアクチュエート位置へ、前記第1の反射面の移動方向と逆の方向に移動可能である光変調デバイス。 - 前記少なくとも1つの可動層は、単一の可動層を備える請求項1のデバイス。
- 前記サポートスタックは、前記単一の可動層と前記第1の部分反射層との間の第1のサポート部と、前記単一の可動層と前記第2の部分反射層との間の第2のサポート部とを備える請求項2のデバイス。
- 前記単一の可動層が、前記第1の部分反射層に向かって移動すると、前記第1のサブキャビティは、大きさが減少し、前記第2のサブキャビティは、大きさが増加する請求項2のデバイス。
- 前記第1の反射面は、前記単一の可動層の第1の面を備え、前記第2の反射面は、前記単一の可動層の第2の面を備える請求項2のデバイス
- 前記単一の可動層は、少なくとも1つの反射部を備え、前記第1の反射面は、前記少なくとも1つの反射部の第1の面を備え、前記第2の反射面は、前記少なくとも1つの反射部の第2の面を備える請求項2のデバイス
- 前記第1の基板と前記第2の基板とのうちの少なくとも1つは、前記第1の基板と前記第2の基板との間の体積にエッチングガスがアクセスすることを可能にする大きさを有するホールを備える請求項1のデバイス。
- 前記少なくとも1つの可動層は第1の可動層と第2の可動層とを備え、前記第1の可動層と前記第2の可動層とは、前記第1の部分反射層と前記第2の部分反射層との間に配置される請求項1のデバイス。
- 前記第1の可動層と前記第2の可動層とは、移動時に、互いに接触しない請求項8のデバイス。
- 前記少なくとも1つのサポートスタックは、前記第1の可動層と前記第1の部分反射層との間の第1のサポート部と、前記第1の可動層と前記第2の可動層との間の第2のサポート部と、前記第2の可動層と前記第2の部分反射層との間の第3のサポート部とを備える請求項8のデバイス。
- 前記第1の可動層は前記第1の反射面を備え、前記第2の可動層は前記第2の反射面を備える請求項8のデバイス。
- 前記第1の可動層が、前記第1の部分反射層に向かって移動すると、前記第1のサブキャビティは大きさが減少し、前記第2のサブキャビティは大きさが変わらず、前記第2の可動層が、前記第2の部分反射層に向かって移動すると、前記第2のサブキャビティは大きさが減少し、前記第1のサブキャビティは大きさが変わらない請求項8のデバイス。
- 前記第1の反射面は、前記第1の可動層の表面を備え、前記第2の反射面は、前記第2の可動層の表面を備える請求項8のデバイス。
- 前記第1の可動層は第1の反射部を備え、前記第1の反射面は前記第1の反射部の表面を備え、前記第2の可動層は第2の反射部を備え、前記第2の反射面は前記第2の反射部の表面を備える請求項8のデバイス。
- 前記第1の可動層と前記第2の可動層とがアクチュエートされていない場合、前記第1の反射面と前記第2の反射面との間の距離は、前記第1のサポート部の高さの約2倍乃至約10倍の間にある請求項10のデバイス。
- 前記第1の部分反射層、前記第2の部分反射層、又は前記少なくとも1つの可動層のうちの少なくとも1つと電気的に通信し、イメージデータを処理するように構成されたプロセッサと、
前記プロセッサと電気的に通信するメモリデバイスとを更に備える請求項1のデバイス。 - 前記第1の部分反射層、前記第2の部分反射層、又は前記少なくとも1つの可動層のうちの少なくとも1つに、少なくとも1つの信号を送るように構成された駆動回路を更に備える請求項16のデバイス。
- 前記イメージデータのうちの少なくとも一部を前記駆動回路に送るように構成されたコントローラを更に備える請求項17のデバイス。
- 前記プロセッサへ前記イメージデータを送るように構成されたイメージソースモジュールを更に備える請求項16のデバイス。
- 前記イメージソースモジュールは、受信機、トランシーバ、及び送信機のうち少なくとも1つを備える請求項19のデバイス。
- 入力データを受信し、前記入力データを前記プロセッサへ通信するように構成された入力デバイスを更に備える請求項16のデバイス。
- 光を伝搬する第1の手段と、
前記光を伝搬する第1の手段から一定間隔で配置され、光を伝搬する第2の手段と、
前記光を伝搬する第1の手段から一定間隔で配置され、部分的に光を反射する第1の手段と、
前記光を伝搬する第2の手段から一定間隔で配置され、部分的に光を反射する第2の手段と、
前記部分的に光を反射する第1の手段と、前記部分的に光を反射する第2の手段との間に配置され、その間で移動可能であり、光を反射する手段と、
前記光を伝搬する第1の手段を、前記光を伝搬する第2の手段に結合し、かつ前記光を反射する手段をサポートする手段とを備え、
前記反射する手段は、第1の表面と第2の表面とを備え、前記第1の表面は、第1の非アクチュエート位置から第1のアクチュエート位置へ、前記部分的に光を反射する第1の手段へ向かう方向に移動可能であり、前記第2の表面は、第2の非アクチュエート位置から第2のアクチュエート位置へ、前記部分的に光を反射する第2の手段へ向かう方向に移動可能である光変調デバイス。 - 前記光を伝搬する第1の手段は、透明な基板を備える請求項22のデバイス。
- 前記光を伝搬する第2の手段は、透明な基板を備える請求項22のデバイス。
- 前記部分的に光を反射する第1の手段は、部分反射層を備える請求項22のデバイス。
- 前記部分的に光を反射する第2の手段は、部分反射層を備える請求項22のデバイス。
- 前記光を反射する手段は、前記部分的に光を反射する第1の手段と、前記部分的に光を反射する第2の手段とに対してほぼ垂直な方向に沿って移動可能な少なくとも1つの可動層を備える請求項22のデバイス。
- 前記結合する手段は、少なくとも1つのサポートスタックを備える請求項22のデバイス。
- 反対に面する2つのイメージを作成する方法であって、
第1の透明基板上の第1の部分反射層と、前記第1の透明基板から一定間隔で配置された第2の透明基板上の第2の部分反射層と、前記第1の透明基板と前記第2の透明基板とをともに結合するサポートスタックと、前記第1の部分反射層と前記第2の部分反射層とを接続し、かつ単一の可動層を、前記第1の部分反射層と前記第2の部分反射層との間に配置したサポートスタック上にサポートされた単一の可動層とを備えたデバイスを準備することと、
前記可動層を、前記第1の部分反射層に対してほぼ垂直な方向に移動させ、もって、前記第1の透明基板を介して表示可能な第1のイメージを生成することであって、前記可動層は、第1の非アクチュエート位置から第1のアクチュエート位置へ向かう第1の方向に移動可能であること、と、
前記可動層を、前記第2の部分反射層に対してほぼ垂直な方向に移動させ、もって、前記第2の透明基板を介して表示可能な第2のイメージを生成することであって、前記可動層は、第2の非アクチュエート位置から第2のアクチュエート位置へ向かう、前記第1の方向と逆の方向である第2の方向に移動可能であること、とを備える方法。 - 2つの表示可能面を備えた光変調デバイスを製造する方法であって、
透明な第1の基板を準備することと、
第1の部分反射層を形成することと、
第1のサポート部を形成することと、
前記第1のサポート部がサポートする反射層を形成することであって、前記反射層は、第1の表面と第2の表面とを備え、前記第1の表面は、第1の非アクチュエート位置から第1のアクチュエート位置へ、前記第1の部分反射層へ向かう第1の方向に移動可能であり、前記第2の表面は、第2の非アクチュエート位置から第2のアクチュエート位置へ向かう、前記第1の方向と逆の方向である第2の方向に移動可能であること、と、
第2のサポート部を形成することと、
第2の部分反射層を形成することであって、前記第1の部分反射層及び前記第2の部分反射層は、前記第1のサポート部及び前記第2のサポート部に結合されていることと、
透明な第2の基板を、前記第2の部分反射層に加えることとを備える方法。 - 前記第1の部分反射層と前記反射層との間に犠牲層を形成することと、前記犠牲層をエッチング除去して、前記第1の部分反射層と前記反射層との間にキャビティを生成することとを更に備える請求項30の方法。
- 前記第1及び第2の部分反射層及び前記第2の基板を通じたホールを準備することと、前記ホールを用いて、前記犠牲層へエッチング液を与えることとを更に備える請求項31の方法。
- 前記反射層と前記第2の部分反射層との間に犠牲層を形成することと、前記犠牲層をエッチング除去して、前記反射層と前記第2の部分反射層との間にキャビティを生成することとを更に備える請求項30の方法。
- 前記第1及び第2の部分反射層及び前記第2の基板にホールを準備することと、前記ホールを用いて、前記犠牲層へエッチング液を与えることとを更に備える請求項33の方法。
- 前記第1のサポート部と前記第2のサポート部との間に第3のサポート部を形成することと、
第2の反射層を形成することと更に備え、
前記第3のサポート部は、前記第1の基板と前記第2の基板との間の前記第2の反射層をサポートし、前記第2の表面は、前記第2の反射層の一部であり、前記第3のサポート部は前記第1の反射層と前記第2の反射層との間に位置する請求項30の方法。
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US61332304P | 2004-09-27 | 2004-09-27 | |
US11/187,129 US7304784B2 (en) | 2004-09-27 | 2005-07-21 | Reflective display device having viewable display on both sides |
PCT/US2005/029822 WO2006036386A1 (en) | 2004-09-27 | 2005-08-22 | Reflective display device having viewable display on both sides |
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Publication number | Publication date |
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MX2007003602A (es) | 2007-05-23 |
MY140901A (en) | 2010-01-29 |
US7304784B2 (en) | 2007-12-04 |
BRPI0515363A (pt) | 2008-07-15 |
EP1803020A1 (en) | 2007-07-04 |
WO2006036386A1 (en) | 2006-04-06 |
RU2397519C2 (ru) | 2010-08-20 |
CA2577894A1 (en) | 2006-04-06 |
KR20070057189A (ko) | 2007-06-04 |
IL180910A0 (en) | 2007-07-04 |
US20060077155A1 (en) | 2006-04-13 |
AU2005290164A1 (en) | 2006-04-06 |
RU2007110165A (ru) | 2008-09-27 |
US7999993B2 (en) | 2011-08-16 |
JP2008514985A (ja) | 2008-05-08 |
KR101167895B1 (ko) | 2012-07-30 |
EP1803020B1 (en) | 2012-02-08 |
AU2005290164A2 (en) | 2006-04-06 |
TW200626941A (en) | 2006-08-01 |
HK1103447A1 (en) | 2007-12-21 |
ATE545055T1 (de) | 2012-02-15 |
US20080055706A1 (en) | 2008-03-06 |
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