JP4251453B2 - イオン注入方法 - Google Patents
イオン注入方法 Download PDFInfo
- Publication number
- JP4251453B2 JP4251453B2 JP2004046213A JP2004046213A JP4251453B2 JP 4251453 B2 JP4251453 B2 JP 4251453B2 JP 2004046213 A JP2004046213 A JP 2004046213A JP 2004046213 A JP2004046213 A JP 2004046213A JP 4251453 B2 JP4251453 B2 JP 4251453B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ion beam
- implantation
- dose
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 67
- 238000005468 ion implantation Methods 0.000 title claims description 51
- 239000000758 substrate Substances 0.000 claims description 190
- 238000010884 ion-beam technique Methods 0.000 claims description 101
- 238000009826 distribution Methods 0.000 claims description 61
- 238000002513 implantation Methods 0.000 claims description 28
- 230000002093 peripheral effect Effects 0.000 claims description 28
- 238000002347 injection Methods 0.000 claims description 23
- 239000007924 injection Substances 0.000 claims description 23
- 150000002500 ions Chemical class 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 description 13
- 230000006870 function Effects 0.000 description 6
- 238000012937 correction Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
- H01J37/3172—Maskless patterned ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20228—Mechanical X-Y scanning
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Description
D1 =d1
D2 =d2
D3 =d1
D4 =2d2
D5 =d1 +d2
D6 =2d1
D7 =d1 +d2
D8 =2d1
D9 =d1 +d2
D10=2d1
D11=d1 +d2
D12=2d1
D4 =3d2
D5 =d1 +2d2
D6 =3d1
D7 =2d1 +d2
D8 =3d1
D9 =d1 +2d2
D10=3d1
D11=2d1 +d2
D12=3d1
D4 =4d2
D5 =2d1 +2d2
D6 =4d1
D7 =2d1 +2d2
D8 =4d1
D9 =2d1 +2d2
D10=4d1
D11=2d1 +2d2
D12=4d1
d1 =(2DB −DA )/n
d2 =DA /n
4 イオンビーム
20 走査器
22 走査電源
28 ホルダ
30 回転装置
32 駆動装置
36 制御装置
Claims (2)
- イオンビームを電界または磁界によってX方向に往復走査することと、基板を前記X方向と実質的に直交するY方向に機械的に往復駆動することとを併用して、基板にイオン注入を行うイオン注入方法において、
イオンビームが基板に入射する領域内で、基板の駆動速度をイオンビームのビーム電流密度に正比例するように制御しつつ、イオンビームの走査速度をステップ状に変化させて基板にイオン注入を行う注入工程を複数回実施すると共に、この各注入工程の合間であってイオンビームが基板に当たっていない間に、基板をその中心部を中心にして所定の回転角度だけ回転させる回転工程をそれぞれ実施し、
かつ前記注入工程として、イオンビームの走査速度を、基板の一端から他端にかけて、第1の走査速度、当該第1の走査速度とは異なる第2の走査速度および前記第1の走査速度にステップ状に変化させる注入工程をn回(nは4または8)実施すると共に、前記回転工程として、基板を360/n度ずつ回転させる回転工程を実施することによって、基板の面内において、中央領域とそれを囲む外周領域とでドーズ量の互いに異なるドーズ量分布を形成することを特徴としており、
更に、前記中央領域および外周領域の目標ドーズ量をそれぞれDA およびDB とし、1回の注入工程による前記第1の走査速度および第2の走査速度による設定ドーズ量をそれぞれd1 およびd2 としたとき、
d1 =(2DB −DA )/n、かつ、
d2 =DA /n
に設定することを特徴としているイオン注入方法。 - イオンビームを電界または磁界によってX方向に往復走査することと、基板を前記X方向と実質的に直交するY方向に機械的に往復駆動することとを併用して、基板にイオン注入を行うイオン注入方法において、
イオンビームが基板に入射する領域内で、基板の駆動速度をイオンビームのビーム電流密度に正比例するように制御しつつ、基板の駆動速度をステップ状に変化させて基板にイオン注入を行う注入工程を複数回実施すると共に、この各注入工程の合間であってイオンビームが基板に当たっていない間に、基板をその中心部を中心にして所定の回転角度だけ回転させる回転工程をそれぞれ実施し、
かつ前記注入工程として、基板の駆動速度を、イオンビームが基板に入射する領域内で、第1の駆動速度、当該第1の駆動速度とは異なる第2の駆動速度および前記第1の駆動速度にステップ状に変化させる注入工程をn回(nは4または8)実施すると共に、前記回転工程として、基板を360/n度ずつ回転させる回転工程を実施することによって、基板の面内において、中央領域とそれを囲む外周領域とでドーズ量の互いに異なるドーズ量分布を形成することを特徴としており、
更に、前記中央領域および外周領域の目標ドーズ量をそれぞれDA およびDB とし、1回の注入工程による前記第1の駆動速度および第2の駆動速度による設定ドーズ量をそれぞれd1 およびd2 としたとき、
d1 =(2DB −DA )/n、かつ、
d2 =DA /n
に設定することを特徴としているイオン注入方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004046213A JP4251453B2 (ja) | 2004-02-23 | 2004-02-23 | イオン注入方法 |
US10/840,281 US8017922B2 (en) | 2004-02-23 | 2004-05-07 | Ion implantation method and apparatus |
EP04023084A EP1580789A3 (en) | 2004-02-23 | 2004-09-28 | Ion implantation method and apparatus |
TW093129822A TWI308354B (en) | 2004-02-23 | 2004-10-01 | Ion implantation method and apparatus |
KR1020040086146A KR100722159B1 (ko) | 2004-02-23 | 2004-10-27 | 이온주입방법 및 그 장치 |
CNB200410098236XA CN100382226C (zh) | 2004-02-23 | 2004-11-30 | 离子注入方法和装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004046213A JP4251453B2 (ja) | 2004-02-23 | 2004-02-23 | イオン注入方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007009056A Division JP4155327B2 (ja) | 2007-01-18 | 2007-01-18 | イオン注入方法およびその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005235682A JP2005235682A (ja) | 2005-09-02 |
JP4251453B2 true JP4251453B2 (ja) | 2009-04-08 |
Family
ID=34858132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004046213A Expired - Lifetime JP4251453B2 (ja) | 2004-02-23 | 2004-02-23 | イオン注入方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8017922B2 (ja) |
EP (1) | EP1580789A3 (ja) |
JP (1) | JP4251453B2 (ja) |
KR (1) | KR100722159B1 (ja) |
CN (1) | CN100382226C (ja) |
TW (1) | TWI308354B (ja) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004063691B4 (de) | 2004-05-10 | 2019-01-17 | Hynix Semiconductor Inc. | Verfahren zum Implantieren von Ionen in einem Halbleiterbauelement |
US7208330B2 (en) * | 2005-01-12 | 2007-04-24 | Texas Instruments Incorporated | Method for varying the uniformity of a dopant as it is placed in a substrate by varying the speed of the implant across the substrate |
KR100653995B1 (ko) | 2005-03-17 | 2006-12-05 | 주식회사 하이닉스반도체 | 반도체소자 제조를 위한 국부적 임플란트 방법 |
KR100675891B1 (ko) | 2005-05-04 | 2007-02-02 | 주식회사 하이닉스반도체 | 불균일 이온주입장치 및 불균일 이온주입방법 |
KR100668746B1 (ko) * | 2005-12-29 | 2007-01-29 | 주식회사 하이닉스반도체 | 와이드빔을 이용한 불균일 이온주입장치 및 이온주입방법 |
KR100699889B1 (ko) * | 2005-12-29 | 2007-03-28 | 삼성전자주식회사 | 가변적인 이온주입 조건이 수반되는 반도체 소자의 제조방법 |
JP5015464B2 (ja) * | 2006-01-30 | 2012-08-29 | 株式会社アルバック | イオン注入方法およびイオン注入装置 |
US7544957B2 (en) * | 2006-05-26 | 2009-06-09 | Varian Semiconductor Equipment Associates, Inc. | Non-uniform ion implantation |
KR100914280B1 (ko) * | 2006-08-23 | 2009-08-28 | 주식회사 하이닉스반도체 | 불균일이온주입을 이용한 반도체소자의 게이트 형성방법 |
GB0617167D0 (en) | 2006-08-31 | 2006-10-11 | Cdt Oxford Ltd | Compounds for use in opto-electrical devices |
US7683347B2 (en) * | 2006-09-29 | 2010-03-23 | Varian Semiconductor Equipment Associates, Inc. | Technique for improving ion implantation throughput and dose uniformity |
JP2008166660A (ja) * | 2007-01-05 | 2008-07-17 | Matsushita Electric Ind Co Ltd | 半導体製造装置 |
FR2920785B1 (fr) * | 2007-09-11 | 2010-02-26 | Quertech Ingenierie | Traitement de la porosite des metaux par bombardement ionique |
JP4471008B2 (ja) * | 2008-02-12 | 2010-06-02 | 日新イオン機器株式会社 | イオン注入方法およびイオン注入装置 |
JP4471009B2 (ja) * | 2008-02-12 | 2010-06-02 | 日新イオン機器株式会社 | イオン注入方法およびイオン注入装置 |
JP5311112B2 (ja) * | 2008-11-12 | 2013-10-09 | 日新イオン機器株式会社 | イオン注入方法およびイオン注入装置 |
MY171019A (en) | 2009-04-13 | 2019-09-23 | Applied Materials Inc | Modification of magnetic properties of films using ion and neutral beam implantation |
JP5448586B2 (ja) * | 2009-06-05 | 2014-03-19 | キヤノン株式会社 | 光学素子の製造方法 |
US8987691B2 (en) * | 2009-09-03 | 2015-03-24 | Advanced Ion Beam Technology, Inc. | Ion implanter and ion implant method thereof |
US8669539B2 (en) * | 2010-03-29 | 2014-03-11 | Advanced Ion Beam Technology, Inc. | Implant method and implanter by using a variable aperture |
JP2011233386A (ja) * | 2010-04-28 | 2011-11-17 | Nissin Ion Equipment Co Ltd | イオン注入装置及びビーム電流密度分布調整方法 |
US20120196047A1 (en) * | 2011-01-28 | 2012-08-02 | Advanced Ion Beam Technology, Inc. | Determining relative scan velocity to control ion implantation of work piece |
JP5211328B2 (ja) * | 2011-02-02 | 2013-06-12 | 日新イオン機器株式会社 | イオン注入方法およびイオン注入装置 |
JP5575025B2 (ja) * | 2011-03-23 | 2014-08-20 | 株式会社Sen | イオン注入方法及びイオン注入装置 |
JP5638995B2 (ja) | 2011-03-28 | 2014-12-10 | 株式会社Sen | イオン注入方法及びイオン注入装置 |
US20120302049A1 (en) * | 2011-05-24 | 2012-11-29 | Nanya Technology Corporation | Method for implanting wafer |
JP5718169B2 (ja) * | 2011-06-14 | 2015-05-13 | 株式会社Sen | イオン注入装置及びイオン注入方法 |
CN102629553B (zh) * | 2011-11-18 | 2014-07-23 | 京东方科技集团股份有限公司 | 离子注入方法 |
CN103367126B (zh) * | 2012-03-28 | 2016-03-09 | 无锡华润上华科技有限公司 | 离子注入方法 |
CN104701124B (zh) * | 2013-12-05 | 2017-05-03 | 和舰科技(苏州)有限公司 | 离子注入设备及控制离子注入角度的方法 |
US9218941B2 (en) | 2014-01-15 | 2015-12-22 | Axcelis Technologies, Inc. | Ion implantation system and method with variable energy control |
JP6509089B2 (ja) * | 2015-09-30 | 2019-05-08 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置 |
JP6588323B2 (ja) * | 2015-12-10 | 2019-10-09 | 住友重機械イオンテクノロジー株式会社 | イオン注入方法およびイオン注入装置 |
JP7078632B2 (ja) * | 2017-01-09 | 2022-05-31 | ティーイーエル エピオン インコーポレイテッド | 補償位置特定処理装置および方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126918A (en) * | 1980-03-11 | 1981-10-05 | Hitachi Ltd | Injecting device for ion |
US4449051A (en) * | 1982-02-16 | 1984-05-15 | Varian Associates, Inc. | Dose compensation by differential pattern scanning |
JPS62295347A (ja) * | 1986-04-09 | 1987-12-22 | イクリプス・イオン・テクノロジ−・インコ−ポレイテツド | イオンビ−ム高速平行走査装置 |
JPH0770298B2 (ja) | 1989-05-15 | 1995-07-31 | 日新電機株式会社 | イオン注入装置 |
JP2969788B2 (ja) | 1990-05-17 | 1999-11-02 | 日新電機株式会社 | イオンビームの平行度測定方法、走査波形整形方法およびイオン注入装置 |
US6055460A (en) * | 1997-08-06 | 2000-04-25 | Advanced Micro Devices, Inc. | Semiconductor process compensation utilizing non-uniform ion implantation methodology |
US5898179A (en) | 1997-09-10 | 1999-04-27 | Orion Equipment, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
JP3567749B2 (ja) * | 1998-07-22 | 2004-09-22 | 日新電機株式会社 | 荷電粒子ビームの分布測定方法およびそれに関連する方法 |
JP2000150407A (ja) | 1998-11-06 | 2000-05-30 | Matsushita Electronics Industry Corp | 半導体装置の製造方法 |
US6207959B1 (en) | 1999-04-19 | 2001-03-27 | Applied Materials, Inc. | Ion implanter |
JP3414337B2 (ja) | 1999-11-12 | 2003-06-09 | 日新電機株式会社 | 電磁界レンズの制御方法およびイオン注入装置 |
KR100298587B1 (ko) | 1999-11-22 | 2001-11-05 | 윤종용 | 이온 주입 장치 |
JP3341749B2 (ja) | 1999-12-28 | 2002-11-05 | 日新電機株式会社 | イオン注入方法およびイオン注入装置 |
US6323497B1 (en) * | 2000-06-02 | 2001-11-27 | Varian Semiconductor Equipment Assoc. | Method and apparatus for controlling ion implantation during vacuum fluctuation |
US6657209B2 (en) * | 2000-09-20 | 2003-12-02 | Axcelis Technologies, Inc. | Method and system for determining pressure compensation factors in an ion implanter |
JP4867113B2 (ja) | 2001-09-11 | 2012-02-01 | ソニー株式会社 | イオン注入方法およびイオン注入装置 |
JP4061044B2 (ja) | 2001-10-05 | 2008-03-12 | 住友重機械工業株式会社 | 基板移動装置 |
JP3692999B2 (ja) * | 2001-10-26 | 2005-09-07 | 日新イオン機器株式会社 | イオン注入方法およびその装置 |
US7049210B2 (en) * | 2002-09-23 | 2006-05-23 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
-
2004
- 2004-02-23 JP JP2004046213A patent/JP4251453B2/ja not_active Expired - Lifetime
- 2004-05-07 US US10/840,281 patent/US8017922B2/en not_active Expired - Lifetime
- 2004-09-28 EP EP04023084A patent/EP1580789A3/en not_active Withdrawn
- 2004-10-01 TW TW093129822A patent/TWI308354B/zh active
- 2004-10-27 KR KR1020040086146A patent/KR100722159B1/ko active IP Right Review Request
- 2004-11-30 CN CNB200410098236XA patent/CN100382226C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP1580789A3 (en) | 2010-12-08 |
EP1580789A2 (en) | 2005-09-28 |
CN100382226C (zh) | 2008-04-16 |
TW200529275A (en) | 2005-09-01 |
KR100722159B1 (ko) | 2007-05-28 |
JP2005235682A (ja) | 2005-09-02 |
US20050184254A1 (en) | 2005-08-25 |
US8017922B2 (en) | 2011-09-13 |
CN1661763A (zh) | 2005-08-31 |
KR20050083538A (ko) | 2005-08-26 |
TWI308354B (en) | 2009-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4251453B2 (ja) | イオン注入方法 | |
JP5311112B2 (ja) | イオン注入方法およびイオン注入装置 | |
KR100582783B1 (ko) | 이온주입방법 및 그 장치 | |
TWI497558B (zh) | 離子束掃描處理裝置及離子束掃描處理方法 | |
KR101271502B1 (ko) | 이온 빔 각 확산 제어를 위한 기술 | |
TWI443716B (zh) | 執行高傾斜植入的方法、離子植入裝置與植入工件的方法 | |
WO2006031559A2 (en) | Controlled dose ion implantation | |
JP2008522431A (ja) | ビーム利用率の最適化 | |
US9431247B2 (en) | Method for ion implantation | |
JP2008510278A (ja) | イオン注入線量および均一性制御のためのイオンビーム測定システム及び方法 | |
JP2010500736A (ja) | 走査されたイオンビーム注入装置のための処理能力の向上 | |
WO2008042668A2 (en) | Technique for improving ion implantation throughput and dose uniformity | |
JP4155327B2 (ja) | イオン注入方法およびその装置 | |
JP2017515272A (ja) | 角度エネルギフィルタを用いた角度スキャン | |
US6984832B2 (en) | Beam angle control in a batch ion implantation system | |
KR20160024384A (ko) | 이온 각도의 확산을 제어하기 위한 장치 및 기술들 | |
KR20160001565A (ko) | 이온 주입기 | |
JP2002170515A (ja) | イオン注入方法 | |
CN102800549A (zh) | 离子植入机及离子植入的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060316 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060516 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060712 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20061219 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070118 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20070219 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20070316 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080924 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090114 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4251453 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120130 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130130 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130130 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140130 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |