JP4171695B2 - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 23
- 238000002955 isolation Methods 0.000 claims description 62
- 230000002093 peripheral effect Effects 0.000 claims description 59
- 230000015572 biosynthetic process Effects 0.000 claims description 46
- 238000009792 diffusion process Methods 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 25
- 239000012535 impurity Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 description 51
- 230000015556 catabolic process Effects 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229920002120 photoresistant polymer Polymers 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 19
- 150000004767 nitrides Chemical class 0.000 description 18
- 229920005591 polysilicon Polymers 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 238000000206 photolithography Methods 0.000 description 9
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 7
- 238000011049 filling Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
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- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H10B—ELECTRONIC MEMORY DEVICES
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- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
- H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
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Description
しかしながら、メモリセルの駆動制御を行う周辺回路部分では、メモリセル部に比べて素子間において高い耐圧が要求される素子が存在している。高い耐圧を必要とする素子においては、上記のようなトレンチ分離領域を使用する条件では、耐圧を確保するために、素子間分離の距離(トレンチ分離領域の幅)を広くしたり、トレンチ分離領域の下にストッパ領域を形成したりするなどの方法を用いてきた。しかしどちらの方法においても、長い素子分離幅の確保やストッパ領域形成のために広いトレンチ分離領域の幅寸法が必要となり素子分離のための面積が大きくなってしまう問題が発生していた。
一般に、不揮発性メモリは、メモリセル部と周辺回路部とで構成されており、周辺回路部では高い耐圧を必要とする回路(高耐圧系回路)および耐圧を必要とせず電流駆動能力を必要とするロジック回路(低耐圧系回路)などにより構成されている。高耐圧系回路では拡散層間の耐圧とともにゲート絶縁膜の耐圧も確保するため、高耐圧系トランジスタのゲート絶縁膜は低耐圧系トランジスタのゲート絶縁膜よりも厚い膜厚のものが必要となる。この結果、各回路で必要とされるゲート絶縁膜の膜厚の比較をすると、低耐圧系≦メモリセル<高耐圧系のようになる。
この場合、高耐圧系領域(高耐圧系回路の絶縁膜の領域)でのトレンチ分離領域の幅寸法を狭くするために、高耐圧系の素子に形成するトレンチ分離領域を深く形成して深さ方向で耐圧を確保できるようにすると共に、メモリセル領域(メモリセルのゲート絶縁膜の形成領域)では、耐圧が確保できる程度の幅寸法でアスペクト比を確保するために浅いトレンチ分離領域を形成することで素子領域の縮小化を図ることが可能となる。
図1は、後述する製造方法を適用して作成した半導体装置としての不揮発性メモリ半導体装置21の構造を模式的な断面図で示している。半導体基板としてのP型(第1導電型)のシリコン基板(P−sub)22に、第1ウェルとしてのNウェル(N−well)23が形成され、この内側に第2ウェルとしてのPウェル(P−well)24が形成されている。Pウェル24は、内側にメモリセル形成領域25が形成され、Pウェル24内の周辺部には境界領域26が形成され、外側には周辺回路領域27が形成されている。なお、周辺回路領域27には、図示しない第2ウェルとしてのPウェルや他のウェルが形成されている。
次に、上記構成の製造工程について、製造工程の各段階で示す模式的な断面図を参照しながら説明する。なお、この製造工程の説明では、フラッシュメモリの製造過程を図示したものを参照して説明する。
続いて、フォトリソグラフィ処理により、フォトレジスト42をパターニング形成して低耐圧系の周辺回路領域27のシリコン基板22の表面に図1に示す第3のゲート酸化膜35を形成すべく開口部42aを形成し、開口部42a部分に露出している第2のゲート酸化膜41を例えばウェットエッチング処理により除去する。
このレジストマスク48を用いてTEOS系の酸化膜47、第1および第2の窒化膜39,45、第1および第2のポリシリコン膜38,44、第1〜第3の酸化膜37,41,43の順にRIE(Reactive Ion Etching)法によりエッチング除去した後、従来同様の方法でフォトレジスト48を剥離する。これにより、活性領域のパターンがレジストマスク48から酸化膜/窒化膜/ポリシリコン膜/酸化膜の積層膜構造のハードマスクに転写されたことになる。
この埋め込み酸化膜54をCMP法により平坦化処理する場合、メモリセル形成領域25上に堆積した厚い埋め込み酸化膜54を除去するために、周辺の第3STI30上に堆積した埋め込み酸化膜54に対しては膜厚差の分、過剰のCMP平坦化処理を行うことになる(CMPストッパ材である窒化膜39,45から第3STI30上に堆積した埋め込み材までの高さの差が、メモリセル形成領域25よりも周辺回路領域27の方が小さいため)。
またこの関係は、周辺回路領域27内における高耐圧系領域と周辺低耐圧系領域との関係においてもあてはまることであり、低耐圧系領域を高耐圧系領域で取り囲む場合は、低耐圧系領域のガードリング拡散領域の表面の酸化膜を高耐圧系領域の酸化膜で形成することで同様の効果を期待することができる。この場合、メモリセルアレイはPウェル24中に形成するため、ガードリング拡散領域にはP型不純物を導入した拡散層として形成している。
次に、図12に示した状態のものを、900℃以上の高温アニール処理を加えることで各STI28〜30内に埋め込んだ埋め込み酸化膜54の内部応力を解放させる。この後、ウェット処理を行い埋め込み酸化膜54の表面の微小なスクラッチ傷やCMP平坦化処理の研磨時に付着した異物などをリフトオフすることで除去する。
なお、図16に示す断面図は、半導体装置21の平面図を示す図17において、上記の処理工程を経て形成されたゲート電極(図中58部分)の中心線に沿った(図中横方向A−A線で示す部分)断面に対応している。また、図17では、ONO絶縁膜57が露出している部分を斜線領域で示している。
この後、フォトレジスト64を除去し、続いて図示はしないが、通常のコンタクト処理工程、配線層形成工程、パッシベーション膜形成工程などの各形成プロセスを経て不揮発性メモリのウエハ製造プロセスが終了する。このとき、拡散領域31および32あるいは他の図示しない拡散領域は、熱処理を行って所定深さまで拡散するようになっている。
同様に、周辺回路領域27においても、高耐圧のトランジスタと低耐圧のトランジスタとでゲート絶縁膜の膜厚が異なる場合でも、薄いゲート酸化膜35の低耐圧素子形成領域を高耐圧素子形成領域で包囲するように構成しているので、CMP処理工程で平坦性を良好にした品質の高い平坦化処理を実現することができるようになる。
本発明は、上記実施例にのみ限定されるものではなく、次のように変形または拡張できる。
CMP処理工程を採用しないプロセスの場合でも適用することができる。
境界領域26のシリコン基板22の表面のゲート絶縁膜34を同じ膜厚に設定するようにしたが、膜厚をそろえることは必要に応じて実施することができる。
トレンチ分離領域は、必要に応じて3種類以上の深さ寸法のものを掘り分けるプロセスで形成することもできる。
Claims (2)
- 第1導電型の半導体基板と、
この半導体基板に形成された第2導電型の第1ウェルと、
この第1ウェル内に第1導電型のメモリセルおよび周辺回路の形成用にそれぞれ形成された第2ウェルと、
前記メモリセル用の第2ウェル内に素子を分離するように形成された第1の深さ寸法の第1トレンチ分離領域と、
前記メモリセル用の第2ウェル内の周縁部近傍に設けられ前記メモリセルの形成領域を包囲するように高濃度で不純物が導入された第1導電型のガードリング拡散領域と、
このガードリング拡散領域の外側近傍で前記第2ウェルのpn接合が底面部で終端するように形成され前記第1の深さよりも深い第2の深さ寸法の第2トレンチ分離領域と、
前記周辺回路用の第2ウェル内に形成された素子を分離する前記第2の深さの第3トレンチ分離領域とを備え、
前記ガードリング拡散領域の拡散深さは、前記第1トレンチ分離領域の第1の深さよりも深く、且つ前記第2トレンチ分離領域の第2の深さよりも浅く設定されていることを特徴とする半導体装置。 - 請求項1に記載の半導体装置において、
前記第1トレンチ分離領域の第1の深さは、前記メモリセル用の第2ウェル内の素子として形成される第2導電型の高濃度不純物拡散領域の拡散深さよりも深く設定され、
前記第2および第3トレンチ分離領域の第2の深さは、前記周辺回路用の第2ウェル内の第1導電型の高濃度不純物拡散領域の拡散深さより深く設定されていることを特徴とする半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003376816A JP4171695B2 (ja) | 2003-11-06 | 2003-11-06 | 半導体装置 |
US10/981,532 US20050127473A1 (en) | 2003-11-06 | 2004-11-05 | Semiconductor device and method of fabricating the same |
US12/420,582 US7709347B2 (en) | 2003-11-06 | 2009-04-08 | Semiconductor device and method of fabricating the same |
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JP2003376816A JP4171695B2 (ja) | 2003-11-06 | 2003-11-06 | 半導体装置 |
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JP4768469B2 (ja) * | 2006-02-21 | 2011-09-07 | 株式会社東芝 | 半導体装置の製造方法 |
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US8188563B2 (en) * | 2006-07-21 | 2012-05-29 | The Regents Of The University Of California | Shallow-trench-isolation (STI)-bounded single-photon CMOS photodetector |
JP2008071787A (ja) * | 2006-09-12 | 2008-03-27 | Ushio Inc | 光照射式加熱装置および光照射式加熱方法 |
US8654592B2 (en) | 2007-06-12 | 2014-02-18 | Micron Technology, Inc. | Memory devices with isolation structures |
KR100934791B1 (ko) * | 2007-10-15 | 2009-12-31 | 주식회사 동부하이텍 | 전류특성 측정용 반도체 소자 및 반도체 소자의 전류특성측정 방법 |
CN101770954A (zh) * | 2008-12-29 | 2010-07-07 | 中芯国际集成电路制造(上海)有限公司 | 快闪存储器的形成方法 |
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CN102237367B (zh) * | 2010-05-07 | 2014-09-24 | 中国科学院微电子研究所 | 一种闪存器件及其制造方法 |
US8610240B2 (en) * | 2009-10-16 | 2013-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit with multi recessed shallow trench isolation |
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US20140167206A1 (en) * | 2012-12-17 | 2014-06-19 | Macronix International Co., Ltd. | Shallow trench isolation structure and method of manufacture |
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2003
- 2003-11-06 JP JP2003376816A patent/JP4171695B2/ja not_active Expired - Fee Related
-
2004
- 2004-11-05 US US10/981,532 patent/US20050127473A1/en not_active Abandoned
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2009
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US20090203186A1 (en) | 2009-08-13 |
US20050127473A1 (en) | 2005-06-16 |
JP2005142340A (ja) | 2005-06-02 |
US7709347B2 (en) | 2010-05-04 |
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