JP2017162981A - レーザー加工装置 - Google Patents
レーザー加工装置 Download PDFInfo
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- JP2017162981A JP2017162981A JP2016045852A JP2016045852A JP2017162981A JP 2017162981 A JP2017162981 A JP 2017162981A JP 2016045852 A JP2016045852 A JP 2016045852A JP 2016045852 A JP2016045852 A JP 2016045852A JP 2017162981 A JP2017162981 A JP 2017162981A
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- 238000004364 calculation method Methods 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000003754 machining Methods 0.000 description 24
- 238000000034 method Methods 0.000 description 19
- 238000003384 imaging method Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000002390 adhesive tape Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Abstract
Description
10 チャックテーブル
10a 保持面
20 X軸移動手段
30 Y軸移動手段
50 レーザー光線照射手段
60 撮像手段
100 制御手段
101 記憶部(記憶手段)
102 目印制御部
103 加工予定線算出部
110 表示パネル(表示手段)
D デバイス
K 加工予定線
L1 第1の分割予定ライン
L2 第2の分割予定ライン
LK 改質層の形成位置
M 目印部
MP 目印
PS 始点
PE 終点
W ウエーハ
Wa 表面
Claims (1)
- 第1の方向に伸長する第1の分割予定ラインと該第1の方向と交差する方向に伸長する第2の分割予定ラインとが設定され、断続的に形成された該第1の分割予定ラインの始点または終点が該第2の分割予定ラインと接続する領域を備えるウエーハにレーザー光線を照射して、該第1の分割予定ラインと該第2の分割予定ラインとに沿った改質層を該ウエーハの内部に形成するレーザー加工装置であって、
該ウエーハを保持面で保持するチャックテーブルと、
該チャックテーブルに保持された該ウエーハに、該ウエーハに対して透過性を有する波長のレーザー光線を照射するレーザー光線照射手段と、
該チャックテーブルと該レーザー光線照射手段とを相対移動させる移動手段と、
該チャックテーブルに保持された該ウエーハを撮像した画像を表示する表示手段と、
該ウエーハを加工する加工条件を記憶する記憶手段と、
該加工条件として記憶させた該改質層を形成する予定の位置を加工予定線として該表示手段に表示させる加工予定線算出部と、を備え、
該表示手段は、該第1の分割予定ラインの始点または終点が該第2の分割予定ラインと接続する領域を表示すると、既に該改質層を形成する位置を記憶させた該第1の分割予定ラインと該第2の分割予定ラインとの少なくともいずれかがある場合、該改質層が形成される予定の位置に沿って加工予定線が該第1の分割予定ラインと該第2の分割予定ラインとの少なくともいずれかに重ねて表示され、
該第1の分割予定ラインまたは該第2の分割予定ラインに形成する該改質層の始点または終点の位置を、該第2の分割予定ラインまたは該第1の分割予定ラインに形成される該改質層の位置に対応して設定できることを特徴とするレーザー加工装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016045852A JP6666173B2 (ja) | 2016-03-09 | 2016-03-09 | レーザー加工装置 |
CN201710130972.6A CN107186366B (zh) | 2016-03-09 | 2017-03-07 | 激光加工装置 |
US15/453,450 US10580670B2 (en) | 2016-03-09 | 2017-03-08 | Laser processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016045852A JP6666173B2 (ja) | 2016-03-09 | 2016-03-09 | レーザー加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017162981A true JP2017162981A (ja) | 2017-09-14 |
JP6666173B2 JP6666173B2 (ja) | 2020-03-13 |
Family
ID=59788004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016045852A Active JP6666173B2 (ja) | 2016-03-09 | 2016-03-09 | レーザー加工装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10580670B2 (ja) |
JP (1) | JP6666173B2 (ja) |
CN (1) | CN107186366B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107876979A (zh) * | 2017-10-19 | 2018-04-06 | 江西恒动新能源有限公司 | 一种动力锂离子电池注液口密封激光焊接方法 |
JP7286464B2 (ja) * | 2019-08-02 | 2023-06-05 | 株式会社ディスコ | レーザー加工装置 |
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-
2016
- 2016-03-09 JP JP2016045852A patent/JP6666173B2/ja active Active
-
2017
- 2017-03-07 CN CN201710130972.6A patent/CN107186366B/zh active Active
- 2017-03-08 US US15/453,450 patent/US10580670B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20170263473A1 (en) | 2017-09-14 |
CN107186366A (zh) | 2017-09-22 |
CN107186366B (zh) | 2020-10-27 |
US10580670B2 (en) | 2020-03-03 |
JP6666173B2 (ja) | 2020-03-13 |
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