JP6604715B2 - レーザー加工装置 - Google Patents
レーザー加工装置 Download PDFInfo
- Publication number
- JP6604715B2 JP6604715B2 JP2014186235A JP2014186235A JP6604715B2 JP 6604715 B2 JP6604715 B2 JP 6604715B2 JP 2014186235 A JP2014186235 A JP 2014186235A JP 2014186235 A JP2014186235 A JP 2014186235A JP 6604715 B2 JP6604715 B2 JP 6604715B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- laser beam
- captured image
- laser processing
- chuck table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 60
- 238000000034 method Methods 0.000 description 9
- 238000003672 processing method Methods 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 229910009372 YVO4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
Description
4 基台
6 基部
8 壁部
10 チャックテーブル
10a 保持面
12 レーザー加工ヘッド(レーザー光線照射手段)
14 カメラ
16 Y軸移動ユニット(割り出し送り手段、移動手段)
18 Y軸ガイドレール
20 Y軸移動テーブル
22 Y軸ボールネジ
24 Y軸パルスモータ
26 X軸移動ユニット(加工送り手段、移動手段)
28 X軸ガイドレール
30 X軸移動テーブル
32 X軸ボールネジ
34 X軸パルスモータ
36 支持台
38 クランプ
40 支持アーム
42 制御装置(制御手段)
42a 目印制御部
42b 記憶部(記憶手段)
44 表示パネル(表示手段、入力手段)
52 目印(目印部)
54 目印(目印部)
11 ウェーハ
11a 表面
11b 裏面
13 デバイス
13a 第1のデバイス
13b 第2のデバイス
13c 変形デバイス
13d 端材部
15,15a 分割予定ライン(ストリート)
15b 始点
15c 終点
17 保護テープ
19 フレーム
21 改質層
L レーザー光線
Claims (1)
- 複数のデバイスが表面に配列されたウェーハの隣接する該デバイスを隔てる分割予定ラインに該ウェーハを透過する波長のレーザー光線を照射して、ウェーハの内部に所定の長さで連続する改質層を形成するレーザー加工装置であって、
ウェーハを保持するチャックテーブルと、
該チャックテーブルに保持されたウェーハに該レーザー光線を照射するレーザー光線照射手段と、
該チャックテーブルと該レーザー光線照射手段とを加工送り方向及び割り出し送り方向に相対移動させる移動手段と、
該チャックテーブルに保持されたウェーハを撮像した撮像画像を表示する表示手段と、
ウェーハを加工する加工条件を入力する入力手段と、
該入力手段に入力された該加工条件を記憶する記憶手段と、
制御手段と、を備え、
該表示手段には、該撮像画像に重なる目印部が表示され、
該制御手段は、該撮像画像に重なる該目印部が該表示手段に表示された状態で該目印部により指定される該撮像画像の位置を該レーザー加工装置の座標に変換し、該改質層が形成される分割予定ラインの始点又は終点として該記憶手段に記憶させ、全ての分割予定ラインの始点及び終点が設定された後に該始点及び該終点に従い該レーザー光線の照射と非照射とを切り替えて該改質層を形成することを特徴とするレーザー加工装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014186235A JP6604715B2 (ja) | 2014-09-12 | 2014-09-12 | レーザー加工装置 |
TW104125090A TWI683718B (zh) | 2014-09-12 | 2015-08-03 | 雷射加工裝置 |
KR1020150121783A KR102305378B1 (ko) | 2014-09-12 | 2015-08-28 | 레이저 가공 장치 |
US14/842,272 US9925618B2 (en) | 2014-09-12 | 2015-09-01 | Laser processing apparatus |
CN201510570407.2A CN105414744A (zh) | 2014-09-12 | 2015-09-09 | 激光加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014186235A JP6604715B2 (ja) | 2014-09-12 | 2014-09-12 | レーザー加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016058684A JP2016058684A (ja) | 2016-04-21 |
JP6604715B2 true JP6604715B2 (ja) | 2019-11-13 |
Family
ID=55453884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014186235A Active JP6604715B2 (ja) | 2014-09-12 | 2014-09-12 | レーザー加工装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9925618B2 (ja) |
JP (1) | JP6604715B2 (ja) |
KR (1) | KR102305378B1 (ja) |
CN (1) | CN105414744A (ja) |
TW (1) | TWI683718B (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6478821B2 (ja) * | 2015-06-05 | 2019-03-06 | 株式会社ディスコ | ウエーハの生成方法 |
JP6666173B2 (ja) * | 2016-03-09 | 2020-03-13 | 株式会社ディスコ | レーザー加工装置 |
JP6651257B2 (ja) * | 2016-06-03 | 2020-02-19 | 株式会社ディスコ | 被加工物の検査方法、検査装置、レーザー加工装置、及び拡張装置 |
JP6698440B2 (ja) * | 2016-06-21 | 2020-05-27 | 株式会社ディスコ | 加工装置 |
DE102016119794A1 (de) * | 2016-10-18 | 2018-04-19 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Bild-basierte technologiewahl beim laserschweissen |
DE112017007622A5 (de) * | 2017-06-09 | 2020-07-02 | Bystronic Laser Ag | Verfahren zur steuerung einer strahlschneidvorrichtung mit einem schneidwerkzeug, ein computerimplementiertes verfahren zum automatischen bestimmen und erzeugen von bewegungsbefehlen zum steuern eines schneidwerkzeugs einer strahlschneidvorrichtung, sowie strahlschneidvorrichtung zum ausfuehren der verfahren |
JP6998232B2 (ja) * | 2018-02-20 | 2022-01-18 | 株式会社ディスコ | 加工装置 |
JP7017949B2 (ja) * | 2018-03-02 | 2022-02-09 | 株式会社ディスコ | 加工装置 |
JP7365108B2 (ja) * | 2018-06-05 | 2023-10-19 | 株式会社ディスコ | 処理装置 |
JP7345963B2 (ja) * | 2019-05-13 | 2023-09-19 | 株式会社ディスコ | 加工装置 |
JP7235597B2 (ja) * | 2019-06-03 | 2023-03-08 | 株式会社ディスコ | 加工装置 |
CN113305442B (zh) * | 2021-05-12 | 2022-08-12 | 杭州大和热磁电子有限公司 | 一种石英环自动刻字装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6038401Y2 (ja) * | 1979-06-05 | 1985-11-16 | 松下電器産業株式会社 | ヘア−アイロン |
JPH0638401Y2 (ja) * | 1986-09-24 | 1994-10-05 | 日本電気株式会社 | レ−ザトリミング装置 |
JPH04180649A (ja) * | 1990-11-15 | 1992-06-26 | Nec Yamagata Ltd | 半導体チップサンプリング装置 |
JP2910032B2 (ja) * | 1996-08-09 | 1999-06-23 | 日本電気株式会社 | 自動塗布装置 |
JP3157751B2 (ja) * | 1997-09-03 | 2001-04-16 | 山口日本電気株式会社 | 半導体基板のダイシング方法 |
US6591154B2 (en) * | 2000-12-15 | 2003-07-08 | International Business Machines Corporation | System and method for modifying enclosed areas for ion beam and laser beam bias effects |
JPWO2002075806A1 (ja) * | 2001-03-16 | 2004-07-08 | 株式会社日立製作所 | ウエハの検査方法、集束イオンビーム装置及び透過電子ビーム装置 |
JP4398686B2 (ja) | 2003-09-11 | 2010-01-13 | 株式会社ディスコ | ウエーハの加工方法 |
US20050205778A1 (en) * | 2003-10-17 | 2005-09-22 | Gsi Lumonics Corporation | Laser trim motion, calibration, imaging, and fixturing techniques |
JP2005203541A (ja) * | 2004-01-15 | 2005-07-28 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法 |
JP2005251882A (ja) * | 2004-03-03 | 2005-09-15 | Disco Abrasive Syst Ltd | レーザー加工装置 |
US7380322B2 (en) * | 2005-12-13 | 2008-06-03 | Von Detten Volker | Device for insertion of contacts into connector insulator cavities |
JP4795886B2 (ja) * | 2006-07-27 | 2011-10-19 | 株式会社キーエンス | レーザ加工装置、レーザ加工条件設定装置、レーザ加工条件設定方法、レーザ加工条件設定プログラム |
JP2008294106A (ja) * | 2007-05-23 | 2008-12-04 | Sony Corp | レーザアニール装置 |
JP2010123723A (ja) | 2008-11-19 | 2010-06-03 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法 |
JP5695818B2 (ja) * | 2009-01-27 | 2015-04-08 | 株式会社日立ハイテクサイエンス | 断面加工方法及び断面観察試料の製造方法 |
KR20110051442A (ko) * | 2009-11-10 | 2011-05-18 | 가부시기가이샤 디스코 | 레이저 가공 방법, 레이저 가공 장치 및 칩의 제조 방법 |
JP5771389B2 (ja) * | 2010-12-14 | 2015-08-26 | 株式会社ディスコ | 加工方法 |
JP5964580B2 (ja) * | 2011-12-26 | 2016-08-03 | 株式会社ディスコ | ウェーハの加工方法 |
JP2013226588A (ja) * | 2012-04-26 | 2013-11-07 | Olympus Corp | リペア装置及びリペア方法 |
JP6003496B2 (ja) * | 2012-10-02 | 2016-10-05 | 三星ダイヤモンド工業株式会社 | パターン付き基板の加工方法 |
TWI543830B (zh) * | 2013-05-10 | 2016-08-01 | 財團法人工業技術研究院 | 視覺誤差校正方法 |
US9063330B2 (en) * | 2013-05-30 | 2015-06-23 | Oculus Vr, Llc | Perception based predictive tracking for head mounted displays |
JP6189700B2 (ja) * | 2013-10-03 | 2017-08-30 | 株式会社ディスコ | ウエーハの加工方法 |
-
2014
- 2014-09-12 JP JP2014186235A patent/JP6604715B2/ja active Active
-
2015
- 2015-08-03 TW TW104125090A patent/TWI683718B/zh active
- 2015-08-28 KR KR1020150121783A patent/KR102305378B1/ko active IP Right Grant
- 2015-09-01 US US14/842,272 patent/US9925618B2/en active Active
- 2015-09-09 CN CN201510570407.2A patent/CN105414744A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
TW201609297A (zh) | 2016-03-16 |
JP2016058684A (ja) | 2016-04-21 |
CN105414744A (zh) | 2016-03-23 |
KR102305378B1 (ko) | 2021-09-24 |
US9925618B2 (en) | 2018-03-27 |
US20160074959A1 (en) | 2016-03-17 |
KR20160031410A (ko) | 2016-03-22 |
TWI683718B (zh) | 2020-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6604715B2 (ja) | レーザー加工装置 | |
JP5192213B2 (ja) | レーザー加工装置 | |
TWI546860B (zh) | And a method of ablating a substrate having a passivation film laminated thereon | |
JP2010123797A (ja) | ウエーハのレーザー加工方法 | |
JP6494991B2 (ja) | ウエーハの加工方法 | |
JP2019125599A (ja) | 被加工物の加工方法 | |
JP2011108708A (ja) | ウエーハの加工方法 | |
JP5722071B2 (ja) | 半導体デバイスの製造方法およびレーザー加工装置 | |
JP2006289388A (ja) | レーザー加工装置 | |
JP2013237097A (ja) | 改質層形成方法 | |
JP6116420B2 (ja) | レーザー加工装置 | |
JP2010064125A (ja) | レーザー加工装置 | |
JP5615107B2 (ja) | 分割方法 | |
JP2011108709A (ja) | ウエーハの加工方法 | |
JP2008109026A (ja) | 半導体ウエーハおよび該半導体ウエーハの製造方法 | |
CN107186366B (zh) | 激光加工装置 | |
JP5868193B2 (ja) | ウエーハの加工方法 | |
JP5442303B2 (ja) | 板状ワークの加工装置 | |
JP5771389B2 (ja) | 加工方法 | |
JP5372429B2 (ja) | 板状物の分割方法 | |
CN113496933A (zh) | 对准标记的设定方法和加工装置 | |
TWI791580B (zh) | 對準圖案的設定方法 | |
JP2023002418A (ja) | ウエーハの確認方法 | |
JP5839383B2 (ja) | ウエーハの加工方法 | |
JP7349841B2 (ja) | チップの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170713 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180328 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180403 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180531 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20181023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190122 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20190129 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20190329 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191015 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6604715 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |