JP2016225383A - 気密パッケージの製造方法 - Google Patents
気密パッケージの製造方法 Download PDFInfo
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- JP2016225383A JP2016225383A JP2015108176A JP2015108176A JP2016225383A JP 2016225383 A JP2016225383 A JP 2016225383A JP 2015108176 A JP2015108176 A JP 2015108176A JP 2015108176 A JP2015108176 A JP 2015108176A JP 2016225383 A JP2016225383 A JP 2016225383A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/16—Laser beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
- H01L23/08—Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
- C03C3/066—Glass compositions containing silica with less than 40% silica by weight containing boron containing zinc
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/14—Silica-free oxide glass compositions containing boron
- C03C3/145—Silica-free oxide glass compositions containing boron containing aluminium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/20—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing titanium compounds; containing zirconium compounds
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/24—Fusion seal compositions being frit compositions having non-frit additions, i.e. for use as seals between dissimilar materials, e.g. glass and metal; Glass solders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/041—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction having no base used as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/712—Containers; Packaging elements or accessories, Packages
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2207/00—Compositions specially applicable for the manufacture of vitreous enamels
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Acoustics & Sound (AREA)
- Glass Compositions (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
また、第二の封着材料層を枠体の上縁部ではなく、電気炉の焼成により第二のガラス基板上に形成したこと以外の条件を[実施例1]と同様にして、気密パッケージを作製した(試料No.7)。更に、試料No.7について、上記接着性の評価を行った。その結果、試料No.7は、接着性の評価で剥離が認められた。
10 第一のガラス基板
11 第一の封着材料層
12 枠体
12a 枠体の底部
12b 枠体の上縁部
13 第二の封着材料層
14 収容部材
15 第二のガラス基板
16 レーザー光
Claims (10)
- (1)第一のガラス基板を用意すると共に、第一のガラス基板上に第一の封着材料層を形成する工程と、(2)上部に開口部を有する枠体を用意すると共に、枠体の底部と第一の封着材料層が接触するように、枠体と第一のガラス基板を配置した後、第一の封着材料層を介して枠体と第一のガラス基板を封着する工程と、(3)枠体の上縁部に第二の封着材料層を形成する工程と、(4)枠体内に収容部材を収容する工程と、(5)第二のガラス基板を用意すると共に、第二のガラス基板と第二の封着材料層が接触するように、第二のガラス基板を配置した後、レーザー光を第二のガラス基板側から第二の封着材料層に向けて照射し、第二の封着材料層を介して第二のガラス基板と枠体を封着して、気密パッケージを得る工程と、を備えることを特徴とする気密パッケージの製造方法。
- 第一の封着材料を含むペーストを第一のガラス基板上に塗布、焼成して、第一の封着材料の焼結体からなる第一の封着材料層を形成することを特徴とする請求項1に記載の気密パッケージの製造方法。
- 第一の封着材料として、ビスマス系ガラス粉末 55〜95体積%、耐火性フィラー粉末 5〜45体積%を含有する封着材料を用いることを特徴とする請求項1又は2に記載の気密パッケージの製造方法。
- 枠体として、グリーンシートの焼結体を用いることを特徴とする請求項1〜3の何れかに記載の気密パッケージの製造方法。
- 第一の封着材料層を焼成して、枠体と第一のガラス基板を封着することを特徴とする請求項1〜4の何れかに記載の気密パッケージの製造方法。
- 第二の封着材料を含むペーストを枠体の上縁部に塗布、焼成して、第二の封着材料の焼結体からなる第二の封着材料層を形成することを特徴とする請求項1〜5の何れかに記載の気密パッケージの製造方法。
- 第二の封着材料として、ビスマス系ガラス粉末 55〜95体積%、耐火性フィラー粉末 5〜45体積%、耐熱顔料 1〜15体積%を含有する封着材料を用いることを特徴とする請求項6に記載の気密パッケージの製造方法。
- 第二の封着材料層の平均厚みを10μm未満とすることを特徴とする請求項1〜7の何れかに記載の気密パッケージの製造方法。
- 収容部材として、圧電振動子素子又は蛍光体粒子を分散させた樹脂を用いることを特徴とする請求項1〜8の何れかに記載の気密パッケージの製造方法。
- 請求項1〜9の何れかに記載の気密パッケージの製造方法により作製されてなることを特徴とする気密パッケージ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015108176A JP6493798B2 (ja) | 2015-05-28 | 2015-05-28 | 気密パッケージの製造方法 |
PCT/JP2016/064434 WO2016190149A1 (ja) | 2015-05-28 | 2016-05-16 | 気密パッケージの製造方法 |
US15/576,922 US10377086B2 (en) | 2015-05-28 | 2016-05-16 | Manufacturing method for airtight package |
KR1020177023469A KR20180015610A (ko) | 2015-05-28 | 2016-05-16 | 기밀 패키지의 제조 방법 |
CN201680015812.0A CN107431045B (zh) | 2015-05-28 | 2016-05-16 | 气密封装体及其制造方法 |
TW105115486A TWI680594B (zh) | 2015-05-28 | 2016-05-19 | 氣密封裝體及其製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015108176A JP6493798B2 (ja) | 2015-05-28 | 2015-05-28 | 気密パッケージの製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2016225383A true JP2016225383A (ja) | 2016-12-28 |
JP6493798B2 JP6493798B2 (ja) | 2019-04-03 |
Family
ID=57393250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015108176A Active JP6493798B2 (ja) | 2015-05-28 | 2015-05-28 | 気密パッケージの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10377086B2 (ja) |
JP (1) | JP6493798B2 (ja) |
KR (1) | KR20180015610A (ja) |
CN (1) | CN107431045B (ja) |
TW (1) | TWI680594B (ja) |
WO (1) | WO2016190149A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018142568A (ja) * | 2017-02-27 | 2018-09-13 | 日本電気硝子株式会社 | パッケージ基体及びそれを用いた気密パッケージ |
JP2018158877A (ja) * | 2017-03-24 | 2018-10-11 | 日本電気硝子株式会社 | カバーガラス及び気密パッケージ |
WO2018216587A1 (ja) * | 2017-05-23 | 2018-11-29 | 日本電気硝子株式会社 | 気密パッケージの製造方法及び気密パッケージ |
JP2019021716A (ja) * | 2017-07-14 | 2019-02-07 | 日本電気硝子株式会社 | 封着材料層付きパッケージ基体の製造方法及び気密パッケージの製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110972418B (zh) * | 2018-09-30 | 2022-01-07 | 比亚迪股份有限公司 | 电子设备壳体、电子设备和复合体 |
JP7360085B2 (ja) * | 2019-06-05 | 2023-10-12 | 日本電気硝子株式会社 | 粉末材料及び粉末材料ペースト |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61145849A (ja) * | 1984-12-20 | 1986-07-03 | Ngk Spark Plug Co Ltd | シリコン半導体用容器 |
JP2010012595A (ja) * | 2008-07-01 | 2010-01-21 | Commiss Energ Atom | 吊り下げゲッター材料ベース構造 |
JP2011182155A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 圧電デバイスと圧電デバイスの製造方法 |
JP2015023263A (ja) * | 2013-07-24 | 2015-02-02 | 日本電気硝子株式会社 | 電気素子パッケージの製造方法及び電気素子パッケージ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005222895A (ja) * | 2004-02-09 | 2005-08-18 | Hitachi Displays Ltd | 画像表示装置及びその製造方法 |
JP2008186697A (ja) | 2007-01-30 | 2008-08-14 | Univ Of Tokyo | パネル体の製造方法 |
JP2012014971A (ja) * | 2010-07-01 | 2012-01-19 | Asahi Glass Co Ltd | 電子デバイス及びその製造方法 |
CN103078063B (zh) * | 2013-01-30 | 2015-12-23 | 四川虹视显示技术有限公司 | 一种oled封装结构 |
-
2015
- 2015-05-28 JP JP2015108176A patent/JP6493798B2/ja active Active
-
2016
- 2016-05-16 CN CN201680015812.0A patent/CN107431045B/zh not_active Expired - Fee Related
- 2016-05-16 WO PCT/JP2016/064434 patent/WO2016190149A1/ja active Application Filing
- 2016-05-16 US US15/576,922 patent/US10377086B2/en active Active
- 2016-05-16 KR KR1020177023469A patent/KR20180015610A/ko not_active Application Discontinuation
- 2016-05-19 TW TW105115486A patent/TWI680594B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61145849A (ja) * | 1984-12-20 | 1986-07-03 | Ngk Spark Plug Co Ltd | シリコン半導体用容器 |
JP2010012595A (ja) * | 2008-07-01 | 2010-01-21 | Commiss Energ Atom | 吊り下げゲッター材料ベース構造 |
JP2011182155A (ja) * | 2010-03-01 | 2011-09-15 | Seiko Epson Corp | 圧電デバイスと圧電デバイスの製造方法 |
JP2015023263A (ja) * | 2013-07-24 | 2015-02-02 | 日本電気硝子株式会社 | 電気素子パッケージの製造方法及び電気素子パッケージ |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018142568A (ja) * | 2017-02-27 | 2018-09-13 | 日本電気硝子株式会社 | パッケージ基体及びそれを用いた気密パッケージ |
JP2018158877A (ja) * | 2017-03-24 | 2018-10-11 | 日本電気硝子株式会社 | カバーガラス及び気密パッケージ |
JP7082309B2 (ja) | 2017-03-24 | 2022-06-08 | 日本電気硝子株式会社 | カバーガラス及び気密パッケージ |
WO2018216587A1 (ja) * | 2017-05-23 | 2018-11-29 | 日本電気硝子株式会社 | 気密パッケージの製造方法及び気密パッケージ |
JPWO2018216587A1 (ja) * | 2017-05-23 | 2020-03-26 | 日本電気硝子株式会社 | 気密パッケージの製造方法及び気密パッケージ |
JP2019021716A (ja) * | 2017-07-14 | 2019-02-07 | 日本電気硝子株式会社 | 封着材料層付きパッケージ基体の製造方法及び気密パッケージの製造方法 |
JP7047270B2 (ja) | 2017-07-14 | 2022-04-05 | 日本電気硝子株式会社 | 封着材料層付きパッケージ基体の製造方法及び気密パッケージの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201705559A (zh) | 2017-02-01 |
US10377086B2 (en) | 2019-08-13 |
KR20180015610A (ko) | 2018-02-13 |
CN107431045A (zh) | 2017-12-01 |
WO2016190149A1 (ja) | 2016-12-01 |
JP6493798B2 (ja) | 2019-04-03 |
TWI680594B (zh) | 2019-12-21 |
US20180147787A1 (en) | 2018-05-31 |
CN107431045B (zh) | 2020-02-07 |
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