JP2016085212A - 欠陥検出システム及び方法 - Google Patents
欠陥検出システム及び方法 Download PDFInfo
- Publication number
- JP2016085212A JP2016085212A JP2015200163A JP2015200163A JP2016085212A JP 2016085212 A JP2016085212 A JP 2016085212A JP 2015200163 A JP2015200163 A JP 2015200163A JP 2015200163 A JP2015200163 A JP 2015200163A JP 2016085212 A JP2016085212 A JP 2016085212A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspection object
- defect detection
- light source
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2014-0143702 | 2014-10-22 | ||
KR1020140143702A KR20160047360A (ko) | 2014-10-22 | 2014-10-22 | 결함 검출 시스템 및 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2016085212A true JP2016085212A (ja) | 2016-05-19 |
Family
ID=55827530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015200163A Pending JP2016085212A (ja) | 2014-10-22 | 2015-10-08 | 欠陥検出システム及び方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2016085212A (zh) |
KR (1) | KR20160047360A (zh) |
CN (1) | CN105548193A (zh) |
TW (1) | TW201616123A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021148794A (ja) * | 2020-03-17 | 2021-09-27 | 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. | 透過光学系の検査装置 |
CN116465826A (zh) * | 2023-03-15 | 2023-07-21 | 东阳市诰源闪光材料有限公司 | 一种用于光学膜偏光率测试装置及测试方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102101152B1 (ko) * | 2016-08-18 | 2020-04-16 | 주식회사 엘지화학 | 결점 검사장치 및 이를 이용한 광학필름의 결점 검사방법 |
CN108072659B (zh) * | 2016-11-11 | 2022-05-31 | 三星显示有限公司 | 多光学视觉设备 |
KR102304850B1 (ko) * | 2017-03-16 | 2021-09-27 | 현대자동차주식회사 | 통합안테나 모듈 및 그를 이용한 차량용 루프 안테나 |
WO2018212087A1 (ja) * | 2017-05-15 | 2018-11-22 | 三菱電機株式会社 | 欠陥検査装置および欠陥検査方法 |
CN108507953B (zh) * | 2018-04-02 | 2021-01-29 | 凌云光技术股份有限公司 | 一种带膜组件自有缺陷检测方法及装置 |
KR20200015050A (ko) * | 2018-08-02 | 2020-02-12 | (주)제이티 | 슬릿광원 및 이를 포함하는 비전검사장치 |
CN109813652A (zh) * | 2018-12-29 | 2019-05-28 | 赣州市德普特科技有限公司 | 一种触控屏与显示屏框贴外观检测装置 |
US11703460B2 (en) * | 2019-07-09 | 2023-07-18 | Kla Corporation | Methods and systems for optical surface defect material characterization |
TWI712788B (zh) * | 2019-11-14 | 2020-12-11 | 勝麗國際股份有限公司 | 感測器封裝結構的缺陷檢測方法 |
CN112098425B (zh) * | 2020-11-17 | 2021-11-23 | 北京领邦智能装备股份公司 | 高精度的成像***、方法、图像采集装置及检测设备 |
CN116993718B (zh) * | 2023-09-25 | 2023-12-22 | 深圳市东陆科技有限公司 | 基于机器视觉的tft阵列基板缺陷检测方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10148619A (ja) * | 1996-11-15 | 1998-06-02 | Mitsubishi Chem Corp | 検査基体の面欠陥検査方法及び装置 |
JP2007024876A (ja) * | 2005-07-18 | 2007-02-01 | Samsung Electronics Co Ltd | 内部に少なくとも一対のビーム経路を有するレンズユニットを具備する光学的検査装置及びこれを用いて基板の表面欠陥を検出する方法 |
US20080198602A1 (en) * | 2007-02-16 | 2008-08-21 | 3M Innovative Properties Company | Method and apparatus for illuminating material for automated inspection |
JP2011169782A (ja) * | 2010-02-19 | 2011-09-01 | Futec Inc | 欠陥検査装置 |
JP2014109520A (ja) * | 2012-12-03 | 2014-06-12 | Ccs Inc | 検査システム及び検査用照明装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03102362U (zh) * | 1990-02-07 | 1991-10-24 | ||
JPH11316195A (ja) * | 1998-04-30 | 1999-11-16 | Asahi Glass Co Ltd | 透明板の表面欠陥検出装置 |
JP2007240432A (ja) * | 2006-03-10 | 2007-09-20 | Omron Corp | 欠陥検査装置および欠陥検査方法 |
KR20120129020A (ko) * | 2011-05-18 | 2012-11-28 | 동우 화인켐 주식회사 | 필름 결함 모니터링 장치 및 방법 |
KR20140011777A (ko) * | 2012-07-19 | 2014-01-29 | 삼성전기주식회사 | 표면 이물질 검사 시스템 및 그 제어 방법 |
KR20140087585A (ko) * | 2012-12-31 | 2014-07-09 | 동우 화인켐 주식회사 | 편광 필름 검사 장치 |
KR101446984B1 (ko) * | 2013-08-08 | 2014-10-07 | 이영우 | 결함 검사장치 |
-
2014
- 2014-10-22 KR KR1020140143702A patent/KR20160047360A/ko active Application Filing
-
2015
- 2015-08-27 TW TW104128155A patent/TW201616123A/zh unknown
- 2015-10-08 JP JP2015200163A patent/JP2016085212A/ja active Pending
- 2015-10-22 CN CN201510690667.3A patent/CN105548193A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10148619A (ja) * | 1996-11-15 | 1998-06-02 | Mitsubishi Chem Corp | 検査基体の面欠陥検査方法及び装置 |
JP2007024876A (ja) * | 2005-07-18 | 2007-02-01 | Samsung Electronics Co Ltd | 内部に少なくとも一対のビーム経路を有するレンズユニットを具備する光学的検査装置及びこれを用いて基板の表面欠陥を検出する方法 |
US20080198602A1 (en) * | 2007-02-16 | 2008-08-21 | 3M Innovative Properties Company | Method and apparatus for illuminating material for automated inspection |
JP2011169782A (ja) * | 2010-02-19 | 2011-09-01 | Futec Inc | 欠陥検査装置 |
JP2014109520A (ja) * | 2012-12-03 | 2014-06-12 | Ccs Inc | 検査システム及び検査用照明装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021148794A (ja) * | 2020-03-17 | 2021-09-27 | 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. | 透過光学系の検査装置 |
JP7126011B2 (ja) | 2020-03-17 | 2022-08-25 | 東友ファインケム株式会社 | 透過光学系の検査装置 |
CN116465826A (zh) * | 2023-03-15 | 2023-07-21 | 东阳市诰源闪光材料有限公司 | 一种用于光学膜偏光率测试装置及测试方法 |
CN116465826B (zh) * | 2023-03-15 | 2023-10-24 | 东阳市诰源闪光材料有限公司 | 一种用于光学膜偏光率测试装置及测试方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20160047360A (ko) | 2016-05-02 |
CN105548193A (zh) | 2016-05-04 |
TW201616123A (zh) | 2016-05-01 |
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