JP2016085212A - 欠陥検出システム及び方法 - Google Patents

欠陥検出システム及び方法 Download PDF

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Publication number
JP2016085212A
JP2016085212A JP2015200163A JP2015200163A JP2016085212A JP 2016085212 A JP2016085212 A JP 2016085212A JP 2015200163 A JP2015200163 A JP 2015200163A JP 2015200163 A JP2015200163 A JP 2015200163A JP 2016085212 A JP2016085212 A JP 2016085212A
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JP
Japan
Prior art keywords
light
inspection object
defect detection
light source
defect
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Pending
Application number
JP2015200163A
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English (en)
Japanese (ja)
Inventor
ギュ リ ウン
Gyu Li Woon
ギュ リ ウン
ファン イオム ドン
Dong-Hwan Eom
ファン イオム ドン
ギュン ホン スン
Seung Gyun Hong
ギュン ホン スン
ヒュン パク ジェ
Jae-Hyun Park
ヒュン パク ジェ
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Dongwoo Fine Chem Co Ltd
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Dongwoo Fine Chem Co Ltd
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Application filed by Dongwoo Fine Chem Co Ltd filed Critical Dongwoo Fine Chem Co Ltd
Publication of JP2016085212A publication Critical patent/JP2016085212A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2015200163A 2014-10-22 2015-10-08 欠陥検出システム及び方法 Pending JP2016085212A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2014-0143702 2014-10-22
KR1020140143702A KR20160047360A (ko) 2014-10-22 2014-10-22 결함 검출 시스템 및 방법

Publications (1)

Publication Number Publication Date
JP2016085212A true JP2016085212A (ja) 2016-05-19

Family

ID=55827530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015200163A Pending JP2016085212A (ja) 2014-10-22 2015-10-08 欠陥検出システム及び方法

Country Status (4)

Country Link
JP (1) JP2016085212A (zh)
KR (1) KR20160047360A (zh)
CN (1) CN105548193A (zh)
TW (1) TW201616123A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021148794A (ja) * 2020-03-17 2021-09-27 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. 透過光学系の検査装置
CN116465826A (zh) * 2023-03-15 2023-07-21 东阳市诰源闪光材料有限公司 一种用于光学膜偏光率测试装置及测试方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
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KR102101152B1 (ko) * 2016-08-18 2020-04-16 주식회사 엘지화학 결점 검사장치 및 이를 이용한 광학필름의 결점 검사방법
CN108072659B (zh) * 2016-11-11 2022-05-31 三星显示有限公司 多光学视觉设备
KR102304850B1 (ko) * 2017-03-16 2021-09-27 현대자동차주식회사 통합안테나 모듈 및 그를 이용한 차량용 루프 안테나
WO2018212087A1 (ja) * 2017-05-15 2018-11-22 三菱電機株式会社 欠陥検査装置および欠陥検査方法
CN108507953B (zh) * 2018-04-02 2021-01-29 凌云光技术股份有限公司 一种带膜组件自有缺陷检测方法及装置
KR20200015050A (ko) * 2018-08-02 2020-02-12 (주)제이티 슬릿광원 및 이를 포함하는 비전검사장치
CN109813652A (zh) * 2018-12-29 2019-05-28 赣州市德普特科技有限公司 一种触控屏与显示屏框贴外观检测装置
US11703460B2 (en) * 2019-07-09 2023-07-18 Kla Corporation Methods and systems for optical surface defect material characterization
TWI712788B (zh) * 2019-11-14 2020-12-11 勝麗國際股份有限公司 感測器封裝結構的缺陷檢測方法
CN112098425B (zh) * 2020-11-17 2021-11-23 北京领邦智能装备股份公司 高精度的成像***、方法、图像采集装置及检测设备
CN116993718B (zh) * 2023-09-25 2023-12-22 深圳市东陆科技有限公司 基于机器视觉的tft阵列基板缺陷检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10148619A (ja) * 1996-11-15 1998-06-02 Mitsubishi Chem Corp 検査基体の面欠陥検査方法及び装置
JP2007024876A (ja) * 2005-07-18 2007-02-01 Samsung Electronics Co Ltd 内部に少なくとも一対のビーム経路を有するレンズユニットを具備する光学的検査装置及びこれを用いて基板の表面欠陥を検出する方法
US20080198602A1 (en) * 2007-02-16 2008-08-21 3M Innovative Properties Company Method and apparatus for illuminating material for automated inspection
JP2011169782A (ja) * 2010-02-19 2011-09-01 Futec Inc 欠陥検査装置
JP2014109520A (ja) * 2012-12-03 2014-06-12 Ccs Inc 検査システム及び検査用照明装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102362U (zh) * 1990-02-07 1991-10-24
JPH11316195A (ja) * 1998-04-30 1999-11-16 Asahi Glass Co Ltd 透明板の表面欠陥検出装置
JP2007240432A (ja) * 2006-03-10 2007-09-20 Omron Corp 欠陥検査装置および欠陥検査方法
KR20120129020A (ko) * 2011-05-18 2012-11-28 동우 화인켐 주식회사 필름 결함 모니터링 장치 및 방법
KR20140011777A (ko) * 2012-07-19 2014-01-29 삼성전기주식회사 표면 이물질 검사 시스템 및 그 제어 방법
KR20140087585A (ko) * 2012-12-31 2014-07-09 동우 화인켐 주식회사 편광 필름 검사 장치
KR101446984B1 (ko) * 2013-08-08 2014-10-07 이영우 결함 검사장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10148619A (ja) * 1996-11-15 1998-06-02 Mitsubishi Chem Corp 検査基体の面欠陥検査方法及び装置
JP2007024876A (ja) * 2005-07-18 2007-02-01 Samsung Electronics Co Ltd 内部に少なくとも一対のビーム経路を有するレンズユニットを具備する光学的検査装置及びこれを用いて基板の表面欠陥を検出する方法
US20080198602A1 (en) * 2007-02-16 2008-08-21 3M Innovative Properties Company Method and apparatus for illuminating material for automated inspection
JP2011169782A (ja) * 2010-02-19 2011-09-01 Futec Inc 欠陥検査装置
JP2014109520A (ja) * 2012-12-03 2014-06-12 Ccs Inc 検査システム及び検査用照明装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021148794A (ja) * 2020-03-17 2021-09-27 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. 透過光学系の検査装置
JP7126011B2 (ja) 2020-03-17 2022-08-25 東友ファインケム株式会社 透過光学系の検査装置
CN116465826A (zh) * 2023-03-15 2023-07-21 东阳市诰源闪光材料有限公司 一种用于光学膜偏光率测试装置及测试方法
CN116465826B (zh) * 2023-03-15 2023-10-24 东阳市诰源闪光材料有限公司 一种用于光学膜偏光率测试装置及测试方法

Also Published As

Publication number Publication date
KR20160047360A (ko) 2016-05-02
CN105548193A (zh) 2016-05-04
TW201616123A (zh) 2016-05-01

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