JP2015103662A5 - - Google Patents
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- Publication number
- JP2015103662A5 JP2015103662A5 JP2013243124A JP2013243124A JP2015103662A5 JP 2015103662 A5 JP2015103662 A5 JP 2015103662A5 JP 2013243124 A JP2013243124 A JP 2013243124A JP 2013243124 A JP2013243124 A JP 2013243124A JP 2015103662 A5 JP2015103662 A5 JP 2015103662A5
- Authority
- JP
- Japan
- Prior art keywords
- tank
- liquid
- filter
- circulation line
- flushing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 64
- 238000011010 flushing procedure Methods 0.000 claims description 42
- 238000004140 cleaning Methods 0.000 claims 11
- 238000007599 discharging Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 3
- 238000004590 computer program Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013243124A JP6159651B2 (ja) | 2013-11-25 | 2013-11-25 | フィルタ洗浄方法、液処理装置及び記憶媒体 |
| TW103139780A TWI568485B (zh) | 2013-11-25 | 2014-11-17 | Filter cleaning method, liquid treatment device and memory media |
| KR1020140162505A KR102314052B1 (ko) | 2013-11-25 | 2014-11-20 | 필터 세정 방법, 액처리 장치 및 기억 매체 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013243124A JP6159651B2 (ja) | 2013-11-25 | 2013-11-25 | フィルタ洗浄方法、液処理装置及び記憶媒体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015103662A JP2015103662A (ja) | 2015-06-04 |
| JP2015103662A5 true JP2015103662A5 (ko) | 2015-12-24 |
| JP6159651B2 JP6159651B2 (ja) | 2017-07-05 |
Family
ID=53379138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013243124A Active JP6159651B2 (ja) | 2013-11-25 | 2013-11-25 | フィルタ洗浄方法、液処理装置及び記憶媒体 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6159651B2 (ko) |
| KR (1) | KR102314052B1 (ko) |
| TW (1) | TWI568485B (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202135914A (zh) * | 2020-02-05 | 2021-10-01 | 日商東京威力科創股份有限公司 | 過濾器洗淨系統及過濾器洗淨方法 |
| KR102583556B1 (ko) * | 2021-01-07 | 2023-10-10 | 세메스 주식회사 | 처리액 공급 장치 및 처리액 공급 장치의 고형 제거 방법 |
| KR102504552B1 (ko) | 2021-09-10 | 2023-03-02 | (주)디바이스이엔지 | 반도체 제조 부품의 플러싱 조건 결정 장치 및 플러싱 조건 결정 방법 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04162627A (ja) * | 1990-10-26 | 1992-06-08 | Matsushita Electric Ind Co Ltd | 薬液処理装置 |
| JPH0516114U (ja) * | 1991-08-14 | 1993-03-02 | 三菱重工業株式会社 | 潤滑油タンク及びラインフイルターのフラツシング回路 |
| KR960025332U (ko) * | 1994-12-26 | 1996-07-22 | 약액처리조용 여과필터 | |
| US5753135A (en) * | 1995-10-23 | 1998-05-19 | Jablonsky; Julius James | Apparatus and method for recovering photoresist developers and strippers |
| JP4692997B2 (ja) * | 1998-07-07 | 2011-06-01 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
| TW514561B (en) * | 2000-08-28 | 2002-12-21 | Henkel Corp | Antiplugging method and apparatus for separating multivalent metal ions from autodeposition compositions, and for regenerating ion exchange resins useful therewith |
| JP2003251290A (ja) * | 2002-03-05 | 2003-09-09 | Dainippon Screen Mfg Co Ltd | 洗浄装置及びこれを備えた基板処理装置 |
| JP5503602B2 (ja) * | 2011-07-29 | 2014-05-28 | 東京エレクトロン株式会社 | 処理液供給装置、処理液供給方法、プログラム及びコンピュータ記憶媒体 |
-
2013
- 2013-11-25 JP JP2013243124A patent/JP6159651B2/ja active Active
-
2014
- 2014-11-17 TW TW103139780A patent/TWI568485B/zh active
- 2014-11-20 KR KR1020140162505A patent/KR102314052B1/ko active IP Right Grant
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