JP2015038248A - アーク蒸着による所定の構造を有する金属酸化物層の製造方法 - Google Patents
アーク蒸着による所定の構造を有する金属酸化物層の製造方法 Download PDFInfo
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- JP2015038248A JP2015038248A JP2014188025A JP2014188025A JP2015038248A JP 2015038248 A JP2015038248 A JP 2015038248A JP 2014188025 A JP2014188025 A JP 2014188025A JP 2014188025 A JP2014188025 A JP 2014188025A JP 2015038248 A JP2015038248 A JP 2015038248A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0408—Light metal alloys
- C22C1/0416—Aluminium-based alloys
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Coating By Spraying Or Casting (AREA)
- Catalysts (AREA)
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
【解決手段】本発明は、金属および半金属構成要素の三元およびより高次の酸化物を含む層を製造する方法に関し、前記酸化物の生成温度は、二元(またはより高次の)合金ターゲットの組成(状態図をもとにして)をもとにして実質的に確立される。
【選択図】なし
Description
Claims (4)
- アーク蒸着によって、金属および半金属成分の三元および/またはより高次の酸化物を含む層を製造する方法であって、
前記層の所望の結晶構造の選択的合成は、
該所望の結晶構造の合成に必要な形成温度を決定し、
二元又はより高次の合金ターゲットの組成物の選択が、前記選択される組成物における前記成分の状態図を用いて、前記状態図が前記所望の形成温度に対応する温度で完全な液相から固体成分を含む相への転移を示すように、決められるによって得られ、
前記層が、アルミニウムおよび少なくとも1つの他の金属または半金属成分からなる少なくとも1つの合金ターゲットを用いることによって、コランダム構造中に70原子%を超える割合の酸化アルミニウムを有し、前記合金が1000℃〜1200℃で完全な液相から固体成分を含む相へ転移することを特徴とする方法。 - 請求項1に記載の方法において、
低温溶融ターゲット材料成分の融点を、具体的には前記合金ターゲット中に高温溶融金属または半金属成分を混合し、それによって前記酸化物の形成温度を調節することによって高めることを特徴とする方法。 - 請求項1又は2に記載の方法において、
前記層が、アルミニウムおよび少なくとも1つの他の金属または半金属成分からなる少なくとも1つの合金ターゲットを用いることによって、コランダム構造中に70原子%を超える割合の酸化アルミニウムを有し、
前記ターゲットが、原子%で以下の組成であって、
以下の群からの1または複数であり、
Au:20〜30
B:3未満
Be:20〜30
C:3未満
Cr:10超〜25
Fe:5〜15
Hf:5〜10
Ir:10〜15
La:10〜15
Mo:2〜5
Nb:1〜3
Ta:1〜3
Ti:2〜6
V:3〜8
W:5〜8
Y:12〜16
Zr:2〜4
残りは本質的にAlが70原子%以上である、組成のうちの1つを有することを特徴とする方法。 - 請求項1〜3のいずれか1項に記載の方法において、
前記層が、少なくとも1つのアルミニウムターゲットを用い、少量の1つもしくは複数の金属または半金属成分を混合することによって、コランダム構造中に70原子%を超える割合の酸化アルミニウムを有することを特徴とし、その混合物が、高温溶融温度を有し、したがって、前記状態図によって少なくとも1000℃の混合物溶融温度が達成されることを特徴とする方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4759108P | 2008-04-24 | 2008-04-24 | |
US61/047,591 | 2008-04-24 | ||
EP08016572A EP2166128B1 (de) | 2008-09-19 | 2008-09-19 | Verfahren zum Herstellen von Metalloxidschichten durch Funkenverdampfung |
EP08016572.3 | 2008-09-19 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011505377A Division JP2011522960A (ja) | 2008-04-24 | 2009-02-06 | アーク蒸着による所定の構造を有する金属酸化物層の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015038248A true JP2015038248A (ja) | 2015-02-26 |
JP5876123B2 JP5876123B2 (ja) | 2016-03-02 |
Family
ID=40297780
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011505376A Pending JP2011518949A (ja) | 2008-04-24 | 2009-02-06 | アーク蒸着による金属酸化物層の製造方法 |
JP2011505377A Pending JP2011522960A (ja) | 2008-04-24 | 2009-02-06 | アーク蒸着による所定の構造を有する金属酸化物層の製造方法 |
JP2014188025A Expired - Fee Related JP5876123B2 (ja) | 2008-04-24 | 2014-09-16 | アーク蒸着による所定の構造を有する金属酸化物層の製造方法 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011505376A Pending JP2011518949A (ja) | 2008-04-24 | 2009-02-06 | アーク蒸着による金属酸化物層の製造方法 |
JP2011505377A Pending JP2011522960A (ja) | 2008-04-24 | 2009-02-06 | アーク蒸着による所定の構造を有する金属酸化物層の製造方法 |
Country Status (16)
Country | Link |
---|---|
US (2) | US10323320B2 (ja) |
EP (2) | EP2166128B1 (ja) |
JP (3) | JP2011518949A (ja) |
KR (2) | KR101629909B1 (ja) |
CN (2) | CN102016104B (ja) |
AT (1) | ATE532886T1 (ja) |
AU (2) | AU2009240321B2 (ja) |
BR (2) | BRPI0907264A2 (ja) |
CA (2) | CA2722380A1 (ja) |
ES (2) | ES2377225T3 (ja) |
MX (2) | MX2010011496A (ja) |
PL (2) | PL2166128T3 (ja) |
PT (2) | PT2166128E (ja) |
RU (2) | RU2525949C2 (ja) |
TW (2) | TWI390061B (ja) |
WO (2) | WO2009129879A1 (ja) |
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JP2011084804A (ja) * | 2009-09-18 | 2011-04-28 | Kobelco Kaken:Kk | 金属酸化物−金属複合スパッタリングターゲット |
EP2363509A1 (en) * | 2010-02-28 | 2011-09-07 | Oerlikon Trading AG, Trübbach | Synthesis of metal oxides by reactive cathodic arc evaporation |
DE102010053751A1 (de) * | 2010-10-28 | 2012-05-03 | Oerlikon Trading Ag, Trübbach | Molybdänmonoxidschichten und deren Herstellung mittels PVD |
WO2014032753A1 (en) * | 2012-08-29 | 2014-03-06 | Oerlikon Trading Ag, Trübbach | Arc pvd coating with enhanced reducing friction and reducing wear properties |
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WO2014111264A1 (en) * | 2013-01-18 | 2014-07-24 | Oerlikon Trading Ag, Trübbach | COATING METHOD FOR PRODUCING (Al,Cr)2O3-BASED COATINGS WITH ENHANCED PROPERTIES |
DE102013006633A1 (de) * | 2013-04-18 | 2014-10-23 | Oerlikon Trading Ag, Trübbach | Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen |
WO2015003806A1 (de) * | 2013-07-09 | 2015-01-15 | Oerlikon Trading Ag, Trübbach | Target zur reaktiven sputter-abscheidung elektrisch-isolierender schichten |
DE102014104672A1 (de) * | 2014-04-02 | 2015-10-08 | Kennametal Inc. | Beschichtetes Schneidwerkzeug und Verfahren zu seiner Herstellung |
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ES2786348T3 (es) * | 2015-12-23 | 2020-10-09 | Materion Advanced Mat Germany Gmbh | Diana de pulverización catódica basada en óxido de circonio |
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2008
- 2008-09-19 PL PL08016572T patent/PL2166128T3/pl unknown
- 2008-09-19 PT PT08016572T patent/PT2166128E/pt unknown
- 2008-09-19 EP EP08016572A patent/EP2166128B1/de not_active Not-in-force
- 2008-09-19 AT AT08016572T patent/ATE532886T1/de active
- 2008-09-19 ES ES08016572T patent/ES2377225T3/es active Active
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JPH0849066A (ja) * | 1994-06-24 | 1996-02-20 | Balzers Ag | 工作片の被覆方法および装置および陰極アーク放電方法 |
JP2000129445A (ja) * | 1998-10-27 | 2000-05-09 | Sumitomo Electric Ind Ltd | 耐摩耗性被膜およびその製造方法ならびに耐摩耗部材 |
JP2002053946A (ja) * | 2000-08-04 | 2002-02-19 | Kobe Steel Ltd | 硬質皮膜および耐摩耗部材並びにその製造方法 |
JP2003286566A (ja) * | 2002-03-29 | 2003-10-10 | Kobe Steel Ltd | カソード放電型アークイオンプレーティング用ターゲットおよびその製造方法 |
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