JP2012143723A - 樹脂塗布装置 - Google Patents
樹脂塗布装置 Download PDFInfo
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- JP2012143723A JP2012143723A JP2011005157A JP2011005157A JP2012143723A JP 2012143723 A JP2012143723 A JP 2012143723A JP 2011005157 A JP2011005157 A JP 2011005157A JP 2011005157 A JP2011005157 A JP 2011005157A JP 2012143723 A JP2012143723 A JP 2012143723A
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- 239000004743 Polypropylene Substances 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/14—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts
- B05B15/16—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts for preventing non-intended contact between spray heads or nozzles and foreign bodies, e.g. nozzle guards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
【解決手段】本実施の形態に係る樹脂塗布装置1は、ステージ602の上面に供給された液状樹脂Lを押圧部604における押圧面634に保持したワークWで上から押圧し液状樹脂LをワークW下面に広げる樹脂塗布装置1であって、押圧部604には、移動部606によるワークWのステージ602への接近によってワークW下面に液状樹脂Lが押し広げられる際に押圧面634が受ける圧力を検出する圧力センサ633が備えられ、制御部は圧力センサ633が検出した圧力に基づいて移動部606の動作を制御する構成とした。
【選択図】図5
Description
2 外部筐体
3 ベース台
4、5 カセット
6 制御部
100 カセット収容部
200 第一のワーク搬送部
300 第二のワーク搬送部
400 ワーク検出部
500 シート切断部
600 貼着装置
601 基台
602 ステージ
603 樹脂供給部
604 押圧部
605 コラム部
606 移動部
611 ガイドレール
612 Z軸テーブル
613 支持部
621 ベース部材
622 凹部
623 押圧板
624 保持板
631 流路
632 気体吸引部
633 圧力センサ
634 押圧面
635 押圧センサ
636 発光部
637 気体供給部
651 凹部
652 第一の保持面
653 第二の保持面
654 側面
655 第一の吸引口
656 第二の吸引口
657 閉空間
700 シート供給部
800 シート搬送部
Claims (3)
- ワークを吸着保持可能な押圧面を有する押圧部と、
前記押圧面に対向して配設されたステージと、
前記ステージの上面に液状樹脂を供給する樹脂供給部と、
前記押圧面を前記ステージに対して接近及び離反させる移動部と、
前記移動部の動作を制御する制御部と、を有し、
前記ステージの上面に供給された前記液状樹脂を前記押圧面に保持した前記ワークで上から押圧し前記液状樹脂を前記ワーク下面に広げる樹脂塗布装置であって、
前記押圧部は前記移動部による前記押圧面が保持した前記ワークの前記ステージへの接近によって前記ワーク下面に前記液状樹脂が押し広げられる際に前記押圧面が受ける圧力を検出する圧力センサを有し、
前記制御部は前記圧力センサが検出した圧力に基づいて前記移動部の動作を制御することを特徴とする樹脂塗布装置。 - 前記制御部は、前記圧力センサが予め設定した圧力以上の圧力を検出した際に、前記移動部による前記押圧面が保持した前記ワークの前記ステージへの接近を停止することを特徴とする請求項1記載の樹脂塗布装置。
- 前記制御部は、前記圧力センサが直前に検出した圧力以下の圧力を検出した際に、前記移動部による前記押圧面が保持した前記ワークの前記ステージへの接近を停止することを特徴とする請求項1記載の樹脂塗布装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011005157A JP5670208B2 (ja) | 2011-01-13 | 2011-01-13 | 樹脂塗布装置 |
TW100144831A TWI554337B (zh) | 2011-01-13 | 2011-12-06 | Resin coating means |
KR1020110144169A KR101831910B1 (ko) | 2011-01-13 | 2011-12-28 | 수지 도포 장치 |
CN201210010370.4A CN102580887B (zh) | 2011-01-13 | 2012-01-13 | 树脂涂布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011005157A JP5670208B2 (ja) | 2011-01-13 | 2011-01-13 | 樹脂塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012143723A true JP2012143723A (ja) | 2012-08-02 |
JP5670208B2 JP5670208B2 (ja) | 2015-02-18 |
Family
ID=46470434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011005157A Active JP5670208B2 (ja) | 2011-01-13 | 2011-01-13 | 樹脂塗布装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5670208B2 (ja) |
KR (1) | KR101831910B1 (ja) |
CN (1) | CN102580887B (ja) |
TW (1) | TWI554337B (ja) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014033005A (ja) * | 2012-08-01 | 2014-02-20 | Disco Abrasive Syst Ltd | ウェーハ貼着装置 |
JP2014099560A (ja) * | 2012-11-15 | 2014-05-29 | Disco Abrasive Syst Ltd | ウェーハ貼着方法 |
KR20140125296A (ko) * | 2013-04-18 | 2014-10-28 | 가부시기가이샤 디스코 | 판형물의 접착 방법 |
JP2014217929A (ja) * | 2013-05-10 | 2014-11-20 | 株式会社ディスコ | 定盤ユニット及びシートの密着方法 |
DE102016203663A1 (de) | 2015-03-10 | 2016-09-15 | Disco Corporation | Schutzelementausbildeverfahren |
CN106994431A (zh) * | 2015-12-16 | 2017-08-01 | 株式会社斯库林集团 | 基板保持装置、涂布装置、基板保持方法 |
KR20170107904A (ko) * | 2016-03-16 | 2017-09-26 | 가부시기가이샤 디스코 | 보호 부재 형성 장치 |
JP2017174883A (ja) * | 2016-03-22 | 2017-09-28 | 株式会社ディスコ | 保護部材形成装置 |
JP2017220548A (ja) * | 2016-06-07 | 2017-12-14 | 株式会社ディスコ | 保護部材形成装置 |
JP2018088440A (ja) * | 2016-11-28 | 2018-06-07 | 株式会社ディスコ | 収縮率測定方法及び保護部材形成装置 |
JP2018088441A (ja) * | 2016-11-28 | 2018-06-07 | 株式会社ディスコ | 硬化エネルギー測定方法及び保護部材形成装置 |
JP2018125323A (ja) * | 2017-01-30 | 2018-08-09 | 株式会社ディスコ | 保護部材形成装置 |
JP2019087620A (ja) * | 2017-11-06 | 2019-06-06 | 株式会社ディスコ | 保護部材形成装置 |
JP2020188230A (ja) * | 2019-05-17 | 2020-11-19 | 株式会社ディスコ | 保護部材形成装置 |
JP2021019160A (ja) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | 加工方法及び樹脂貼り機 |
JP2021019161A (ja) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | 樹脂貼り機 |
US10978320B2 (en) * | 2018-12-07 | 2021-04-13 | Disco Corporation | Protective member forming apparatus |
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JP5845379B1 (ja) * | 2014-03-14 | 2016-01-20 | オリジン電気株式会社 | 樹脂塗布装置及び樹脂塗布済部材の製造方法 |
KR101676184B1 (ko) * | 2015-08-20 | 2016-11-15 | 주식회사 두오텍 | 리드 프레임 도포장치 및 도포방법 |
CN106002529B (zh) * | 2016-07-12 | 2019-03-29 | 苏州宏泉高压电容器有限公司 | 一种高压陶瓷电容器瓷介质芯片毛刺去除装置 |
JP2022172822A (ja) | 2021-05-07 | 2022-11-17 | 信越半導体株式会社 | ウェーハの製造方法 |
CN114653522B (zh) * | 2022-03-28 | 2022-12-13 | 常州时创能源股份有限公司 | 一种液料滚涂方法 |
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2011
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- 2011-12-06 TW TW100144831A patent/TWI554337B/zh active
- 2011-12-28 KR KR1020110144169A patent/KR101831910B1/ko active IP Right Grant
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2012
- 2012-01-13 CN CN201210010370.4A patent/CN102580887B/zh active Active
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Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2014033005A (ja) * | 2012-08-01 | 2014-02-20 | Disco Abrasive Syst Ltd | ウェーハ貼着装置 |
JP2014099560A (ja) * | 2012-11-15 | 2014-05-29 | Disco Abrasive Syst Ltd | ウェーハ貼着方法 |
KR20140125296A (ko) * | 2013-04-18 | 2014-10-28 | 가부시기가이샤 디스코 | 판형물의 접착 방법 |
JP2014212188A (ja) * | 2013-04-18 | 2014-11-13 | 株式会社ディスコ | 板状物の貼着方法 |
KR102144137B1 (ko) * | 2013-04-18 | 2020-08-12 | 가부시기가이샤 디스코 | 판형물의 접착 방법 |
JP2014217929A (ja) * | 2013-05-10 | 2014-11-20 | 株式会社ディスコ | 定盤ユニット及びシートの密着方法 |
DE102016203663A1 (de) | 2015-03-10 | 2016-09-15 | Disco Corporation | Schutzelementausbildeverfahren |
KR20160110150A (ko) | 2015-03-10 | 2016-09-21 | 가부시기가이샤 디스코 | 보호 부재의 형성 방법 |
CN106994431B (zh) * | 2015-12-16 | 2019-06-04 | 株式会社斯库林集团 | 基板保持装置、涂布装置、基板保持方法 |
CN106994431A (zh) * | 2015-12-16 | 2017-08-01 | 株式会社斯库林集团 | 基板保持装置、涂布装置、基板保持方法 |
KR102207773B1 (ko) | 2016-03-16 | 2021-01-25 | 가부시기가이샤 디스코 | 보호 부재 형성 장치 |
KR20170107904A (ko) * | 2016-03-16 | 2017-09-26 | 가부시기가이샤 디스코 | 보호 부재 형성 장치 |
JP2017174883A (ja) * | 2016-03-22 | 2017-09-28 | 株式会社ディスコ | 保護部材形成装置 |
JP2017220548A (ja) * | 2016-06-07 | 2017-12-14 | 株式会社ディスコ | 保護部材形成装置 |
JP2018088441A (ja) * | 2016-11-28 | 2018-06-07 | 株式会社ディスコ | 硬化エネルギー測定方法及び保護部材形成装置 |
JP2018088440A (ja) * | 2016-11-28 | 2018-06-07 | 株式会社ディスコ | 収縮率測定方法及び保護部材形成装置 |
JP2018125323A (ja) * | 2017-01-30 | 2018-08-09 | 株式会社ディスコ | 保護部材形成装置 |
JP7105053B2 (ja) | 2017-11-06 | 2022-07-22 | 株式会社ディスコ | 保護部材形成装置 |
JP2019087620A (ja) * | 2017-11-06 | 2019-06-06 | 株式会社ディスコ | 保護部材形成装置 |
US10978320B2 (en) * | 2018-12-07 | 2021-04-13 | Disco Corporation | Protective member forming apparatus |
JP2020188230A (ja) * | 2019-05-17 | 2020-11-19 | 株式会社ディスコ | 保護部材形成装置 |
JP7339771B2 (ja) | 2019-05-17 | 2023-09-06 | 株式会社ディスコ | 保護部材形成装置 |
JP2021019160A (ja) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | 加工方法及び樹脂貼り機 |
JP7285718B2 (ja) | 2019-07-23 | 2023-06-02 | 株式会社ディスコ | 加工方法及び樹脂貼り機 |
JP7285719B2 (ja) | 2019-07-23 | 2023-06-02 | 株式会社ディスコ | 樹脂貼り機 |
JP2021019161A (ja) * | 2019-07-23 | 2021-02-15 | 株式会社ディスコ | 樹脂貼り機 |
TWI818182B (zh) * | 2019-07-23 | 2023-10-11 | 日商迪思科股份有限公司 | 加工方法以及樹脂黏貼機 |
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TW201236767A (en) | 2012-09-16 |
JP5670208B2 (ja) | 2015-02-18 |
KR101831910B1 (ko) | 2018-02-26 |
CN102580887B (zh) | 2015-10-14 |
TWI554337B (zh) | 2016-10-21 |
CN102580887A (zh) | 2012-07-18 |
KR20120082338A (ko) | 2012-07-23 |
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