JP2011500968A - 水素化非晶質炭素コーティングを生成する方法 - Google Patents
水素化非晶質炭素コーティングを生成する方法 Download PDFInfo
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- JP2011500968A JP2011500968A JP2010530506A JP2010530506A JP2011500968A JP 2011500968 A JP2011500968 A JP 2011500968A JP 2010530506 A JP2010530506 A JP 2010530506A JP 2010530506 A JP2010530506 A JP 2010530506A JP 2011500968 A JP2011500968 A JP 2011500968A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【選択図】図1
Description
1)Guptaら、「Tribological behavior of plasma−enhanced CVD a−C:H films」、Tribology International 37、(2004年)、1031〜1038頁に記載のような、一方は硬いと言われ他方は柔らかいと言われている互いに異なる2つのa−C:H層のスタック、
2)a−C:H/a−SiC:H型のスタック。
C6H12流量:100sccm、
H2流量:25sccm、
圧力:4Pa、
電力:320W、
電圧:670V。
2 中間層
3 層
4 層
5 層
6 本発明による多層コーティング
7 PECVDチャンバ
8 管路
9 管路
10 管路
11 供給管路
12 試料キャリア
13 発電器
14 真空ポンプ
15 層、スプリンクラー
16 ゲージ
Claims (12)
- 水素化非晶質炭素の少なくとも2つの層(3、4)を備え、前記層(3、4)のそれぞれは、同一の化学組成ならびに物理的および機械的特性と、同一または異なる厚さとを有することを特徴とする、水素化非晶質炭素のコーティング(6)。
- 水素化非晶質炭素の前記層(3,4)のそれぞれが、500nm以下の厚さを有することを特徴とする、請求項1に記載のコーティング(6)。
- 1.5マイクロメートル以上、好ましくは2マイクロメートル以上の厚さを有することを特徴とする、請求項1または2に記載のコーティング(6)。
- コーティング厚1マイクロメートル当たり10を超える層を備えることを特徴とする、請求項1から3のいずれか一項に記載のコーティング(6)。
- a)プラズマエンハンスト化学気相堆積により、期間t1の間水素化非晶質炭素の第1の層(3)を堆積させるステップと、
b)期間tの間プラズマ発生器を停止するステップと、
c)ステップa)の場合と同じ電力、温度、圧力および雰囲気条件下でプラズマ発生器を再始動することにより、ステップa)の期間t1と同一または異なる期間t2の間、ステップa)において得られた層(3)上に第2の層(4)を堆積させるステップと、
d)必要に応じて、所望のコーティング(6)厚が得られるまで、少なくとも1回ステップb)およびc)を反復するステップと
を含むことを特徴とする、請求項1から4のいずれか一項に記載のコーティング(6)を基板(1)の少なくとも1つの表面上に堆積させるための方法。 - ステップb)においてプラズマ発生器が停止される期間tが、堆積ステップa)またはc)のそれぞれの期間よりも短いことを特徴とする、請求項5に記載の方法。
- 発生器が停止されるステップb)の間、その前のステップにおいて得られた層の上面が研磨されることを特徴とする、請求項5または6に記載の方法。
- 前記研磨が、中性ガス中での前記上面のイオン衝撃により行われることを特徴とする、請求項7に記載の方法。
- ステップa)およびc)の期間t1およびt2が、前記層(3、4)のそれぞれの厚さが500nm以下であるような期間であることを特徴とする、請求項5から8のいずれか一項に記載の方法。
- ステップb)およびc)が、1.5マイクロメートル以上、好ましくは2マイクロメートル以上のコーティングの最終厚さが得られるまで反復されることを特徴とする、請求項5から9のいずれか一項に記載の方法。
- ステップa)の前に、基板(1)の前記少なくとも1つの表面上にSiC:Hの層(2)を堆積させるステップをさらに含むことを特徴とする、請求項5から10のいずれか一項に記載の方法。
- 請求項1から4のいずれか一項に記載のコーティング、または請求項5から11のいずれか一項に記載の方法により得られるコーティングを備えるデバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0707422 | 2007-10-23 | ||
FR0707422A FR2922559B1 (fr) | 2007-10-23 | 2007-10-23 | Procede de realisation d'un revetement en carbone amorphe hydrogene |
PCT/FR2008/001472 WO2009083673A1 (fr) | 2007-10-23 | 2008-10-20 | Procede de realisation de revetement en carbone amorphe hydrogene |
Publications (2)
Publication Number | Publication Date |
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JP2011500968A true JP2011500968A (ja) | 2011-01-06 |
JP5492090B2 JP5492090B2 (ja) | 2014-05-14 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2010530506A Expired - Fee Related JP5492090B2 (ja) | 2007-10-23 | 2008-10-20 | 水素化非晶質炭素コーティングを生成する方法 |
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US (1) | US8367207B2 (ja) |
EP (1) | EP2209928B1 (ja) |
JP (1) | JP5492090B2 (ja) |
FR (1) | FR2922559B1 (ja) |
WO (1) | WO2009083673A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US8940650B2 (en) * | 2013-03-06 | 2015-01-27 | GlobalFoundries, Inc. | Methods for fabricating integrated circuits utilizing silicon nitride layers |
US20140273461A1 (en) * | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Carbon film hardmask stress reduction by hydrogen ion implantation |
BR102016017735B1 (pt) * | 2016-07-29 | 2021-05-18 | Mahle Metal Leve S.A. | elemento deslizante para motores de combustão interna |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09128708A (ja) * | 1995-10-27 | 1997-05-16 | Hitachi Ltd | 薄膜磁気ヘッド及び磁気ディスク記録再生装置 |
JP2000178738A (ja) * | 1998-12-15 | 2000-06-27 | Tdk Corp | ダイヤモンド状炭素膜を被覆した部材 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5432003A (en) * | 1988-10-03 | 1995-07-11 | Crystallume | Continuous thin diamond film and method for making same |
JPH02199099A (ja) * | 1988-10-21 | 1990-08-07 | Crystallume | 連続ダイヤモンド薄膜およびその製法 |
US5124179A (en) * | 1990-09-13 | 1992-06-23 | Diamonex, Incorporated | Interrupted method for producing multilayered polycrystalline diamond films |
US5803967A (en) * | 1995-05-31 | 1998-09-08 | Kobe Steel Usa Inc. | Method of forming diamond devices having textured and highly oriented diamond layers therein |
US6582513B1 (en) * | 1998-05-15 | 2003-06-24 | Apollo Diamond, Inc. | System and method for producing synthetic diamond |
-
2007
- 2007-10-23 FR FR0707422A patent/FR2922559B1/fr not_active Expired - Fee Related
-
2008
- 2008-10-20 US US12/738,679 patent/US8367207B2/en not_active Expired - Fee Related
- 2008-10-20 WO PCT/FR2008/001472 patent/WO2009083673A1/fr active Application Filing
- 2008-10-20 EP EP08868936.9A patent/EP2209928B1/fr not_active Not-in-force
- 2008-10-20 JP JP2010530506A patent/JP5492090B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09128708A (ja) * | 1995-10-27 | 1997-05-16 | Hitachi Ltd | 薄膜磁気ヘッド及び磁気ディスク記録再生装置 |
JP2000178738A (ja) * | 1998-12-15 | 2000-06-27 | Tdk Corp | ダイヤモンド状炭素膜を被覆した部材 |
Also Published As
Publication number | Publication date |
---|---|
JP5492090B2 (ja) | 2014-05-14 |
WO2009083673A1 (fr) | 2009-07-09 |
US20110076476A1 (en) | 2011-03-31 |
FR2922559A1 (fr) | 2009-04-24 |
EP2209928B1 (fr) | 2017-01-04 |
EP2209928A1 (fr) | 2010-07-28 |
US8367207B2 (en) | 2013-02-05 |
FR2922559B1 (fr) | 2010-09-17 |
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