JP2008531306A - 研磨品を製造する急速工作システム及び方法 - Google Patents
研磨品を製造する急速工作システム及び方法 Download PDFInfo
- Publication number
- JP2008531306A JP2008531306A JP2007557079A JP2007557079A JP2008531306A JP 2008531306 A JP2008531306 A JP 2008531306A JP 2007557079 A JP2007557079 A JP 2007557079A JP 2007557079 A JP2007557079 A JP 2007557079A JP 2008531306 A JP2008531306 A JP 2008531306A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- abrasive article
- article
- coated
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D2203/00—Tool surfaces formed with a pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
- Y10T442/608—Including strand or fiber material which is of specific structural definition
- Y10T442/609—Cross-sectional configuration of strand or fiber material is specified
- Y10T442/611—Cross-sectional configuration of strand or fiber material is other than circular
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (31)
- 被覆研磨品において、
基体と、
パターン化された1組の研磨構造とを備え、
前記パターン化された1組の研磨構造の各研磨構造が強化裂開面を有する、被覆研磨品。 - 前記強化裂開面が強化された内部構造孔を有する、請求項1に記載の被覆研磨品。
- 前記強化裂開面が内部構造孔のパターンを有する、請求項2に記載の被覆研磨品。
- 前記内部構造孔のパターンが、前記パターン化された1組の研磨構造の複数の研磨構造において反復される、請求項3に記載の被覆研磨品。
- 前記研磨構造の強化された内部構造孔は50ミクロン以下の寸法変化が可能である、請求項2に記載の被覆研磨品。
- 前記研磨構造の強化された内部構造孔は8ミクロン以下の寸法変化が可能である、請求項5に記載の被覆研磨品。
- 前記研磨構造の強化された内部構造孔は50ミクロン以下の寸法変化が可能である、請求項2に記載の被覆研磨品。
- 前記強化された内部構造孔が、多角形、円形及び不規則形からなるグループから選択された幾何学的横断面を有する、請求項2に記載の被覆研磨品。
- 前記強化裂開面が表面溝を有する、請求項1に記載の被覆研磨品。
- 前記強化裂開面が裂け目面を有する、請求項1に記載の被覆研磨品。
- 型外しし難い輪郭を有する外側表面を有している、研磨品。
- 前記研磨品は、前記研磨品の前記外側表面に沿った一定パターンの研磨構造を有し、前記研磨構造は、前記研磨品の前記外側表面から延びる正規方向に相対して−90゜から0°までの角度に沿って延びる1つの傾斜を有する少なくとも1つの壁を持つ請求項11に記載の研磨品。
- 前記研磨構造の前記パターンは、一定配列の研磨構造である請求項12に記載の研磨品。
- 前記研磨物品は被覆物品である請求項12に記載の研磨品。
- 前記研磨品は結合研磨品であり、前記結合研磨品は、前記結合研磨品の外側表面から結合研磨品の内部にまで延びる特徴的構造を有し、前記特徴的構造は少なくとも約1.5のアスペクト比を有し、前記アスペクト比は、前記結合研磨品の外側表面から内向きに延びる開口部の深さの、その外側表面の開口部の最小寸法に対する比である請求項11に記載の研磨品。
- 前記特徴的構造は少なくとも約2.5のアスペクト比を有する請求項15に記載の研磨品。
- 前記特徴的構造は少なくとも約3.5のアスペクト比を有する請求項16に記載の研磨品。
- 前記構造は、湾曲した横断面を有する溝を有している請求項15に記載の研磨品。
- 前記結合研磨物品は内部溝を有する請求項15に記載の研磨品。
- 前記内部溝は直線でない請求項19に記載の研磨品。
- 前記研磨品は、パターンされた層を複数有し、前記パターン化された複数の層の中の一層の内部において、第1の領域は第1の組成を有し、第2の領域は、第1の組成と異なる第2の組成を有している研磨品。
- 前記第一領域及び前記第二領域は、異なる特性を有し、前記異なる特性は、前記研磨品内の寸法の関数として変化する請求項21に記載の研磨品。
- 前記第一領域及び前記第二領域は、前記研磨品の中心からの半径の関数として変化する特性を有している請求項22に記載の研磨品。
- 前記特性は、粒子密度を有している請求項22に記載の研磨品。
- 前記特性は、結合強度を有している請求項22に記載の研磨品。
- 前記特性は、弾性係数を有している請求項22に記載の研磨品。
- 前記特性は、圧縮係数を有している請求項22に記載の研磨品。
- 前記特性は、間隙率を有している請求項22に記載の研磨品。
- 前記特性は、粒子寸法を有している請求項22に記載の研磨品。
- 前記特性は、粒子組成を有している請求項22に記載の研磨品。
- 前記特性は、結合剤組成を有している請求項22に記載の研磨品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/062,904 | 2005-02-22 | ||
US11/062,904 US7524345B2 (en) | 2005-02-22 | 2005-02-22 | Rapid tooling system and methods for manufacturing abrasive articles |
PCT/US2006/005915 WO2006091519A2 (en) | 2005-02-22 | 2006-02-21 | Coated or bonded abrasive articles |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008531306A true JP2008531306A (ja) | 2008-08-14 |
JP2008531306A5 JP2008531306A5 (ja) | 2013-03-14 |
JP5260966B2 JP5260966B2 (ja) | 2013-08-14 |
Family
ID=36570545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007557079A Expired - Fee Related JP5260966B2 (ja) | 2005-02-22 | 2006-02-21 | 研磨品を製造する急速工作システム及び方法 |
Country Status (18)
Country | Link |
---|---|
US (1) | US7524345B2 (ja) |
EP (1) | EP1851005B1 (ja) |
JP (1) | JP5260966B2 (ja) |
KR (1) | KR100917572B1 (ja) |
CN (1) | CN101142055B (ja) |
AT (1) | ATE433365T1 (ja) |
AU (1) | AU2006216846B2 (ja) |
BR (1) | BRPI0606961A2 (ja) |
CA (1) | CA2596700C (ja) |
DE (1) | DE602006007215D1 (ja) |
IL (1) | IL185294A (ja) |
MX (1) | MX2007010255A (ja) |
NO (1) | NO20073996L (ja) |
NZ (1) | NZ560233A (ja) |
RU (1) | RU2361719C2 (ja) |
UA (1) | UA89224C2 (ja) |
WO (1) | WO2006091519A2 (ja) |
ZA (1) | ZA200706795B (ja) |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013516334A (ja) * | 2010-01-07 | 2013-05-13 | ジーケーエヌ シンター メタルズ、エル・エル・シー | 工作機械及び該工作機械の製造方法 |
JP2015517922A (ja) * | 2012-04-25 | 2015-06-25 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 印刷による化学機械研磨パッド |
JP2016536151A (ja) * | 2013-11-04 | 2016-11-24 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 研磨材を中に有する印刷された化学機械研磨パッド |
JP2017052087A (ja) * | 2015-07-15 | 2017-03-16 | シーフォー・カーバイズ・リミテッドC4 Carbides Limited | 工具刃、工具刃の製造方法、およびコンピュータ読取可能な媒体 |
JP2017533105A (ja) * | 2014-10-17 | 2017-11-09 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 研磨用物品、及び、化学機械研磨用物品を製造するための統合型のシステムと方法 |
KR20180104654A (ko) * | 2016-01-21 | 2018-09-21 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 금속 접합제 및 유리질 접합제 연마 용품의 제조 방법, 및 연마 용품 전구체 |
JP2019166633A (ja) * | 2014-10-17 | 2019-10-03 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 付加製造プロセスを使用する、複合材料特性を有するcmpパッド構造 |
US10537973B2 (en) | 2016-03-09 | 2020-01-21 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing |
US10596763B2 (en) | 2017-04-21 | 2020-03-24 | Applied Materials, Inc. | Additive manufacturing with array of energy sources |
JP2020098930A (ja) * | 2014-10-17 | 2020-06-25 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 付加製造プロセスにより製作される研磨パッド |
US10821573B2 (en) | 2014-10-17 | 2020-11-03 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US10875145B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US10882160B2 (en) | 2017-05-25 | 2021-01-05 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing using sacrificial material |
JP2021024069A (ja) * | 2019-08-09 | 2021-02-22 | 株式会社ノリタケカンパニーリミテド | 研磨体の製造方法及び研磨体 |
US10953515B2 (en) | 2014-10-17 | 2021-03-23 | Applied Materials, Inc. | Apparatus and method of forming a polishing pads by use of an additive manufacturing process |
US10967482B2 (en) | 2017-05-25 | 2021-04-06 | Applied Materials, Inc. | Fabrication of polishing pad by additive manufacturing onto mold |
US11002530B2 (en) | 2016-09-20 | 2021-05-11 | Applied Materials, Inc. | Tiltable platform for additive manufacturing of a polishing pad |
JP2021169151A (ja) * | 2015-07-15 | 2021-10-28 | シーフォー・カーバイズ・リミテッドC4 Carbides Limited | 工具刃の製造方法 |
JP2022064894A (ja) * | 2015-10-16 | 2022-04-26 | アプライド マテリアルズ インコーポレイテッド | 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US11772229B2 (en) | 2016-01-19 | 2023-10-03 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5414694B2 (ja) * | 2007-12-27 | 2014-02-12 | スリーエム イノベイティブ プロパティズ カンパニー | 成形され断裂された研磨粒子及びこの研磨粒子を使用する研磨物品、並びにそれらの作製方法 |
US8123828B2 (en) * | 2007-12-27 | 2012-02-28 | 3M Innovative Properties Company | Method of making abrasive shards, shaped abrasive particles with an opening, or dish-shaped abrasive particles |
US10137556B2 (en) * | 2009-06-22 | 2018-11-27 | 3M Innovative Properties Company | Shaped abrasive particles with low roundness factor |
US8142532B2 (en) * | 2008-12-17 | 2012-03-27 | 3M Innovative Properties Company | Shaped abrasive particles with an opening |
US8142891B2 (en) * | 2008-12-17 | 2012-03-27 | 3M Innovative Properties Company | Dish-shaped abrasive particles with a recessed surface |
CA3081239C (en) | 2008-12-17 | 2022-09-20 | 3M Innovative Properties Company | Shaped abrasive particles with grooves |
US8142531B2 (en) * | 2008-12-17 | 2012-03-27 | 3M Innovative Properties Company | Shaped abrasive particles with a sloping sidewall |
US8480772B2 (en) | 2009-12-22 | 2013-07-09 | 3M Innovative Properties Company | Transfer assisted screen printing method of making shaped abrasive particles and the resulting shaped abrasive particles |
BR112013009469B1 (pt) | 2010-11-01 | 2020-08-25 | 3M Innovative Properties Company | partículas abrasivas com formato e método de produção |
PL2658680T3 (pl) | 2010-12-31 | 2021-05-31 | Saint-Gobain Ceramics & Plastics, Inc. | Wyroby ścierne zawierające cząstki ścierne o określonych kształtach i sposoby formowania takich wyrobów |
TWI471196B (zh) * | 2011-03-31 | 2015-02-01 | Saint Gobain Abrasives Inc | 用於高速磨削操作之磨料物品 |
CN103764349B (zh) | 2011-06-30 | 2017-06-09 | 圣戈本陶瓷及塑料股份有限公司 | 液相烧结碳化硅研磨颗粒 |
WO2013003830A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
JP5802336B2 (ja) | 2011-09-26 | 2015-10-28 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 研磨粒子材料を含む研磨製品、研磨粒子材料を使用する研磨布紙および形成方法 |
WO2013102176A1 (en) | 2011-12-30 | 2013-07-04 | Saint-Gobain Ceramics & Plastics, Inc. | Forming shaped abrasive particles |
KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
WO2013102170A1 (en) | 2011-12-30 | 2013-07-04 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
KR101667943B1 (ko) | 2012-01-10 | 2016-10-20 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 복잡한 형상들을 가지는 연마 입자들 및 이의 성형 방법들 |
WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
WO2013149209A1 (en) | 2012-03-30 | 2013-10-03 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
CA2869434C (en) | 2012-04-04 | 2021-01-12 | 3M Innovative Properties Company | Abrasive particles, method of making abrasive particles, and abrasive articles |
BR112014029317B1 (pt) | 2012-05-23 | 2022-05-31 | Saint-Gobain Ceramics & Plastics, Inc | Partículas abrasivas moldadas e métodos de formação das mesmas |
BR112014032152B1 (pt) | 2012-06-29 | 2022-09-20 | Saint-Gobain Ceramics & Plastics, Inc | Partículas abrasivas tendo formatos particulares e artigos abrasivos |
JP5982580B2 (ja) | 2012-10-15 | 2016-08-31 | サンーゴバン アブレイシブズ,インコーポレイティド | 特定の形状を有する研磨粒子およびこのような粒子の形成方法 |
US9074119B2 (en) | 2012-12-31 | 2015-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
EP4364891A3 (en) | 2013-03-29 | 2024-07-31 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
EP3052270A4 (en) | 2013-09-30 | 2017-05-03 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
KR102081045B1 (ko) | 2013-12-31 | 2020-02-26 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 형상화 연마 입자들을 포함하는 연마 물품 |
US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
CN111331524B (zh) | 2014-04-14 | 2022-04-29 | 圣戈本陶瓷及塑料股份有限公司 | 包括成形磨粒的研磨制品 |
JP6484647B2 (ja) | 2014-04-14 | 2019-03-13 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 成形研磨粒子を含む研磨物品 |
US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
US10196551B2 (en) | 2015-03-31 | 2019-02-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
WO2016201104A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
CN107896491B (zh) | 2015-06-25 | 2020-12-29 | 3M创新有限公司 | 制造金属粘结磨料制品的方法和金属粘结磨料制品 |
JP7458693B2 (ja) * | 2015-06-25 | 2024-04-01 | スリーエム イノベイティブ プロパティズ カンパニー | ガラス質ボンド研磨物品及びその製造方法 |
JP6940495B2 (ja) | 2015-10-30 | 2021-09-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法 |
US10593574B2 (en) | 2015-11-06 | 2020-03-17 | Applied Materials, Inc. | Techniques for combining CMP process tracking data with 3D printed CMP consumables |
KR102639373B1 (ko) | 2016-01-21 | 2024-02-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플루오로중합체의 적층 가공 |
US11072115B2 (en) | 2016-03-30 | 2021-07-27 | 3M Innovative Properties Company | Methods of making metal bond and vitreous bond abrasive articles, and abrasive article precursors |
SI3455321T1 (sl) | 2016-05-10 | 2022-10-28 | Saint-Gobain Ceramics & Plastics, Inc. | Metode oblikovanja abrazivnih delcev |
KR102313436B1 (ko) | 2016-05-10 | 2021-10-19 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
CN105950115A (zh) * | 2016-05-13 | 2016-09-21 | 盐城工学院 | 一种适用于氧化镓衬底的环保研磨膏及其制备方法 |
US10500786B2 (en) | 2016-06-22 | 2019-12-10 | Carbon, Inc. | Dual cure resins containing microwave absorbing materials and methods of using the same |
US20180009032A1 (en) * | 2016-07-08 | 2018-01-11 | General Electric Company | Metal objects and methods for making metal objects using disposable molds |
WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
CN108015906A (zh) | 2016-10-28 | 2018-05-11 | 圣戈班磨料磨具有限公司 | 空芯钻头及其制造方法 |
US11623324B2 (en) | 2016-12-23 | 2023-04-11 | 3M Innovative Properties Company | Polymer bond abrasive articles and methods of making them |
US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
DE102017113369A1 (de) * | 2017-06-19 | 2018-12-20 | Carl Hilzinger-Thum Gmbh & Co. Kg | Verfahren zum Herstellen einer Schleifbürste sowie eine nach diesem Verfahren hergestellte Schleifbürste |
EP3642293A4 (en) | 2017-06-21 | 2021-03-17 | Saint-Gobain Ceramics&Plastics, Inc. | PARTICULATE MATERIALS AND METHOD FOR MANUFACTURING THEREOF |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
JP2021504171A (ja) | 2017-11-21 | 2021-02-15 | スリーエム イノベイティブ プロパティズ カンパニー | 被覆研磨ディスク並びにその製造方法及び使用方法 |
US11607775B2 (en) | 2017-11-21 | 2023-03-21 | 3M Innovative Properties Company | Coated abrasive disc and methods of making and using the same |
WO2020050932A1 (en) | 2018-09-04 | 2020-03-12 | Applied Materials, Inc. | Formulations for advanced polishing pads |
US20220266421A1 (en) * | 2019-07-15 | 2022-08-25 | 3M Innovative Properties Company | Abrasive articles having internal coolant features and methods of manufacturing the same |
US11813712B2 (en) | 2019-12-20 | 2023-11-14 | Applied Materials, Inc. | Polishing pads having selectively arranged porosity |
KR20220116556A (ko) | 2019-12-27 | 2022-08-23 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
US11806829B2 (en) | 2020-06-19 | 2023-11-07 | Applied Materials, Inc. | Advanced polishing pads and related polishing pad manufacturing methods |
US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
JP2024524510A (ja) | 2021-07-05 | 2024-07-05 | アドマテック ヨーロッパ ベー.フェー. | 研磨物品のための付加製造方法及び装置 |
CN114274060B (zh) * | 2021-11-23 | 2023-12-01 | 北京安泰钢研超硬材料制品有限责任公司 | 一种SiC芯片减薄用金属基金刚石刀头、砂轮及其制造方法 |
DE102022126743A1 (de) * | 2022-10-13 | 2024-04-18 | Ernst-Abbe-Hochschule Jena Körperschaft des öffentlichen Rechts | Werkzeug zum Materialabtrag und Verfahren zu seiner Herstellung |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109084A (ja) * | 1987-10-19 | 1989-04-26 | Tokyo Jiki Insatsu Kk | 研磨フィルム |
JPH02250775A (ja) * | 1989-03-20 | 1990-10-08 | Nippon Rejibon Kk | 研削研磨用砥石とその製造方法とその製造装置 |
JPH048409A (ja) * | 1990-04-26 | 1992-01-13 | Nippon Steel Corp | 耐衝撃性に優れる被覆超硬合金工具 |
JPH06226509A (ja) * | 1993-01-28 | 1994-08-16 | Sumitomo Electric Ind Ltd | 被覆切削工具 |
JPH091403A (ja) * | 1995-06-15 | 1997-01-07 | Sumitomo Electric Ind Ltd | 被覆硬質合金工具 |
JP2001260037A (ja) * | 2000-03-15 | 2001-09-25 | Tkx:Kk | ディスク状砥石 |
JP2003504218A (ja) * | 1999-07-09 | 2003-02-04 | スリーエム イノベイティブ プロパティズ カンパニー | 多孔性セラミック研摩複合材料を含むメタルボンド研摩物品およびそれを用いたワークピースの研摩方法 |
JP2003080465A (ja) * | 2001-09-10 | 2003-03-18 | Refuraito Kk | ラッピングフィルム及びその製造方法 |
WO2004029310A2 (en) * | 2002-09-24 | 2004-04-08 | Chien-Min Sung | Molten braze-coated superabrasive particles and associated methods |
JP2004519341A (ja) * | 2000-11-03 | 2004-07-02 | スリーエム イノベイティブ プロパティズ カンパニー | 可撓性研磨剤製品、ならびに該製品の製造方法および使用方法 |
JP2004535306A (ja) * | 2001-07-20 | 2004-11-25 | スリーエム イノベイティブ プロパティズ カンパニー | 摩耗インジケータを有する固定研磨物品 |
JP2004338022A (ja) * | 2003-05-14 | 2004-12-02 | Tkx:Kk | ディスク砥石およびその製造方法 |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3058223A (en) * | 1960-02-02 | 1962-10-16 | Westinghouse Electric Corp | Pulse actuated measuring apparatus |
DD223654A1 (de) | 1984-05-21 | 1985-06-19 | Werkzeugmasch Okt Veb | Schleifkoerper, vorzugsweise doppelkegelschleifkoerper |
JPH06104816B2 (ja) * | 1990-02-09 | 1994-12-21 | 日本研磨材工業株式会社 | 焼結アルミナ砥粒及びその製造方法 |
US5243790A (en) * | 1992-06-25 | 1993-09-14 | Abrasifs Vega, Inc. | Abrasive member |
DE69326774T2 (de) | 1993-06-02 | 2000-06-21 | Dai Nippon Printing Co., Ltd. | Schleifband und verfahren zu dessen herstellung |
ES2109709T3 (es) * | 1993-06-17 | 1998-01-16 | Minnesota Mining & Mfg | Articulos abrasivos con diseño y metodos de fabricacion y empleo de los mismos. |
US5477025A (en) * | 1994-01-14 | 1995-12-19 | Quantum Laser Corporation | Laser nozzle |
US5731046A (en) * | 1994-01-18 | 1998-03-24 | Qqc, Inc. | Fabrication of diamond and diamond-like carbon coatings |
US5554415A (en) * | 1994-01-18 | 1996-09-10 | Qqc, Inc. | Substrate coating techniques, including fabricating materials on a surface of a substrate |
US6209420B1 (en) * | 1994-03-16 | 2001-04-03 | Baker Hughes Incorporated | Method of manufacturing bits, bit components and other articles of manufacture |
GB9423268D0 (en) * | 1994-11-18 | 1995-01-11 | Minnesota Mining & Mfg | Abrasive articles |
JP3117394B2 (ja) * | 1994-11-29 | 2000-12-11 | 帝人製機株式会社 | 光学的立体造形用樹脂組成物 |
US5571297A (en) * | 1995-06-06 | 1996-11-05 | Norton Company | Dual-cure binder system |
KR0158750B1 (ko) * | 1995-06-09 | 1999-01-15 | 김수광 | 연마용 시트 |
US5669940A (en) * | 1995-08-09 | 1997-09-23 | Minnesota Mining And Manufacturing Company | Abrasive article |
US5785914A (en) * | 1995-11-22 | 1998-07-28 | Kress; Russel L. | Process of producing ceramic polymer composite tool |
US5738817A (en) * | 1996-02-08 | 1998-04-14 | Rutgers, The State University | Solid freeform fabrication methods |
US5742883A (en) * | 1996-07-31 | 1998-04-21 | Hewlett-Packard Company | Product integrated return mailer |
US5902441A (en) * | 1996-09-04 | 1999-05-11 | Z Corporation | Method of three dimensional printing |
US6007318A (en) * | 1996-12-20 | 1999-12-28 | Z Corporation | Method and apparatus for prototyping a three-dimensional object |
US6110031A (en) * | 1997-06-25 | 2000-08-29 | 3M Innovative Properties Company | Superabrasive cutting surface |
US6203861B1 (en) * | 1998-01-12 | 2001-03-20 | University Of Central Florida | One-step rapid manufacturing of metal and composite parts |
KR19990081117A (ko) * | 1998-04-25 | 1999-11-15 | 윤종용 | 씨엠피 패드 컨디셔닝 디스크 및 컨디셔너, 그 디스크의 제조방법, 재생방법 및 세정방법 |
AU4849899A (en) * | 1998-06-30 | 2000-01-17 | Trustees Of Tufts College | Multiple-material prototyping by ultrasonic adhesion |
US6375692B1 (en) | 1999-07-29 | 2002-04-23 | Saint-Gobain Abrasives Technology Company | Method for making microabrasive tools |
US6328632B1 (en) * | 1999-08-31 | 2001-12-11 | Micron Technology, Inc. | Polishing pads and planarizing machines for mechanical and/or chemical-mechanical planarization of microelectronic substrate assemblies |
US6293980B2 (en) * | 1999-12-20 | 2001-09-25 | Norton Company | Production of layered engineered abrasive surfaces |
US7016868B1 (en) * | 1999-12-22 | 2006-03-21 | Eastman Kodak Company | Method and system for organizing images |
WO2001064396A1 (en) | 2000-02-28 | 2001-09-07 | Rodel Holdings, Inc. | Polishing pad surface texture formed by solid phase droplets |
US20010039175A1 (en) * | 2000-02-29 | 2001-11-08 | Reza Golzarian | Polishing pad surface on hollow posts |
WO2001091924A1 (en) * | 2000-06-01 | 2001-12-06 | Board Of Regents, The University Of Texas System | Direct selective laser sintering of metals |
JP2002057130A (ja) | 2000-08-14 | 2002-02-22 | Three M Innovative Properties Co | Cmp用研磨パッド |
US6652256B2 (en) * | 2000-10-27 | 2003-11-25 | Dorsey D. Coe | Three-dimensional model colorization during model construction from computer aided design data |
KR100497205B1 (ko) * | 2001-08-02 | 2005-06-23 | 에스케이씨 주식회사 | 마이크로홀이 형성된 화학적 기계적 연마패드 |
US6632129B2 (en) * | 2001-02-15 | 2003-10-14 | 3M Innovative Properties Company | Fixed abrasive article for use in modifying a semiconductor wafer |
US6767619B2 (en) * | 2001-05-17 | 2004-07-27 | Charles R. Owens | Preform for manufacturing a material having a plurality of voids and method of making the same |
US20020188504A1 (en) * | 2001-06-07 | 2002-12-12 | Whale Margo N. | Monitoring usage of printer consumables to initiate promotional actions |
US6599177B2 (en) * | 2001-06-25 | 2003-07-29 | Saint-Gobain Abrasives Technology Company | Coated abrasives with indicia |
JP2004537175A (ja) * | 2001-08-02 | 2004-12-09 | エスケーシー カンパニー,リミテッド | レーザーを使用した化学的機械的研磨パッドの製造方法 |
TW526817U (en) * | 2001-12-25 | 2003-04-01 | Ind Tech Res Inst | Pressure regulating apparatus and ink jet printing head using the pressurized regulating apparatus |
US6949128B2 (en) * | 2001-12-28 | 2005-09-27 | 3M Innovative Properties Company | Method of making an abrasive product |
JP4097456B2 (ja) * | 2002-05-09 | 2008-06-11 | シャープ株式会社 | 画像形成装置の梱包具及び画像形成装置の梱包方法 |
US6797023B2 (en) * | 2002-05-14 | 2004-09-28 | Saint-Gobain Abrasives Technology Company | Coated abrasives |
US6833014B2 (en) * | 2002-07-26 | 2004-12-21 | 3M Innovative Properties Company | Abrasive product, method of making and using the same, and apparatus for making the same |
US7179526B2 (en) * | 2002-08-02 | 2007-02-20 | 3M Innovative Properties Company | Plasma spraying |
US20050060941A1 (en) * | 2003-09-23 | 2005-03-24 | 3M Innovative Properties Company | Abrasive article and methods of making the same |
US7270143B2 (en) * | 2005-03-16 | 2007-09-18 | The General Electric Company | Offset variable-orifice flow sensor |
-
2005
- 2005-02-22 US US11/062,904 patent/US7524345B2/en not_active Expired - Fee Related
-
2006
- 2006-02-21 RU RU2007134984A patent/RU2361719C2/ru not_active IP Right Cessation
- 2006-02-21 UA UAA200710574A patent/UA89224C2/ru unknown
- 2006-02-21 BR BRPI0606961-4A patent/BRPI0606961A2/pt not_active IP Right Cessation
- 2006-02-21 CN CN2006800054838A patent/CN101142055B/zh not_active Expired - Fee Related
- 2006-02-21 KR KR1020077018832A patent/KR100917572B1/ko not_active IP Right Cessation
- 2006-02-21 EP EP06735533A patent/EP1851005B1/en not_active Not-in-force
- 2006-02-21 MX MX2007010255A patent/MX2007010255A/es active IP Right Grant
- 2006-02-21 AU AU2006216846A patent/AU2006216846B2/en not_active Ceased
- 2006-02-21 WO PCT/US2006/005915 patent/WO2006091519A2/en active Application Filing
- 2006-02-21 JP JP2007557079A patent/JP5260966B2/ja not_active Expired - Fee Related
- 2006-02-21 DE DE602006007215T patent/DE602006007215D1/de not_active Expired - Fee Related
- 2006-02-21 NZ NZ560233A patent/NZ560233A/en not_active IP Right Cessation
- 2006-02-21 AT AT06735533T patent/ATE433365T1/de not_active IP Right Cessation
- 2006-02-21 CA CA2596700A patent/CA2596700C/en not_active Expired - Fee Related
-
2007
- 2007-08-01 NO NO20073996A patent/NO20073996L/no not_active Application Discontinuation
- 2007-08-15 IL IL185294A patent/IL185294A/en not_active IP Right Cessation
- 2007-08-15 ZA ZA200706795A patent/ZA200706795B/xx unknown
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109084A (ja) * | 1987-10-19 | 1989-04-26 | Tokyo Jiki Insatsu Kk | 研磨フィルム |
JPH02250775A (ja) * | 1989-03-20 | 1990-10-08 | Nippon Rejibon Kk | 研削研磨用砥石とその製造方法とその製造装置 |
JPH048409A (ja) * | 1990-04-26 | 1992-01-13 | Nippon Steel Corp | 耐衝撃性に優れる被覆超硬合金工具 |
JPH06226509A (ja) * | 1993-01-28 | 1994-08-16 | Sumitomo Electric Ind Ltd | 被覆切削工具 |
JPH091403A (ja) * | 1995-06-15 | 1997-01-07 | Sumitomo Electric Ind Ltd | 被覆硬質合金工具 |
JP2003504218A (ja) * | 1999-07-09 | 2003-02-04 | スリーエム イノベイティブ プロパティズ カンパニー | 多孔性セラミック研摩複合材料を含むメタルボンド研摩物品およびそれを用いたワークピースの研摩方法 |
JP2001260037A (ja) * | 2000-03-15 | 2001-09-25 | Tkx:Kk | ディスク状砥石 |
JP2004519341A (ja) * | 2000-11-03 | 2004-07-02 | スリーエム イノベイティブ プロパティズ カンパニー | 可撓性研磨剤製品、ならびに該製品の製造方法および使用方法 |
JP2004535306A (ja) * | 2001-07-20 | 2004-11-25 | スリーエム イノベイティブ プロパティズ カンパニー | 摩耗インジケータを有する固定研磨物品 |
JP2003080465A (ja) * | 2001-09-10 | 2003-03-18 | Refuraito Kk | ラッピングフィルム及びその製造方法 |
WO2004029310A2 (en) * | 2002-09-24 | 2004-04-08 | Chien-Min Sung | Molten braze-coated superabrasive particles and associated methods |
JP2004338022A (ja) * | 2003-05-14 | 2004-12-02 | Tkx:Kk | ディスク砥石およびその製造方法 |
Cited By (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013516334A (ja) * | 2010-01-07 | 2013-05-13 | ジーケーエヌ シンター メタルズ、エル・エル・シー | 工作機械及び該工作機械の製造方法 |
US10029405B2 (en) | 2012-04-25 | 2018-07-24 | Applied Materials, Inc. | Printing a chemical mechanical polishing pad |
US11673225B2 (en) | 2012-04-25 | 2023-06-13 | Applied Materials, Inc. | Printing a chemical mechanical polishing pad |
US11207758B2 (en) | 2012-04-25 | 2021-12-28 | Applied Materials, Inc. | Printing a chemical mechanical polishing pad |
US9744724B2 (en) | 2012-04-25 | 2017-08-29 | Applied Materials, Inc. | Apparatus for printing a chemical mechanical polishing pad |
JP2017193047A (ja) * | 2012-04-25 | 2017-10-26 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 印刷による化学機械研磨パッド |
JP2017205869A (ja) * | 2012-04-25 | 2017-11-24 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | バッキング層および研磨層を有する印刷による化学機械研磨パッド |
US10843306B2 (en) | 2012-04-25 | 2020-11-24 | Applied Materials, Inc. | Printing a chemical mechanical polishing pad |
US12011801B2 (en) | 2012-04-25 | 2024-06-18 | Applied Materials, Inc. | Printing a chemical mechanical polishing pad |
KR102209101B1 (ko) | 2012-04-25 | 2021-01-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 프린팅된 화학적 기계적 폴리싱 패드 |
JP2015517922A (ja) * | 2012-04-25 | 2015-06-25 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 印刷による化学機械研磨パッド |
KR20190045422A (ko) * | 2012-04-25 | 2019-05-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 프린팅된 화학적 기계적 폴리싱 패드 |
JP2019141997A (ja) * | 2012-04-25 | 2019-08-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 印刷による化学機械研磨パッド |
JP2020078868A (ja) * | 2013-11-04 | 2020-05-28 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 研磨材を中に有する印刷された化学機械研磨パッド |
JP2016536151A (ja) * | 2013-11-04 | 2016-11-24 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 研磨材を中に有する印刷された化学機械研磨パッド |
US11794308B2 (en) | 2013-11-04 | 2023-10-24 | Applied Materials, Inc. | Printed chemical mechanical polishing pad having particles therein |
US10953515B2 (en) | 2014-10-17 | 2021-03-23 | Applied Materials, Inc. | Apparatus and method of forming a polishing pads by use of an additive manufacturing process |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US11724362B2 (en) | 2014-10-17 | 2023-08-15 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US11958162B2 (en) | 2014-10-17 | 2024-04-16 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
US10821573B2 (en) | 2014-10-17 | 2020-11-03 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
US10493691B2 (en) | 2014-10-17 | 2019-12-03 | Applied Materials, Inc. | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
US10875145B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Polishing pads produced by an additive manufacturing process |
JP2021112819A (ja) * | 2014-10-17 | 2021-08-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials, Incorporated | 付加製造プロセスを使用する、複合材料特性を有するcmpパッド構造 |
JP2020098930A (ja) * | 2014-10-17 | 2020-06-25 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 付加製造プロセスにより製作される研磨パッド |
JP2019166633A (ja) * | 2014-10-17 | 2019-10-03 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 付加製造プロセスを使用する、複合材料特性を有するcmpパッド構造 |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US12023853B2 (en) | 2014-10-17 | 2024-07-02 | Applied Materials, Inc. | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
US11446788B2 (en) | 2014-10-17 | 2022-09-20 | Applied Materials, Inc. | Precursor formulations for polishing pads produced by an additive manufacturing process |
JP2017533105A (ja) * | 2014-10-17 | 2017-11-09 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 研磨用物品、及び、化学機械研磨用物品を製造するための統合型のシステムと方法 |
JP7221234B2 (ja) | 2014-10-17 | 2023-02-13 | アプライド マテリアルズ インコーポレイテッド | 付加製造プロセスにより製作される研磨パッド |
JP7344251B2 (ja) | 2015-07-15 | 2023-09-13 | シーフォー・カーバイズ・リミテッド | 工具刃の製造方法 |
JP2021169151A (ja) * | 2015-07-15 | 2021-10-28 | シーフォー・カーバイズ・リミテッドC4 Carbides Limited | 工具刃の製造方法 |
JP7483991B2 (ja) | 2015-07-15 | 2024-05-15 | シーフォー・カーバイズ・リミテッド | 工具刃の製造方法 |
JP2017052087A (ja) * | 2015-07-15 | 2017-03-16 | シーフォー・カーバイズ・リミテッドC4 Carbides Limited | 工具刃、工具刃の製造方法、およびコンピュータ読取可能な媒体 |
JP2022064894A (ja) * | 2015-10-16 | 2022-04-26 | アプライド マテリアルズ インコーポレイテッド | 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 |
JP7434378B2 (ja) | 2015-10-16 | 2024-02-20 | アプライド マテリアルズ インコーポレイテッド | 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 |
US11772229B2 (en) | 2016-01-19 | 2023-10-03 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
KR102629658B1 (ko) * | 2016-01-21 | 2024-01-29 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 금속 접합제 및 유리질 접합제 연마 용품의 제조 방법, 및 연마 용품 전구체 |
JP2019508264A (ja) * | 2016-01-21 | 2019-03-28 | スリーエム イノベイティブ プロパティズ カンパニー | メタルボンド及びガラス質ボンド研磨物品の製造方法、並びに研磨物品前駆体 |
KR20180104654A (ko) * | 2016-01-21 | 2018-09-21 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 금속 접합제 및 유리질 접합제 연마 용품의 제조 방법, 및 연마 용품 전구체 |
US11597054B2 (en) | 2016-03-09 | 2023-03-07 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing |
US10537973B2 (en) | 2016-03-09 | 2020-01-21 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing |
US11154961B2 (en) | 2016-03-09 | 2021-10-26 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing |
US11002530B2 (en) | 2016-09-20 | 2021-05-11 | Applied Materials, Inc. | Tiltable platform for additive manufacturing of a polishing pad |
US11137243B2 (en) | 2016-09-20 | 2021-10-05 | Applied Materials, Inc. | Two step curing of polishing pad material in additive manufacturing |
JP7086101B2 (ja) | 2017-04-21 | 2022-06-17 | アプライド マテリアルズ インコーポレイテッド | 付加製造装置のためのエネルギー源のアレーを有するエネルギー送達システム |
US10596763B2 (en) | 2017-04-21 | 2020-03-24 | Applied Materials, Inc. | Additive manufacturing with array of energy sources |
JP2020517491A (ja) * | 2017-04-21 | 2020-06-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 付加製造装置のためのエネルギー源のアレーを有するエネルギー送達システム |
US11059149B2 (en) | 2017-05-25 | 2021-07-13 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing using initial layer |
US10967482B2 (en) | 2017-05-25 | 2021-04-06 | Applied Materials, Inc. | Fabrication of polishing pad by additive manufacturing onto mold |
US10882160B2 (en) | 2017-05-25 | 2021-01-05 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing using sacrificial material |
US11084143B2 (en) | 2017-05-25 | 2021-08-10 | Applied Materials, Inc. | Correction of fabricated shapes in additive manufacturing using modified edge |
US11642757B2 (en) | 2017-05-25 | 2023-05-09 | Applied Materials, Inc. | Using sacrificial material in additive manufacturing of polishing pads |
JP2021024069A (ja) * | 2019-08-09 | 2021-02-22 | 株式会社ノリタケカンパニーリミテド | 研磨体の製造方法及び研磨体 |
JP7105743B2 (ja) | 2019-08-09 | 2022-07-25 | 株式会社ノリタケカンパニーリミテド | 研磨体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
MX2007010255A (es) | 2007-09-11 |
NO20073996L (no) | 2007-09-21 |
WO2006091519A2 (en) | 2006-08-31 |
AU2006216846B2 (en) | 2009-05-28 |
IL185294A (en) | 2010-12-30 |
JP5260966B2 (ja) | 2013-08-14 |
KR20070108523A (ko) | 2007-11-12 |
WO2006091519A3 (en) | 2006-11-30 |
KR100917572B1 (ko) | 2009-09-15 |
US20060185256A1 (en) | 2006-08-24 |
DE602006007215D1 (de) | 2009-07-23 |
US7524345B2 (en) | 2009-04-28 |
CA2596700C (en) | 2012-04-17 |
ZA200706795B (en) | 2008-10-29 |
IL185294A0 (en) | 2008-02-09 |
RU2361719C2 (ru) | 2009-07-20 |
EP1851005B1 (en) | 2009-06-10 |
ATE433365T1 (de) | 2009-06-15 |
BRPI0606961A2 (pt) | 2009-07-28 |
CA2596700A1 (en) | 2006-08-31 |
NZ560233A (en) | 2009-10-30 |
UA89224C2 (ru) | 2010-01-11 |
CN101142055B (zh) | 2012-07-18 |
EP1851005A2 (en) | 2007-11-07 |
AU2006216846A1 (en) | 2006-08-31 |
RU2007134984A (ru) | 2009-03-27 |
CN101142055A (zh) | 2008-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5260966B2 (ja) | 研磨品を製造する急速工作システム及び方法 | |
JP5378483B2 (ja) | 研磨品を製造する急速工作システム及び方法 | |
JP2012045709A (ja) | 研磨品を製造する急速工作システム及び方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100810 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20101110 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20101117 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110210 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110524 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110824 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120110 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120409 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120416 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120710 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121030 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20121214 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20121214 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20121217 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20121217 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20121228 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20130128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130402 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130426 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160502 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |