JP2008244134A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2008244134A JP2008244134A JP2007082434A JP2007082434A JP2008244134A JP 2008244134 A JP2008244134 A JP 2008244134A JP 2007082434 A JP2007082434 A JP 2007082434A JP 2007082434 A JP2007082434 A JP 2007082434A JP 2008244134 A JP2008244134 A JP 2008244134A
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- metal layer
- pad electrode
- resin film
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Abstract
【解決手段】本発明の半導体装置では、パッド電極3上に酸化防止用金属層4が形成されている。パッド電極3上のスピンコート樹脂膜7に形成された開口領域8からは、酸化防止用金属層4が露出している。そして、酸化防止用金属層4上にメッキ用金属層9、銅メッキ層10が形成されている。この構造により、パッド電極3上では、パッド電極3上面は酸化され難く、酸化膜より大幅にシート抵抗値の小さい酸化防止用金属層4が電流経路となり、パッド電極3上の抵抗値が低減される。
【選択図】図1
Description
3 パッド電極
4 酸化防止用金属層
7 スピンコート樹脂膜
8 開口領域
9 メッキ用金属層
10 Cuメッキ層
13 バンプ電極
Claims (12)
- 半導体基板上に絶縁処理され設けられるパッド電極と、
少なくとも前記パッド電極の一主面を被覆するように形成される酸化防止用金属層と、
前記酸化防止用金属層を被覆するように形成されるスピンコート樹脂膜と、
前記酸化防止用金属層の表面を露出するように、前記スピンコート樹脂膜に設けられる開口領域と、
前記スピンコート樹脂膜の前記開口領域から露出する前記酸化防止用金属層と接続されるメッキ用金属層と、
前記メッキ用金属層上に形成される電極とを有することを特徴とする半導体装置。 - 前記酸化防止用金属層は、少なくともチタンナイトライド層またはチタンタングステン層から成ることを特徴とする請求項1に記載の半導体装置。
- 前記メッキ用金属層は、クロム層を有し、前記電極は、銅層と、前記銅層上に形成されるバンプ電極とを有することを特徴とする請求項1または請求項2に記載の半導体装置。
- 前記スピンコート樹脂膜は、ポリベンズオキサゾール膜またはポリイミド樹脂膜から成ることを特徴とする請求項3に記載の半導体装置。
- 半導体基板上を絶縁処理し、前記絶縁処理された半導体基板上にパッド電極を形成し、少なくとも前記パッド電極の一主面を被覆する酸化防止用金属層を形成する工程と、
前記酸化防止用金属層上にスピンコート樹脂膜を形成し、前記スピンコート樹脂膜に開口領域を形成する工程と、
前記スピンコート樹脂膜の開口領域から露出する前記酸化防止用金属層上にメッキ用金属層を形成した後、前記メッキ用金属層上に電極を形成する工程とを有することを特徴とする半導体装置の製造方法。 - 前記パッド電極を構成する金属層上に前記酸化防止用金属層を連続して堆積した後、前記パッド電極を構成する金属層及び前記酸化防止用金属層を同一工程により選択的に除去することを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記酸化防止用金属層として少なくともチタンナイトライド層またはチタンタングステン層を堆積することを特徴とする請求項5または請求項6に記載の半導体装置の製造方法。
- 前記メッキ用金属層としてクロム層を形成し、前記電極として銅層と、前記銅層上にバンプ電極を形成することを特徴とする請求項5から請求項7のいずれかに記載の半導体装置の製造方法。
- 前記スピンコート樹脂膜としてポリベンズオキサゾール膜またはポリイミド樹脂膜を形成することを特徴とする請求項8に記載の半導体装置の製造方法。
- ウエハの一主面上に絶縁処理され設けられるパッド電極と、前記パッド電極の一主面を被覆する酸化防止用金属層とを有する前記ウエハを準備する工程と、
前記酸化防止用金属層上にスピンコート樹脂膜を形成し、前記スピンコート樹脂膜に開口領域を形成する工程と、
前記スピンコート樹脂膜の開口領域から露出する前記酸化防止用金属層上にメッキ用金属層を形成した後、前記メッキ用金属層上に電極を形成する工程とを有することを特徴とする半導体装置の製造方法。 - 前記メッキ用金属層としてクロム層を形成し、前記電極として銅層と、前記銅層上にバンプ電極を形成することを特徴とする請求項10に記載の半導体装置の製造方法。
- 前記スピンコート樹脂膜としてポリベンズオキサゾール膜またはポリイミド樹脂膜を形成することを特徴とする請求項10または請求項11に記載の半導体装置の製造方法。
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JP5138248B2 (ja) * | 2007-03-23 | 2013-02-06 | オンセミコンダクター・トレーディング・リミテッド | 半導体装置及びその製造方法 |
JP5192171B2 (ja) * | 2007-04-17 | 2013-05-08 | オンセミコンダクター・トレーディング・リミテッド | 半導体装置及びその製造方法 |
US20110012239A1 (en) * | 2009-07-17 | 2011-01-20 | Qualcomm Incorporated | Barrier Layer On Polymer Passivation For Integrated Circuit Packaging |
JP2017224753A (ja) * | 2016-06-16 | 2017-12-21 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
CN107504989A (zh) * | 2017-08-16 | 2017-12-22 | 钟祥市中原电子有限责任公司 | 一种钢水定氧探头 |
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