JP2007243080A - 半導体装置およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
- H01L21/0465—Making n or p doped regions or layers, e.g. using diffusion using ion implantation using masks
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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Abstract
【解決手段】半導体基板が、一方の主面側の中央部に、少なくとも耐圧に必要な厚さをもち、炭化珪素または窒化ガリウムからなる半導体層を備え、他方の主面側に、前記中央部に対向する位置に凹部と、該凹部の底部を取り囲み、凹部の側面をなす支持部とを有する半導体装置とする。凹部はドライエッチング等により形成される。
【選択図】 図3
Description
1’ n−型半導体基板
1’’ n+型ドレイン領域
2,2’ n−型半導体層、ドリフト層
3 バッファ領域
4 p−型ウエル領域
5 n+型ソース領域
6 耐圧構造領域
7 活性領域
8 n+型半導体基板1の薄肉部
14 トレンチ
15 ゲート絶縁膜
16 ポリシリコンゲート電極
17 p+領域
18 層間絶縁膜
19 ソース電極
20 ドレイン電極
101,201 凹部
102,202 凹部の底部
103,203 支持部。
Claims (20)
- 半導体基板が、
一方の主面側の中央部に、少なくとも耐圧に必要な厚さをもち、炭化珪素または窒化ガリウムからなる半導体層を備え、
他方の主面側に、前記中央部に対向する位置に凹部と、該凹部の底部を取り囲み、凹部の側面をなす支持部とを有する
ことを特徴とする半導体装置。 - 前記半導体基板と半導体層が第一導電型であり、前記底部に半導体層よりも不純物濃度が高く第一導電型の領域を有する請求項1記載の半導体装置。
- 前記半導体基板と半導体層が第一導電型であり、前記底部に半導体層よりも不純物濃度が高く第二導電型の領域を有する請求項1記載の半導体装置。
- 前記半導体基板が第二導電型であり、半導体層が第一導電型であり、前記底部に半導体層よりも不純物濃度が高く第二導電型の領域を有する請求項1記載の半導体装置。
- 前記底部に、半導体層と第二導電型の領域との間に、半導体層よりも不純物濃度が高く第一導電型の領域を有する請求項3または4に記載の半導体装置。
- 半導体基板が炭化珪素からなる請求項1〜5のいずれか一項に記載の半導体装置。
- 半導体層がエピタキシャル成長層である請求項6記載の半導体装置。
- 半導体基板の前記底部の厚さが1〜50μmである請求項1記載の半導体装置。
- 半導体基板の前記支持部の厚さが200〜500μmである請求項1記載の半導体装置。
- 前記半導体層が耐圧構造として、プレーナ型耐圧構造を備えていることを特徴とする請求項1〜9のいずれか一項に記載の半導体装置。
- 前記半導体基板と半導体層とが耐圧構造として、メサ溝構造を備えていることを特徴とする請求項1〜9のいずれか一項に記載の半導体装置。
- 半導体基板の、一方の主面側の中央部に、少なくとも耐圧に必要な厚さをもち、炭化珪素または窒化ガリウムからなる半導体層を形成する第一工程と、他方の主面側に、前記中央部に対向する位置に凹部と、該凹部の底部を取り囲み、凹部の側面をなす支持部とを形成する第二工程とを含むことを特徴とする半導体装置の製造方法。
- 前記半導体基板が炭化珪素からなり、半導体層がエピタキシャル成長により形成される請求項12記載の半導体装置の製造方法。
- 前記第二工程が、ドライエッチング及び粒子噴射から選ばれる少なくとも1つの研磨工程を含む請求項12または13に記載の半導体装置の製造方法。
- 前記第二工程の後に、半導体基板の他方の主面にイオン打ち込みをし、活性化アニールを行う請求項12または13に記載の半導体装置の製造方法。
- 前記活性化アニールをレーザーアニール法により行う請求項15記載の半導体装置の製造方法。
- 前記第二工程において、半導体基板の一方の主面側から該半導体基板を透過する波長領域を有する光を照射し、前記底部の厚さを測定しながら凹部を形成する請求項12または13に記載の半導体装置の製造方法。
- 前記半導体層がエピタキシャル横方向成長技術を用いて形成され、前記第二工程において、該エピタキシャル横方向成長工程で使用したマスクを前記凹部を形成する際にマーカーとして使う請求項13記載の半導体装置の製造方法。
- 前記第一工程の後に、第二工程を行う請求項13記載の半導体装置の製造方法。
- 前記第二工程の後に、第一工程を行う請求項13記載の半導体装置の製造方法。
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JP2006066876A JP2007243080A (ja) | 2006-03-13 | 2006-03-13 | 半導体装置およびその製造方法 |
DE102007010095A DE102007010095A1 (de) | 2006-03-13 | 2007-03-02 | Halbleitervorrichtung und deren Herstellungsverfahren |
US11/683,993 US7821014B2 (en) | 2006-03-13 | 2007-03-08 | Semiconductor device and manufacturing method thereof with a recessed backside substrate for breakdown voltage blocking |
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JP6870286B2 (ja) * | 2016-11-15 | 2021-05-12 | 富士電機株式会社 | 炭化珪素半導体装置の製造方法 |
US10937783B2 (en) * | 2016-11-29 | 2021-03-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
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Also Published As
Publication number | Publication date |
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DE102007010095A1 (de) | 2007-09-20 |
US7821014B2 (en) | 2010-10-26 |
US20070210316A1 (en) | 2007-09-13 |
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