JP2006197147A - 圧電薄膜共振子及びこれを用いたフィルタ - Google Patents
圧電薄膜共振子及びこれを用いたフィルタ Download PDFInfo
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- JP2006197147A JP2006197147A JP2005005791A JP2005005791A JP2006197147A JP 2006197147 A JP2006197147 A JP 2006197147A JP 2005005791 A JP2005005791 A JP 2005005791A JP 2005005791 A JP2005005791 A JP 2005005791A JP 2006197147 A JP2006197147 A JP 2006197147A
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- 239000002648 laminated material Substances 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【解決手段】 基板41上に形成された下部電極43と、基板41及び下部電極43上に形成された圧電膜44と、圧電膜44上に形成された上部電極45とを有する複合膜を備えた圧電薄膜共振子において、圧電膜44を挟む上部電極45と下部電極43との重なり領域であるメンブレン46に接続する上部電極あるいは下部電極の少なくとも一方の電極において、メンブレン46からの引出部分の形状が、メンブレン46の外形幅よりも細くなっている構成。
【選択図】 図4
Description
実施例1では単一の圧電薄膜共振子のみについて説明したが、このような共振子を、図8に示すように、直列腕と並列腕にそれぞれラダー型に配置することによってバンドパスフィルタを構成することが可能である。本実施例では、直列腕に4個S1〜S4、並列腕に3個P1〜P3の圧電薄膜共振子が配置されている。圧電薄膜共振子の基本構造は実施例1で説明した圧電薄膜共振子と同じであるが、並列共振子の共振周波数を低下させてバンドパスフィルタ特性を得るために、並列共振子の上部電極上に不図示のTi膜からなる付加膜が設けられている。
42 空隙
43 下部電極
44 圧電膜
45 上部電極
46 メンブレン
46´ メンブレン対応領域
47 エッチング液導入孔
47´ 流路
48 犠牲層
Claims (10)
- 基板上に形成された下部電極と、前記基板及び下部電極上に形成された圧電膜と、該圧電膜上に形成された上部電極とを有する複合膜を備えた圧電薄膜共振子において、前記圧電膜を挟む前記上部電極と前記下部電極との重なり領域であるメンブレンに接続する上部電極あるいは下部電極の少なくとも一方の電極において、前記メンブレンからの引出部分の形状が、前記メンブレンの外形幅よりも細くなっていることを特徴とする圧電薄膜共振子。
- 前記メンブレンと前記基板との間に空隙が設けられていることを特徴とする請求項1項記載の圧電薄膜共振子。
- 前記メンブレンは、該メンブレンと前記基板との間にドーム状の膨らみを有する空隙が形成されるように湾曲しており、前記基板上での前記空隙の投影形状は閉曲線もしくは多角形又はそれらの組合せからなる輪郭を有していることを特徴とする請求項1項記載の圧電薄膜共振子。
- 前記空隙の投影形状は、前記基板上での前記メンブレンの投影形状と相似していることを特徴とする請求項3に記載の圧電薄膜共振子。
- 前記メンブレンの形状は楕円形であることを特徴とする請求項1から4項の何れかに記載の圧電薄膜共振子。
- 前記メンブレンの形状及び前記基板上での前記空隙の投影形状は、それぞれ互いに平行とならない辺を少なくとも一組持つ多角形であることを特徴とする請求項1から4項の何れかに記載の圧電薄膜共振子。
- 前記複合膜の応力は圧縮応力であることを特徴とする請求項1から6の何れかに記載の圧電薄膜共振子。
- 前記下部電極には、前記メンブレンと前記基板との間の前記空隙に通じる孔部が設けられていることを特徴とする請求項1〜7の何れかに記載の圧電薄膜共振子。
- 前記圧電膜は、(002)方向を主軸とする配向性をもつ窒化アルミニウム(AlN)又は酸化亜鉛(ZnO)であることを特徴とする請求項1〜8の何れかに記載の圧電薄膜共振子。
- 請求項1〜9の何れかに記載の圧電薄膜共振子を複数組み合わせて構成されていることを特徴とするフィルタ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005005791A JP4149444B2 (ja) | 2005-01-12 | 2005-01-12 | 圧電薄膜共振子及びこれを用いたフィルタ |
EP20050257870 EP1684424A1 (en) | 2005-01-12 | 2005-12-20 | Piezoelectric thin-film resonator and filter using the same |
US11/326,418 US7345402B2 (en) | 2005-01-12 | 2006-01-06 | Piezoelectric thin-film resonator and filter using the same |
CNB2006100005937A CN100511991C (zh) | 2005-01-12 | 2006-01-11 | 压电薄膜谐振器以及使用该压电薄膜谐振器的滤波器 |
KR20060002945A KR20060082413A (ko) | 2005-01-12 | 2006-01-11 | 압전 박막 공진자 및 이를 이용한 필터 |
KR1020070098096A KR100929760B1 (ko) | 2005-01-12 | 2007-09-28 | 압전 박막 공진자 및 이를 이용한 필터 |
Applications Claiming Priority (1)
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JP2005005791A JP4149444B2 (ja) | 2005-01-12 | 2005-01-12 | 圧電薄膜共振子及びこれを用いたフィルタ |
Publications (2)
Publication Number | Publication Date |
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JP2006197147A true JP2006197147A (ja) | 2006-07-27 |
JP4149444B2 JP4149444B2 (ja) | 2008-09-10 |
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JP2005005791A Active JP4149444B2 (ja) | 2005-01-12 | 2005-01-12 | 圧電薄膜共振子及びこれを用いたフィルタ |
Country Status (5)
Country | Link |
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US (1) | US7345402B2 (ja) |
EP (1) | EP1684424A1 (ja) |
JP (1) | JP4149444B2 (ja) |
KR (2) | KR20060082413A (ja) |
CN (1) | CN100511991C (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7345402B2 (en) * | 2005-01-12 | 2008-03-18 | Fujitsu-Media Devices Limited | Piezoelectric thin-film resonator and filter using the same |
JP2008288819A (ja) * | 2007-05-17 | 2008-11-27 | Fujitsu Media Device Kk | 圧電薄膜共振器およびフィルタ |
JP2008311873A (ja) * | 2007-06-13 | 2008-12-25 | Fujitsu Media Device Kk | フィルタ |
JP2011091639A (ja) * | 2009-10-22 | 2011-05-06 | Taiyo Yuden Co Ltd | 圧電薄膜共振子 |
JP4853523B2 (ja) * | 2006-12-25 | 2012-01-11 | 株式会社村田製作所 | 圧電薄膜共振子 |
JPWO2015190429A1 (ja) * | 2014-06-13 | 2017-04-20 | 株式会社村田製作所 | 圧電デバイスおよび圧電デバイスの製造方法 |
Families Citing this family (11)
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JP4707533B2 (ja) * | 2005-10-27 | 2011-06-22 | 太陽誘電株式会社 | 圧電薄膜共振器およびフィルタ |
US7629865B2 (en) * | 2006-05-31 | 2009-12-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters |
JP4968900B2 (ja) * | 2006-10-17 | 2012-07-04 | 太陽誘電株式会社 | ラダー型フィルタの製造方法 |
JP5220503B2 (ja) * | 2008-07-23 | 2013-06-26 | 太陽誘電株式会社 | 弾性波デバイス |
JP4944145B2 (ja) * | 2009-03-19 | 2012-05-30 | 太陽誘電株式会社 | 圧電薄膜共振子、フィルタ、通信モジュール、通信装置 |
JP5643056B2 (ja) | 2010-11-01 | 2014-12-17 | 太陽誘電株式会社 | 弾性波デバイス |
US8925385B2 (en) * | 2010-12-06 | 2015-01-06 | Sierra Instruments, Inc. | Longitudinal resonating mode inertial mass sensing systems |
JP5792554B2 (ja) * | 2011-08-09 | 2015-10-14 | 太陽誘電株式会社 | 弾性波デバイス |
CN107222181A (zh) * | 2016-12-29 | 2017-09-29 | 杭州左蓝微电子技术有限公司 | 基于soi基片的薄膜体声波谐振器及其制备方法 |
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JP3939939B2 (ja) * | 2001-07-17 | 2007-07-04 | 富士通株式会社 | 圧電薄膜共振素子の製造方法 |
US6448699B1 (en) * | 2001-08-31 | 2002-09-10 | Cts Corporation | Octagonal electrode for crystals |
JP3954395B2 (ja) | 2001-10-26 | 2007-08-08 | 富士通株式会社 | 圧電薄膜共振子、フィルタ、および圧電薄膜共振子の製造方法 |
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KR100499126B1 (ko) * | 2002-06-20 | 2005-07-04 | 삼성전자주식회사 | 유기막 멤브레인을 이용한 액츄에이터 |
JP2004032572A (ja) * | 2002-06-28 | 2004-01-29 | Kinseki Ltd | 圧電振動子の製造方法 |
US7098574B2 (en) * | 2002-11-08 | 2006-08-29 | Toyo Communication Equipment Co., Ltd. | Piezoelectric resonator and method for manufacturing the same |
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EP1533896B1 (en) * | 2003-11-20 | 2011-11-02 | Panasonic Corporation | Piezoelectric element, composite piezoelectric element, and filter, duplexer and communication equipment using the same |
US7126255B2 (en) * | 2004-04-05 | 2006-10-24 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film-type device |
TW200610266A (en) * | 2004-06-03 | 2006-03-16 | Sony Corp | Thin film bulk acoustic resonator and method of manufacturing the same |
JP2006147839A (ja) * | 2004-11-19 | 2006-06-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
WO2006067949A1 (ja) * | 2004-12-24 | 2006-06-29 | Murata Manufacturing Co., Ltd. | 圧電薄膜共振子およびその製造方法 |
JP4149444B2 (ja) * | 2005-01-12 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びこれを用いたフィルタ |
-
2005
- 2005-01-12 JP JP2005005791A patent/JP4149444B2/ja active Active
- 2005-12-20 EP EP20050257870 patent/EP1684424A1/en not_active Withdrawn
-
2006
- 2006-01-06 US US11/326,418 patent/US7345402B2/en active Active
- 2006-01-11 KR KR20060002945A patent/KR20060082413A/ko not_active Application Discontinuation
- 2006-01-11 CN CNB2006100005937A patent/CN100511991C/zh active Active
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2007
- 2007-09-28 KR KR1020070098096A patent/KR100929760B1/ko active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US7345402B2 (en) * | 2005-01-12 | 2008-03-18 | Fujitsu-Media Devices Limited | Piezoelectric thin-film resonator and filter using the same |
JP4853523B2 (ja) * | 2006-12-25 | 2012-01-11 | 株式会社村田製作所 | 圧電薄膜共振子 |
JP2008288819A (ja) * | 2007-05-17 | 2008-11-27 | Fujitsu Media Device Kk | 圧電薄膜共振器およびフィルタ |
JP2008311873A (ja) * | 2007-06-13 | 2008-12-25 | Fujitsu Media Device Kk | フィルタ |
JP2011091639A (ja) * | 2009-10-22 | 2011-05-06 | Taiyo Yuden Co Ltd | 圧電薄膜共振子 |
JPWO2015190429A1 (ja) * | 2014-06-13 | 2017-04-20 | 株式会社村田製作所 | 圧電デバイスおよび圧電デバイスの製造方法 |
Also Published As
Publication number | Publication date |
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CN1805276A (zh) | 2006-07-19 |
JP4149444B2 (ja) | 2008-09-10 |
KR20060082413A (ko) | 2006-07-18 |
US20060152110A1 (en) | 2006-07-13 |
KR100929760B1 (ko) | 2009-12-10 |
US7345402B2 (en) | 2008-03-18 |
CN100511991C (zh) | 2009-07-08 |
EP1684424A1 (en) | 2006-07-26 |
KR20070105943A (ko) | 2007-10-31 |
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