GB1330332A - Electroless deposition of copper - Google Patents

Electroless deposition of copper

Info

Publication number
GB1330332A
GB1330332A GB4859070A GB4859070A GB1330332A GB 1330332 A GB1330332 A GB 1330332A GB 4859070 A GB4859070 A GB 4859070A GB 4859070 A GB4859070 A GB 4859070A GB 1330332 A GB1330332 A GB 1330332A
Authority
GB
United Kingdom
Prior art keywords
mol
oct
contacted
silver nitrate
copper plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4859070A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1330332A publication Critical patent/GB1330332A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • C23C18/405Formaldehyde

Abstract

1330332 Electroless copper plating PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 13 Oct 1970 [16 Oct 1969] 48590/70 Heading C7F [Also in Division G2] An alkaline, aqueous Cu-plating solution free from a sulphur compound which is capable of forming a chelate with cuprous ions, inorganic cyanide, organic nitrile or compounds of Mo, Nb, V, Re, V, As, Sb, Bi, Ac, La, and rare earths comprises per litre 0À01 to 0À10 mol of Cu salt, 0À01 to 0À80 mol of complexing agent, 0À05 to 0À50 mol alkalimetal hydroxide, 0À01 to 0À35 mol formaldehyde, and one or more nonionic or ionic polyalkylene oxidic compounds, e.g. a polyalkylene glycol, an ether which may be esterified with an acid sulphate ester or an acid phosphate ester of a fatty alcohol or an alkyl phenol or a polyethylene glycol or an ethoxylated fatty amine or fatty amide. Examples are described of plating on paper-resin laminates and glass plates. The substrate may be first coated with a photo-sensitive material, which is exposed and then contacted with a mercurous nitrate and silver nitrate solution, and intensified with silver nitrate before contacting with the copper plating solution. Alternatively the substrates may be first contacted with stannous and palladium chlorides.
GB4859070A 1969-10-16 1970-10-13 Electroless deposition of copper Expired GB1330332A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6915718A NL6915718A (en) 1969-10-16 1969-10-16

Publications (1)

Publication Number Publication Date
GB1330332A true GB1330332A (en) 1973-09-19

Family

ID=19808149

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4859070A Expired GB1330332A (en) 1969-10-16 1970-10-13 Electroless deposition of copper

Country Status (11)

Country Link
US (1) US3804638A (en)
AT (1) AT311145B (en)
AU (1) AU2101370A (en)
BE (1) BE757573A (en)
CA (1) CA947458A (en)
CH (1) CH550255A (en)
DE (1) DE2049061C3 (en)
FR (1) FR2065996A5 (en)
GB (1) GB1330332A (en)
HK (1) HK49576A (en)
NL (1) NL6915718A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171225A (en) 1976-01-23 1979-10-16 U.S. Philips Corporation Electroless copper plating solutions
EP0132594A1 (en) * 1983-07-25 1985-02-13 Hitachi, Ltd. Electroless copper plating solution
CN110498532A (en) * 2019-08-15 2019-11-26 深南电路股份有限公司 The processing method and processing unit of printed wiring board waste water

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627594B2 (en) * 1975-03-14 1981-06-25
US4211564A (en) * 1978-05-09 1980-07-08 Hitachi, Ltd. Chemical copper plating solution
US4301196A (en) * 1978-09-13 1981-11-17 Kollmorgen Technologies Corp. Electroless copper deposition process having faster plating rates
US4303443A (en) * 1979-06-15 1981-12-01 Hitachi, Ltd. Electroless copper plating solution
JPS56156749A (en) * 1980-05-08 1981-12-03 Toshiba Corp Chemical copper plating solution
CA1184359A (en) * 1981-10-23 1985-03-26 Donald A. Arcilesi Metallic impurity control for electroless copper plating
IT1157006B (en) * 1982-03-09 1987-02-11 Alfachimici Spa STABILIZING MIXTURE FOR A CHEMICAL COPPER BATH
US4548644A (en) * 1982-09-28 1985-10-22 Hitachi Chemical Company, Ltd. Electroless copper deposition solution
US4908242A (en) * 1986-10-31 1990-03-13 Kollmorgen Corporation Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures
US5925403A (en) * 1994-01-31 1999-07-20 Matsushita Electric Works, Ltd. Method of coating a copper film on a ceramic substrate
US6852152B2 (en) * 2002-09-24 2005-02-08 International Business Machines Corporation Colloidal seed formulation for printed circuit board metallization
US20050016416A1 (en) * 2003-07-23 2005-01-27 Jon Bengston Stabilizer for electroless copper plating solution
TWI335632B (en) * 2003-09-19 2011-01-01 Applied Materials Inc Apparatus and method of detecting the electroless deposition endpoint
US20050067297A1 (en) * 2003-09-26 2005-03-31 Innovative Technology Licensing, Llc Copper bath for electroplating fine circuitry on semiconductor chips
US20060062897A1 (en) * 2004-09-17 2006-03-23 Applied Materials, Inc Patterned wafer thickness detection system
JP2006342428A (en) * 2005-06-10 2006-12-21 Enthone Inc Method for direct metallization of non-conductive substrate
US20160273112A1 (en) * 2013-03-27 2016-09-22 Atotech Deutschland Gmbh Electroless copper plating solution
US10060034B2 (en) 2017-01-23 2018-08-28 Rohm And Haas Electronic Materials Llc Electroless copper plating compositions
US10294569B2 (en) 2017-10-06 2019-05-21 Rohm And Haas Electronic Materials Llc Stable electroless copper plating compositions and methods for electroless plating copper on substrates
US10655227B2 (en) 2017-10-06 2020-05-19 Rohm And Haas Electronic Materials Llc Stable electroless copper plating compositions and methods for electroless plating copper on substrates
CN113388829A (en) * 2021-06-11 2021-09-14 惠州金晟新电子科技有限公司 Electroless copper plating solution and method for plating copper on substrate by using electroless copper plating solution

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075856A (en) * 1958-03-31 1963-01-29 Gen Electric Copper plating process and solution
US3300335A (en) * 1963-11-20 1967-01-24 Dow Chemical Co Electroless metal plating with foam
US3485643A (en) * 1966-05-06 1969-12-23 Photocircuits Corp Electroless copper plating
US3472664A (en) * 1966-09-15 1969-10-14 Enthone Inhibiting stardusting in electroless copper plating
US3515563A (en) * 1967-12-28 1970-06-02 Photocircuits Corp Autocatalytic metal plating solutions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171225A (en) 1976-01-23 1979-10-16 U.S. Philips Corporation Electroless copper plating solutions
EP0132594A1 (en) * 1983-07-25 1985-02-13 Hitachi, Ltd. Electroless copper plating solution
CN110498532A (en) * 2019-08-15 2019-11-26 深南电路股份有限公司 The processing method and processing unit of printed wiring board waste water

Also Published As

Publication number Publication date
BE757573A (en) 1971-04-15
CH550255A (en) 1974-06-14
NL6915718A (en) 1971-04-20
CA947458A (en) 1974-05-21
FR2065996A5 (en) 1971-08-06
AU2101370A (en) 1972-04-20
HK49576A (en) 1976-08-06
AT311145B (en) 1973-10-25
DE2049061C3 (en) 1981-04-30
DE2049061B2 (en) 1980-07-24
US3804638A (en) 1974-04-16
DE2049061A1 (en) 1971-04-29

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee