FR2834593B1 - Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant - Google Patents

Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant

Info

Publication number
FR2834593B1
FR2834593B1 FR0300128A FR0300128A FR2834593B1 FR 2834593 B1 FR2834593 B1 FR 2834593B1 FR 0300128 A FR0300128 A FR 0300128A FR 0300128 A FR0300128 A FR 0300128A FR 2834593 B1 FR2834593 B1 FR 2834593B1
Authority
FR
France
Prior art keywords
piezoelectric
vibrator
substrate
thin film
duplexer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0300128A
Other languages
English (en)
Other versions
FR2834593A1 (fr
Inventor
Daisuke Nakamura
Yukio Yoshino
Masaki Takeuchi
Yoshihiko Gotoh
Tadashi Nomura
Ken Ichi Uesaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of FR2834593A1 publication Critical patent/FR2834593A1/fr
Application granted granted Critical
Publication of FR2834593B1 publication Critical patent/FR2834593B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02133—Means for compensation or elimination of undesirable effects of stress
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Un résonateur piézoélectrique inclut un substrat (2) et un vibrateur (7). Le vibrateur inclut une partie en film mince qui comporte au moins une couche en film mince piézoélectrique (4) qui est disposée sur le substrat et au moins une paire d'électrodes supérieure et inférieure (6, 5) qui sont disposées sur le substrat. Le vibrateur présente une structure selon laquelle la partie en film mince est prise en sandwich entre ses surfaces supérieure et inférieure par les électrodes supérieure et inférieure qui sont opposées l'une à l'autre suivant la direction de profondeur et la partie en chevauchement du vibrateur qui est définie par les électrodes supérieure et inférieure opposées présente une forme tétragonale tel que vu suivant la direction de profondeur autre qu'un rectangle et qu'un carré, la forme tétragonale comportant des côtés sensiblement parallèles présentant une longueur longitudinale égale ou inférieure à environ 10 fois la longueur d'onde oscillation et présentant également au moins une partie dans laquelle la distance entre des bords d'électrode opposés varie.
FR0300128A 2002-01-08 2003-01-08 Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant Expired - Lifetime FR2834593B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002001330 2002-01-08
JP2002201766A JP3969224B2 (ja) 2002-01-08 2002-07-10 圧電共振子及びそれを用いた圧電フィルタ・デュプレクサ・通信装置

Publications (2)

Publication Number Publication Date
FR2834593A1 FR2834593A1 (fr) 2003-07-11
FR2834593B1 true FR2834593B1 (fr) 2006-01-20

Family

ID=26625445

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0300128A Expired - Lifetime FR2834593B1 (fr) 2002-01-08 2003-01-08 Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant

Country Status (6)

Country Link
US (1) US6914368B2 (fr)
JP (1) JP3969224B2 (fr)
KR (1) KR100505717B1 (fr)
CN (1) CN1248414C (fr)
FR (1) FR2834593B1 (fr)
GB (1) GB2383906B (fr)

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US20040027030A1 (en) * 2002-08-08 2004-02-12 Li-Peng Wang Manufacturing film bulk acoustic resonator filters
JP4024741B2 (ja) 2003-10-20 2007-12-19 富士通メディアデバイス株式会社 圧電薄膜共振子及びフィルタ
JP2005260915A (ja) * 2004-02-09 2005-09-22 Murata Mfg Co Ltd 分波器、通信機
JP4149416B2 (ja) * 2004-05-31 2008-09-10 富士通メディアデバイス株式会社 圧電薄膜共振子およびフィルタならびにそれらの製造方法
US7161448B2 (en) * 2004-06-14 2007-01-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancements using recessed region
JP4535841B2 (ja) * 2004-10-28 2010-09-01 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
JP4149444B2 (ja) 2005-01-12 2008-09-10 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
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JP4617936B2 (ja) * 2005-03-14 2011-01-26 ソニー株式会社 圧電共振素子の製造方法および圧電共振素子
JP4550658B2 (ja) * 2005-04-28 2010-09-22 富士通メディアデバイス株式会社 圧電薄膜共振器およびフィルタ
JP4508241B2 (ja) 2005-06-02 2010-07-21 株式会社村田製作所 圧電共振子及び圧電薄膜フィルタ
JP4476903B2 (ja) * 2005-08-24 2010-06-09 株式会社東芝 薄膜圧電共振器およびフィルタ回路
WO2007026397A1 (fr) * 2005-08-30 2007-03-08 Kyocera Corporation Élément résonnant piézoélectrique et résonateur piézoélectrique l'utilisant
US7889027B2 (en) 2005-09-09 2011-02-15 Sony Corporation Film bulk acoustic resonator shaped as an ellipse with a part cut off
JP4687345B2 (ja) * 2005-09-09 2011-05-25 ソニー株式会社 薄膜バルク音響共振器
JP4877966B2 (ja) * 2006-03-08 2012-02-15 日本碍子株式会社 圧電薄膜デバイス
JP4181185B2 (ja) 2006-04-27 2008-11-12 富士通メディアデバイス株式会社 フィルタおよび分波器
JP4252584B2 (ja) 2006-04-28 2009-04-08 富士通メディアデバイス株式会社 圧電薄膜共振器およびフィルタ
US7629865B2 (en) * 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
JP4719623B2 (ja) * 2006-05-31 2011-07-06 太陽誘電株式会社 フィルタ
JPWO2008093514A1 (ja) * 2007-02-02 2010-05-20 株式会社村田製作所 圧電薄膜共振子
JP5184179B2 (ja) * 2008-03-28 2013-04-17 京セラ株式会社 薄膜共振子、フィルタおよびデュプレクサ
JP5229945B2 (ja) * 2008-09-09 2013-07-03 太陽誘電株式会社 フィルタ、デュープレクサ、および通信装置
KR101104153B1 (ko) * 2010-08-20 2012-01-13 이규주 일회용 종이컵 소변기
JP2017158146A (ja) * 2016-03-04 2017-09-07 日本電波工業株式会社 水晶振動子
JP6755108B2 (ja) * 2016-03-23 2020-09-16 日本電波工業株式会社 水晶振動子
TWI578698B (zh) * 2016-04-11 2017-04-11 穩懋半導體股份有限公司 體聲波共振器之共振結構
JP6791766B2 (ja) * 2017-01-17 2020-11-25 日本電波工業株式会社 圧電振動片及び圧電デバイス
CN108649920B (zh) * 2017-12-29 2021-12-03 苏州汉天下电子有限公司 压电声波谐振器、压电声波滤波器、双工器及射频通信模块
JP7337331B2 (ja) * 2019-06-17 2023-09-04 株式会社村田製作所 共振子及び共振装置
US11595022B2 (en) * 2019-07-31 2023-02-28 Samsung Electro-Mechanics Co., Ltd. Bulk-acoustic wave resonator
CN111654261B (zh) * 2020-04-21 2021-08-10 诺思(天津)微***有限责任公司 体声波谐振器及其设计方法、滤波器、电子设备
CN112202415B (zh) * 2020-09-25 2021-09-24 杭州星阖科技有限公司 一种体声波谐振器的制造工艺方法和体声波谐振器
CN114301411B (zh) * 2021-09-23 2023-02-17 武汉敏声新技术有限公司 一种体声波谐振器和体声波滤波器

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Also Published As

Publication number Publication date
KR20030060818A (ko) 2003-07-16
GB0300310D0 (en) 2003-02-05
JP2003273693A (ja) 2003-09-26
CN1248414C (zh) 2006-03-29
GB2383906B (en) 2003-12-10
CN1431777A (zh) 2003-07-23
JP3969224B2 (ja) 2007-09-05
US20030127945A1 (en) 2003-07-10
US6914368B2 (en) 2005-07-05
GB2383906A (en) 2003-07-09
FR2834593A1 (fr) 2003-07-11
KR100505717B1 (ko) 2005-08-04

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