FR2834593B1 - Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant - Google Patents
Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluantInfo
- Publication number
- FR2834593B1 FR2834593B1 FR0300128A FR0300128A FR2834593B1 FR 2834593 B1 FR2834593 B1 FR 2834593B1 FR 0300128 A FR0300128 A FR 0300128A FR 0300128 A FR0300128 A FR 0300128A FR 2834593 B1 FR2834593 B1 FR 2834593B1
- Authority
- FR
- France
- Prior art keywords
- piezoelectric
- vibrator
- substrate
- thin film
- duplexer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 239000010409 thin film Substances 0.000 abstract 3
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 abstract 2
- 230000010355 oscillation Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Un résonateur piézoélectrique inclut un substrat (2) et un vibrateur (7). Le vibrateur inclut une partie en film mince qui comporte au moins une couche en film mince piézoélectrique (4) qui est disposée sur le substrat et au moins une paire d'électrodes supérieure et inférieure (6, 5) qui sont disposées sur le substrat. Le vibrateur présente une structure selon laquelle la partie en film mince est prise en sandwich entre ses surfaces supérieure et inférieure par les électrodes supérieure et inférieure qui sont opposées l'une à l'autre suivant la direction de profondeur et la partie en chevauchement du vibrateur qui est définie par les électrodes supérieure et inférieure opposées présente une forme tétragonale tel que vu suivant la direction de profondeur autre qu'un rectangle et qu'un carré, la forme tétragonale comportant des côtés sensiblement parallèles présentant une longueur longitudinale égale ou inférieure à environ 10 fois la longueur d'onde oscillation et présentant également au moins une partie dans laquelle la distance entre des bords d'électrode opposés varie.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002001330 | 2002-01-08 | ||
JP2002201766A JP3969224B2 (ja) | 2002-01-08 | 2002-07-10 | 圧電共振子及びそれを用いた圧電フィルタ・デュプレクサ・通信装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2834593A1 FR2834593A1 (fr) | 2003-07-11 |
FR2834593B1 true FR2834593B1 (fr) | 2006-01-20 |
Family
ID=26625445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0300128A Expired - Lifetime FR2834593B1 (fr) | 2002-01-08 | 2003-01-08 | Resonateur piezoelectrique et filtre piezoelectrique, duplexeur et appareil de communication l'incluant |
Country Status (6)
Country | Link |
---|---|
US (1) | US6914368B2 (fr) |
JP (1) | JP3969224B2 (fr) |
KR (1) | KR100505717B1 (fr) |
CN (1) | CN1248414C (fr) |
FR (1) | FR2834593B1 (fr) |
GB (1) | GB2383906B (fr) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
PL362605A1 (en) * | 2000-11-27 | 2004-11-02 | The Procter & Gamble Company | Dishwashing method |
US20040027030A1 (en) * | 2002-08-08 | 2004-02-12 | Li-Peng Wang | Manufacturing film bulk acoustic resonator filters |
JP4024741B2 (ja) | 2003-10-20 | 2007-12-19 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びフィルタ |
JP2005260915A (ja) * | 2004-02-09 | 2005-09-22 | Murata Mfg Co Ltd | 分波器、通信機 |
JP4149416B2 (ja) * | 2004-05-31 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子およびフィルタならびにそれらの製造方法 |
US7161448B2 (en) * | 2004-06-14 | 2007-01-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancements using recessed region |
JP4535841B2 (ja) * | 2004-10-28 | 2010-09-01 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びこれを用いたフィルタ |
JP4149444B2 (ja) | 2005-01-12 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子及びこれを用いたフィルタ |
JP4696597B2 (ja) * | 2005-03-03 | 2011-06-08 | 宇部興産株式会社 | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
JP4617936B2 (ja) * | 2005-03-14 | 2011-01-26 | ソニー株式会社 | 圧電共振素子の製造方法および圧電共振素子 |
JP4550658B2 (ja) * | 2005-04-28 | 2010-09-22 | 富士通メディアデバイス株式会社 | 圧電薄膜共振器およびフィルタ |
JP4508241B2 (ja) | 2005-06-02 | 2010-07-21 | 株式会社村田製作所 | 圧電共振子及び圧電薄膜フィルタ |
JP4476903B2 (ja) * | 2005-08-24 | 2010-06-09 | 株式会社東芝 | 薄膜圧電共振器およびフィルタ回路 |
WO2007026397A1 (fr) * | 2005-08-30 | 2007-03-08 | Kyocera Corporation | Élément résonnant piézoélectrique et résonateur piézoélectrique l'utilisant |
US7889027B2 (en) | 2005-09-09 | 2011-02-15 | Sony Corporation | Film bulk acoustic resonator shaped as an ellipse with a part cut off |
JP4687345B2 (ja) * | 2005-09-09 | 2011-05-25 | ソニー株式会社 | 薄膜バルク音響共振器 |
JP4877966B2 (ja) * | 2006-03-08 | 2012-02-15 | 日本碍子株式会社 | 圧電薄膜デバイス |
JP4181185B2 (ja) | 2006-04-27 | 2008-11-12 | 富士通メディアデバイス株式会社 | フィルタおよび分波器 |
JP4252584B2 (ja) | 2006-04-28 | 2009-04-08 | 富士通メディアデバイス株式会社 | 圧電薄膜共振器およびフィルタ |
US7629865B2 (en) * | 2006-05-31 | 2009-12-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters |
JP4719623B2 (ja) * | 2006-05-31 | 2011-07-06 | 太陽誘電株式会社 | フィルタ |
JPWO2008093514A1 (ja) * | 2007-02-02 | 2010-05-20 | 株式会社村田製作所 | 圧電薄膜共振子 |
JP5184179B2 (ja) * | 2008-03-28 | 2013-04-17 | 京セラ株式会社 | 薄膜共振子、フィルタおよびデュプレクサ |
JP5229945B2 (ja) * | 2008-09-09 | 2013-07-03 | 太陽誘電株式会社 | フィルタ、デュープレクサ、および通信装置 |
KR101104153B1 (ko) * | 2010-08-20 | 2012-01-13 | 이규주 | 일회용 종이컵 소변기 |
JP2017158146A (ja) * | 2016-03-04 | 2017-09-07 | 日本電波工業株式会社 | 水晶振動子 |
JP6755108B2 (ja) * | 2016-03-23 | 2020-09-16 | 日本電波工業株式会社 | 水晶振動子 |
TWI578698B (zh) * | 2016-04-11 | 2017-04-11 | 穩懋半導體股份有限公司 | 體聲波共振器之共振結構 |
JP6791766B2 (ja) * | 2017-01-17 | 2020-11-25 | 日本電波工業株式会社 | 圧電振動片及び圧電デバイス |
CN108649920B (zh) * | 2017-12-29 | 2021-12-03 | 苏州汉天下电子有限公司 | 压电声波谐振器、压电声波滤波器、双工器及射频通信模块 |
JP7337331B2 (ja) * | 2019-06-17 | 2023-09-04 | 株式会社村田製作所 | 共振子及び共振装置 |
US11595022B2 (en) * | 2019-07-31 | 2023-02-28 | Samsung Electro-Mechanics Co., Ltd. | Bulk-acoustic wave resonator |
CN111654261B (zh) * | 2020-04-21 | 2021-08-10 | 诺思(天津)微***有限责任公司 | 体声波谐振器及其设计方法、滤波器、电子设备 |
CN112202415B (zh) * | 2020-09-25 | 2021-09-24 | 杭州星阖科技有限公司 | 一种体声波谐振器的制造工艺方法和体声波谐振器 |
CN114301411B (zh) * | 2021-09-23 | 2023-02-17 | 武汉敏声新技术有限公司 | 一种体声波谐振器和体声波滤波器 |
Family Cites Families (22)
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US4123680A (en) * | 1977-05-26 | 1978-10-31 | Tyco Crystal Products, Inc. | Piezoelectric quartz crystal products and fabrication methods therefor |
JPS6013608B2 (ja) * | 1979-03-12 | 1985-04-08 | 株式会社精工舎 | 厚みすべり圧電振動子 |
CH683050A5 (fr) | 1991-06-04 | 1993-12-31 | Suisse Electronique Microtech | Résonateur à quartz vibrant selon un mode fondamental de torsion. |
JPH08148968A (ja) * | 1994-11-24 | 1996-06-07 | Mitsubishi Electric Corp | 薄膜圧電素子 |
US5903087A (en) * | 1997-06-05 | 1999-05-11 | Motorola Inc. | Electrode edge wave patterns for piezoelectric resonator |
JPH11168343A (ja) | 1997-12-04 | 1999-06-22 | Murata Mfg Co Ltd | 厚み縦圧電共振子 |
US6150703A (en) * | 1998-06-29 | 2000-11-21 | Trw Inc. | Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials |
US6215375B1 (en) | 1999-03-30 | 2001-04-10 | Agilent Technologies, Inc. | Bulk acoustic wave resonator with improved lateral mode suppression |
JP3723697B2 (ja) | 1999-05-31 | 2005-12-07 | 京セラ株式会社 | 圧電共振子 |
JP2001211052A (ja) | 2000-01-26 | 2001-08-03 | Murata Mfg Co Ltd | 圧電共振子 |
JP2001223556A (ja) | 2000-02-14 | 2001-08-17 | Ueda Japan Radio Co Ltd | 圧電振動子及びアレイ型圧電振動子 |
JP2001251159A (ja) | 2000-03-08 | 2001-09-14 | Mitsubishi Electric Corp | 薄膜圧電素子及びその製造方法 |
KR100349126B1 (ko) * | 2000-05-04 | 2002-08-17 | 삼성전기주식회사 | 형광등용 압전트랜스포머 |
US6420202B1 (en) | 2000-05-16 | 2002-07-16 | Agere Systems Guardian Corp. | Method for shaping thin film resonators to shape acoustic modes therein |
EP1170862B1 (fr) | 2000-06-23 | 2012-10-10 | Murata Manufacturing Co., Ltd. | Résonateur piézoélectrique et filtre piézoélectrique comprenant le même |
JP3498682B2 (ja) | 2000-06-23 | 2004-02-16 | 株式会社村田製作所 | 圧電共振子およびそれを用いた圧電フィルタ |
JP3881503B2 (ja) | 2000-09-29 | 2007-02-14 | 京セラ株式会社 | 圧電振動子及びそれを搭載した圧電デバイス |
DE10058339A1 (de) | 2000-11-24 | 2002-06-06 | Infineon Technologies Ag | Bulk-Acoustic-Wave-Filter |
TW523582B (en) * | 2000-11-24 | 2003-03-11 | Shr-Guang Li | Fourth-order partial differential equation piezoelectric transducer with mutually independent gain and phase functions |
JP2002374144A (ja) | 2001-06-15 | 2002-12-26 | Ube Electronics Ltd | 薄膜圧電共振器 |
KR100398365B1 (ko) * | 2001-06-25 | 2003-09-19 | 삼성전기주식회사 | 폭방향 파동이 억제되는 박막 공진기 |
US6448699B1 (en) * | 2001-08-31 | 2002-09-10 | Cts Corporation | Octagonal electrode for crystals |
-
2002
- 2002-07-10 JP JP2002201766A patent/JP3969224B2/ja not_active Expired - Lifetime
- 2002-12-12 US US10/317,145 patent/US6914368B2/en not_active Expired - Lifetime
-
2003
- 2003-01-07 GB GB0300310A patent/GB2383906B/en not_active Expired - Lifetime
- 2003-01-08 FR FR0300128A patent/FR2834593B1/fr not_active Expired - Lifetime
- 2003-01-08 CN CNB031010334A patent/CN1248414C/zh not_active Expired - Lifetime
- 2003-01-08 KR KR10-2003-0001131A patent/KR100505717B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20030060818A (ko) | 2003-07-16 |
GB0300310D0 (en) | 2003-02-05 |
JP2003273693A (ja) | 2003-09-26 |
CN1248414C (zh) | 2006-03-29 |
GB2383906B (en) | 2003-12-10 |
CN1431777A (zh) | 2003-07-23 |
JP3969224B2 (ja) | 2007-09-05 |
US20030127945A1 (en) | 2003-07-10 |
US6914368B2 (en) | 2005-07-05 |
GB2383906A (en) | 2003-07-09 |
FR2834593A1 (fr) | 2003-07-11 |
KR100505717B1 (ko) | 2005-08-04 |
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