FR2632361B1 - Pompe turbomoleculaire a vide - Google Patents

Pompe turbomoleculaire a vide

Info

Publication number
FR2632361B1
FR2632361B1 FR888807570A FR8807570A FR2632361B1 FR 2632361 B1 FR2632361 B1 FR 2632361B1 FR 888807570 A FR888807570 A FR 888807570A FR 8807570 A FR8807570 A FR 8807570A FR 2632361 B1 FR2632361 B1 FR 2632361B1
Authority
FR
France
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR888807570A
Other languages
English (en)
French (fr)
Other versions
FR2632361A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHARSHIN SERGEI
SHOLOKHOV VALERY
Original Assignee
SHARSHIN SERGEI
SHOLOKHOV VALERY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHARSHIN SERGEI, SHOLOKHOV VALERY filed Critical SHARSHIN SERGEI
Publication of FR2632361A1 publication Critical patent/FR2632361A1/fr
Application granted granted Critical
Publication of FR2632361B1 publication Critical patent/FR2632361B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Junction Field-Effect Transistors (AREA)
FR888807570A 1988-03-30 1988-06-07 Pompe turbomoleculaire a vide Expired - Fee Related FR2632361B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (en) 1988-03-30 1988-03-30 Turbomolecular vacuum pump

Publications (2)

Publication Number Publication Date
FR2632361A1 FR2632361A1 (fr) 1989-12-08
FR2632361B1 true FR2632361B1 (fr) 1992-05-07

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888807570A Expired - Fee Related FR2632361B1 (fr) 1988-03-30 1988-06-07 Pompe turbomoleculaire a vide

Country Status (7)

Country Link
JP (1) JPH02503703A (fi)
CH (1) CH676378A5 (fi)
DE (1) DE3891280T1 (fi)
FI (1) FI895719A0 (fi)
FR (1) FR2632361B1 (fi)
GB (1) GB2230562B (fi)
WO (1) WO1989009341A1 (fi)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (fi) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (fi) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
DE3891280T1 (de) 1990-04-05
GB8926400D0 (en) 1990-08-01
FR2632361A1 (fr) 1989-12-08
JPH02503703A (ja) 1990-11-01
FI895719A0 (fi) 1989-11-29
GB2230562B (en) 1991-09-11
WO1989009341A1 (en) 1989-10-05
GB2230562A (en) 1990-10-24
CH676378A5 (fi) 1991-01-15

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Legal Events

Date Code Title Description
ST Notification of lapse