DE68903355D1 - Vakuumpumpen. - Google Patents
Vakuumpumpen.Info
- Publication number
- DE68903355D1 DE68903355D1 DE8989303810T DE68903355T DE68903355D1 DE 68903355 D1 DE68903355 D1 DE 68903355D1 DE 8989303810 T DE8989303810 T DE 8989303810T DE 68903355 T DE68903355 T DE 68903355T DE 68903355 D1 DE68903355 D1 DE 68903355D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pumps
- pumps
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB888809621A GB8809621D0 (en) | 1988-04-22 | 1988-04-22 | Dry pump with closed loop filter |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68903355D1 true DE68903355D1 (de) | 1992-12-10 |
DE68903355T2 DE68903355T2 (de) | 1993-03-18 |
Family
ID=10635708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8989303810T Expired - Fee Related DE68903355T2 (de) | 1988-04-22 | 1989-04-18 | Vakuumpumpen. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4995794A (de) |
EP (1) | EP0338764B1 (de) |
JP (1) | JP2608605B2 (de) |
DE (1) | DE68903355T2 (de) |
ES (1) | ES2035556T3 (de) |
GB (1) | GB8809621D0 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3876243D1 (de) * | 1988-10-24 | 1993-01-07 | Leybold Ag | Zweiwellenvakuumpumpe mit schoepfraum. |
EP0448750B1 (de) * | 1990-03-27 | 1996-05-01 | Leybold Aktiengesellschaft | Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb |
FR2670839A1 (fr) * | 1990-12-21 | 1992-06-26 | Cit Alcatel | Machine, telle que pompe a vide ou compresseur du type volumetrique ou a entrainement. |
US5356275A (en) * | 1991-03-04 | 1994-10-18 | Leybold Aktiengesellschaft | Device for supplying a multi-stage dry-running vacuum pump with inert gas |
FR2691382B1 (fr) * | 1992-05-22 | 1994-09-09 | Cit Alcatel | Installation de pompage pour pomper une enceinte contenant des gaz mélangés à des particules solides ou susceptibles de générer des particules ou condensats solides. |
US5449454A (en) * | 1993-01-13 | 1995-09-12 | Aquaria, Inc. | Gas expelling device for a canister type filter |
JP2922181B1 (ja) | 1998-01-26 | 1999-07-19 | 株式会社宇野澤組鐵工所 | 粉体捕集機能を有する真空ポンプ装置 |
WO2005028871A1 (en) * | 2003-09-23 | 2005-03-31 | The Boc Group Plc | Cleaning method of a rotary piston vacuum pump |
US7094036B2 (en) * | 2003-09-24 | 2006-08-22 | The Boc Group Plc | Vacuum pumping system |
GB0519742D0 (en) * | 2005-09-28 | 2005-11-09 | Boc Group Plc | Method of pumping gas |
DE102007001316B4 (de) * | 2007-01-02 | 2009-02-05 | Deutsche Mechatronics Gmbh | Entstaubungsvorrichtung und Verfahren zur Entstaubung, insbesondere von Bandanlagen |
GB0922564D0 (en) * | 2009-12-24 | 2010-02-10 | Edwards Ltd | Pump |
US20120140166A1 (en) | 2010-12-07 | 2012-06-07 | Abbott Medical Optics Inc. | Pupil dependent diffractive lens for near, intermediate, and far vision |
GB2499217A (en) * | 2012-02-08 | 2013-08-14 | Edwards Ltd | Vacuum pump with recirculation valve |
FR2993614B1 (fr) * | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | Procede et dispositif de pompage d'une chambre de procedes |
BE1023207B1 (nl) * | 2015-01-15 | 2016-12-21 | Atlas Copco Airpower Naamloze Vennootschap | Werkwijze voor het regelen van een gastoevoer naar een vacuümpomp |
EP4027016A1 (de) * | 2015-01-15 | 2022-07-13 | ATLAS COPCO AIRPOWER, naamloze vennootschap | Verfahren zur regelung der geschwindigkeit eines verdichters/einer vakuumpumpe |
BR112017014960B1 (pt) | 2015-01-15 | 2022-10-04 | Atlas Copco Airpower, Naamloze Vennootschap | Método para regular a temperatura em um canal de saída, controlador para controlar o fornecimento de um gás de purga em um canal de entrada, bomba de vácuo e uso de um controlador |
JP6935216B2 (ja) * | 2017-03-31 | 2021-09-15 | 株式会社荏原製作所 | ルーツ型真空ポンプ |
DE102018203992A1 (de) * | 2018-03-15 | 2019-09-19 | Gardner Denver Schopfheim Gmbh | Drehkolbenmaschine |
FR3086705B1 (fr) * | 2018-09-27 | 2020-10-23 | Pfeiffer Vacuum | Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2148671A (en) * | 1937-01-08 | 1939-02-28 | Fred L Allen | Fluid injector |
US3168236A (en) * | 1963-09-05 | 1965-02-02 | Jaeger Machine Co | Oil scavenging system for a rotary compressor |
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
GB1509376A (en) * | 1975-07-18 | 1978-05-04 | Wdm Ltd | Gas ballast for vacuum pumps |
GB2088957B (en) * | 1980-12-05 | 1984-12-12 | Boc Ltd | Rotary positive-displacement fluidmachines |
IT1135031B (it) * | 1981-01-14 | 1986-08-20 | Generalvacuum Spa | Perfezionamenti nelle o relativi alle pompe a capsulismo |
US4534699A (en) * | 1983-06-22 | 1985-08-13 | Possell Clarence P | Coal fired turbine |
JPS60256584A (ja) * | 1984-05-30 | 1985-12-18 | Honjiyou Chem Kk | 高真空装置 |
JPS62153597A (ja) * | 1985-12-27 | 1987-07-08 | Hitachi Ltd | 真空ポンプ |
-
1988
- 1988-04-22 GB GB888809621A patent/GB8809621D0/en active Pending
-
1989
- 1989-04-18 DE DE8989303810T patent/DE68903355T2/de not_active Expired - Fee Related
- 1989-04-18 ES ES198989303810T patent/ES2035556T3/es not_active Expired - Lifetime
- 1989-04-18 EP EP89303810A patent/EP0338764B1/de not_active Expired - Lifetime
- 1989-04-21 US US07/341,528 patent/US4995794A/en not_active Expired - Lifetime
- 1989-04-24 JP JP1104372A patent/JP2608605B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH01315682A (ja) | 1989-12-20 |
EP0338764B1 (de) | 1992-11-04 |
JP2608605B2 (ja) | 1997-05-07 |
GB8809621D0 (en) | 1988-05-25 |
DE68903355T2 (de) | 1993-03-18 |
EP0338764A2 (de) | 1989-10-25 |
US4995794A (en) | 1991-02-26 |
ES2035556T3 (es) | 1993-04-16 |
EP0338764A3 (en) | 1990-03-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |