ES464266A1 - Method and apparatus for control of electroless plating solutions - Google Patents
Method and apparatus for control of electroless plating solutionsInfo
- Publication number
- ES464266A1 ES464266A1 ES464266A ES464266A ES464266A1 ES 464266 A1 ES464266 A1 ES 464266A1 ES 464266 A ES464266 A ES 464266A ES 464266 A ES464266 A ES 464266A ES 464266 A1 ES464266 A1 ES 464266A1
- Authority
- ES
- Spain
- Prior art keywords
- control
- electroless plating
- plating solutions
- electrodes
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
Abstract
A copper-plating bath operating without an external power supply can be controlled automatically by measuring, with the aid of two electrodes, of which one is positioned in bath fluid and serves as the deposition electrode and the other serves as the reference electrode, the mixed potential arising between the electrodes and employing this measurement for controlling and/or regulating one or more bath parameters.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US74411076A | 1976-11-22 | 1976-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES464266A1 true ES464266A1 (en) | 1978-08-01 |
Family
ID=24991471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES464266A Expired ES464266A1 (en) | 1976-11-22 | 1977-11-18 | Method and apparatus for control of electroless plating solutions |
Country Status (14)
Country | Link |
---|---|
JP (1) | JPS5365226A (en) |
AT (1) | AT354213B (en) |
AU (1) | AU512805B2 (en) |
CA (1) | CA1112523A (en) |
CH (1) | CH637995A5 (en) |
DE (2) | DE2751104A1 (en) |
ES (1) | ES464266A1 (en) |
FR (1) | FR2371522A1 (en) |
GB (1) | GB1588758A (en) |
IL (1) | IL53298A (en) |
IT (1) | IT1116376B (en) |
NL (1) | NL7712683A (en) |
SE (1) | SE442410B (en) |
ZA (1) | ZA775495B (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5953348B2 (en) * | 1977-12-16 | 1984-12-24 | 株式会社日立製作所 | Automatic management method and device for main components of chemical copper plating solution |
US4276323A (en) * | 1979-12-21 | 1981-06-30 | Hitachi, Ltd. | Process for controlling of chemical copper plating solution |
JPS6096767A (en) * | 1983-10-31 | 1985-05-30 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Copper plating process |
US4707377A (en) * | 1983-10-31 | 1987-11-17 | International Business Machines Corporation | Copper plating |
JPS61110799A (en) * | 1984-10-30 | 1986-05-29 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | Controller of metal plating cell |
US4623554A (en) * | 1985-03-08 | 1986-11-18 | International Business Machines Corp. | Method for controlling plating rate in an electroless plating system |
ES2039403T3 (en) * | 1986-10-31 | 1993-10-01 | Amp-Akzo Corporation (A Delaware Corp.) | METHOD FOR DEPOSITING WITHOUT ELECTRICITY HIGH QUALITY COPPER. |
US4908242A (en) * | 1986-10-31 | 1990-03-13 | Kollmorgen Corporation | Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
US4774101A (en) * | 1986-12-10 | 1988-09-27 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Automated method for the analysis and control of the electroless metal plating solution |
JPS63149278U (en) * | 1987-03-19 | 1988-09-30 | ||
DE3718584A1 (en) * | 1987-06-03 | 1988-12-15 | Norddeutsche Affinerie | METHOD FOR MEASURING THE ACTIVE INHIBITOR CONCENTRATION DURING METAL DEPOSITION FROM AQUEOUS ELECTROLYTE |
US4842886A (en) * | 1987-11-04 | 1989-06-27 | International Business Machines Corporation | Method for electroless plating |
AU3304389A (en) * | 1988-04-29 | 1989-11-02 | Kollmorgen Corporation | Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
GB2225026A (en) * | 1988-11-22 | 1990-05-23 | American Chem & Refining Co | Electroless gold plating composition |
JP2005206931A (en) | 2003-12-26 | 2005-08-04 | Sumitomo Electric Ind Ltd | Method for producing metal powder |
JP5116068B2 (en) * | 2004-09-07 | 2013-01-09 | Jx日鉱日石金属株式会社 | Method for stabilizing electroless gold plating solution |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3375178A (en) * | 1964-05-28 | 1968-03-26 | Continental Oil Co | Method of confirming the occurrence of plating in electroless nickel-plating |
FR1522048A (en) * | 1966-05-06 | 1968-04-19 | Photocircuits Corp | Non-galvanic deposit of metals |
JPS5921386B2 (en) * | 1976-04-13 | 1984-05-19 | 株式会社東芝 | Automatic plating speed control method for electroless plating |
-
1977
- 1977-09-13 ZA ZA00775495A patent/ZA775495B/en unknown
- 1977-11-03 IL IL53298A patent/IL53298A/en unknown
- 1977-11-11 DE DE19772751104 patent/DE2751104A1/en not_active Ceased
- 1977-11-11 DE DE2759952A patent/DE2759952C2/en not_active Expired
- 1977-11-17 NL NL7712683A patent/NL7712683A/en not_active Application Discontinuation
- 1977-11-18 CA CA291,214A patent/CA1112523A/en not_active Expired
- 1977-11-18 ES ES464266A patent/ES464266A1/en not_active Expired
- 1977-11-18 AT AT827777A patent/AT354213B/en not_active IP Right Cessation
- 1977-11-18 AU AU30760/77A patent/AU512805B2/en not_active Expired
- 1977-11-21 GB GB48323/77A patent/GB1588758A/en not_active Expired
- 1977-11-21 CH CH1419677A patent/CH637995A5/en not_active IP Right Cessation
- 1977-11-22 SE SE7713192A patent/SE442410B/en not_active IP Right Cessation
- 1977-11-22 IT IT51901/77A patent/IT1116376B/en active
- 1977-11-22 FR FR7734995A patent/FR2371522A1/en active Granted
- 1977-11-22 JP JP14147477A patent/JPS5365226A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
ZA775495B (en) | 1978-07-26 |
AU512805B2 (en) | 1980-10-30 |
AU3076077A (en) | 1979-05-24 |
ATA827777A (en) | 1979-05-15 |
IT1116376B (en) | 1986-02-10 |
DE2751104A1 (en) | 1978-05-24 |
FR2371522A1 (en) | 1978-06-16 |
JPS5365226A (en) | 1978-06-10 |
NL7712683A (en) | 1978-05-24 |
JPS5753857B2 (en) | 1982-11-15 |
SE442410B (en) | 1985-12-23 |
SE7713192L (en) | 1978-05-23 |
FR2371522B1 (en) | 1980-02-15 |
IL53298A (en) | 1981-02-27 |
IL53298A0 (en) | 1978-01-31 |
GB1588758A (en) | 1981-04-29 |
AT354213B (en) | 1979-12-27 |
CH637995A5 (en) | 1983-08-31 |
DE2759952C2 (en) | 1984-03-08 |
CA1112523A (en) | 1981-11-17 |
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