JP6716656B2 - ターボ分子真空ポンプ - Google Patents

ターボ分子真空ポンプ Download PDF

Info

Publication number: JP6716656B2
Authority: JP; Japan
Prior art keywords: rotor; vacuum pump; blade; pump; bearing
Prior art date: 2017-10-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2018183168A

Other languages

English (en)

Japanese (ja)

Other versions

JP2019065857A (ja

Inventor

ミルコ・メコタ

Original Assignee

プファイファー・ヴァキューム・ゲーエムベーハー

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2017-10-02

Filing date

2018-09-28

Publication date

2020-07-01

2018-09-28 Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー

2019-04-25 Publication of JP2019065857A publication Critical patent/JP2019065857A/ja

2020-07-01 Application granted granted Critical

2020-07-01 Publication of JP6716656B2 publication Critical patent/JP6716656B2/ja

Status Active legal-status Critical Current

2038-09-28 Anticipated expiration legal-status Critical

Links

238000001514 detection method Methods 0.000 claims 1
230000033001 locomotion Effects 0.000 description 17
239000007789 gas Substances 0.000 description 16
239000002826 coolant Substances 0.000 description 9
238000000034 method Methods 0.000 description 8
238000005086 pumping Methods 0.000 description 7
241000763859 Dyckia brevifolia Species 0.000 description 4
230000000694 effects Effects 0.000 description 4
238000004519 manufacturing process Methods 0.000 description 4
230000003245 working effect Effects 0.000 description 4
238000004140 cleaning Methods 0.000 description 3
239000000463 material Substances 0.000 description 3
238000007789 sealing Methods 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
238000005520 cutting process Methods 0.000 description 2
125000006850 spacer group Chemical group 0.000 description 2
241000251468 Actinopterygii Species 0.000 description 1
230000002745 absorbent Effects 0.000 description 1
239000002250 absorbent Substances 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
238000001816 cooling Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000000314 lubricant Substances 0.000 description 1
230000001050 lubricating effect Effects 0.000 description 1
238000003801 milling Methods 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
239000007858 starting material Substances 0.000 description 1

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/70—Shape

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

JP2018183168A 2017-10-02 2018-09-28 ターボ分子真空ポンプ Active JP6716656B2 (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
EP17194409.3A EP3462036B1 (fr)	2017-10-02	2017-10-02	Pompe à vide turbomoléculaire
EP17194409.3		2017-10-02

Publications (2)

Publication Number	Publication Date
JP2019065857A JP2019065857A (ja)	2019-04-25
JP6716656B2 true JP6716656B2 (ja)	2020-07-01

Family

ID=60019732

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2018183168A Active JP6716656B2 (ja)	2017-10-02	2018-09-28	ターボ分子真空ポンプ

Country Status (2)

Country	Link
EP (1)	EP3462036B1 (fr)
JP (1)	JP6716656B2 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60203375A (ja) *	1984-03-28	1985-10-14	Hitachi Ltd	タ−ボ分子ポンプのロ−タの製作方法
JPS6361799A (ja) *	1986-09-02	1988-03-17	Nippon Soken Inc	タ−ボ分子ポンプ
JP3160039B2 (ja) *	1991-08-22	2001-04-23	エヌティエヌ株式会社	ターボ分子ポンプと動翼の加工方法
DE102008056352A1 (de) *	2008-11-07	2010-05-12	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpenrotor
DE102014114326A1 (de) *	2014-10-02	2016-04-07	Pfeiffer Vacuum Gmbh	Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

2017
- 2017-10-02 EP EP17194409.3A patent/EP3462036B1/fr active Active
2018
- 2018-09-28 JP JP2018183168A patent/JP6716656B2/ja active Active

Also Published As

Publication number	Publication date
EP3462036A1 (fr)	2019-04-03
JP2019065857A (ja)	2019-04-25
EP3462036B1 (fr)	2024-04-03

Legal Events

Date	Code	Title	Description
2018-10-03	A621	Written request for application examination	Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181003
2019-10-01	A977	Report on retrieval	Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190927
2019-10-02	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191002
2019-12-26	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20191226
2020-02-28	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20200228
2020-03-30	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200330
2020-05-07	TRDD	Decision of grant or rejection written
2020-05-13	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200513
2020-06-12	A61	First payment of annual fees (during grant procedure)	Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200610
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