EP3462036A1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire Download PDF

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Publication number
EP3462036A1
EP3462036A1 EP17194409.3A EP17194409A EP3462036A1 EP 3462036 A1 EP3462036 A1 EP 3462036A1 EP 17194409 A EP17194409 A EP 17194409A EP 3462036 A1 EP3462036 A1 EP 3462036A1
Authority
EP
European Patent Office
Prior art keywords
blade
vacuum pump
rotor
bearing
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17194409.3A
Other languages
German (de)
English (en)
Other versions
EP3462036B1 (fr
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17194409.3A priority Critical patent/EP3462036B1/fr
Priority to JP2018183168A priority patent/JP6716656B2/ja
Publication of EP3462036A1 publication Critical patent/EP3462036A1/fr
Application granted granted Critical
Publication of EP3462036B1 publication Critical patent/EP3462036B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the present invention relates to a turbomolecular vacuum pump comprising at least two adjacently arranged rotor disks, which each have a plurality of blades distributed in the circumferential direction, which each extend radially outward starting from a blade root.
  • the invention also relates to a method for producing a turbomolecular vacuum pump having at least two adjacent rotor disks, each of which has a plurality of circumferentially distributed blades which each extend radially outwardly from a blade root.
  • Turbomolecular vacuum pumps are used in various fields of technology to create a vacuum necessary for a particular process.
  • Turbomolecular vacuum pumps or turbomolecular pumps briefly comprise a stator with a plurality of stator disks successive in the direction of a rotor axis and a rotor mounted rotatably relative to the stator about the rotor axis, comprising a rotor shaft and a plurality of rotor disks arranged on the rotor shaft and consecutive in the axial direction and arranged between the stator disks, wherein the stator disks and the rotor disks each have a pump-active structure.
  • a blade bottom is to be understood as that region in which a respective blade of the rotor disk starts inside viewed in the radial direction. In the process, this blade root is always smooth or flat in the previously known rotor disks.
  • the object of the invention is to further optimize the contribution of the rotor disks, in particular with regard to the vacuum performance.
  • turbomolecular vacuum pump with the features of claim 1, and in particular the fact that at least one blade root of a respective rotor disc at least one, in particular tooth-like projection is provided.
  • Each of the at least two rotor disks of the pump thus has at least one blade root with a projection.
  • each of the at least two rotor disks can have projections according to the invention on a plurality of, in particular all, blade bottoms.
  • the contribution of the rotor disks to the performance of the vacuum pump and in particular to the vacuum performance is further optimized.
  • the gas to be delivered from a pump inlet to a pump outlet of the vacuum pump is also detected and set in rotation in the area of a respective blade root, thereby entering the entangled blade region in order to be transported further in the direction of the pump outlet become.
  • This ensures that the gas to be conveyed is also optimally captured by the rotating rotor disk in the region of a respective blade root, whereby the pumping action is correspondingly increased.
  • the projection is formed on a suction-side and / or pressure-side end of the blade root.
  • the projection can be formed particularly simply if it is formed in each case by a jump between two surfaces of the blade ground.
  • the surfaces can be formed, for example by machining, in particular by milling and / or sawing.
  • the surfaces and thus the projection each arise during the formation of the blades, in particular when sawing out the blades from a raw disk. Separate operations only for forming the projection are not required.
  • the vacuum performance is improved in a particularly simple manner.
  • the surfaces are flat. This further simplifies their production.
  • the projection may be pointed, for example pyramid-shaped, in particular as a triangular pyramid or by three converging surfaces.
  • the projection has a first side surface which extends at least substantially parallel to a first adjacent blade.
  • the projection can thus optimally co-operate with the blade vacuum technology.
  • such a projection, in particular the surface parallel to the blade can be produced particularly easily, for example with the same tool and / or the same working movement as the blade parallel thereto.
  • the projection in each case has a second side surface, which extends at least substantially perpendicular to a second adjacent blade. This avoids optimally a negative vacuum effect of the projection on this side surface with respect to the vertical blade.
  • the vertical surface can also be produced particularly easily, for example by machining, for example using the same tool and / or the same working movement as the blade which is perpendicular thereto.
  • the projection in each case has a third side surface, which extends at least substantially perpendicular to a rotor axis of the pump.
  • the third side surface may be flat and / or parallel to an end face of the rotor disk or form part of it.
  • first, second or third side surface or blade As far as a first, second or third side surface or blade is referred to, it should be understood that this is merely for the purpose of understanding and reference to the description of the figures below, but is not intended to be a matter of fact actual intended number Sides or blades refers. In this respect, for example, only one side surface perpendicular to the rotor axis and / or one side surface perpendicular to an adjacent blade can be provided on the projection.
  • two projections which are opposite one another in the pumping direction are formed on the blade bottom.
  • the projections each form a front face of the rotor disk with a side face and / or coincide with such.
  • the projections may be arranged symmetrically and / or formed.
  • the performance is further improved if, according to a further embodiment, the projections are inclined in opposite directions with respect to a circumference of the respective rotor disk.
  • a projection arranged on the pressure side may have at least one component in the direction of rotation point.
  • a projection arranged on the suction side can face at least one component counter to the direction of rotation.
  • the pump may have a bearing for a rotor bearing the rotor disks, wherein a first bearing of the bearing as a rolling bearing and a second bearing of the bearing are designed as a magnetic bearing.
  • a first bearing of the bearing as a rolling bearing
  • a second bearing of the bearing are designed as a magnetic bearing.
  • storage is also called a hybrid storage.
  • the turbomolecular vacuum pump can be produced and operated particularly advantageously if the rotor disks are combined to form a common component.
  • the object of the invention is also achieved by a method according to claim 10, and in particular by the fact that on at least one blade root of a respective rotor disk at least one, in particular tooth-like, projection is formed.
  • the blades, in each case including the projection are produced by cutting, in particular by sawing out, from a raw disk.
  • the projection can be produced in a particularly simple and cost-effective manner by being formed by two working movements of a machining tool which form two surfaces on the blade base and the projection as a jump between the surfaces.
  • the surfaces are formed as against each other, in particular light, skewed planes.
  • a development provides that in each case an upper side of a first blade and an opposite lower side of an adjacent blade are formed by a respective one of two working movements of a machining tool.
  • a first of two working movements produces a first side surface of a first projection and a second side surface of a second projection and / or a second of two working movements a second side surface of a first projection and a first side surface of a second projection.
  • a respective working movement can be linear.
  • the working movements can thus be particularly easily planned or programmed.
  • a respective working movement can, for example, run transversely through a raw disk provided for the rotor disk.
  • a working movement may include passing through a raw disk.
  • the working movements have different directions of movement.
  • the working movements for example, with respect to each other, in particular light, have tilted trajectories and / or run along wind-slippery lines.
  • the working movements may have a different angle with respect to the rotor disks.
  • turbomolecular vacuum pump according to the invention can also be developed advantageously in the sense of the embodiments of the method according to the invention described herein, and vice versa.
  • turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected.
  • the gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.
  • the inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally.
  • Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump.
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.
  • a flood inlet 133 On the housing 119 of the turbomolecular pump 111, a flood inlet 133, in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as flushing gas connection is arranged, via which flushing gas for protecting the electric motor 125 from the gas conveyed by the pump into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 housed, can be brought.
  • two coolant connections 139 are further arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.
  • the lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended.
  • the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.
  • a bearing cap 145 is attached to the bottom 141.
  • mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.
  • Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage.
  • the stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.
  • the vacuum pump further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and forms with it the first Holweck pump stage subsequent to the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 is the radial outer surface of the inner Holweck rotor sleeve 165 with formation of a radial Holweck gap 175 and forms with this the third Holweck pumping stage.
  • a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.
  • a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153.
  • the spray nut 185 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of absorbent discs 187 stacked on top of each other and impregnated with a rolling bearing bearing means 181, eg with a lubricant.
  • the operating means is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and due to the centrifugal force along the spray nut 185 in the direction of increasing outer diameter of the injection nut 92 to the roller bearing 181 out promoted, where eg fulfills a lubricating function.
  • the rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.
  • the permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include.
  • the ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153.
  • the rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support portion 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a lid element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.
  • an emergency bearing 215 which runs empty in the normal operation of the vacuum pump 111 without contact and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149th to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation.
  • the radial deflection at which the safety bearing 215 engages is dimensioned large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217.
  • On the extending through the motor stator 217 through portion of the rotor shaft 153 may be arranged radially outside or embedded a permanent magnet arrangement.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137.
  • the electric motor 125 before process gas, eg before corrosive fractions of the process gas to be protected.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing pump connected to the pump outlet 117.
  • delimiting wall 221 Between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called. And per se known labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.
  • Fig. 6 shows a portion of a rotor disk 300 of the prior art in a plan view and a view with a line of sight parallel to a rotor axis, not shown.
  • the rotor disk 300 has a plurality of circumferentially distributed blades 302, between which respective blade roots 304 are formed.
  • a respective blade root 304 is substantially uniform and round, connecting respective top and bottom surfaces of adjacent blades 302.
  • FIG. 7 Two inventively designed rotor disks 400 of a turbomolecular vacuum pump according to the invention are characterized by Fig. 7 shown in a perspective view.
  • a respective rotor disk 400 likewise has a plurality of circumferentially distributed blades 402, of which a first blade 402a and a second blade 402b are used by way of example to describe the invention.
  • the blades 402a and 402b are connected by a blade root 404.
  • the blade root 404 is formed by two flat surfaces 406a and 406b.
  • the surface 406a is perpendicular to a top 408 of the first blade 402a.
  • the surface 406b is perpendicular to a bottom 410 of the second blade 402b.
  • the surfaces 406a and 406b are like the top 408 and the bottom 410 against each other slightly skewed.
  • the blade root 404 has two projections 412a and 412b formed as symmetrically arranged and formed protrusions.
  • the teeth 412a and 412b are formed as a jump between the two surfaces 406a and 406b.
  • the tooth 412 a is attached to the rotor disk 400 on the pressure side, and the tooth 412 b is attached to the rotor disk 400 on the suction side.
  • the pump-active structure that is to say the blades 402 and the blade base 404, are sawn out of a raw disk.
  • a rotating circular saw blade is moved through the raw disk in two working movements in order to form a top side 408 of the blade 402a, the blade base 404 and the bottom side 410 of the blade 402b.
  • first working movement which runs linearly, the surface 406a and the surface 408 of the blade 402a are respectively formed flat by the saw blade.
  • material is left opposite the surface 408, which forms the tooth 412a in conjunction with a second working movement forming the surface 406b.
  • the tooth 412a thus has a distance to the surface 408, which in particular corresponds to the width of the saw blade used.
  • a first side surface 414a runs parallel to the upper side 408 of the blade 402a.
  • the second surface 406b is formed together with the underside 410 of the blade 402b by a second, likewise linear working movement with a circular saw, in particular the same circular saw.
  • the second working movement is slightly skewed to the first working movement with respect to the rotor disk.
  • the circular saw blade leaves against the bottom 410 material which forms the tooth 412b in connection with the first working movement.
  • the tooth 412b has a first side surface 414a, which parallel to the opposite blade surface, here the bottom 410 of the blade 402b and at a distance corresponding to a tool diameter.
  • first and the second working movement need not be performed in the order named.
  • the first working movement can first be carried out for several or all blades and then the second working movement can be carried out for several or all blades.
  • first the second working movement and then the first working movement can again be carried out for one, several or all blades.
  • the tooth 412a used by way of example for the teeth 412, is designed essentially as a triangular pyramid and points with a point in the circumferential direction, here in a direction of rotation of the rotor disk 400, while the tooth 412b points counter to this direction of rotation.
  • the tooth 412a has a second side surface 416a which is parallel to the underside 410 of the blade 402b and coincides with the surface 406b, which was thus formed by the second working movement.
  • a third side surface 418a of the tooth 412a coincides with an end face of the rotor disk 400.
  • the tooth 412b is correspondingly formed, but a second side surface 416b of the tooth 412b coincides with the surface 406a and was formed during the first working movement.
  • a third side surface of the tooth 412b coincides with a suction side end side of the rotor disk 400, but is in the Fig. 7 not visible due to the selected perspective.
  • rotor disks 400 are the Fig. 7 shown in a slightly different perspective.
  • a first side surface 414b of a suction side tooth 412b is more visible.
  • Fig. 9 shows in a plan view of the upper of the rotor disks 400 of Fig. 7 and 8th wherein outer ends of the blades 402 are concealed by a peripheral edge of a flange, not shown, of the turbomolecular vacuum pump.
  • a tooth 412a is provided on each of the blade roots 404 provided between the rotor blades 402, of which a third side surface 418a is visible.
  • the teeth 412a are inclined in the direction of rotation.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP17194409.3A 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire Active EP3462036B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17194409.3A EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire
JP2018183168A JP6716656B2 (ja) 2017-10-02 2018-09-28 ターボ分子真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17194409.3A EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire

Publications (2)

Publication Number Publication Date
EP3462036A1 true EP3462036A1 (fr) 2019-04-03
EP3462036B1 EP3462036B1 (fr) 2024-04-03

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ID=60019732

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17194409.3A Active EP3462036B1 (fr) 2017-10-02 2017-10-02 Pompe à vide turbomoléculaire

Country Status (2)

Country Link
EP (1) EP3462036B1 (fr)
JP (1) JP6716656B2 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203375A (ja) * 1984-03-28 1985-10-14 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
JPH05106588A (ja) * 1991-08-22 1993-04-27 Ntn Corp ターボ分子ポンプと動翼の加工方法
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6361799A (ja) * 1986-09-02 1988-03-17 Nippon Soken Inc タ−ボ分子ポンプ
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203375A (ja) * 1984-03-28 1985-10-14 Hitachi Ltd タ−ボ分子ポンプのロ−タの製作方法
JPH05106588A (ja) * 1991-08-22 1993-04-27 Ntn Corp ターボ分子ポンプと動翼の加工方法
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor

Also Published As

Publication number Publication date
JP6716656B2 (ja) 2020-07-01
JP2019065857A (ja) 2019-04-25
EP3462036B1 (fr) 2024-04-03

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