EP3916235B1 - Procédé de fabrication d'une pompe à vide - Google Patents

Procédé de fabrication d'une pompe à vide Download PDF

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Publication number
EP3916235B1
EP3916235B1 EP20176707.6A EP20176707A EP3916235B1 EP 3916235 B1 EP3916235 B1 EP 3916235B1 EP 20176707 A EP20176707 A EP 20176707A EP 3916235 B1 EP3916235 B1 EP 3916235B1
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EP
European Patent Office
Prior art keywords
pump
stator
rings
rotor
part rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20176707.6A
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German (de)
English (en)
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EP3916235A1 (fr
Inventor
Andreas Hofmann
Erhard Harapat
Jens Keller
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Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
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Priority to EP20176707.6A priority Critical patent/EP3916235B1/fr
Priority to JP2020193104A priority patent/JP7018114B2/ja
Publication of EP3916235A1 publication Critical patent/EP3916235A1/fr
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Publication of EP3916235B1 publication Critical patent/EP3916235B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a method for producing a vacuum pump, in particular a turbomolecular vacuum pump, which comprises at least one annular stator disk which is set up to generate a pumping effect in cooperation with a rotor, in particular at least one rotor disk, of the pump, wherein the Stator disk comprises at least two separate partial rings.
  • the invention also relates to a vacuum pump, in particular a turbomolecular vacuum pump, comprising at least one ring-shaped stator disk which is set up to generate a pumping effect in cooperation with at least one rotor disk of the pump, the stator disk comprising at least two separate partial rings.
  • stator disks are typically alternately arranged axially with respect to a rotational axis of a rotor of the pump.
  • the stator disks are usually constructed in such a way that they consist of two partial rings, each of which extends by approximately 180° around the axis of rotation of the rotor of the turbomolecular vacuum pump. This serves to simplify assembly of the stator disks. Their partial rings can thus be inserted radially from the outside into the space between two adjacent rotor disks and thus assembled into a stator disk.
  • stator discs into partial rings it is known, for example, to separate a stator disc using a hand-held tool after the Stator disk with its active pumping blade structure was previously made in one piece, in particular by cutting.
  • the manual process involves high levels of inaccuracy and the risk of undefined burr formation or deformation of the workpiece.
  • EP 2 796 726 A1 relates to the manufacture of a stator element for a Holweck pump stage of a vacuum pump, the stator element having a basic shape essentially in the shape of a cylinder jacket and comprising a plurality of stator parts which are separate from one another.
  • EP 2 019 208 A1 discloses separating stator disks of a vacuum pump.
  • the partial rings are initially held together as a set of at least two partial rings.
  • the subrings can later be separated from each other at any time.
  • the predetermined separation point makes it possible for the separation to take place independently of the production of the blade structure of the partial rings or independently of the first method section.
  • the method thus enables particularly simple handling of the partial rings in the manufacturing process of the pump and the partial rings only have to be separated when required, for example immediately before assembly. Since the separation is particularly easy due to the predetermined separation point, the manufacturing process is simplified overall.
  • the independence of the separation from the first method section means in particular that either a different tool and/or a different machine can be used for the separation than for the production of the pump-active structure. Consequently, the tool or the machine only has to be able to separate the partial rings and in this respect can be made much simpler and smaller.
  • Particular preference is given to separating by hand, so that in particular no additional tool or any additional machine is required for separating.
  • the separability by hand can be ensured in a simple manner by appropriate dimensioning of the material thickness or the shape of the connection.
  • Separation at the predetermined separation point means a final separation of the partial rings, in particular by destroying the material that forms the connection or the predetermined separation point after the first process step. Consequently, the second stage of the process includes a final separation of the partial rings, i.e. the partial rings are no longer connected in one piece after the second stage of the process.
  • the first stage of the method can, for example, also include measures that prepare the final separation, for example by locally reducing the material of the partial rings connected in one piece, e.g. notching, in order to produce a predetermined separation point.
  • a stator disk is generally to be understood as an at least essentially disk-shaped component of the pump, which remains static in relation to a housing of the pump during operation of the pump and which has a pump-active structure.
  • a partial ring is to be understood as an element with a pump-active structure that is suitable for generating a pumping effect in conjunction with a rotor, in particular a rotor disk.
  • Manufacturing the partial rings includes ie at least the formation of a pump-active structure.
  • the pump-active structure can, for example, be completely finished before the second method section, or further method steps can in principle also be carried out on the pump-active structure after the first or also after the second method section.
  • the pump-active structure is preferably molecularly pump-active.
  • the pump-active structure can be, for example, a turbo blade structure or a Siegbahn structure.
  • the rotor or the rotor disk generally has a structure that corresponds to the active pumping structure of the stator disk insofar as the structures develop a pumping effect together and through their relative movement when the rotor is rotating. If the stator disk in question is a turbomolecular stator disk, the rotor or the rotor disk also has a turbo blade structure in particular. If the stator disk in question is a Siegbahn stator disk, for example, the rotor or the rotor disk has in particular a surface which faces the pump-active structure of the stator disk and which is essentially smooth and/or flat.
  • the partial rings apart from their connection, are completely finished before they are separated.
  • such an assembly includes a radial insertion of the partial rings into an intermediate space between two rotor disks, as described above in connection with turbostator disks by way of example. Handling prior to assembly is therefore particularly easy.
  • the predetermined separation point can, for example, comprise at least one predetermined breaking point, a material bridge and/or a notch.
  • the partial rings can advantageously be broken up, for example, to separate them.
  • breaking forms one particularly simple way of separating the partial rings, in particular due to the predetermined breaking point, without special tools and/or without special precision requirements.
  • breaking offers the particular advantage that the broken parts, namely the partial rings, then fit together exactly and are aligned exactly with one another in the assembled state, because of typically exactly corresponding breaking edges.
  • connection or the predetermined separation point can have a material thickness of at most 1 mm, in particular in a breaking direction and/or in a smallest dimension of a cross section of the connection.
  • a material bridge of the connection is generally preferably made small, in particular so small that it is breakable, preferably breakable by hand.
  • a material bridge can be designed, for example, as a particularly fragile connecting web.
  • a turbomolecular stator disk and/or a partial ring of a turbomolecular stator disk can have an inner ring and/or an outer ring, for example.
  • a plurality of stator blades extend radially outward from the inner ring and a plurality of stator blades extend radially inward from the outer ring. If both an inner ring and an outer ring are provided, a plurality of stator blades extend radially between the inner and outer rings.
  • connection between the partial rings can preferably connect an inner or outer ring of one partial ring to an inner or outer ring, in particular not to a blade, of the other partial ring.
  • a material bridge of the connection attaches to an inner ring and/or outer ring of at least one of the partial rings, in particular not to a blade.
  • the material bridge has a significantly reduced material thickness, in particular compared to the inner or outer ring.
  • the partial rings are separated by hand and/or without tools, in particular by a fitter, before he assembles the partial rings to form a stator disk. Because no tools and/or machines are required for the separation, the method is particularly simple.
  • the partial rings can preferably only be separated for assembly, for example at an assembly workstation and/or by a fitter.
  • the partial rings can therefore remain together beforehand, in particular as a set of connected partial rings, and are therefore easy to handle.
  • the partial rings can be stored, transported, treated and/or machined as a set or in the connected state between the first process section and the second process section, ie between the joint production and the separation.
  • transport can also include transport within the manufacturing plant, for example transport from a machine by means of which the partial rings are produced together to an assembly work station.
  • a treatment can include a coating, for example.
  • the at least two partial rings that are produced together are assembled to form a stator disk when the pump is assembled.
  • the at least two partial rings that are produced jointly and connected in one piece after the first method step thus belong together in the sense that after assembly they jointly form a stator disk.
  • This allows assembly errors to be avoided in a simple manner. It is easy for the fitter to identify which partial rings belong together. In particular, if the fitter only separates the partial rings immediately before assembly, for example breaks them up, correct assignment is easily ensured. In addition to the question of which partial rings belong together, this also applies to their relative orientation. It is thus effectively prevented, for example, that one of the partial rings is accidentally twisted, so that Top and bottom are reversed.
  • the assembler breaks the partial rings by hand, he already has them in his hand in the correct orientation, so that he can also assemble them directly, for example inserting them radially into an intermediate space between two rotor disks.
  • the assembly is thus simplified, in addition to eliminating several possible errors.
  • connection with a predetermined separation point can also be provided between the partial rings after the first method section.
  • several material bridges can be provided between the partial rings. At least two spaced connections ensure in a simple manner that the partial rings can be connected firmly enough to stay together as long as necessary, for example during transport, and can be designed to be relatively easy to separate, especially breakable, on the other hand.
  • the partial rings can be aligned with one another in any way when they are produced together or in the connected state.
  • provision can be made for the partial rings to be aligned with one another at least essentially before they are separated in the way they are aligned with one another after assembly.
  • an arrangement that saves material and/or space can be selected.
  • the object of the invention is also achieved by a set of at least two stator disk partial rings according to independent claim 7.
  • the partial rings are provided for at least one stator disk of a vacuum pump. They are connected to one another in one piece, with the connection between the partial rings having a locally reduced material thickness, so that the connection forms a predetermined separation point.
  • the partial rings have a pumping structure, in particular a turbo blade structure or a Siegbahn structure, and are manufactured with their pumping structure by cutting, formed from sheet metal or cast.
  • the partial rings are produced from one part or as one part and by separating the part, the separating comprising a machining process.
  • the partial rings can, for example, be finally separated from one another by the machining method.
  • a material of the connection between the partial rings can be locally reduced by the machining process, so that the connection forms the predetermined separation point and the partial rings are separated, preferably broken, in a separate process section at the predetermined separation point.
  • the machining process forms a sub-step of the cutting and takes place in preparation for a second, separate sub-step of the cutting, namely a final cutting.
  • first method step in which a blade structure is formed
  • second method step in which the cutting method of separation is carried out, with a material bridge, in particular a small one, being left as a predetermined separation point
  • third method step that is separate from the first two method steps , in which the partial rings are finally separated at the intended separation point, for example broken.
  • first and second method steps are both part of the first method step and the third method step is part of the second method step.
  • the severing at a predetermined severing point generally includes at least a final severing. Consequently, a machining process, which is part of cutting, serves in particular as a preparation the final separation and/or production of a predetermined separation point, but can also include a final separation.
  • the machining process which is part of the cutting, can preferably involve sawing, in particular by means of a circular saw, milling, for example by means of a disc milling cutter, and/or cutting-off grinding. Sawing and milling enable particularly precise separating cuts.
  • the two stator disc split rings can be made from one part, e.g. by machining from a solid bar or by stamping from sheet metal and separating the part, or the two stator disc split rings can be made as one part, e.g. by casting and separating the part getting produced. Separation includes a machining process in each case.
  • the cutting process of separating takes place with a cutting tool, in particular a saw blade, which has a cutting width of at most 1 mm.
  • the cutting width is particularly preferably not more than 0.6 mm.
  • the narrower cutting width of 1 mm at most results in a particularly small amount of play, for which it has been shown that the vacuum performance is hardly affected within the scope of this play.
  • the small cutting width thus advantageously combines the simple manufacturing process with high performance requirements of the vacuum pump to be manufactured.
  • a pump-active structure is produced for both partial rings by means of a machining process, with the cutting process of separating taking place in the same clamping as the machining process for producing the pump-active structure.
  • a pump-active structure can preferably be produced for each partial ring by means of a machining process.
  • the partial rings of each set can preferably be separated, with the separation in each case comprising a machining process.
  • the machining processes for producing the pump-active structures and the machining processes for the separation take place in one and the same clamping.
  • the multiple sets are preferably clamped together in a clamping device.
  • the cutting process of separating takes place at least for one set of partial rings after the production of the pump-active structure.
  • the partial rings are separated after the production of the pump-active structure, the separation comprising a machining process and both the production of the pump-active structures and the machining process of separating for each of the several sets of dividing wheels are done in the same clamping.
  • all pump-active structures are initially activated all sets of partial rings are produced, with all sets subsequently being subjected to the cutting process of separation.
  • pump-active structures are preferably carried out by means of at least one tool other than the cutting method of separating.
  • a pump-active structure can be produced, for example, by sawing and/or milling.
  • a turbo blade structure can be produced in particular in that two parallel and concentrically aligned circular saw blades are guided into a raw material in a rotating manner in such a way that a stator blade remains between the circular saw blades.
  • a Siegbahn structure can preferably be machined from a raw material by means of an end mill.
  • the cutting process of separating can preferably be carried out by means of a single circular saw blade.
  • Both the tool for producing the pump-active structure and the tool for separating can preferably be operated on one and the same tool holder, in particular with a tool change taking place between the production of the pump-active structure and the cutting process of separating.
  • FIG. 13 Another aspect of the invention relates to a vacuum pump according to claim 13.
  • This comprises at least one ring-shaped stator disk, which is set up to generate a pumping effect in cooperation with a rotor, in particular at least one rotor disk, of the pump, the stator disk comprising at least two separate partial rings.
  • the partial rings are separated by at least two separating cuts, with at least one of the separating cuts being inclined in Is aligned with respect to an axis of rotation of the rotor of the pump. Both separating cuts are preferably aligned at an angle.
  • the invention also relates to a method for producing a vacuum pump, which has at least one ring-shaped stator disk, which is set up to generate a pumping effect in cooperation with a rotor, in particular at least one rotor disk, of the pump, the stator disk comprising at least two separate partial rings, the two partial rings are separated by at least two separating cuts and wherein at least one of the separating cuts is made obliquely with respect to a rotational axis of the rotor of the pump and/or with respect to a central axis of the stator disk.
  • the vacuum performance of the pump is improved by the oblique alignment of the separating cut.
  • the separating cut is not aligned parallel to the axis of rotation, as was previously the case, but is optically dense in particular in the axial direction. i.e. Particles to be conveyed cannot easily flow back axially through the separating cut. Rather, due to the oblique arrangement, the separating cut has in particular an effect similar to the blades, which are also aligned obliquely.
  • the oblique arrangement of the separating cut allows the partial rings to be separated easily, in particular in the case of a turbomolecular stator disk, even with blades overlapping in the circumferential direction, without damaging the blades.
  • the separating cut is preferably aligned at an angle of at least 10°, in particular at least 20°, with respect to an axis of rotation of the rotor of the pump.
  • the stator disk can preferably be designed as a turbomolecular stator disk.
  • the separating cut is aligned at least essentially parallel to at least one stator blade arranged adjacent to the separating cut in the circumferential direction, in particular with respect to a radially inner blade end, a radially outer blade end and/or a radial blade center.
  • stator disks and/or stator disk partial rings with their pump-active structure can be produced, for example, by cutting, in particular sawed and/or milled, formed from sheet metal or cast.
  • the number of blades in a turbomolecular stator disc can be even or odd.
  • two partial rings of a stator disc can form e.g. symmetrical halves, or alternatively can be divided asymmetrically.
  • a vacuum pump described herein can preferably be designed as a molecular vacuum pump, in particular as a turbomolecular vacuum pump and/or Siegbahn vacuum pump.
  • a pumping effect described above can be or include a molecular, in particular a turbomolecular or Siegbahn pumping effect.
  • the vacuum pump can have, for example, one or more turbomolecular stator disks and/or Siegbahn stator disks and/or turbomolecular and/or Siegbahn pump stages include.
  • individual, several or all of the stator disks can be designed in accordance with the embodiments described herein.
  • a turbomolecular vacuum pump basically has at least one rotor disk rotating during operation of the pump and a stator disk arranged downstream of this rotor disk in the axial direction with respect to a rotational axis of the rotor disk or a rotor of the pump.
  • a turbomolecular vacuum pump can also have a plurality of rotor disks and stator disks, in particular a large number, which can be arranged in particular in the form of a plurality of so-called turbo stages.
  • the turbomolecular vacuum pump can also have further pump stages which are based on a different pump principle, for example a Holweck pump stage, a Siegbahn pump stage and/or a side channel pump stage.
  • the vacuum pump can also be designed, for example, as a so-called split-flow vacuum pump, i. H. in addition to an inlet and an outlet, also have at least one intermediate inlet.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms when the vacuum pump is aligned according to FIG 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and/or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump (cf. also 3 ). Several connections 127 for accessories are provided on the electronics housing 123 .
  • a data interface 129 for example according to the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be conducted into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) operate solely on air cooling.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141 .
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed in such a way that it can also be operated when it is oriented in a different way than in FIG 1 is shown. It is also possible to realize embodiments of the vacuum pump in which the underside 141 cannot be arranged facing downwards but to the side or directed upwards. In principle, any angles are possible.
  • various screws 143 are also arranged, by means of which components of the vacuum pump that are not further specified here are fastened to one another.
  • a bearing cap 145 is attached to the underside 141 .
  • fastening bores 147 are arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), which in particular are larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant fed in and out via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which can be rotated about an axis of rotation 151 .
  • the turbomolecular pump 111 comprises a plurality of turbomolecular pumping stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator discs 157 are held at a desired axial distance from one another by spacer rings 159 .
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • Other turbomolecular vacuum pumps (not shown) exist that do not have Holweck pumping stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 in the shape of a cylinder jacket, fastened to the rotor hub 161 and carried by it, which are oriented coaxially to the axis of rotation 151 and are nested in one another in the radial direction. Also provided are two cylinder jacket-shaped Holweck stator sleeves 167, 169, which are also oriented coaxially with respect to the axis of rotation 151 and are nested in one another when viewed in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 and forming with it the first Holweck pump stage following the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 to form a radial Holweck gap 173 and therewith forms a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and therewith forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • the nested Holweck pump stages are connected in series with one another.
  • a connection channel 179 to the outlet 117 can also be provided.
  • the above-mentioned pumping-active surfaces of the Holweck stator sleeves 167, 169 each have a plurality of Holweck grooves running in a spiral shape around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Advance vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided for the rotatable mounting of the rotor shaft 153 .
  • a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter that increases towards the roller bearing 181 .
  • the injection nut 185 is in sliding contact with at least one stripper of an operating fluid store.
  • an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "spray tip" is also used in this context.
  • the resource reservoir comprises a plurality of absorbent discs 187 stacked on top of one another, which are impregnated with a resource for the roller bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 185 and, as a result of the centrifugal force, is conveyed along the spray nut 185 in the direction of the increasing outer diameter of the spray nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • roller bearing 181 and the operating fluid reservoir are surrounded by a trough-shaped insert 189 and the bearing cover 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, which each comprise a ring stack of a plurality of permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 lie opposite one another, forming a radial bearing gap 199, the ring magnets 195 on the rotor side being arranged radially on the outside and the ring magnets 197 on the stator side being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 produces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the ring magnets 195 on the rotor side are carried by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the ring magnets 197 on the stator side are carried by a support section 203 on the stator side, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119 .
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 201 .
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the support section 203 and a fastening ring 211 connected to the support section 203 .
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197 .
  • An emergency or safety bearing 215 is provided within the magnetic bearing, which runs idle without contact during normal operation of the vacuum pump 111 and only engages in the event of an excessive radial deflection of the rotor 149 relative to the stator, in order to create a radial stop for the rotor 149 to form, so that a collision of the rotor-side structures with the stator-side structures is prevented becomes.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the backup bearing 215 to be disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough so that the backup bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 that extends through the motor stator 217 .
  • the motor stator 217 is fixed in the housing inside the motor room 137 provided for the electric motor 125 .
  • a sealing gas which is also referred to as flushing gas and which can be air or nitrogen, for example, can get into the engine compartment 137 via the sealing gas connection 135 .
  • the electric motor 125 can be protected against process gas, for example against corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117 , ie the vacuum pressure produced by the backing pump connected to the pump outlet 117 prevails in the engine compartment 137 at least approximately.
  • a labyrinth seal 223 can also be provided between the rotor hub 161 and a wall 221 delimiting the motor compartment 137, in particular in order to achieve better sealing of the motor compartment 217 in relation to the Holweck pump stages located radially outside.
  • the assembly of the stator discs 157 can, for example, based on 3 explain.
  • a plurality of stator disks 157 are each arranged in an intermediate space between two rotor disks 155 .
  • the rotor 149 is first assembled with all its rotor disks 155 .
  • a respective stator disk 157 consists of two partial rings which each occupy approximately 180° of the circumference. Two partial rings that belong together are introduced in the radial direction into an intermediate space between two rotor disks 155 and assembled to form a rotor disk 157 .
  • a spacer ring 159 is arranged between each pair of stator disks 157 and holds the stator disks 157 in position relative to one another and relative to the housing 119 .
  • FIG. 6 illustrates an exemplary manufacturing method for a turbomolecular pump, in which a plurality of stator disks 10, namely turbomolecular stator disks, are manufactured together in one setting.
  • a plurality of stator disks 10 namely turbomolecular stator disks
  • ring disks as semi-finished products for the stator disks 10 are clamped together in a clamping device 12 and processed on one and the same machine.
  • the clamping device 12 is constructed as a kind of tower, whereby a segment 14 of the clamping device 12 and a stator disk 10 are placed alternately on top of one another in order to clamp the stator disks 10 or their semi-finished products, and the axially outermost segments 14 are then braced against one another, for example by means of a here not shown screw.
  • the stator discs 10 are clamped axially and are thus fixed.
  • the gripper 12 is shown partially exploded to illustrate its construction and assembly.
  • a tool namely a circular saw blade 16 is also shown in use. This is also for illustration purposes only. It goes without saying that the tool typically only becomes active after the clamping device 12 has been completely assembled and the stator discs 10 or their semi-finished products are firmly clamped.
  • stator discs 10 are shown in FIG 6 already largely finished, but have not yet been finally separated into partial rings, as is provided for the assembly of the stator discs 10 .
  • the stator disks 10 have an identical structure and are explained in more detail using the upper stator disk 10 as an example.
  • the stator disk 10 comprises an inner ring 18 which carries a multiplicity of stator blades 20 distributed uniformly over the circumference.
  • a respective stator blade 20 extends outwards in the radial direction, starting from the inner ring 18 , and is aligned obliquely with respect to an axis 22 .
  • the axis 22 forms a central axis of the stator disks 10 and the clamping device 12.
  • the central axis 22 of the stator disks 10 coincides in the assembled state with a rotational axis of a rotor of the pump, for example in 3 with the axis of rotation 151.
  • stator discs 10 up to in 6 shown state includes in particular that - as it is in 7 is illustrated - first, for each stator disc 10, an annular disc 24 is clamped as a semi-finished product in the clamping device 12. Subsequently, the blades 20 are successively machined from the solid material of the ring disk 24 .
  • the blades 20 are successively machined from the solid material of the ring disk 24 .
  • two circular saw blades (not shown) arranged parallel and concentrically but spaced apart can be inserted rotating in the radial direction into the material of the ring disk, with a stator vane 20 remaining between the circular saw blades.
  • the clamping device 12 is rotated, namely by the intended angular spacing of the stator blades 20, and the next stator blade 20 is produced in the same way.
  • the circular saw blades are arranged at a similar angle, as shown in FIG 6 the circular saw blade 16, but which serves to separate the stator discs 10 into partial rings.
  • the two parallel circular saw blades for producing the stator blades can be operated, for example, on the same tool holder 26, with a tool change taking place between the production of the stator blades 20 and a machining process for separating the stator disks 10 into partial rings.
  • both the production of the stator blades 20 and the separating cuts by means of the circular saw blade 16 can preferably be carried out in one setting.
  • the clamping device 12 can then be released and the finished stator disks can be removed as partial rings or as sets of partial rings.
  • the separation of the stator discs 10 into partial rings thus includes machining using the circular saw blade 16.
  • a cutting process using the circular saw blade 16 is preferably carried out after the entire blade structure of at least the relevant stator disc 10, in particular all the stator discs 10, has been finished.
  • the circular saw blade 16 is here oriented obliquely with respect to the axis 22 and substantially parallel to the stator blades 20 between which it is inserted.
  • a separating cut that is oblique with respect to the axis 22 is thus made in the inner ring 18 .
  • Two separating cuts are made for each stator disk 10, which are opposite one another in relation to the axis 22, that is to say are offset by 180° in the circumferential direction.
  • the stator disk 10 is divided into two partial rings which are symmetrical with respect to the axis 22 .
  • the clamping device 12 has a plurality of recesses 28 which are each provided so that the circular saw blade 16 can enter the inner ring 18 without removing the material of the clamping device 12 or colliding with it.
  • Such recesses 28 are preferably present for all intended separating cuts, i.e. on the in 6 on the side facing away from the viewer and opposite the recesses 28, three further and correspondingly arranged recesses are provided.
  • the recesses 28 have a specific angular position, namely the same angular position.
  • the segments 14 can be aligned at the correct angle, for example using a long centering pin.
  • a recess 30 is visible in the upper segment 14 for such a centering pin.
  • a finished stator disc 10, finally separated into two partial rings 31, is in 8 shown.
  • the partial rings 31 are shown here at a large distance from one another, which does not correspond to that in the assembled state and not to that in the state clamped in the clamping device 12, i.e. the separating cuts 32 are shown excessively wide for illustration purposes.
  • the separating cuts 32 are therefore not shown here in the width in which they are made by the circular saw blade 16 or which they have in the assembled state. actually amounts to the cutting width of the separating cut 32 or of the circular saw blade 16 is preferably less than 1 mm.
  • the oblique arrangement of the separating cuts 32 is in 9 illustrated in more detail.
  • the severing cut 32 is aligned obliquely there with respect to the axis 22 , ie has an angle 34 with respect to this axis 22 .
  • the axis 22 corresponds to the axis of rotation of the rotor when it is mounted in the vacuum pump.
  • the separating cut 32 is also aligned parallel to both adjacent stator blades 20 .
  • the angle 34 therefore corresponds to the so-called angle of attack of the stator blades 20, i.e. their angle in relation to the axis 22.
  • the stator blades 20 are arranged in an overlapping manner, ie a part of a respective stator blade 20 protrudes into the region of an adjacent stator blade 20 in relation to the axial direction. This is in 9 recognizable, for example, by the fact that the line of the axis 22 crosses both stator blades 20 in the illustration.
  • the overlapping arrangement of the stator blades 20 also means that the observer cannot see through between the stator blades 20 when viewed in a direction along the axis 22 . In this context one also speaks of an optically dense arrangement. This enables a particularly good vacuum performance, since the particles to be conveyed cannot simply move through the stator disk 10 on an axial path counter to the pumping direction.
  • the oblique arrangement of the separating cut 32 allows a separation of the inner ring 18 despite the overlapping arrangement of the stator blades 20 without any impairment of the stator blades 20.
  • An axial separating cut would damage the stator blades 20 at least at their radially inner ends.
  • the cleavage cut 32 itself is optically dense in the axial direction, unlike an axially aligned cleavage cut. i.e. the separating cut 32 prevents the particles to be conveyed from being able to simply move through it on an axial path counter to the pumping direction. This improves the vacuum performance compared to an axial separating cut.
  • a separating cut 32 is shown in its sectional plane, ie a sectional plane of the inner ring 18 is visible.
  • Two small material bridges 36 are also visible at this section plane. These can, for example, in accordance with the method 6 be left standing by the circular saw blade 16 not being retracted so deeply into the inner ring 18 that it is finally separated, but that the material bridges 36 remain.
  • the material bridges 36 form a one-piece connection between two partial rings 31 of a stator disk 10.
  • the partial rings 31 are held together as a set of partial rings 31 and can, following the in 6 illustrated cutting methods are stored as a set of partial rings 31, transported and, if necessary, further treated and/or machined.
  • the material bridges 36 are dimensioned such that, on the one hand, they hold the partial rings together so firmly that storage, transport or treatment and/or processing are possible and, on the other hand, they can easily be broken by hand if necessary.
  • the material bridges 36 thus form a predetermined breaking point 38. This makes it possible for the fitter to first separate the partial rings 31 for assembly, namely simply breaking them at the predetermined breaking point 38. Beforehand, the handling of the partial rings 31 as a set is particularly easy. In addition, it is always clear to the fitter which partial rings 31 belong together, since they are provided to him as a connected set. This reduces possible sources of error during assembly.
  • the material bridges 36 have a material thickness that is reduced compared to the inner ring 18 so that the material bridges form the predetermined separation point or predetermined breaking point 38 .
  • the material thickness is reduced to such an extent that the material bridges 36 can be separated without the inner ring 18 otherwise being impaired, such as being bent.
  • the precise shape of the inner ring 18 and the arrangement and orientation of the stator blades 20 are thus preserved, while the partial rings 31 can nevertheless be easily separated by hand.
  • the material bridges 36 can be designed differently depending on the strength requirement. For example, only one material bridge 36 can be provided at the separating cut 32 .
  • the shape and number of such material bridges can be determined in the context of the method 6 easily influenced by the guideway of the circular saw blade 16.
  • the stator disk typically has two separating cuts 32, as is the case, for example, in 8 the case is.
  • one or more material bridges can be provided on at least one of the separating cuts 32 , but for example at least one material bridge can also be provided on each of the two separating cuts 32 .
  • stator disks 10 described above are manufactured by machining and separating them into partial disks also includes a machining process, namely sawing using the circular saw blade 16.
  • Alternative methods of manufacturing stator disks or blade structures are, in particular, manufacturing from sheet metal, with a blade structure typically being formed from sheet metal by stamping and bending is, as well as a production by casting. In both cases, the stator disc can then be separated using a machining process, for example using a circular saw.
  • the Figures 11 to 13 each show a set of two partial rings 31 of a stator disc, the partial rings 31 being arranged differently from one another.
  • the partial rings 31 are each connected via predetermined separation points 38, in particular predetermined breaking points.
  • the connections or predetermined separation point in 38 are designed as small material bridges and in the Figures 11 to 13 not visible as such.
  • the compounds have compared to the part of the part ring 31 in question, to which they attach - these are in the Figures 11 to 13 an inner ring 18 and/or an outer ring 40 of the part ring 31 in question - has a significantly reduced material thickness.
  • the 11 shows a particularly simple variant in which the indexing disks 31 are arranged relative to one another in the same way that they are arranged relative to one another in the assembled state.
  • the 12 and 13 show alternative arrangement variants, which serve in particular for optimal material utilization of the sheet metal from which the partial rings 31 are stamped. Depending on the specific dimensioning of the stator discs, for example, the arrangement according to 12 or the one who 13 be beneficial.
  • 11 connect two predetermined separation points 38 an outer ring 40 of a partial ring 31 with an outer ring 40 of the other partial ring 31 and two predetermined separation points 38 connect an inner ring 18 of a partial ring 31 with an inner ring 18 of the other partial ring 31.
  • In 12 connect the two predetermined separation point 38, the inner ring 18 of a partial ring 31 with the outer ring 40 of the other partial ring 31.
  • In 13 connect two predetermined separation points 38 connects an inner ring 18 to an outer ring 40 and two further predetermined separation points 38 connect an inner ring 18 to an inner ring 18.
  • the partial rings 31 are produced together in a first method section in such a way that, after this first method section, the partial rings 31 have at least one blade structure and are connected in one piece, with the connection between the partial rings 31 having a locally reduced material thickness, so that the connection forms a predetermined separation point 38 .
  • the first process step includes the production of the blade structure by means of parallel rotating saw blades and a subsequent partial step of cutting, namely the retraction of the circular saw blade 16 into the inner ring 18 only far enough that the material bridges 36 remain.
  • a second sub-step of the separation namely a final separation by breaking by hand, forms a second process step separate from the first.
  • the partial rings are finally separated at the predetermined separation point.
  • the separation consequently comprises two sub-steps, of which the first sub-step is formed by a machining process, namely sawing, and is part of the first process section.
  • the second partial step includes the actual and final separation of the partial rings from each other at the predetermined separation point and forms the second stage of the process.
  • a first process step includes the production of the blade structure by means of stamping and bending from sheet metal as the starting material. Small material bridges are also left at the predetermined separation point 38, in particular due to a corresponding shaping of the punching tool used.
  • the partial rings are separated at the predetermined separation point, at this point Purpose, for example, simply broken by a fitter directly before assembly.
  • the partial rings 31 are preferably only separated from one another for assembly.
  • the partial rings 31 can advantageously be stored and transported as a set of two connected partial rings 31 and, for example, can also be further processed and/or treated. This allows particularly simple handling in the manufacturing process of the turbomolecular vacuum pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (15)

  1. Procédé de fabrication d'une pompe à vide (111), en particulier d'une pompe à vide moléculaire, en particulier d'une pompe à vide turbomoléculaire, qui comprend au moins un disque de stator annulaire (10, 157) conçu pour engendrer un effet de pompage en coopération avec un rotor (149), en particulier avec au moins un disque de rotor (157), de la pompe (111), le disque de stator (10, 157) comprenant au moins deux anneaux partiels distincts (31) ;
    dans lequel
    dans une première étape du procédé, au moins deux anneaux partiels (31) de disque de stator sont fabriqués conjointement de telle sorte que les anneaux partiels (31) présentent, après la première étape du procédé, au moins une structure active en pompage, en particulier une turbo-structure à aubes ou une structure Siegbahn, et sont reliés d'un seul tenant,
    la liaison entre les anneaux partiels (31), dont la structure active en pompage est fabriquée en particulier par usinage, par estampage ou par coulée, présente une épaisseur de matériau localement réduite, de sorte que la liaison constitue un emplacement destiné à la séparation (36, 38),
    et les anneaux partiels (31) sont séparés au niveau de l'emplacement destiné à la séparation (38) au cours d'une deuxième étape du procédé, distincte de la première.
  2. Procédé selon la revendication 1,
    dans lequel avant la séparation, les anneaux partiels (31) sont fabriqués complètement à finition, à l'exception de leur liaison.
  3. Procédé selon la revendication 1 ou 2,
    dans lequel l'emplacement destiné à la séparation (38) comprend au moins un emplacement destiné à la rupture, un pont de matériau (36) et/ou une encoche, et/ou
    pour la séparation, les anneaux partiels (31) sont cassés.
  4. Procédé selon l'une au moins des revendications précédentes,
    dans lequel les anneaux partiels (31) sont séparés à la main et/ou sans outil.
  5. Procédé selon l'une au moins des revendications précédentes,
    dans lequel les anneaux partiels (31) ne sont séparés que pour le montage, et/ou
    entre la première étape du procédé et la deuxième étape du procédé, les anneaux partiels (31) sont stockés, transportés, traités et/ou usinés, à l'état relié.
  6. Procédé selon l'une au moins des revendications précédentes,
    dans lequel, lors d'un montage de la pompe (111), lesdits au moins deux anneaux partiels (31) fabriqués conjointement sont assemblés en un disque de stator (10, 157).
  7. Jeu d'au moins deux anneaux partiels de disque de stator (31) pour au moins un disque de stator (10, 157) d'une pompe à vide (111), en particulier d'une pompe à vide moléculaire, en particulier d'une pompe à vide turbomoléculaire,
    dans lequel
    les anneaux partiels (31) sont reliés entre eux d'un seul tenant, et la liaison entre les anneaux partiels (31) présente une épaisseur de matériau réduite localement, de sorte que la liaison constitue en emplacement destiné à séparation (38),
    les anneaux partiels (31) présentent une structure active en pompage, en particulier une turbo-structure à aubes ou une structure Siegbahn, et les anneaux partiels ont leur structure active en pompage fabriquée par usinage, par estampage ou par coulée.
  8. Procédé selon l'une des revendications 1 à 6,
    dans lequel les anneaux partiels (31) sont fabriqués soit à partir d'une pièce (24) et par séparation de la pièce, la séparation comprenant un procédé d'usinage, soit sous forme d'une pièce et par séparation de la pièce, la séparation comprenant un procédé d'usinage.
  9. Procédé selon la revendication 8,
    dans lequel le procédé d'usinage est le sciage, en particulier au moyen d'une scie circulaire (16), le fraisage, et/ou le tronçonnage à la meule.
  10. Procédé selon la revendication 8 ou 9,
    dans lequel le procédé d'usinage est réalisé avec un outil d'usinage (16), en particulier avec une lame de scie présentant une largeur de coupe de 1 mm au maximum, en particulier de 0,6 mm au maximum.
  11. Procédé selon l'une au moins des revendications 8 à 10,
    dans lequel une structure active en pompage est réalisée pour chacun des deux anneaux partiels (31) au moyen d'un procédé d'usinage, et
    le procédé d'usinage de séparation est réalisé au sein du même serrage que le procédé d'usinage pour la fabrication de la structure active en pompage.
  12. Procédé selon l'une au moins des revendications 8 à 11,
    dans lequel plusieurs jeux d'au moins deux anneaux partiels de disque de stator (31) respectifs sont fabriqués en un serrage sur une machine, une structure active en pompage est fabriquée pour chaque anneau partiel (31) au moyen d'un procédé d'usinage, et
    les anneaux partiels (31) de chaque jeu sont séparés, la séparation comprenant un procédé d'usinage respectif.
  13. Pompe à vide (111), en particulier pompe à vide moléculaire, en particulier pompe à vide turbomoléculaire, comprenant au moins un disque de stator annulaire (10, 157) conçu pour engendrer un effet de pompage en coopération avec un rotor (149), en particulier avec au moins un disque de rotor (155), de la pompe (111),
    dans laquelle
    le disque de stator (111) comprend au moins deux anneaux partiels distincts (31),
    les anneaux partiels (31) sont séparés par au moins deux coupes de séparation (32), et
    l'une au moins des coupes de séparation (32) est orientée en oblique par rapport à un axe de rotation (22, 151) du rotor (149) de la pompe (111), les anneaux partiels (31) présentent une structure active en pompage, en particulier une turbo-structure à aubes ou une structure Siegbahn,
    et les anneaux partiels ont leur structure active en pompage fabriquée par usinage, par estampage ou par coulée.
  14. Pompe à vide (111) selon la revendication 13,
    dans laquelle le disque de stator (10, 157) est un disque de stator turbomoléculaire,
    en particulier, la coupe de séparation (32) est orientée au moins sensiblement parallèlement à une aube de stator (20) disposée de manière adjacente à la coupe de séparation (32) dans la direction circonférentielle.
  15. Procédé de fabrication d'une pompe à vide (111) qui comprend au moins un disque de stator annulaire (10, 157) conçu pour engendrer un effet de pompage en coopération avec un rotor (149), en particulier avec au moins un disque de rotor (157), de la pompe (111), le disque de stator (10, 157) comprenant au moins deux anneaux partiels distincts (31), les deux anneaux partiels (31) étant séparés par au moins deux coupes de séparation, et l'une au moins des coupes de séparation étant réalisée en oblique par rapport à un axe de rotation (22, 151) du rotor (149) de la pompe (111) et/ou par rapport à un axe central du disque de stator (10, 157).
EP20176707.6A 2020-05-27 2020-05-27 Procédé de fabrication d'une pompe à vide Active EP3916235B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20176707.6A EP3916235B1 (fr) 2020-05-27 2020-05-27 Procédé de fabrication d'une pompe à vide
JP2020193104A JP7018114B2 (ja) 2020-05-27 2020-11-20 真空ポンプを製造するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20176707.6A EP3916235B1 (fr) 2020-05-27 2020-05-27 Procédé de fabrication d'une pompe à vide

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EP3916235B1 true EP3916235B1 (fr) 2023-04-26

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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173594U (fr) * 1986-03-22 1987-11-04
JP2007309245A (ja) * 2006-05-19 2007-11-29 Boc Edwards Kk 真空ポンプ
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102013207269A1 (de) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe

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JP7018114B2 (ja) 2022-02-09
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