EP3002459A1 - Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide - Google Patents

Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide et disque de rotor ou de stator pour une pompe à vide Download PDF

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Publication number
EP3002459A1
EP3002459A1 EP15185155.7A EP15185155A EP3002459A1 EP 3002459 A1 EP3002459 A1 EP 3002459A1 EP 15185155 A EP15185155 A EP 15185155A EP 3002459 A1 EP3002459 A1 EP 3002459A1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
disc
disk
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15185155.7A
Other languages
German (de)
English (en)
Other versions
EP3002459B1 (fr
Inventor
Matthias Ankel
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3002459A1 publication Critical patent/EP3002459A1/fr
Application granted granted Critical
Publication of EP3002459B1 publication Critical patent/EP3002459B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/322—Blade mountings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape
    • F05D2250/71—Shape curved

Definitions

  • the invention relates to a method for producing a rotor or stator disk for a vacuum pump as well as a rotor or stator disk for a vacuum pump.
  • a common design consists of sheet metal, which is stamped during manufacture so that a round disc with radial slots is formed, the radial slots are provided only over an outer part. The part between the slots is bent over, that is exposed out of the window plane, so that blades are formed. This solution is for example in the DE-OS 100 52 637 shown.
  • the prior art ( DE 297 15 035 U1 ) includes a friction vacuum pump in which stator and rotor blades are formed.
  • the stator blades are formed of sheet metal, which are correspondingly limited during manufacture, so that from the inside to the outside, the blades have an increasing height.
  • the rotor blades are adjusted accordingly, so that the gaps between the blades are constant and as small as possible.
  • the cupping of the blades has the disadvantage that a material change is brought about, which considerably limits the stability of the blades.
  • the blade angle is varied in order to set the degree of overlap between the individual blades and thus the so-called optical tightness in rotor or stator discs.
  • the Disc surfaces are aligned plane-parallel to each other.
  • the technical possibilities for production limit the variation of the blade angle in some cases, so that the blades overlap again at their inner diameter and are no longer optically dense at the outer diameter.
  • the disadvantage here is that in order to achieve an optical seal on the outer diameter of the disc, the blade angle outside must be chosen very flat, which reduces the open structure and thus limits the pumping speed.
  • the technical problem underlying the invention is to provide a method for producing a rotor or stator, with the optimization of the overlap of the blades and thus an improvement of the compression and the pumping speed is possible.
  • a rotor or stator with a very good pumping speed and a very good compression should be specified.
  • the inventive method for producing a rotor or stator disc for a vacuum pump, wherein the Rotor or stator is made of a blank of solid material by sawing inclined to a disc plane channels is characterized in that at least one disc surface of the blank is formed radially symmetrically curved before the sawing of the channels.
  • the rotor or stator disc convex-spherical convex-spherical. Due to the radially symmetric curvature, it is possible to optimize the overlap of the blades.
  • the overlap can be both positive, it can be "zero", that is, seen in the axial direction, the discs are just optically dense, but it can also be negative, that is, when viewed axially, there is a defined gap between the blades.
  • both disc surfaces are formed radially symmetrically curved.
  • This embodiment has the advantage that the blade geometry of the stator or rotor disk can be designed according to the required requirements, that is to say with a positive overlap, a negative overlap or an overlap of "zero".
  • the disk surface may be convex-spherical. However, it is also possible to make the disk surface concave-spherical. The choice of this embodiment also depends on how the final disc geometry or overlap should be designed.
  • a further embodiment of the invention provides that the at least one disc surface has a curvature having a radius or having multiple radii. This also allows the desired wheel geometry set. For example, can be adjusted by the crowning degree of overlap of the discs. Here then the crowning is to be chosen so that the discs have the desired overlap in the positive range, in the negative range or an overlap of "zero".
  • a shoulder is provided on the outer diameter of the stator disks. This paragraph is to ensure that the discs can be arranged regardless of their thickness at the outer diameter between spacers in the vacuum pump.
  • a further advantageous embodiment of the invention provides that on the outer diameter of the stator disks, a disk portion has a smaller or larger thickness than the convex-spherical or concave-spherical disk portion. This also makes it possible to make the blades optically tight only at the inner diameter, but at the outer diameter optically permeable or vice versa.
  • the thickness of the rotor or stator disc is formed in the blank decreasing from the inside to the outside.
  • the thickness of the rotor or stator disk in the blank is increasingly formed from the inside to the outside. If it is increasingly formed from the inside to the outside, results without consideration of the blade angle to the outside an open structure with axial optical tightness.
  • the radius of, for example, the convex or concave crown is also a factor influencing the overlap of the blades.
  • the blank is processed by means of the high-speed cuttings.
  • the material is removed, that is, the channels are formed in the blank without exerting pressure on the blank.
  • the rotor or stator disc according to the invention for a vacuum pump wherein the rotor or stator is made of a blank of solid material by sawing inclined to a disc plane channels, characterized in that at least one disc surface of the blank before the sawing of the channels radially symmetrical is formed curved.
  • the overlapping of the blades can be optimized independently of the blade angle.
  • the overlap can be both positive, it can be "zero", but it can also be negative.
  • both disc surfaces are formed radially symmetrically curved. This means that viewed in the axial direction of the disc, both sides of the disc are curved.
  • the disc surfaces may have a mirror-symmetric curvature.
  • the at least one disc surface is convex-spherical or concave-spherical.
  • the at least one disk surface has a curvature with a radius or a curvature with a plurality of radii. This also allows the degree of overlap to be selected and the pumpability to be optimized with respect to the requirements of the disc.
  • a shoulder is provided on the outer diameter of the stator disks. This paragraph ensures a thickness-independent recording of the stator between spacer rings of the pump.
  • the thickness of the rotor or stator disc is formed in the blank decreasing from the inside to the outside.
  • the thickness of the rotor or stator disk in the blank is increasingly formed from the inside to the outside. This results, for example, without consideration of the blade angle, an outwardly open structure with axial optical tightness.
  • the stator or rotor disc is designed as a machined by means of high-speed cuttings stator or rotor disc.
  • high-speed cutting the material is removed pressure-free for the formation of the channels, so that the workpiece is not subjected to any stresses or the like, and thus the finished stator or rotor disc has a particularly high stability.
  • the stator or rotor disc after the sawing of the channels has an index between 0 and -0.20.
  • the disc is visually dense. These discs have a very good compression.
  • the disc is completely optically dense. This also gives the disc a very good compression ratio.
  • the disc is formed on the outer diameter or the inner diameter optically sealed. Depending on the type of application, this also results in a very good pumping speed.
  • the rotor disks have a larger thickness at the outer diameter than at the inner diameter and the thickness of the outer diameter deviates greatly from the thickness of the inner diameter, this can lead to strength problems due to high centrifugal forces due to the large mass accumulation at the outer diameter.
  • the stator disks have the spherical form described and if the rotor disk is correspondingly concave, then the rotor disk has an optically open structure open to the outside. However, as the rotor blades become thinner and thus lighter towards the outside, the centrifugal forces at the same speed are reduced to the rotor disk.
  • the rotor disk can rotate faster without loading the disk material beyond the original dimension. This increases compression and suction, so that any reductions in these values due to the open rotor disk structure are compensated or even reduced.
  • Fig. 1a and Fig. 1b show a blank 11 for a stator 1, which is designed convex-spherical.
  • the larger pane thickness is arranged on the outer diameter 3.
  • the blank 11 At the inner diameter 2, the blank 11 has a thickness h1.
  • the blank 11 At the outer diameter 3, the blank 11 has a thickness h2.
  • the blank 11 has a convex-spherical shape. Before introducing the channels for the stator or rotor blades, the blank 11 is formed in the final convex-crowned shape. That is, the blank 11 has before introducing the channels for the stator or rotor blades on the outer contour having the finished stator or rotor disk.
  • the blank 11 is formed from a convex-crowned blank which is formed before introducing the channels for the stator or rotor blades in the final convex-crowned shape. That is, the blank 11 has before introducing the channels for the stator or rotor blades on the outer contour having the finished stator or rotor disk.
  • the overlap of the blades can be optimized independently of the blade angle.
  • the overlap can be both positive, it can be "zero" (seen in the axial direction, the discs are just as optically dense), but it can also be negative (defined gap between the blades when viewed axially).
  • d1 determines the diameter of the inner diameter of the disc. Up to a diameter d2, the disc is plane-parallel. Between the diameters d2 and d3, the disk 1 has a radially symmetric curvature with the radius R. Between the diameter d3 and d4, the disc is in turn formed plane-parallel, for example, between spacers of a turbomolecular pump (not shown) to be recorded.
  • Fig. 1a shows the disc blank 11.
  • the disc blank 11 has a hole in the center for receiving the sawing.
  • Fig. 2a and Fig. 2b show a plan view of a disc 1 with the inner diameter 2 and the outer diameter 3 and the blades 4.
  • the stator 1 is carried out completely optically tight in the axial direction. That is, looking in the plane of the drawing Fig. 2a in the blades overlap 4 to the outer diameter. 3
  • Fig. 3 shows a partial section through a stator 5.
  • the stator 5 again has a convex-spherical cross section with the radius R.
  • the shoulder is designed plane-parallel to the stator 5 between spacers (not shown) of the vacuum pump (also not shown) to arrange.
  • the stator disks are shaped in accordance with the design of the stator disk 5 with the described spherical shape.
  • the rotor disk can be correspondingly concave, so that the rotor disk has an optically open structure to the outside. As the rotor blades become thinner and thus lighter, they decrease at the same speed, the centrifugal forces on the rotor disk. Alternatively, the rotor disk can rotate faster without loading the disk material beyond its original dimensions. This increases compression and suction, so that any reductions in these values due to the open rotor disk structure are compensated or even reduced.
  • Fig. 4 shows a rotor disk 7 with blades 8. In the area of the outer diameter 3, no overlapping of the blades 8 is provided. The blades 8 are optically not tight here. In the direction of the inner diameter 2, the blades 8 overlap and the rotor disk is optically dense.
  • Fig. 5 shows a cross section of the rotor disk 7.
  • the rotor disk 7 has a convex-spherical shape. This shape has been predetermined in the blank for the rotor disk 7 before the channels 9 (FIG. Fig. 4 ) were introduced.
  • Fig. 6 shows the rotor disk 7. Again, you can see the convex-spherical shape of the rotor disk. 7
  • Fig. 7 shows a further rotor disk 10 with blades 4.
  • the blades 4 are arranged in the region of the outer diameter optically transparent to each other, while they are formed optically dense in the direction of the inner diameter 2.
  • FIGS. 8, 9 and 10 show sections along the lines BB, CC, DD the Fig. 7 , It can be seen in each case the convex-spherical shape of the stator 10.
  • Fig. 11 shows two stator or rotor blades 4, which have an opening angle ⁇ .
  • the length of the blades is denoted by b, the height of the blades by h.
  • the width of the blades is the length SD.
  • the openness is defined as the ratio of the area / distance not at least simply covered by the active rotor structure (the axially "transparent" portion) to the total distance / area swept by the active rotor structure. As soon as the value becomes negative, parts of the track / surface are covered not only simply but even twice by two adjacent rotor blades.
  • the invention is characterized in that the stator disk 5 or the rotor disks 7, 10 is rotated as a completely closed disk. Subsequently, when the spherical shape, for example, the convex-spherical or concave-spherical shape of the stator 5 or the rotor discs 7, 10 is worked out, the channels 9 by sawing, for example, high-speed cutting in the discs 5, 7, 10th brought in.
  • the spherical shape for example, the convex-spherical or concave-spherical shape of the stator 5 or the rotor discs 7, 10
  • Fig. 12a and 12b show a stator 5 with blades 4.
  • the blades 4 do not overlap the outer diameter. At the inner diameter 2, the blades overlap slightly.
  • the disc 5 according to the Fig. 12a and 12b is optically permeable.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15185155.7A 2014-10-02 2015-09-15 Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide Active EP3002459B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014114326.4A DE102014114326A1 (de) 2014-10-02 2014-10-02 Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP3002459A1 true EP3002459A1 (fr) 2016-04-06
EP3002459B1 EP3002459B1 (fr) 2019-05-15

Family

ID=54145658

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15185155.7A Active EP3002459B1 (fr) 2014-10-02 2015-09-15 Procédé de fabrication d'un disque de rotor ou de stator pour une pompe à vide

Country Status (3)

Country Link
EP (1) EP3002459B1 (fr)
JP (1) JP6153579B2 (fr)
DE (1) DE102014114326A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4151860A3 (fr) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Pompe à vide
EP3462036B1 (fr) * 2017-10-02 2024-04-03 Pfeiffer Vacuum Gmbh Pompe à vide turbomoléculaire

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
DE29715035U1 (de) 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
EP0965761A2 (fr) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire
DE10052637A1 (de) 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Scheiben für eine Turbomolekularpumpe
EP1580435A2 (fr) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60188892U (ja) * 1984-05-25 1985-12-14 三菱重工業株式会社 分子ポンプ
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
JPS62203721A (ja) * 1986-03-03 1987-09-08 Inoue Japax Res Inc タ−ボポンプ
JPH0412197A (ja) * 1990-05-01 1992-01-16 Daikin Ind Ltd 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
DE29715035U1 (de) 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
EP0965761A2 (fr) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire
DE10052637A1 (de) 2000-10-24 2002-05-02 Pfeiffer Vacuum Gmbh Scheiben für eine Turbomolekularpumpe
EP1580435A2 (fr) * 2004-03-16 2005-09-28 Pfeiffer Vacuum GmbH Pompe turbomoléculaire

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3462036B1 (fr) * 2017-10-02 2024-04-03 Pfeiffer Vacuum Gmbh Pompe à vide turbomoléculaire
EP4151860A3 (fr) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Pompe à vide
EP4390144A3 (fr) * 2022-12-22 2024-07-10 Pfeiffer Vacuum Technology AG Pompe à vide

Also Published As

Publication number Publication date
DE102014114326A1 (de) 2016-04-07
JP6153579B2 (ja) 2017-06-28
JP2016075276A (ja) 2016-05-12
EP3002459B1 (fr) 2019-05-15

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