EP3091235A1 - Disque de rotor - Google Patents

Disque de rotor Download PDF

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Publication number
EP3091235A1
EP3091235A1 EP15166269.9A EP15166269A EP3091235A1 EP 3091235 A1 EP3091235 A1 EP 3091235A1 EP 15166269 A EP15166269 A EP 15166269A EP 3091235 A1 EP3091235 A1 EP 3091235A1
Authority
EP
European Patent Office
Prior art keywords
rotor
blade
disc
tool
individual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15166269.9A
Other languages
German (de)
English (en)
Other versions
EP3091235B1 (fr
Inventor
Jan Hofmann
Bernd Hofmann
Matthias Ankel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15166269.9A priority Critical patent/EP3091235B1/fr
Priority to JP2015249770A priority patent/JP6148717B2/ja
Publication of EP3091235A1 publication Critical patent/EP3091235A1/fr
Application granted granted Critical
Publication of EP3091235B1 publication Critical patent/EP3091235B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Definitions

  • the present invention relates to a rotor disk for a rotor of a vacuum pump and to a method for producing such a rotor disk.
  • An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft on which a plurality of rotor disks are arranged axially offset or on which exactly one rotor disk is arranged.
  • a respective rotor disk has a plurality of blades arranged distributed in the circumferential direction.
  • vacuum performance values e.g. Suction capacity and compression ratio, which are as constant as possible over the radial extent of each blade
  • the blades each tapered radially outward, i. conical, to execute. That the blade is radially thicker inside and gradually thinner radially outward.
  • the production of a rotor disk with such shaped blades is expensive and it is costly machine tools and tools necessary.
  • a rotor disk with the features of claim 1, and in particular by the fact that at least one blade has a thickness profile with at least one two sections of the blade separating step.
  • a rotor disk according to the invention can be produced particularly easily. Because if a stepped thickness profile is allowed, the trajectories of a machining tool and the type of tool itself can be clear be simplified. For example, in one possible embodiment of the invention, the blade can thereby be produced by merely one-dimensional processing steps, ie a tool is moved only along a straight path in one processing step. As a result, it is possible to replace, for example, an otherwise completely three-dimensional machining path, which requires complicated and costly machining machines with many processing degrees of freedom.
  • the invention therefore means a departure from the idea that only rotor disks with continuously or steadily tapering blades could achieve sufficient vacuum performance values, with the overcoming of this prejudice according to the invention entailing considerable savings potential in the manufacture of the rotor disks.
  • the number of stages according to the invention is basically arbitrary.
  • a larger number of stages for example, a shape of the blade that tapers radially outward, at least theoretically, can be approximated to a somewhat ideal shape.
  • the inventive advantage of easy manufacturability is still ensured, even if a larger number of stages is associated with a greater manufacturing outlay.
  • all blades of the rotor disk are made identical, but this is not mandatory.
  • the thickness profile is defined by opposing flat sides of the blade.
  • a flat side may have at least one of its normal axial, i. have parallel to a rotational axis of the rotor disc, component.
  • a respective flat side differs from a narrow side of the blade, which is e.g. extends perpendicular to the axis of rotation.
  • Narrow side and flat side differ from at least one end face of a blade, which may constitute a boundary of the blade in the radial direction radially outward.
  • transitions between flat sides, narrow sides and the front side are not necessarily unsteady, that is, for example, as sharp edges, executed, such an embodiment according to the invention but is possible.
  • the step is formed on one of the flat sides and between a radially inner thicker portion and a radially outer thinner portion of the blade.
  • the blade has a thickness which decreases radially outward, this decrease not being continuous but being stepped.
  • At least one of the flat sides may be flat. This further simplifies the manufacturing process.
  • the thickness is constant in particular over a radial extent of the respective section. This, too, further simplifies the manufacturing process, e.g. when machining a degree of freedom of the machine can be omitted.
  • the two sections of the blade can each have a parallelogram-shaped cross-section.
  • the cross section may also be of a parallelogram shape differ.
  • the cross section may, for example, be rectangular, trapezoidal or irregularly triangular or polygonal and / or have round boundary lines.
  • a cross-section here is to be understood as a section through the blade perpendicular to a radius of the rotor disk.
  • the blade is inclined relative to an at least substantially perpendicular to a rotation axis extending plane, each section having an angle of attack and the angle of attack of the radially inner portion is greater than the angle of attack of the radially outer portion.
  • the blade may be "twisted” in itself, whereby a continuous “in-itself twisting" can be approximated and replaced by a stepped one in order to further simplify the manufacturing process and still ensure sufficiently good performance of the vacuum pump.
  • the angle of attack is considered in the context of this disclosure, the angle with respect to a plane perpendicular to the axis of rotation.
  • the step comprises at least one chamfer and / or rounding. As a result, sharp edges can be avoided and / or the stability of the blade can be improved.
  • a vacuum pump in particular turbomolecular pump, with at least one multiple, superimposed, mounted on a rotor shaft rotor disks or exactly a separate, mounted on a rotor shaft rotor disk rotor in which at least one rotor disk is formed in accordance with the invention.
  • the object is further achieved by a method for producing a rotor disk for a vacuum pump, in particular a turbomolecular pump, with at least one plurality of separate, superposed, mounted on a rotor shaft rotor disks or exactly one separate, on a rotor shaft rotors comprising rotor disc, or for producing such a vacuum pump, in particular turbomolecular pump, wherein the rotor disc is produced in one piece from a disk made of solid material, and wherein on the disc by material removal a plurality of circumferentially distributed arranged blades is formed, and wherein at least one Scoop is provided with a radially inwardly extending from the outside thickness profile having at least one two sections of the blade separating stage.
  • the disk may in particular be designed as a circular or cylindrical disk and may, alternatively or additionally, already before the formation of the blade have a central, in particular circular opening, which may be e.g. the implementation of a rotor shaft is used.
  • the material removal may involve machining such as e.g. Sawing or milling include, but can also be performed differently.
  • machining operation is carried out, which involves that the tool is driven into the disk with a radial component.
  • the tool is driven into the disk with a radial component.
  • the processing in this case requires only two degrees of freedom, whereby a machine for the production is particularly cost.
  • the tool with an axial component corresponding to an angle of attack of the blade can be passed through the disc. Again, the disc can be easily rotated to produce the next blade. If, according to one embodiment, the tool comprises at least one circular saw blade, this results in the advantage that the Machining reason, so the area corresponding to a radial machining depth, can be formed straight.
  • the tool may comprise a double or twin tool with two simultaneously effective, spaced apart individual tools.
  • the individual tools may e.g. rotate, be coupled with each other, be torsionally rigid or rotatably connected to each other, be connected via a transmission, have parallel axes of rotation and / or have coincident axes of rotation.
  • a tool, in particular a single tool can e.g. a saw, a saw blade, a milling cutter, a double saw, a twin saw and / or the like in each case in single or multiple include.
  • the distance of the individual tools can determine a thickness of a respective section of the blade, wherein for the production of sections of different thickness the distance can be adjustable and / or tools can be kept at different distances between the individual tools.
  • the individual tools are arranged in parallel to produce blade sections with over their radial extent of constant thickness.
  • Parallel may be e.g. refer to an optionally present rotation axis of the respective individual tool, to a working surface of the individual tool and / or to an extension direction or plane of the individual tool.
  • a plurality of machining operations are carried out in chronological succession to form the individual sections of a respective blade, wherein the machining operations differ from one another with regard to a radial machining depth.
  • a step of the thickness profile can be formed at a respective radial machining depth or by a respective radial machining depth.
  • the machining operations can be alternative or additionally differ in a distance between individual tools. For example, a machining process can be assigned to each section of the blade.
  • different tools and / or different settings of a tool can be used for the individual machining operations. Differences may e.g. exist in a kind, a number of teeth, a diameter and / or a distance of the individual tools.
  • a double or twin tool with two simultaneously effective, spaced-apart individual tools is used for the individual machining operations, wherein the distance for the individual machining operations is set differently.
  • the manufacturing process can thereby be accelerated.
  • a respective machining operation can first be carried out for a plurality of, in particular for all, blades of the rotor disk, before a further machining operation is carried out for the respective blades.
  • different orientations of the tool relative to an at least substantially perpendicular plane to a rotation axis are selected for generating different angles of incidence for the individual sections of a respective blade for the individual machining operations.
  • the angle of attack does not depend on the tool itself, but only on its orientation. In other words, the tool can be adjusted to the particular desired angle of attack.
  • the rotor disk and the vacuum pump can be manufactured or developed according to the embodiments of the method described here.
  • the invention also relates to a rotor of a vacuum pump, in particular a turbomolecular pump, with a rotor shaft to which either a separate, inventively designed rotor disc is attached, or at the plurality of separate, superimposed, each inventively designed rotor discs are mounted.
  • a pumping step of a molecular pumping stage may be applied to the turbomolecular pump stage of the vacuum pump comprising the rotor in the pumping direction. of the Holweck type.
  • the rotor shaft of the turbomolecular pumping stage may simultaneously constitute a wave of the molecular pumping stage, i. the turbomolecular pumping stage and the molecular pumping stage then have a common shaft in such an embodiment.
  • the vacuum pump shown as a turbomolecular pump 10 comprises a pump inlet 34 surrounded by an inlet flange 32 and a plurality of pumping stages for delivering the gas present at the pump inlet 34 to a pump outlet 35.
  • the turbomolecular pump 10 comprises a stator having a static housing 36 and one in the housing 36 arranged rotor with a about a rotation axis R rotatably mounted rotor shaft 14th
  • the turbomolecular pump 10 comprises a plurality of pump-connected in series with each other in series turbomolecular pumping stages having a plurality of the rotor shaft 14 connected turbomolecular rotor disks 12 and a plurality of axially disposed between the rotor disks 12 and fixed in the housing 16 turbomolecular stator disks 38 by spacer rings 40 in a desired axial Distance from each other.
  • the rotor disks 12 and stator disks 38 provide in a scooping region 42 an axial pumping action directed in the direction of the pumping direction P.
  • the turbomolecular pump 10 also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and pump-connected with one another in series.
  • the rotor-side part of the Holweck pump stages comprises two on the rotor shaft 14 fixed and carried by this cylinder jacket Holweck rotor sleeves 46, 48 which are coaxial with the axis of rotation R oriented and nested.
  • two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the rotation axis R and nested in one another.
  • the pump-active surfaces of the Holweck pump stages are in each case formed by the radial lateral surfaces which lie opposite one another with the formation of a narrow radial Holweck gap, namely in each case a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52.
  • one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 46 and 48, wherein the opposite pump-active surface of the respective Holweck stator 50 and 52 structuring with helical about the axis of rotation R around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor and thereby pumped.
  • the rotatable mounting of the rotor shaft 14 is effected by a rolling bearing 54 in the region of the pump outlet 35 and a permanent magnet bearing 56 in the region of the pump inlet 34.
  • the permanent magnet bearing 56 includes a rotor-side bearing half 60 and a stator bearing half 58, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings, the magnetic rings facing each other with formation of a radial bearing gap.
  • an emergency or backup bearing 62 is provided, which is designed as an unlubricated roller bearing and runs empty in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor with respect to the stator engages to a form a radial stop for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut 64 is provided on the rotor shaft 14 with an outer diameter increasing towards the rolling bearing 54, which is provided with a scraper of a plurality with a working medium, such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • a working medium such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • the resource is transferred by capillary action from the resource reservoir via the scraper to the rotating spray nut 64 and due to the centrifugal force along the spray nut 64 in the direction of increasing outer diameter of the spray nut 64 to the rolling bearing 54 promoted where it is e.g. fulfills a lubricating function.
  • the turbomolecular pump 10 includes a drive motor 68 for rotatably driving the rotor whose rotor is formed by the rotor shaft 14.
  • a control unit not shown, controls the drive motor 68.
  • a respective rotor disk 12 comprises a plurality of circumferentially distributed blades 16, of which in the sectional view of Fig. 1 two blades 16 of the rotor disk 12 are visible.
  • a respective blade 16 has two stages 22 (only one stage 22 is in Fig. 1 visible) separating two sections of the blade 16.
  • the steps 22 of the blades 16 of the rotor disks 12 are in this example all arranged at the same distance from the axis of rotation R, but also different distances are conceivable.
  • the steps 22 also extend parallel to the axis of rotation R, whereby a different course, for example obliquely to the axis of rotation, is possible.
  • Fig. 2 shows a rotor disk 12, for example, for use in a turbomolecular pump 10 according to Fig. 1 ,
  • the rotor disk 12 includes a plurality of circumferentially arranged distributed vanes 16 which spring radially inward on a rotor hub 27 and extend radially outward.
  • a respective blade 16 comprises two narrow sides 23 which bound the blade 16 in the axial direction and extend perpendicular to the axis of rotation R.
  • the blade 16 also comprises two flat sides 24 and a radially outwardly facing end face 25.
  • Each blade 16 comprises two radially successive sections 18, 20 defined by steps 22 formed on the flat sides 24.
  • the radially inner portion 18 is made thicker than the radially outer portion 20.
  • the result of the steps 22 is that the blade 16 is narrowed to a certain extent radially outward and thus approximates a continuously outwardly tapered shape, as is known from the prior art Technique is known.
  • a respective section 18, 22 has two flat and mutually parallel flat sides 24.
  • a perpendicular to a radius of the rotor disk 12 extending cross section of a respective section 18, 20 has the shape of a parallelogram, since the blades 16 are inclined and the narrow sides 23 of the blades 16 in a plane perpendicular to the axis of rotation R level (see also Fig. 5 ).
  • the blades 16 are thus aligned obliquely with respect to a plane perpendicular to the axis of rotation R and have to this level an angle of attack which is greater in the radially inner portion 18 than in the radially outer portion 20.
  • the angular ratios of the blades 16 are in Fig. 5 explained in more detail.
  • Fig. 3 is the rotor disk 12 of the Fig. 2 shown in a plan view.
  • the blades 16 are with their separated by the steps 22 sections 18, 20 on the Circumference evenly distributed.
  • the blades 16 are also made identical.
  • Fig. 4 is the rotor disk 12 in a sectional view taken along in FIG Fig. 3 indicated section plane S shown.
  • the opposite narrow sides 23 of the blades 16 are aligned parallel to each other and perpendicular to the axis of rotation R.
  • Fig. 5 illustrates the relative orientation of a radially inner portion 18 to a radially outer portion 20th
  • Fig. 5 represents a simplified side view of a blade 16 from radially outside.
  • the radially inner portion 18 has a greater thickness than the radially outer portion 20.
  • the radially inner portion 18 has an angle of attack A1 which is measured with respect to a plane perpendicular to the axis of rotation R and parallel to a narrow side 23 of the blade 16 and which is greater than an angle A2 of the radially outer portion 20.
  • the sections 18 20 are separated by steps 22, of which in each case a step surface substantially parallel to the image plane is visible.
  • the radially outer portion 20 is shown as a parallelogram which is narrower than a parallelogram representing the radially inner portion 18.
  • the sections 18, 20 terminate in a tangential direction, ie in the image to the right or left, in each case at a common point.
  • a maximum difference between the angles of attack A1 and A2 of the sections 18, 20 is achieved, which in turn leads to an advantageous overlap ratio of the rotor disk 16.
  • angles of attack A1, A2 of the two sections 18, 20 are not mandatory, i. the angles of attack A1, A2 of the two sections can also be the same size.
  • FIG. 6 to 8 An inventive method for producing a rotor disk 12 is based on the Fig. 6 to 8 explained in more detail.
  • the 6 and 7 are each a plan view of a disc parallel to the axis of rotation of the disc, while Fig. 8 is a view in the radial direction and thus perpendicular to the axis of rotation of the disc.
  • Fig. 6 is shown as a two saw blades 28 comprehensive double tool in a disc 26, which serves as a semi-finished product for producing a rotor disc 12, retracted in the radial direction or is driven through this in the axial direction.
  • the saw blades 28 in this case have a maximum radial machining depth, which corresponds to a radially inner end of a blade 16 and thus a blade ground.
  • the saw blades 28 have a distance from each other which corresponds to a thickness of the radially inner portion 18.
  • the saw blades 28 may be rotatably mounted on a common drive shaft or driven independently.
  • a second machining operation as in Fig. 7 is illustrated.
  • Fig. 7 has a double tool on two saw blades 28 which have a distance from each other which is smaller than the distance between the saw blades 28 according to Fig. 6 , Due to the smaller distance between the saw blades 28, a smaller thickness is imparted to a second, radially outer portion 20 of the blade 16.
  • the second machining operation has a radial machining depth which is smaller than in the first machining operation.
  • a radially outer portion 20 is formed, which is thinner than the radially inner portion 18, which is effectively "left” by the second machining operation.
  • Between the sections 18, 20 remain two stages 22, namely a step 22 on each flat side 24, which separate the sections 18, 20 in the radial direction.
  • the 6 and 7 serve insofar merely to illustrate a manufacturing concept according to the invention, as the sections 18, 20 thus produced parallel to the axis of rotation of the disc extending flat sides, ie have an angle of attack of 90 °.
  • a blade 16 can be produced with an angle of attack A2 of less than 90 ° of a radially outer section 20 used here by way of example Fig. 8 .
  • Two saw blades 28 are arranged parallel and at a distance from one another which corresponds to the thickness of the radially outer portion 20.
  • the saw blades 28 are aligned according to the desired angle of attack A2 of the radially outer portion 20 to the axis of rotation of the disc 26 and to a plane perpendicular to the axis of rotation plane.
  • the saw blades 28 which are arranged for example on a common drive shaft, in the processing direction Q passed through the disc 26 or retracted perpendicular to the image plane, with a maximum radial machining depth is maintained or achieved.
  • the tool can in principle during the machining operation in addition to a radial, ie in Fig. 8 perpendicular to the image plane, axis, in particular continuously rotated, while the tool is retracted into the disc 26 or driven through by this. It is also possible that the tool is not rotated over certain radial distances, which thus alternately straight sections and entangled or to one, in particular small, angle-wound sections arise. However, each linear tool movements are preferred.
  • FIG. 8 shown processing corresponds to a second processing operation according to Fig. 7
  • a first machining operation for forming a radially inner portion 18 can be carried out analogously to this second machining operation, wherein the saw blades 28, however, at an angle A1, for example according to Fig. 5 , aligned and, for example, are driven along a correspondingly steeper machining direction Q through the disk 26.
  • the distance of the saw blades 28 to each other corresponds to the thickness of the radially inner portion 18th
  • the disk 26 can be rotated about the axis of rotation R relative to the tool, but alternatively the tool can be guided around the disk 26. Also, the orientation of the tool according to an angle A1, A2 can be adjusted by a corresponding alignment of the disc 26 and / or by aligning the tool. -.-.-.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP15166269.9A 2015-05-04 2015-05-04 Disque de rotor Active EP3091235B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15166269.9A EP3091235B1 (fr) 2015-05-04 2015-05-04 Disque de rotor
JP2015249770A JP6148717B2 (ja) 2015-05-04 2015-12-22 ローターディスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15166269.9A EP3091235B1 (fr) 2015-05-04 2015-05-04 Disque de rotor

Publications (2)

Publication Number Publication Date
EP3091235A1 true EP3091235A1 (fr) 2016-11-09
EP3091235B1 EP3091235B1 (fr) 2020-03-11

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Family Applications (1)

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EP15166269.9A Active EP3091235B1 (fr) 2015-05-04 2015-05-04 Disque de rotor

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EP (1) EP3091235B1 (fr)
JP (1) JP6148717B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7069595B2 (ja) * 2017-08-10 2022-05-18 株式会社島津製作所 ポンプロータおよびターボ分子ポンプ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2046693A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Vakuumpumpe
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
EP0965761A2 (fr) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
JPH01237395A (ja) * 1988-03-17 1989-09-21 Daikin Ind Ltd 分子式真空ポンプ
JPH02201100A (ja) * 1989-01-20 1990-08-09 Ntn Corp ターボ分子ポンプ
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH10246195A (ja) * 1997-03-05 1998-09-14 Ebara Corp ターボ分子ポンプ
JP2000110771A (ja) * 1998-10-01 2000-04-18 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2046693A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Vakuumpumpe
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
EP0965761A2 (fr) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Pompe turbo-moléculaire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Also Published As

Publication number Publication date
JP6148717B2 (ja) 2017-06-14
EP3091235B1 (fr) 2020-03-11
JP2016211535A (ja) 2016-12-15

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