EP3133290B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3133290B1
EP3133290B1 EP15181767.3A EP15181767A EP3133290B1 EP 3133290 B1 EP3133290 B1 EP 3133290B1 EP 15181767 A EP15181767 A EP 15181767A EP 3133290 B1 EP3133290 B1 EP 3133290B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
section
blades
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15181767.3A
Other languages
German (de)
English (en)
Other versions
EP3133290A1 (fr
Inventor
Florian Bader
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15181767.3A priority Critical patent/EP3133290B1/fr
Publication of EP3133290A1 publication Critical patent/EP3133290A1/fr
Application granted granted Critical
Publication of EP3133290B1 publication Critical patent/EP3133290B1/fr
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Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/53—Building or constructing in particular ways by integrally manufacturing a component, e.g. by milling from a billet or one piece construction

Definitions

  • the present invention relates to a vacuum pump, in particular a turbo molecular pump, with at least one rotor which has a rotor shaft and a plurality of rotor sections arranged on the rotor shaft, axially spaced along the rotor shaft, each comprising a plurality of rotor blades distributed in the circumferential direction, and at least one of the rotor associated stator, which has a plurality of stator sections each with a plurality of stator blades distributed in the circumferential direction, wherein a respective stator section is arranged in the axial direction between a first and a second rotor section and adjacent to these two rotor sections, and wherein between the first rotor section and a a first axial distance is provided for each stator section and a second axial distance is provided between the respective stator section and the second rotor section.
  • a plurality of rotor sections and a plurality of stator sections are provided, which are arranged alternately in the axial direction, a respective stator section being located centrally between two respectively adjacent rotor sections.
  • the rotor sections can each either be designed in one piece with the rotor shaft or be provided in the form of a separately manufactured rotor disk that is connected to the rotor shaft in a rotationally fixed manner.
  • a vacuum pump of the type mentioned in which the rotor can be adjusted in the axial direction via electromagnetic control means so that the axial distance of a respective rotor section to the stator section on one side is smaller than the axial distance of the respective Rotor section to the stator section on the other hand to adjust the distance on the one hand to a desired value. It remains open in which direction the rotor should be adjusted.
  • stator sections are each arranged between two adjacent rotor sections. The stator sections are each fixed directly to the pump housing or integrated in it.
  • stator sections are separated from one another by spacer rings and are each arranged between two rotor sections, from which they are at least substantially the same distance apart.
  • the object is achieved by a vacuum pump according to claim 1, and in particular in that the second axial distance is different from the first axial distance, the first rotor section being arranged in front of a respective stator section in the pumping direction and the second rotor section being arranged after the respective rotor section in the pumping direction is arranged, the first axial distance is smaller than the second distance and less than 0.7 times the second axial distance, and the two different distances of a respective stator section to the two adjacent rotor sections are defined by corresponding spacer rings between the individual stator sections .
  • the invention allows the arrangement of the rotor and stator sections to be adapted to the movement of the molecules to be conveyed, so that the pumping effect is improved.
  • the mode of operation of the invention is described below in particular with reference to FIG Fig. 2 explained in more detail.
  • the invention allows an existing construction of a vacuum pump to be improved by merely changing the position of the stator sections relative to the rotor sections. This can be achieved in a particularly simple way, e.g. by changing spacer rings between individual stator sections.
  • the invention thus improves the performance of a vacuum pump using particularly simple means, without the need to change the overall construction of the vacuum pump.
  • a respective stator section is arranged between two rotor sections adjacent to it.
  • a respective stator section and each of the two rotor sections adjacent to it are arranged directly one after the other in the respective axial direction.
  • No further stator or rotor sections are arranged between a respective stator section and a respective adjacent rotor section.
  • the respective stator section has an adjacent rotor section in both axial directions.
  • the first rotor section is arranged in front of a respective stator section in the pumping direction, while the second rotor section is arranged after the stator section in the pumping direction.
  • the first axial distance is smaller than that second axial distance.
  • the first axial distance in the pumping direction is smaller than the second axial distance in the pumping direction.
  • the first axial distance can be made as small as possible. A certain minimum distance greater than zero is maintained between a respective stator section and an adjacent rotor section.
  • the second axial distance can become relatively large by reducing the first axial distance, it has been shown that the second axial distance does not have such a strong influence on the pump output, so that the pump output is improved overall when the first axial distance is reduced.
  • the first axial distance is less than 0.7 times the second axial distance.
  • a particularly good pump performance has resulted.
  • Even better pump capacities can result if, according to one embodiment, the first axial distance is less than or equal to half the second axial distance.
  • the rotor shaft is mounted on the inlet side, in particular in a high vacuum area, by a lubrication-free bearing, in particular a magnetic bearing.
  • a lubrication-free bearing in particular a magnetic bearing.
  • the rotor shaft can alternatively or additionally on the outlet side, in particular in a medium or low vacuum range, by a lubricated bearing, in particular a roller bearing such as a ball bearing. This allows inexpensive storage with relatively little play, while the contamination problem on the outlet side is eliminated.
  • At least one rotor section is formed in one piece with the rotor shaft.
  • all rotor sections are designed in one piece with the rotor shaft.
  • a rotor configured in this way is also referred to as a full rotor.
  • at least one rotor section can be formed by a rotor disk produced separately from the rotor shaft and fastened to the rotor shaft.
  • all rotor sections can be formed by separately produced rotor disks. This is also referred to as a disk rotor.
  • At least one stator section is designed as a stator disk made from sheet metal.
  • the production of the stator disk and thus also that of the vacuum pump is technically simplified and more cost-effective.
  • the stator disk is stamped from sheet metal, which further simplifies the manufacturing process.
  • the rotor blades and the stator blades can each be inclined to a plane running at least essentially perpendicular to an axis of rotation, the rotor blades having an angle of attack and the stator blades having an angle of attack and the sum of the angle of attack of the stator blades and the angle of attack of the rotor blades at least substantially 90 ° is.
  • a respective stator blade in particular with a radially outer area, can be aligned at least substantially perpendicular to a respective rotor blade, in particular to its radially outer area.
  • the molecules to be conveyed move away primarily perpendicularly from a respective blade surface of the rotor in the direction of the stator section, as shown below with reference to FIG Fig. 2 explained in more detail. So if the stator blades are parallel to If the molecules are aligned in this direction of movement, they offer minimal resistance to the molecules and the pump performance is optimized.
  • the angle of incidence of the rotor blades is at least substantially 45 °, as a result of which the performance of the pump can be further improved.
  • An exemplary vacuum pump designed as a turbo molecular pump (not shown), which can be further developed by the invention and also by at least one of the embodiments disclosed here, comprises an inlet surrounded by an inlet flange and several pump stages for conveying the gas present at the inlet to an outlet .
  • the turbo molecular pump can have a side tap.
  • the turbomolecular pump comprises a stator with a static housing and a rotor, which is arranged in the housing and has a rotor shaft which is rotatably mounted about an axis of rotation.
  • the turbomolecular pump comprises several turbomolecular pump stages connected in series with one another for effective pumping, with several rotor sections connected to the rotor shaft, designed as turbomolecular rotor disks and with several stator sections arranged in the axial direction between the rotor disks and fixed in the housing, designed as turbomolecular stator disks, which are formed by spacer rings in one desired axial distance from each other are kept.
  • the rotor disks and stator disks provide an axial pumping action directed in the pumping direction in a pumping area.
  • the turbomolecular pump also comprises three Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor-side part of the Holweck pump stages comprises two cylinder-jacket-shaped Holweck rotor sleeves fastened to the rotor shaft and carried by the latter, which are oriented coaxially to the axis of rotation and are nested in one another.
  • two cylinder jacket-shaped Holweck stator sleeves are provided, which are also oriented coaxially to the axis of rotation and nested one inside the other.
  • the active pumping surfaces of the Holweck pump stages are each formed by the radial jacket surfaces lying opposite one another with the formation of a narrow radial Holweck gap, namely a Holweck rotor sleeve and a Holweck stator sleeve.
  • One of the active pumping surfaces is smooth, in the present case, for example, that of the Holweck rotor sleeve, the opposite, active pumping surface of the respective Holweck stator sleeve having a structure with grooves running helically around the axis of rotation in the axial direction, in which the rotation of the rotor, the gas is propelled and thereby pumped.
  • the rotatable mounting of the rotor shaft is brought about by a roller bearing in the area of the outlet and a permanent magnetic bearing in the area of the inlet.
  • the permanent magnetic bearing comprises a rotor-side bearing half and a stator-side bearing half, each of which comprises a ring stack of several permanent magnetic rings stacked on top of one another in the axial direction, the magnetic rings being opposite one another to form a radial bearing gap.
  • an emergency or safety bearing is provided, which is designed as an unlubricated roller bearing and runs empty during normal operation of the vacuum pump without contact and only comes into engagement with an excessive radial deflection of the rotor relative to the stator to create a radial stop for the rotor to form, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut with an outer diameter that increases towards the roller bearing is provided on the rotor shaft, which is in sliding contact with a scraper of a plurality of absorbent disks soaked with an operating medium such as a lubricant.
  • an operating medium such as a lubricant.
  • the operating medium is transferred from the operating medium storage via the scraper to the rotating injection nut by capillary action and, as a result of the centrifugal force, is conveyed along the injection nut in the direction of the increasing outer diameter of the injection nut to the roller bearing, where it has a lubricating function, for example.
  • the turbo molecular pump comprises a drive motor for rotatingly driving the rotor, the rotor of which is formed by the rotor shaft.
  • a control unit controls the drive motor.
  • Fig. 1 shows a rotor shaft 14 of a rotor of a turbomolecular pump according to the invention, shown here only partially, with two rotor sections designed as rotor disks 16 being connected to the rotor shaft 14 in a rotationally fixed manner.
  • the respective rotor disk 16 has a plurality of rotor blades (not shown) which are arranged spaced apart in the circumferential direction.
  • stator section designed as a stator disk 22, which is not connected to the rotor shaft 14, but statically to a housing of the turbo molecular pump, not shown.
  • the stator disk 22 has a plurality of stator blades, likewise not shown, which are arranged spaced apart in the circumferential direction.
  • first axial distance A1 between the upper rotor disk 16 and the stator disk 22, and there is a second axial distance A2 between the stator disk 22 and the lower rotor disk 16.
  • the first axial distance A1 is smaller than the second axial distance A2.
  • the axial distance A1 is approximately 0.4 times the second axial distance A2. According to the invention, this distance ratio must be less than 0.7.
  • stator section is here arranged outside an axial center between the first rotor section, here the upper rotor disk 16, and the second rotor section, here the lower rotor disk 16.
  • stator section is arranged closer to one of the adjacent rotor sections, namely closer to the upper rotor disk 16, than to the respective other rotor section, viewed in the axial direction, that is, along the rotor shaft 14.
  • a pumping direction P describes a desired direction of movement of the gas molecules to be conveyed during a pumping process.
  • the intermediate space immediately following the upper rotor disk 16 in the pumping direction P, which is assigned to the first axial distance A1 is smaller than the second intermediate space in the pumping direction, which immediately follows the stator disk 22 and the second axial distance A2 is assigned. It may be desirable to make the first axial distance A1 as small as possible in order to further improve the pumping capacity of the turbo molecular pump.
  • rotor blades 18 and stator blades 24 are shown in simplified form, namely as a simplified developed view in the radial direction, ie in the direction of the rotor shaft 14 shown here only as a dashed line is arranged in front of a stator disk including the stator blades 24, also not shown in detail.
  • the rotor blades 18 move in at high speed during pumping Fig. 2 to the right (direction of rotation) while the stator blades 24 are fixed, ie not moving.
  • the rotor blades 18 and the stator blades 24 are arranged obliquely at a respective angle of attack of 45 °, the stator blades 24 being oriented obliquely opposite to the rotor blades 18.
  • the angle of attack is measured here in each case starting from a plane running perpendicular to the rotor shaft 14.
  • a molecule to be conveyed which gets into the axial area of the rotor blades 18, is to a certain extent captured by the obliquely downwardly directed surface of a rotor blade 18 moving rapidly to the right, the molecule being adsorbed on the surface. The molecule then desorbs from the surface, moving away from the rotor blade. The molecule adopts a preferred direction which is perpendicular to the surface from which the molecule was previously desorbed. In Fig.
  • stator blades 24 are also aligned perpendicular to the obliquely downwardly directed surfaces of the rotor blades 18, so that a molecule which moves in the preferred direction can pass parallel to the stator blades 24 and thus almost unhindered through the axially following stator disk 22, with only the - relatively small - thickness of the stator blades 24 opposing this movement.
  • the axial distance between the stator disk and the rotor disk following in the pumping direction has less of an influence on the pumping power. This is because here the molecule to be conveyed can be actively captured by the rotor disk, essentially regardless of its direction of movement, and thus transported further.
  • the pumping performance of the turbo molecular pump is therefore improved by the invention, in particular in the molecular working range.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Pompe à vide, en particulier pompe turbomoléculaire, comportant
    au moins un rotor qui présente un arbre de rotor (14) et plusieurs portions de rotor (16) disposées sur l'arbre de rotor (14), espacées axialement le long de l'arbre de rotor (14) et comprennent chacune une pluralité de pales de rotor (18) disposées en répartition dans la direction circonférentielle, et au moins un stator associé au rotor, qui présente plusieurs portions de stator (22) comprenant chacune une pluralité de pales de stator (24) disposées en répartition dans la direction circonférentielle,
    dans laquelle
    une portion de stator respective (22) est disposée dans la direction axiale entre une première et une deuxième portion de rotor (16) et est adjacente à chacune de ces deux portions de rotor (16),
    une première distance axiale (A1) est prévue entre la première portion de rotor (16) et une portion de stator respective (22), et une deuxième distance axiale (A2) est prévue entre la portion de stator respective (22) et la deuxième portion de rotor (16),
    la deuxième distance axiale (A2) est différente de la première distance axiale (A1),
    la première portion de rotor (16) est disposée en amont d'une portion de stator respective (22) dans la direction de pompage (P), et la deuxième portion de rotor (16) est disposée en aval de la portion de stator respective (22) dans la direction de pompage (P), la première distance axiale (A1) étant inférieure à la deuxième distance axiale (A2),
    caractérisée en ce que
    la première distance axiale (A1) est inférieure à 0,7 fois la deuxième distance axiale (A2), et en ce que
    les deux distances différentes (A1, A2) d'une portion de stator respective (22) par rapport aux deux portions de rotor (16) adjacentes sont définies par des anneaux écarteurs correspondants entre les portions de stator individuelles (22).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    la première distance axiale (A1) est inférieure à la moitié de la deuxième distance axiale (A2).
  3. Pompe à vide selon l'une des revendications 1 ou 2,
    caractérisée en ce que
    l'arbre de rotor (14) est supporté du côté entrée par un palier sans lubrification, en particulier par un palier magnétique.
  4. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'arbre de rotor (14) est supporté du côté sortie par un palier lubrifié, en particulier par un palier à roulement.
  5. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins une portion de rotor (16) est réalisée d'un seul tenant avec l'arbre de rotor (14).
  6. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins une portion de stator (22) est réalisée sous forme de disque de stator en tôle.
  7. Pompe à vide selon la revendication 6,
    caractérisée en ce que
    le disque de stator est découpé en tôle.
  8. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    les pales de rotor (18) et les pales de stator (24) sont chacune positionnées en oblique par rapport à un plan au moins sensiblement perpendiculaire à un axe de rotation (R), les pales de rotor (18) ayant un angle de positionnement et les pales de stator (24) ayant un angle de positionnement, et la somme de l'angle de positionnement des pales de stator (24) et de l'angle de positionnement des pales de rotor (18) étant au moins sensiblement de 90°.
  9. Pompe à vide selon la revendication 8,
    caractérisée en ce que
    l'angle de positionnement des pales de rotor (18) est au moins sensiblement de 45°.
EP15181767.3A 2015-08-20 2015-08-20 Pompe à vide Active EP3133290B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15181767.3A EP3133290B1 (fr) 2015-08-20 2015-08-20 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15181767.3A EP3133290B1 (fr) 2015-08-20 2015-08-20 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3133290A1 EP3133290A1 (fr) 2017-02-22
EP3133290B1 true EP3133290B1 (fr) 2021-06-09

Family

ID=53887009

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15181767.3A Active EP3133290B1 (fr) 2015-08-20 2015-08-20 Pompe à vide

Country Status (1)

Country Link
EP (1) EP3133290B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113187743A (zh) * 2021-04-08 2021-07-30 日扬科技股份有限公司 长效运转的转子结构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
DE19804768B4 (de) * 1998-02-06 2006-08-24 Pfeiffer Vacuum Gmbh Rotorlagerung für eine Gasreibungspumpe
JP2000257586A (ja) * 1999-03-08 2000-09-19 Koyo Seiko Co Ltd ターボ分子ポンプ
JP2003003987A (ja) * 2001-06-22 2003-01-08 Osaka Vacuum Ltd 分子ポンプ
EP2757266B1 (fr) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP3133290A1 (fr) 2017-02-22

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