FR2854933B1 - Pompe moleculaire, turbomoleculaire ou hybride a vanne integree - Google Patents

Pompe moleculaire, turbomoleculaire ou hybride a vanne integree

Info

Publication number
FR2854933B1
FR2854933B1 FR0305724A FR0305724A FR2854933B1 FR 2854933 B1 FR2854933 B1 FR 2854933B1 FR 0305724 A FR0305724 A FR 0305724A FR 0305724 A FR0305724 A FR 0305724A FR 2854933 B1 FR2854933 B1 FR 2854933B1
Authority
FR
France
Prior art keywords
molecular
pump
turbomolecular
integrated valve
hybrid pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0305724A
Other languages
English (en)
Other versions
FR2854933A1 (fr
Inventor
Jean Pierre Desbiolles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Priority to FR0305724A priority Critical patent/FR2854933B1/fr
Priority to EP04291161A priority patent/EP1477684B1/fr
Priority to DE602004009857T priority patent/DE602004009857T2/de
Priority to AT04291161T priority patent/ATE377711T1/de
Priority to JP2004142872A priority patent/JP4560331B2/ja
Priority to US10/843,354 priority patent/US7311491B2/en
Publication of FR2854933A1 publication Critical patent/FR2854933A1/fr
Application granted granted Critical
Publication of FR2854933B1 publication Critical patent/FR2854933B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR0305724A 2003-05-13 2003-05-13 Pompe moleculaire, turbomoleculaire ou hybride a vanne integree Expired - Fee Related FR2854933B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0305724A FR2854933B1 (fr) 2003-05-13 2003-05-13 Pompe moleculaire, turbomoleculaire ou hybride a vanne integree
EP04291161A EP1477684B1 (fr) 2003-05-13 2004-05-05 Pompe moléculaire, turbomoléculaire ou hybride à vanne integrée
DE602004009857T DE602004009857T2 (de) 2003-05-13 2004-05-05 Molekular, Turbomolekular oder Hybridpumpe mit intergriertem Ventil
AT04291161T ATE377711T1 (de) 2003-05-13 2004-05-05 Molekular, turbomolekular oder hybridpumpe mit intergriertem ventil
JP2004142872A JP4560331B2 (ja) 2003-05-13 2004-05-12 バルブを含んだ分子ポンプ、ターボ分子ポンプ、ハイブリッドポンプ
US10/843,354 US7311491B2 (en) 2003-05-13 2004-05-12 Molecular drag, turbomolecular, or hybrid pump with an integrated valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0305724A FR2854933B1 (fr) 2003-05-13 2003-05-13 Pompe moleculaire, turbomoleculaire ou hybride a vanne integree

Publications (2)

Publication Number Publication Date
FR2854933A1 FR2854933A1 (fr) 2004-11-19
FR2854933B1 true FR2854933B1 (fr) 2005-08-05

Family

ID=33017166

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0305724A Expired - Fee Related FR2854933B1 (fr) 2003-05-13 2003-05-13 Pompe moleculaire, turbomoleculaire ou hybride a vanne integree

Country Status (6)

Country Link
US (1) US7311491B2 (fr)
EP (1) EP1477684B1 (fr)
JP (1) JP4560331B2 (fr)
AT (1) ATE377711T1 (fr)
DE (1) DE602004009857T2 (fr)
FR (1) FR2854933B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005007593D1 (de) * 2005-06-30 2008-07-31 Varian Spa Vakuumpumpe
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
AT510406B1 (de) 2011-04-04 2012-04-15 Scheuch Gmbh Schlauchfilter zur reinigung staubbelasteter gase und injektordüse für ein solches schlauchfilter
US9267605B2 (en) 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013207269A1 (de) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
JP6738485B2 (ja) * 2016-08-26 2020-08-12 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 低圧リフトピンキャビティハードウェア
US10559451B2 (en) * 2017-02-15 2020-02-11 Applied Materials, Inc. Apparatus with concentric pumping for multiple pressure regimes
US10655638B2 (en) 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
US5443368A (en) * 1993-07-16 1995-08-22 Helix Technology Corporation Turbomolecular pump with valves and integrated electronic controls
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique

Also Published As

Publication number Publication date
US7311491B2 (en) 2007-12-25
FR2854933A1 (fr) 2004-11-19
DE602004009857T2 (de) 2008-08-28
US20040228747A1 (en) 2004-11-18
DE602004009857D1 (de) 2007-12-20
EP1477684B1 (fr) 2007-11-07
JP2004340147A (ja) 2004-12-02
JP4560331B2 (ja) 2010-10-13
EP1477684A1 (fr) 2004-11-17
ATE377711T1 (de) 2007-11-15

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Effective date: 20100129