DK3484810T3 - Fremstillingsindretning og fremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier - Google Patents

Fremstillingsindretning og fremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier Download PDF

Info

Publication number
DK3484810T3
DK3484810T3 DK17828578.9T DK17828578T DK3484810T3 DK 3484810 T3 DK3484810 T3 DK 3484810T3 DK 17828578 T DK17828578 T DK 17828578T DK 3484810 T3 DK3484810 T3 DK 3484810T3
Authority
DK
Denmark
Prior art keywords
batteries
procedure
manufacture
carbon
manufacturing device
Prior art date
Application number
DK17828578.9T
Other languages
English (en)
Inventor
Yimin Zhu
Vincent Pluvinage
Original Assignee
Oned Mat Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oned Mat Inc filed Critical Oned Mat Inc
Application granted granted Critical
Publication of DK3484810T3 publication Critical patent/DK3484810T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/381—Alkaline or alkaline earth metals elements
    • H01M4/382—Lithium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/362—Composites
    • H01M4/366—Composites as layered products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/28—Moving reactors, e.g. rotary drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B01J4/007—Feed or outlet devices as such, e.g. feeding tubes provided with moving parts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/023—Preparation by reduction of silica or free silica-containing material
    • C01B33/025—Preparation by reduction of silica or free silica-containing material with carbon or a solid carbonaceous material, i.e. carbo-thermal process
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4417—Methods specially adapted for coating powder
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403—Treating multiple sides of workpieces, e.g. 3D workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0564—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of organic materials only
    • H01M10/0565—Polymeric materials, e.g. gel-type or solid-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0416—Methods of deposition of the material involving impregnation with a solution, dispersion, paste or dry powder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • H01M4/583—Carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H01M4/587—Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2204/00—Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices
    • B01J2204/002—Aspects relating to feed or outlet devices; Regulating devices for feed or outlet devices the feeding side being of particular interest
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386—Silicon or alloys based on silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • H01M4/583—Carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/62—Selection of inactive substances as ingredients for active masses, e.g. binders, fillers
    • H01M4/624—Electric conductive fillers
    • H01M4/625—Carbon or graphite
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9075—Catalytic material supported on carriers, e.g. powder carriers
    • H01M4/9083—Catalytic material supported on carriers, e.g. powder carriers on carbon or graphite
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DK17828578.9T 2016-07-15 2017-07-14 Fremstillingsindretning og fremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier DK3484810T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662363087P 2016-07-15 2016-07-15
PCT/US2017/042246 WO2018013991A2 (en) 2016-07-15 2017-07-14 Manufacturing apparatus and method for making silicon nanowires on carbon based powders for use in batteries

Publications (1)

Publication Number Publication Date
DK3484810T3 true DK3484810T3 (da) 2023-11-20

Family

ID=60940785

Family Applications (2)

Application Number Title Priority Date Filing Date
DK20195843.6T DK3778471T3 (da) 2016-07-15 2017-07-14 Fremstillingsfremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier
DK17828578.9T DK3484810T3 (da) 2016-07-15 2017-07-14 Fremstillingsindretning og fremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DK20195843.6T DK3778471T3 (da) 2016-07-15 2017-07-14 Fremstillingsfremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier

Country Status (11)

Country Link
US (3) US11728477B2 (da)
EP (4) EP4292702A3 (da)
JP (2) JP7155104B2 (da)
KR (1) KR102531225B1 (da)
CN (1) CN109689567B (da)
DK (2) DK3778471T3 (da)
ES (2) ES2913682T3 (da)
FI (1) FI3484810T3 (da)
HU (2) HUE064985T2 (da)
PL (2) PL3778471T3 (da)
WO (1) WO2018013991A2 (da)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106936677B (zh) * 2015-12-31 2020-06-26 华为技术有限公司 一种模块化ups***及功率设备的数据传输方法
ES2913682T3 (es) 2016-07-15 2022-06-03 Oned Mat Inc Procedimiento de fabricación para la fabricación de nanocables de silicio en polvos a base de carbono para su uso en baterías
US11174552B2 (en) * 2018-06-12 2021-11-16 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US11641012B2 (en) 2019-01-14 2023-05-02 Global Graphene Group, Inc. Process for producing graphene/silicon nanowire hybrid material for a lithium-ion battery
KR20200100928A (ko) * 2019-02-19 2020-08-27 현대자동차주식회사 분말의 표면 처리 장치 및 이를 이용한 분말의 표면 처리 방법
TWI765795B (zh) 2019-04-24 2022-05-21 美商應用材料股份有限公司 具有旋轉葉片與氣體注入之用於在固定腔室中塗覆粒子的反應器
BR112022003964A2 (pt) 2019-09-03 2022-05-24 Haldor Topsoe As Forno reformador com tubos reformadores suportados
CN110592559B (zh) * 2019-09-17 2021-08-27 淮北摩兰科技有限公司 一种显示屏线路保护装置及方法
CN110641028B (zh) * 2019-09-25 2021-05-04 大同新成新材料股份有限公司 碳毡加工生产用翻转式热压机及其使用方法
EP3822395A1 (en) * 2019-11-13 2021-05-19 Fundación Imdea Materiales Nanowires network
CN112599758B (zh) * 2021-03-03 2021-07-06 拓米(成都)应用技术研究院有限公司 纳米硅团聚体复合负极材料及其制备方法
CN117396428A (zh) 2021-05-28 2024-01-12 恩维雷斯公司 用于制备硅-碳复合材料的方法
US20230307613A1 (en) * 2021-12-23 2023-09-28 Oned Material, Inc. Novel composites for anode electrodes

Family Cites Families (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3395674A (en) * 1963-09-23 1968-08-06 Int Resistance Co Apparatus for vapor coating tumbling substrates
US4136216A (en) 1975-08-26 1979-01-23 Surface Technology, Inc. Non-precious metal colloidal dispersions for electroless metal deposition
JPS5268886A (en) * 1975-12-08 1977-06-08 Fujitsu Ltd Surface treatment method of powder
US4171225A (en) 1976-01-23 1979-10-16 U.S. Philips Corporation Electroless copper plating solutions
US4400436A (en) 1980-06-30 1983-08-23 Ppg Industries, Inc. Direct electroless deposition of cuprous oxide films
JPS58136701A (ja) 1982-02-08 1983-08-13 Japan Synthetic Rubber Co Ltd 微粒子のコーティング方法
DE3328709A1 (de) 1983-08-09 1985-02-28 Bayer Ag, 5090 Leverkusen Drehrohrofen und dessen verwendung
JPS6142362U (ja) 1985-07-18 1986-03-18 日本精工株式会社 緊急ロツク解除機構付シ−トベルト巻取装置
JPS6345834U (da) 1986-09-12 1988-03-28
US5897945A (en) 1996-02-26 1999-04-27 President And Fellows Of Harvard College Metal oxide nanorods
US6036774A (en) 1996-02-26 2000-03-14 President And Fellows Of Harvard College Method of producing metal oxide nanorods
US5677082A (en) 1996-05-29 1997-10-14 Ucar Carbon Technology Corporation Compacted carbon for electrochemical cells
US5997832A (en) 1997-03-07 1999-12-07 President And Fellows Of Harvard College Preparation of carbide nanorods
US6479030B1 (en) 1997-09-16 2002-11-12 Inorganic Specialists, Inc. Carbon electrode material
US6303266B1 (en) 1998-09-24 2001-10-16 Kabushiki Kaisha Toshiba Resin useful for resist, resist composition and pattern forming process using the same
FR2786208B1 (fr) * 1998-11-25 2001-02-09 Centre Nat Rech Scient Procede de croissance cristalline sur substrat et reacteur pour sa mise en oeuvre
US6225198B1 (en) 2000-02-04 2001-05-01 The Regents Of The University Of California Process for forming shaped group II-VI semiconductor nanocrystals, and product formed using process
US6306736B1 (en) 2000-02-04 2001-10-23 The Regents Of The University Of California Process for forming shaped group III-V semiconductor nanocrystals, and product formed using process
US6326056B1 (en) * 2000-02-16 2001-12-04 Specialty Coating Systems, Inc. Mobile cellular tumble coating method
EP1136587B1 (en) * 2000-03-23 2013-05-15 Hitachi Metals, Ltd. Deposited-film forming apparatus
KR100995457B1 (ko) 2000-08-22 2010-11-18 프레지던트 앤드 펠로우즈 오브 하버드 칼리지 나노센서 제조 방법
US7301199B2 (en) 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
JP2002060943A (ja) 2000-08-22 2002-02-28 Tohoku Electric Power Co Inc 高純度シリコンの被覆方法及び装置
NO20010929D0 (no) * 2001-02-23 2001-02-23 Norsk Hydro As FremgangsmÕte for utøvelse av termiske reaksjoner mellom reaktanter samt en ovn for samme
KR100394080B1 (ko) * 2001-03-20 2003-08-06 광주과학기술원 표면 개질된 실리카와 그 제조방법 및 장치
KR101008294B1 (ko) 2001-03-30 2011-01-13 더 리전트 오브 더 유니버시티 오브 캘리포니아 나노구조체 및 나노와이어의 제조 방법 및 그로부터 제조되는 디바이스
JP4388717B2 (ja) * 2001-06-27 2009-12-24 株式会社ユーテック Ｃｖｄ成膜装置及びｃｖｄ成膜方法
US20040026684A1 (en) 2002-04-02 2004-02-12 Nanosys, Inc. Nanowire heterostructures for encoding information
US6872645B2 (en) 2002-04-02 2005-03-29 Nanosys, Inc. Methods of positioning and/or orienting nanostructures
US20040037767A1 (en) 2002-08-21 2004-02-26 First Nano, Inc. Method and apparatus of carbon nanotube fabrication
US7067867B2 (en) 2002-09-30 2006-06-27 Nanosys, Inc. Large-area nonenabled macroelectronic substrates and uses therefor
CN1150997C (zh) 2002-12-27 2004-05-26 浙江大学 在碳纳米管表面负载纳米单金属粒子的方法
EP1445236A1 (fr) 2003-02-05 2004-08-11 Université de Liège Procédé et installation pour la fabrication de nanotubes de carbone
JP4274414B2 (ja) * 2003-05-21 2009-06-10 富士機械製造株式会社 球状半導体素子の製造方法及び製造装置
US7261779B2 (en) * 2003-06-05 2007-08-28 Lockheed Martin Corporation System, method, and apparatus for continuous synthesis of single-walled carbon nanotubes
CN1249276C (zh) 2003-07-11 2006-04-05 华中师范大学 化学沉淀法制备稳定的纳米氧化亚铜晶须的方法
KR100771393B1 (ko) 2003-10-20 2007-10-30 하리마 카세이 가부시키가이샤 건조 분말상의 금속 미립자 및 금속 산화물 미립자와 그용도
US20110039690A1 (en) 2004-02-02 2011-02-17 Nanosys, Inc. Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production
US7553371B2 (en) 2004-02-02 2009-06-30 Nanosys, Inc. Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production
US7105428B2 (en) 2004-04-30 2006-09-12 Nanosys, Inc. Systems and methods for nanowire growth and harvesting
EP1829141B1 (en) 2004-12-09 2013-05-29 Nanosys, Inc. Nanowire-based membrane electrode assemblies for fuel cells
US7842432B2 (en) 2004-12-09 2010-11-30 Nanosys, Inc. Nanowire structures comprising carbon
JP2008540309A (ja) 2005-05-12 2008-11-20 ベリー スモール パーティクル コンパニー ピーティーワイ リミテッド 材料の製造方法
CN101292365B (zh) 2005-06-17 2012-04-04 依路米尼克斯公司 纳米结构的光伏器件及其制造方法
EP1952467B9 (en) 2005-11-21 2012-03-14 Nanosys, Inc. Nanowire structures comprising carbon
KR100778011B1 (ko) 2005-12-06 2007-11-28 한국과학기술원 자기조립 초분자체를 이용한 금속 나노와이어 어레이의제조방법
JP2009522197A (ja) 2005-12-29 2009-06-11 ナノシス・インコーポレイテッド パターン形成された基板上のナノワイヤの配向した成長のための方法
CN100463111C (zh) 2006-01-14 2009-02-18 清华大学 硅线的制备方法
JP2008019461A (ja) 2006-07-11 2008-01-31 Fujifilm Corp 金属ナノ粒子の製造方法、金属ナノ粒子及び金属ナノ粒子分散物
KR100783667B1 (ko) * 2006-08-10 2007-12-07 한국화학연구원 입자형 다결정 실리콘의 제조방법 및 제조장치
JP2010509171A (ja) 2006-11-07 2010-03-25 ナノシス・インク． ナノワイヤー成長用システム及び方法
US20080135089A1 (en) 2006-11-15 2008-06-12 General Electric Company Graded hybrid amorphous silicon nanowire solar cells
KR100824301B1 (ko) * 2006-12-21 2008-04-22 세메스 주식회사 반응 챔버와 이를 포함하는 탄소나노튜브 합성 장치 및 설비
CN100448798C (zh) 2007-04-29 2009-01-07 北京科技大学 一种制备碳化硅晶须增强碳化硅复合材料零件的方法
GB0713898D0 (en) 2007-07-17 2007-08-29 Nexeon Ltd A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries
WO2009021988A1 (fr) 2007-08-14 2009-02-19 Universite Libre De Bruxelles Procédé de dépôt de nanoparticules sur un support
US20090186276A1 (en) 2008-01-18 2009-07-23 Aruna Zhamu Hybrid nano-filament cathode compositions for lithium metal or lithium ion batteries
US20110308463A1 (en) 2008-05-30 2011-12-22 Alta Devices, Inc. Chemical vapor deposition reactor with isolated sequential processing zones
CN102119120B (zh) * 2008-08-08 2013-08-07 株式会社东芝 纳米碳生成装置
KR101073853B1 (ko) 2008-12-29 2011-10-17 도레이첨단소재 주식회사 기재 상에 나노 구조체로 이루어진 망상 필름의 제조 방법 및 그에 따라 제조된 나노 구조체 망상 필름이 구비된 기재
FR2944783B1 (fr) 2009-04-28 2011-06-03 Commissariat Energie Atomique Procede d'elaboration de nanofils de silicium et/ou de germanium.
JP5686988B2 (ja) 2009-05-04 2015-03-18 シャープ株式会社 燃料電池用膜電極複合体に用いられる触媒層、それを用いる燃料電池用膜電極複合体、燃料電池、およびその製造方法
US20100285358A1 (en) 2009-05-07 2010-11-11 Amprius, Inc. Electrode Including Nanostructures for Rechargeable Cells
DK3859830T3 (da) 2009-05-19 2022-04-11 Oned Mat Inc Nanostrukturerede materialer til batterianvendelser
EP2440323B1 (en) * 2009-06-09 2019-08-28 Haydale Graphene Industries plc Methods and apparatus for particle processing with plasma
US8623288B1 (en) 2009-06-29 2014-01-07 Nanosys, Inc. Apparatus and methods for high density nanowire growth
CN101604753A (zh) 2009-07-24 2009-12-16 成都中科来方能源科技有限公司 碳硅复合材料及其制备方法和用途
US9138965B2 (en) 2009-10-30 2015-09-22 The Board Of Trustees Of The Leland Stanford Junior University Conductive fibrous materials
WO2011060024A2 (en) 2009-11-11 2011-05-19 Amprius, Inc. Open structures in substrates for electrodes
CN101791538A (zh) 2010-03-17 2010-08-04 上海大学 用负载氧化铜介孔碳材料去除水溶液中酚的方法
KR101128928B1 (ko) * 2010-10-26 2012-03-27 주식회사 지오스 열화학 기상 증착법을 이용한 탄소나노튜브 대량 합성장치
CA2819999C (en) * 2010-12-08 2018-09-04 Innovative Carbon Limited Particulate materials, composites comprising them, preparation and uses thereof
WO2013016339A2 (en) 2011-07-26 2013-01-31 Nanosys, Inc. Nanostructured battery active materials and methods of producing same
KR20130037091A (ko) 2011-10-05 2013-04-15 삼성에스디아이 주식회사 음극 활물질 및 이를 채용한 리튬 전지
CN102530931B (zh) 2011-12-14 2014-04-02 天津大学 基于石墨烯的纳米复合材料及其制备方法
US8865057B2 (en) 2012-02-06 2014-10-21 Wisconsin Alumni Research Foundation Apparatus and methods for industrial-scale production of metal matrix nanocomposites
US9711787B2 (en) 2012-11-30 2017-07-18 Lg Chem, Ltd. Anode active material for lithium secondary battery, preparation method thereof, and lithium secondary battery comprising the same
KR101557559B1 (ko) 2012-11-30 2015-10-07 주식회사 엘지화학 리튬 이차 전지용 음극재, 이의 제조 방법 및 이를 포함하는 리튬 이차 전지
US9676627B2 (en) 2014-05-14 2017-06-13 University Of Dayton Growth of silicon and boron nitride nanomaterials on carbon fibers by chemical vapor deposition
KR101637980B1 (ko) * 2014-09-24 2016-07-08 울산과학기술원 열 화학기상증착 장치 및 열 화학기상증착 방법
JP6312212B2 (ja) * 2014-11-18 2018-04-18 信越化学工業株式会社 回転式筒状炉、及び非水電解質二次電池用負極活物質の製造方法
JP6312213B2 (ja) * 2014-11-18 2018-04-18 信越化学工業株式会社 回転式筒状炉、及び非水電解質二次電池用負極活物質の製造方法
US10516169B2 (en) * 2015-11-12 2019-12-24 Sonata Scientific LLC Apparatus and method for coating bulk quantities of solid particles
ES2913682T3 (es) 2016-07-15 2022-06-03 Oned Mat Inc Procedimiento de fabricación para la fabricación de nanocables de silicio en polvos a base de carbono para su uso en baterías
US11174552B2 (en) * 2018-06-12 2021-11-16 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films

Also Published As

Publication number Publication date
KR102531225B1 (ko) 2023-05-10
HUE064985T2 (hu) 2024-04-28
CN109689567B (zh) 2022-09-09
EP4292702A3 (en) 2024-04-17
FI3484810T3 (fi) 2023-11-09
JP7155104B2 (ja) 2022-10-18
EP4273296A1 (en) 2023-11-08
EP3484810A4 (en) 2020-03-25
US20230352668A1 (en) 2023-11-02
HUE058982T2 (hu) 2022-10-28
KR20190030723A (ko) 2019-03-22
US10862114B2 (en) 2020-12-08
WO2018013991A2 (en) 2018-01-18
PL3484810T3 (pl) 2024-02-19
EP3778471B1 (en) 2022-04-20
ES2913682T3 (es) 2022-06-03
EP3484810A2 (en) 2019-05-22
US20180019467A1 (en) 2018-01-18
PL3778471T3 (pl) 2022-06-13
JP2022189833A (ja) 2022-12-22
ES2962317T3 (es) 2024-03-18
EP3778471A1 (en) 2021-02-17
DK3778471T3 (da) 2022-05-23
US20180019468A1 (en) 2018-01-18
US11728477B2 (en) 2023-08-15
CN109689567A (zh) 2019-04-26
EP4292702A2 (en) 2023-12-20
WO2018013991A3 (en) 2018-02-22
EP3484810B1 (en) 2023-10-11
JP2019527187A (ja) 2019-09-26

Similar Documents

Publication Publication Date Title
DK3484810T3 (da) Fremstillingsindretning og fremgangsmåde til fremstilling af siliciumnanowirer på carbonbaserede pulvere til anvendelse i batterier
GB2583047B (en) Organomimetic devices and methods of use and manufacturing thereof
DK3448386T3 (da) Isoquinolin-3-ylcarboxamider og fremstilling og anvendelse deraf
HK1202983A1 (en) Semiconductor device and manufacturing method of the same
DK3313401T3 (da) Nanopartikler omfattende sirolimus og albumin til anvendelse i behandling af epithelioide celletumorer
DK3142220T3 (da) Strømadapter og -terminal
HK1204506A1 (en) Semiconductor device and manufacturing method of semiconductor device
DK3083789T3 (da) Overfladebehandling af partikler og anvendelse heraf
DK2692668T3 (da) Indretning og fremgangsmåde til palletering af laster med flere referencer
DK2970898T3 (da) Fremstilling og anvendels af røde blodceller
DK3096684T3 (da) Anordning og fremgangsmåde til måling af kropsegenskaber
JP2016027652A5 (ja) 半導体装置、及び電子機器
DK2988756T4 (da) Formulering af kontraststof og dertil knyttet fremstillingsfremgangsmåde
DK3151319T3 (da) Elektrodemateriale, fremgangsmåde til fremstilling heraf og lithiumbatteri
EP2991108A4 (en) Semiconductor device and method of manufacture thereof
DK3078724T3 (da) Fremgangsmåde til fremstilling af biodiesel og relaterede produkter
TWI563624B (en) Semiconductor device structure and method of fabricating the same
DK3078056T3 (da) Elektroaktiv anordning og fremgangsmåde til fremstilling af denne
DK3092659T3 (da) Trench-mos-indretning med en afslutningsstruktur med flere feltafspændings-trenches til højspændingsanvendelser og tilsvarende fremstillingsfremgangsmåde
DK3462565T3 (da) Anordning, der skal oplades, og opladningsfremgangsmåde
DK3010043T3 (da) Halvlederindretning og fremstillingsfremgangsmåde dertil
HK1206869A1 (en) Semiconductor device and method of manufacturing the same
GB201320925D0 (en) Semiconductor devices and fabrication methods
DK2994150T3 (da) Probiotika og fremgangsmåde til anvendelse
DK3080021T3 (da) Indretning og fremgangsmåde til håndtering af genstande