DE69912887D1 - Sensor - Google Patents

Sensor

Info

Publication number
DE69912887D1
DE69912887D1 DE69912887T DE69912887T DE69912887D1 DE 69912887 D1 DE69912887 D1 DE 69912887D1 DE 69912887 T DE69912887 T DE 69912887T DE 69912887 T DE69912887 T DE 69912887T DE 69912887 D1 DE69912887 D1 DE 69912887D1
Authority
DE
Germany
Prior art keywords
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69912887T
Other languages
English (en)
Other versions
DE69912887T2 (de
Inventor
Masaharu Ikeda
Masayoshi Esashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69912887D1 publication Critical patent/DE69912887D1/de
Application granted granted Critical
Publication of DE69912887T2 publication Critical patent/DE69912887T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Surgical Instruments (AREA)
DE69912887T 1998-07-14 1999-07-05 Sensor Expired - Lifetime DE69912887T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21343298 1998-07-14
JP21343298A JP4124867B2 (ja) 1998-07-14 1998-07-14 変換装置

Publications (2)

Publication Number Publication Date
DE69912887D1 true DE69912887D1 (de) 2003-12-24
DE69912887T2 DE69912887T2 (de) 2004-11-04

Family

ID=16639140

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69912887T Expired - Lifetime DE69912887T2 (de) 1998-07-14 1999-07-05 Sensor

Country Status (7)

Country Link
US (1) US6145384A (de)
EP (1) EP0973012B1 (de)
JP (1) JP4124867B2 (de)
CN (1) CN1141564C (de)
DE (1) DE69912887T2 (de)
DK (1) DK0973012T3 (de)
NO (1) NO320487B1 (de)

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TW546480B (en) * 2000-03-07 2003-08-11 Sumitomo Metal Ind Circuit, apparatus and method for inspecting impedance
JP4773630B2 (ja) * 2001-05-15 2011-09-14 株式会社デンソー ダイアフラム型半導体装置とその製造方法
US20040232503A1 (en) * 2001-06-12 2004-11-25 Shinya Sato Semiconductor device and method of producing the same
TWI221195B (en) * 2001-09-06 2004-09-21 Tokyo Electron Ltd Electrostatic capacitance measuring circuit, electrostatic capacitance measuring instrument, and microphone device
CN1271415C (zh) * 2001-09-06 2006-08-23 东京毅力科创株式会社 电容检测电路、电容检测装置及麦克风装置
ATE399327T1 (de) * 2001-09-06 2008-07-15 Tokyo Electron Ltd Vorrichtung und verfahren zur messung der sensorkapazität
TWI221196B (en) * 2001-09-06 2004-09-21 Tokyo Electron Ltd Impedance measuring circuit, its method, and electrostatic capacitance measuring circuit
US20040016120A1 (en) * 2002-06-07 2004-01-29 California Institute Of Technology Method and resulting device for fabricating electret materials on bulk substrates
AU2003238880A1 (en) * 2002-06-07 2003-12-22 California Institute Of Technology Electret generator apparatus and method
US20060149168A1 (en) * 2002-08-19 2006-07-06 Robert Czarnek Capacitive uterine contraction sensor
JP3930862B2 (ja) * 2004-02-13 2007-06-13 東京エレクトロン株式会社 容量型センサ
US8581610B2 (en) * 2004-04-21 2013-11-12 Charles A Miller Method of designing an application specific probe card test system
CN101592499B (zh) * 2004-05-10 2011-11-09 株式会社藤仓 静电电容传感器
JP4463653B2 (ja) * 2004-05-10 2010-05-19 株式会社フジクラ ハイブリッドセンサ
US7489141B1 (en) 2004-08-18 2009-02-10 Environmental Metrology Corporation Surface micro sensor and method
US7560788B2 (en) * 2004-09-20 2009-07-14 General Electric Company Microelectromechanical system pressure sensor and method for making and using
US7317317B1 (en) * 2004-11-02 2008-01-08 Environmental Metrology Corporation Shielded micro sensor and method for electrochemically monitoring residue in micro features
US7332902B1 (en) * 2004-11-02 2008-02-19 Environmental Metrology Corporation Micro sensor for electrochemically monitoring residue in micro channels
US7932726B1 (en) 2005-08-16 2011-04-26 Environmental Metrology Corporation Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)
US7448277B2 (en) * 2006-08-31 2008-11-11 Evigia Systems, Inc. Capacitive pressure sensor and method therefor
CN102132228B (zh) * 2008-09-03 2014-01-01 水岛昌德 输入装置
US7902851B2 (en) 2009-06-10 2011-03-08 Medtronic, Inc. Hermeticity testing
US8172760B2 (en) 2009-06-18 2012-05-08 Medtronic, Inc. Medical device encapsulated within bonded dies
JP4585615B1 (ja) * 2010-02-03 2010-11-24 株式会社オーギャ 入力装置
US8666505B2 (en) 2010-10-26 2014-03-04 Medtronic, Inc. Wafer-scale package including power source
US8424388B2 (en) * 2011-01-28 2013-04-23 Medtronic, Inc. Implantable capacitive pressure sensor apparatus and methods regarding same
GB2491111B (en) * 2011-05-19 2015-08-19 Oxford Instr Nanotechnology Tools Ltd Charge-sensitive amplifier
US20120308066A1 (en) * 2011-06-03 2012-12-06 Hung-Jen Chen Combined micro-electro-mechanical systems microphone and method for manufacturing the same
JP6111434B2 (ja) * 2012-03-09 2017-04-12 パナソニックＩｐマネジメント株式会社 慣性力センサ
CN104748769B (zh) * 2013-12-25 2017-08-04 北京纳米能源与***研究所 一种基于静电感应的传感器以及传感方法
JP6452140B2 (ja) * 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
JP6555869B2 (ja) * 2014-10-17 2019-08-07 キヤノン株式会社 静電容量型トランスデューサ
US9826308B2 (en) 2015-02-12 2017-11-21 Apple Inc. Capacitive displacement sensing circuit with a guard voltage source
KR101739791B1 (ko) * 2015-05-11 2017-05-26 주식회사 하이딥 압력 센싱 장치, 압력 검출기 및 이들을 포함하는 장치
CN105547553B (zh) * 2015-12-15 2018-06-05 北京理工大学 基于压电驻极体的无源高灵敏冲击力传感器及其测试方法
US9933867B2 (en) 2015-12-30 2018-04-03 Synaptics Incorporated Active pen capacitive displacement gauge
TWI677669B (zh) * 2016-09-20 2019-11-21 友達光電股份有限公司 壓力感測陣列與壓力感測方法
JP6527193B2 (ja) * 2017-04-07 2019-06-05 株式会社鷺宮製作所 圧力センサ
DE112020005489T5 (de) * 2019-11-07 2022-09-08 Alps Alpine Co., Ltd. Kapazitätserfassungsvorrichtung und kapazitätserfassungsverfahren
CN110794273A (zh) * 2019-11-19 2020-02-14 哈尔滨理工大学 含有高压驱动保护电极的电位时域谱测试***
EP4009006A1 (de) * 2020-12-01 2022-06-08 NXP USA, Inc. Sensoreinheit mit reduktion von störeinstreuungen und betriebsverfahren
WO2023058660A1 (ja) * 2021-10-05 2023-04-13 株式会社村田製作所 圧力センサ構造および圧力センサ装置

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US3417626A (en) * 1965-05-25 1968-12-24 Gen Precision Inc Single-axis accelerometer
JPS6165114A (ja) * 1984-09-06 1986-04-03 Yokogawa Hokushin Electric Corp 容量式変換装置
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
JPH05231890A (ja) * 1992-02-19 1993-09-07 Yokogawa Electric Corp 容量式電磁流量計
FR2687777B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur capacitif a faible capacite parasite et procede de fabrication.
JPH0569631U (ja) * 1992-02-24 1993-09-21 横河電機株式会社 容量式電磁流量計
US5459368A (en) * 1993-08-06 1995-10-17 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device mounted module
JPH0784554A (ja) * 1993-09-20 1995-03-31 Toshiba Corp 液晶表示装置
JP3217560B2 (ja) * 1993-11-15 2001-10-09 株式会社東芝 半導体装置
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5545912A (en) * 1994-10-27 1996-08-13 Motorola, Inc. Electronic device enclosure including a conductive cap and substrate
JPH09257832A (ja) * 1996-03-26 1997-10-03 Matsushita Electric Works Ltd エレクトレット応用装置及びその製造方法
JPH09257618A (ja) * 1996-03-26 1997-10-03 Toyota Central Res & Dev Lab Inc 静電容量型圧力センサおよびその製造方法
JPH1038508A (ja) * 1996-07-22 1998-02-13 Hewlett Packard Co <Hp> 位置検出装置及び位置決め装置

Also Published As

Publication number Publication date
NO320487B1 (no) 2005-12-12
CN1243244A (zh) 2000-02-02
DK0973012T3 (da) 2004-03-15
CN1141564C (zh) 2004-03-10
NO993448D0 (no) 1999-07-13
NO993448L (no) 2000-01-17
EP0973012B1 (de) 2003-11-19
JP4124867B2 (ja) 2008-07-23
EP0973012A1 (de) 2000-01-19
US6145384A (en) 2000-11-14
DE69912887T2 (de) 2004-11-04
JP2000028462A (ja) 2000-01-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP