DE69839540D1 - Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf - Google Patents

Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf

Info

Publication number
DE69839540D1
DE69839540D1 DE69839540T DE69839540T DE69839540D1 DE 69839540 D1 DE69839540 D1 DE 69839540D1 DE 69839540 T DE69839540 T DE 69839540T DE 69839540 T DE69839540 T DE 69839540T DE 69839540 D1 DE69839540 D1 DE 69839540D1
Authority
DE
Germany
Prior art keywords
manufacturing
piezoelectric layer
inkjet printhead
layer element
printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69839540T
Other languages
English (en)
Inventor
Tsutomu Nishiwaki
Masami Murai
Kazuo Hashimoto
Toshihiko Anno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16428097A external-priority patent/JP3615644B2/ja
Priority claimed from JP11509398A external-priority patent/JPH11307832A/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69839540D1 publication Critical patent/DE69839540D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/081—Shaping or machining of piezoelectric or electrostrictive bodies by coating or depositing using masks, e.g. lift-off
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69839540T 1997-06-20 1998-06-19 Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf Expired - Lifetime DE69839540D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16428097A JP3615644B2 (ja) 1997-06-20 1997-06-20 薄膜圧電体素子の製造方法及び薄膜圧電体素子、並びにインクジェット式記録ヘッド
JP11509398A JPH11307832A (ja) 1998-04-24 1998-04-24 圧電体薄膜素子、その製造方法、並びにインクジェット式記録ヘッド

Publications (1)

Publication Number Publication Date
DE69839540D1 true DE69839540D1 (de) 2008-07-10

Family

ID=26453693

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69839540T Expired - Lifetime DE69839540D1 (de) 1997-06-20 1998-06-19 Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf

Country Status (3)

Country Link
US (1) US6147438A (de)
EP (1) EP0886328B1 (de)
DE (1) DE69839540D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6402304B1 (en) * 1998-08-12 2002-06-11 Seiko Epson Corporation Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head
JP3517876B2 (ja) 1998-10-14 2004-04-12 セイコーエプソン株式会社 強誘電体薄膜素子の製造方法、インクジェット式記録ヘッド及びインクジェットプリンタ
US6594875B2 (en) * 1998-10-14 2003-07-22 Samsung Electro-Mechanics Co. Method for producing a piezoelectric/electrostrictive actuator
US6432238B1 (en) * 1998-12-30 2002-08-13 Samsung Electro-Mechanicals Co., Ltd. Method for fabricating piezoelectric/electrostrictive thick film using seeding layer
US6903491B2 (en) * 2001-04-26 2005-06-07 Matsushita Electric Industrial Co., Ltd. Piezoelectric element, actuator, and inkjet head
US6620237B2 (en) 2001-11-15 2003-09-16 Spectra, Inc. Oriented piezoelectric film
US7009328B2 (en) * 2003-06-20 2006-03-07 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method
US7559631B2 (en) * 2003-09-24 2009-07-14 Seiko Epson Corporation Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus
JP4024741B2 (ja) * 2003-10-20 2007-12-19 富士通メディアデバイス株式会社 圧電薄膜共振子及びフィルタ
WO2007089852A2 (en) * 2006-01-30 2007-08-09 Donaldson Company, Inc. Filter arrangement and servicing thereof
EP1984619A2 (de) * 2006-02-07 2008-10-29 Donaldson Company, Inc. Filteranordnung und -verfahren
JP5275698B2 (ja) * 2008-06-17 2013-08-28 富士フイルム株式会社 圧電体膜の分極方法および圧電素子構造体の製造方法
WO2012118995A1 (en) * 2011-03-02 2012-09-07 Game Changers, Llc Thermal transpiration device and method of making same
EP2690678B1 (de) * 2011-03-25 2017-09-13 NGK Insulators, Ltd. Geschichtete komponenten und verfahren zu ihrer herstellung
CN105428518B (zh) * 2015-11-13 2019-01-25 中国科学院上海微***与信息技术研究所 基于局域共振体的声子晶体结构及其制作方法
JP6690253B2 (ja) * 2016-01-22 2020-04-28 株式会社リコー Ｐｚｔ前駆体溶液及びその製造方法、ｐｚｔ膜の製造方法、電気機械変換素子の製造方法、液体吐出ヘッドの製造方法
CN113272982B (zh) * 2018-11-09 2024-06-14 麦斯卓微电子(南京)有限公司 压电致动器制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3244311B2 (ja) * 1992-09-28 2002-01-07 ローム株式会社 半導体装置の製造方法
JP3159561B2 (ja) * 1993-03-29 2001-04-23 ローム株式会社 結晶性薄膜用電極
JPH06349324A (ja) * 1993-06-04 1994-12-22 Sharp Corp 強誘電体薄膜の形成方法
JPH08118662A (ja) * 1994-10-26 1996-05-14 Mita Ind Co Ltd インクジェットプリンタ用印字ヘッド及びその製造方法
JP3166535B2 (ja) * 1995-03-01 2001-05-14 富士電機株式会社 インクジェット記録ヘッド
EP0736385B1 (de) * 1995-04-03 1998-02-25 Seiko Epson Corporation Tintenstrahldruckkopf und dessen Herstellungsverfahren
JP3209082B2 (ja) * 1996-03-06 2001-09-17 セイコーエプソン株式会社 圧電体薄膜素子及びその製造方法、並びにこれを用いたインクジェット式記録ヘッド

Also Published As

Publication number Publication date
EP0886328A2 (de) 1998-12-23
US6147438A (en) 2000-11-14
EP0886328A3 (de) 2000-09-20
EP0886328B1 (de) 2008-05-28

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