DE60118113D1 - Mit Bläschen angetriebener Tintenstrahldruckkopf, dazugehöriges Herstellungsverfahren, und Tintenausstossverfahren - Google Patents
Mit Bläschen angetriebener Tintenstrahldruckkopf, dazugehöriges Herstellungsverfahren, und TintenausstossverfahrenInfo
- Publication number
- DE60118113D1 DE60118113D1 DE60118113T DE60118113T DE60118113D1 DE 60118113 D1 DE60118113 D1 DE 60118113D1 DE 60118113 T DE60118113 T DE 60118113T DE 60118113 T DE60118113 T DE 60118113T DE 60118113 D1 DE60118113 D1 DE 60118113D1
- Authority
- DE
- Germany
- Prior art keywords
- bubble
- propelled
- jet printhead
- associated manufacturing
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/055—Devices for absorbing or preventing back-pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14137—Resistor surrounding the nozzle opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/1437—Back shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2000-0022260A KR100374788B1 (ko) | 2000-04-26 | 2000-04-26 | 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법 |
KR2226000000 | 2000-04-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60118113D1 true DE60118113D1 (de) | 2006-05-11 |
DE60118113T2 DE60118113T2 (de) | 2007-03-01 |
Family
ID=36217535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60118113T Expired - Lifetime DE60118113T2 (de) | 2000-04-26 | 2001-04-24 | Mit Bläschen angetriebener Tintenstrahldruckkopf, dazugehöriges Herstellungsverfahren, und Tintenausstossverfahren |
Country Status (5)
Country | Link |
---|---|
US (2) | US6499832B2 (de) |
EP (1) | EP1149705B1 (de) |
JP (1) | JP3382932B2 (de) |
KR (1) | KR100374788B1 (de) |
DE (1) | DE60118113T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100506082B1 (ko) * | 2000-12-18 | 2005-08-04 | 삼성전자주식회사 | 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드의 제조 방법 |
KR100668296B1 (ko) * | 2001-01-19 | 2007-01-12 | 삼성전자주식회사 | 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드 |
TW491734B (en) | 2001-06-28 | 2002-06-21 | Acer Comm & Multimedia Inc | Microinjector for ejecting droplets of different sizes |
KR100400015B1 (ko) * | 2001-11-15 | 2003-09-29 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
KR100400228B1 (ko) * | 2001-11-16 | 2003-10-01 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
KR100400229B1 (ko) * | 2001-11-22 | 2003-10-01 | 삼성전자주식회사 | 버블젯 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
KR100433530B1 (ko) * | 2001-12-10 | 2004-05-31 | 삼성전자주식회사 | 일체형 잉크젯 프린트 헤드의 제조 방법 |
KR100438708B1 (ko) * | 2001-12-13 | 2004-07-05 | 삼성전자주식회사 | 잉크젯 프린트 헤드 및 이의 제조 방법 |
KR100428793B1 (ko) * | 2002-06-26 | 2004-04-28 | 삼성전자주식회사 | 잉크젯 프린터 헤드 및 그 제조 방법 |
US6902867B2 (en) * | 2002-10-02 | 2005-06-07 | Lexmark International, Inc. | Ink jet printheads and methods therefor |
US6755509B2 (en) * | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
KR100499150B1 (ko) * | 2003-07-29 | 2005-07-04 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
US7213908B2 (en) * | 2004-08-04 | 2007-05-08 | Eastman Kodak Company | Fluid ejector having an anisotropic surface chamber etch |
KR100676815B1 (ko) * | 2005-05-31 | 2007-02-01 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
US7554764B2 (en) * | 2006-04-07 | 2009-06-30 | Hitachi Global Storage Technologies Netherlands B.V. | Lift-off method for forming write pole of a magnetic write head and write pole formed thereby |
US20080018713A1 (en) * | 2006-07-21 | 2008-01-24 | Lopez Ali G | Multi-crystalline silicon device and manufacturing method |
JP5159069B2 (ja) * | 2006-08-29 | 2013-03-06 | キヤノン株式会社 | 液体吐出方法 |
JP4921101B2 (ja) * | 2006-10-04 | 2012-04-25 | キヤノン株式会社 | インクジェット記録ヘッド、およびインク吐出方法 |
KR20080086306A (ko) * | 2007-03-22 | 2008-09-25 | 삼성전자주식회사 | 잉크젯 프린트헤드의 제조방법 |
JP5875293B2 (ja) | 2011-08-25 | 2016-03-02 | キヤノン株式会社 | 記録ヘッドおよびインクジェット記録装置 |
Family Cites Families (52)
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US3890623A (en) | 1973-05-02 | 1975-06-17 | Minnesota Mining & Mfg | Magnetic document encoder having multiple staggered styli |
CA1127227A (en) | 1977-10-03 | 1982-07-06 | Ichiro Endo | Liquid jet recording process and apparatus therefor |
US4275290A (en) | 1978-05-08 | 1981-06-23 | Northern Telecom Limited | Thermally activated liquid ink printing |
US4219822A (en) | 1978-08-17 | 1980-08-26 | The Mead Corporation | Skewed ink jet printer with overlapping print lines |
US4296421A (en) | 1978-10-26 | 1981-10-20 | Canon Kabushiki Kaisha | Ink jet recording device using thermal propulsion and mechanical pressure changes |
US4330787A (en) | 1978-10-31 | 1982-05-18 | Canon Kabushiki Kaisha | Liquid jet recording device |
JPS55131882A (en) | 1979-04-02 | 1980-10-14 | Canon Inc | Electronic equipment |
JPS5931943B2 (ja) | 1979-04-02 | 1984-08-06 | キヤノン株式会社 | 液体噴射記録法 |
US4463359A (en) | 1979-04-02 | 1984-07-31 | Canon Kabushiki Kaisha | Droplet generating method and apparatus thereof |
JPS56144160A (en) | 1980-04-11 | 1981-11-10 | Ricoh Co Ltd | Ink jet recording unit |
DE3028404A1 (de) | 1980-07-26 | 1982-07-22 | NCR Corp., 45479 Dayton, Ohio | Tintenstrahldrucker |
US4429321A (en) | 1980-10-23 | 1984-01-31 | Canon Kabushiki Kaisha | Liquid jet recording device |
JPS5774180A (en) | 1980-10-28 | 1982-05-10 | Nippon Telegr & Teleph Corp <Ntt> | Heat sensitive recorder |
US4521805A (en) | 1981-04-24 | 1985-06-04 | Canon Kabushiki Kaisha | Printing apparatus or system |
US4490728A (en) | 1981-08-14 | 1984-12-25 | Hewlett-Packard Company | Thermal ink jet printer |
US4611219A (en) | 1981-12-29 | 1986-09-09 | Canon Kabushiki Kaisha | Liquid-jetting head |
US4675696A (en) | 1982-04-07 | 1987-06-23 | Canon Kabushiki Kaisha | Recording apparatus |
DE3402683C2 (de) | 1983-01-28 | 1994-06-09 | Canon Kk | Tintenstrahl-Aufzeichnungskopf |
DE3306098A1 (de) | 1983-02-22 | 1984-08-23 | Siemens AG, 1000 Berlin und 8000 München | Piezoelektrisch betriebener schreibkopf mit kanalmatrize |
US4580149A (en) * | 1985-02-19 | 1986-04-01 | Xerox Corporation | Cavitational liquid impact printer |
US4675694A (en) | 1986-03-12 | 1987-06-23 | Exxon Printing Systems, Inc. | Method and apparatus for a high density array printer using hot melt inks |
EP0367303A1 (de) | 1986-04-28 | 1990-05-09 | Hewlett-Packard Company | Thermischer Tintenstrahldruckkopf |
US4894664A (en) | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
DE3717294C2 (de) * | 1986-06-10 | 1995-01-26 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf |
US4812859A (en) | 1987-09-17 | 1989-03-14 | Hewlett-Packard Company | Multi-chamber ink jet recording head for color use |
US4882595A (en) | 1987-10-30 | 1989-11-21 | Hewlett-Packard Company | Hydraulically tuned channel architecture |
EP0317171A3 (de) | 1987-11-13 | 1990-07-18 | Hewlett-Packard Company | Integrales Dünnschicht-Injektionssystem für einen thermischen Tintenspritzdruckkopf und Arbeitsmethoden |
JP2846636B2 (ja) | 1987-12-02 | 1999-01-13 | キヤノン株式会社 | インクジェット記録ヘッド用基板の作製方法 |
US4847630A (en) | 1987-12-17 | 1989-07-11 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
US4831390A (en) | 1988-01-15 | 1989-05-16 | Xerox Corporation | Bubble jet printing device with improved printhead heat control |
JPH01190458A (ja) | 1988-01-25 | 1989-07-31 | Nec Corp | インクジェットヘッド |
JP2656793B2 (ja) | 1988-06-01 | 1997-09-24 | キヤノン株式会社 | インクジェット記録装置 |
EP0352498A1 (de) | 1988-07-14 | 1990-01-31 | Ascom Hasler AG | Frankiermaschine |
DE68914897T2 (de) | 1988-07-26 | 1994-08-25 | Canon Kk | Flüssigkeitsstrahlaufzeichnungskopf und Aufzeichnungsgerät, versehen mit diesem Kopf. |
US4864328A (en) | 1988-09-06 | 1989-09-05 | Spectra, Inc. | Dual mode ink jet printer |
US4864329A (en) | 1988-09-22 | 1989-09-05 | Xerox Corporation | Fluid handling device with filter and fabrication process therefor |
US4985710A (en) | 1989-11-29 | 1991-01-15 | Xerox Corporation | Buttable subunits for pagewidth "Roofshooter" printheads |
JPH03277550A (ja) * | 1990-03-28 | 1991-12-09 | Canon Inc | インクジェット記録ヘッドおよび該インクジェット記録ヘッドを搭載したインクジェット記録装置 |
EP0530209B1 (de) | 1990-05-21 | 1994-12-07 | Eastman Kodak Company | Tintenschreibkopf für eine nach dem thermalwandlerprinzip arbeitende flüssigkeitsstrahlaufzeichnungsvorrichtung und verfahren zu seiner herstellung |
EP0471157B1 (de) | 1990-08-16 | 1995-08-09 | Hewlett-Packard Company | Photo-ablatierte Bauteile für Farbstrahldruckkopf |
JPH04241955A (ja) | 1991-01-11 | 1992-08-28 | Fuji Xerox Co Ltd | インクジェット記録ヘッドの製造方法 |
AU657720B2 (en) * | 1991-01-30 | 1995-03-23 | Canon Kabushiki Kaisha | A bubblejet image reproducing apparatus |
US6019457A (en) | 1991-01-30 | 2000-02-01 | Canon Information Systems Research Australia Pty Ltd. | Ink jet print device and print head or print apparatus using the same |
JPH05338178A (ja) | 1991-12-23 | 1993-12-21 | Canon Inf Syst Res Australia Pty Ltd | インクジェットプリントデバイス |
JPH07156402A (ja) | 1994-09-01 | 1995-06-20 | Ricoh Co Ltd | 液体噴射記録ヘッド |
US5850241A (en) | 1995-04-12 | 1998-12-15 | Eastman Kodak Company | Monolithic print head structure and a manufacturing process therefor using anisotropic wet etching |
AUPN522295A0 (en) * | 1995-09-06 | 1995-09-28 | Eastman Kodak Company | Cmos process compatible fabrication of lift print heads |
JPH10151765A (ja) * | 1996-11-25 | 1998-06-09 | Canon Inc | インクジェット装置、及びインクジェットヘッド |
KR100221459B1 (ko) * | 1997-03-07 | 1999-09-15 | 이형도 | 프린트헤드의 기록액 분사장치 및 그 방법 |
US6093330A (en) * | 1997-06-02 | 2000-07-25 | Cornell Research Foundation, Inc. | Microfabrication process for enclosed microstructures |
KR100397604B1 (ko) * | 2000-07-18 | 2003-09-13 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법 |
KR100668294B1 (ko) * | 2001-01-08 | 2007-01-12 | 삼성전자주식회사 | 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드 및 그제조방법 |
-
2000
- 2000-04-26 KR KR10-2000-0022260A patent/KR100374788B1/ko active IP Right Grant
-
2001
- 2001-04-18 JP JP2001120192A patent/JP3382932B2/ja not_active Expired - Fee Related
- 2001-04-24 DE DE60118113T patent/DE60118113T2/de not_active Expired - Lifetime
- 2001-04-24 EP EP01303716A patent/EP1149705B1/de not_active Expired - Lifetime
- 2001-04-26 US US09/842,123 patent/US6499832B2/en not_active Expired - Lifetime
-
2002
- 2002-09-27 US US10/255,758 patent/US6685846B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60118113T2 (de) | 2007-03-01 |
US20030038862A1 (en) | 2003-02-27 |
KR100374788B1 (ko) | 2003-03-04 |
US6685846B2 (en) | 2004-02-03 |
EP1149705A1 (de) | 2001-10-31 |
JP3382932B2 (ja) | 2003-03-04 |
US6499832B2 (en) | 2002-12-31 |
US20010055048A1 (en) | 2001-12-27 |
KR20010097852A (ko) | 2001-11-08 |
EP1149705B1 (de) | 2006-03-22 |
JP2001347666A (ja) | 2001-12-18 |
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