DE69937713D1 - Piezoelektrisches gerät, tintenstrahldruckkopf, verfahren zum herstellen und drucker - Google Patents
Piezoelektrisches gerät, tintenstrahldruckkopf, verfahren zum herstellen und druckerInfo
- Publication number
- DE69937713D1 DE69937713D1 DE69937713T DE69937713T DE69937713D1 DE 69937713 D1 DE69937713 D1 DE 69937713D1 DE 69937713 T DE69937713 T DE 69937713T DE 69937713 T DE69937713 T DE 69937713T DE 69937713 D1 DE69937713 D1 DE 69937713D1
- Authority
- DE
- Germany
- Prior art keywords
- printer
- manufacture
- ink jet
- print head
- jet print
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
- H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5219698 | 1998-03-04 | ||
JP8116898 | 1998-03-27 | ||
JP31441398 | 1998-11-05 | ||
JP31660598 | 1998-11-06 | ||
PCT/JP1999/001058 WO1999045598A1 (en) | 1998-03-04 | 1999-03-04 | Piezoelectric device, ink-jet recording head, method fo manufacture, and printer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69937713D1 true DE69937713D1 (de) | 2008-01-24 |
Family
ID=27462743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69937713T Expired - Lifetime DE69937713D1 (de) | 1998-03-04 | 1999-03-04 | Piezoelektrisches gerät, tintenstrahldruckkopf, verfahren zum herstellen und drucker |
Country Status (5)
Country | Link |
---|---|
US (1) | US6398349B1 (de) |
EP (1) | EP0991130B1 (de) |
JP (1) | JP3882946B2 (de) |
DE (1) | DE69937713D1 (de) |
WO (1) | WO1999045598A1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6903491B2 (en) * | 2001-04-26 | 2005-06-07 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, actuator, and inkjet head |
DE60332174D1 (de) * | 2002-02-19 | 2010-05-27 | Brother Ind Ltd | Tintenstrahldruckkopf und dazugehöriges Herstellungsverfahren, Tintenstrahldrucker und Herstellungsverfahren eines Aktors |
JP3974096B2 (ja) * | 2002-09-20 | 2007-09-12 | キヤノン株式会社 | 圧電体素子及びインクジェット記録ヘッド |
JP4419458B2 (ja) * | 2003-07-14 | 2010-02-24 | リコープリンティングシステムズ株式会社 | インクジェットヘッドの製造方法 |
JP2005136115A (ja) * | 2003-10-30 | 2005-05-26 | Tdk Corp | 電子デバイス及びその製造方法 |
JP2005244184A (ja) * | 2004-01-28 | 2005-09-08 | Toshiba Corp | 薄膜圧電素子及び薄膜圧電素子の製造方法 |
US7323805B2 (en) | 2004-01-28 | 2008-01-29 | Kabushiki Kaisha Toshiba | Piezoelectric thin film device and method for manufacturing the same |
JP2006069152A (ja) * | 2004-09-06 | 2006-03-16 | Canon Inc | インクジェットヘッド及びその製造方法 |
JP2006069151A (ja) * | 2004-09-06 | 2006-03-16 | Canon Inc | 圧電膜型アクチュエータの製造方法及び液体噴射ヘッド |
JP5170356B2 (ja) * | 2005-03-22 | 2013-03-27 | セイコーエプソン株式会社 | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
JP2006303425A (ja) * | 2005-03-22 | 2006-11-02 | Seiko Epson Corp | 圧電素子及び液体噴射ヘッド並びに液体噴射装置 |
CN100505357C (zh) * | 2005-03-22 | 2009-06-24 | 精工爱普生株式会社 | 压电元件,液体喷射头和液体喷射设备 |
JP2007019084A (ja) * | 2005-07-05 | 2007-01-25 | Seiko Epson Corp | 圧電素子の製造方法及び液体噴射ヘッドの製造方法 |
JP4730126B2 (ja) * | 2006-02-22 | 2011-07-20 | パナソニック電工株式会社 | バルク弾性波共振素子及び該製造方法並びにフィルタ回路 |
JP4333686B2 (ja) * | 2006-04-03 | 2009-09-16 | セイコーエプソン株式会社 | アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 |
JP4367654B2 (ja) * | 2006-08-30 | 2009-11-18 | セイコーエプソン株式会社 | 圧電素子及び液体噴射ヘッド |
JP5251031B2 (ja) * | 2006-09-08 | 2013-07-31 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッド、液体噴射装置、センサー |
DE102007019166A1 (de) * | 2007-04-20 | 2008-10-30 | Fachhochschule Kiel | Verfahren zur Herstellung von Substraten für die Oberflächen-verstärkte Raman-Spektroskopie |
JP5104609B2 (ja) * | 2008-07-14 | 2012-12-19 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
JP5314963B2 (ja) | 2008-08-12 | 2013-10-16 | 富士フイルム株式会社 | 積層体、圧電素子、および液体吐出装置 |
JP5371329B2 (ja) * | 2008-08-29 | 2013-12-18 | 富士フイルム株式会社 | 圧電素子、および液体吐出装置 |
JP5561464B2 (ja) * | 2009-09-30 | 2014-07-30 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッドおよび液体噴射装置 |
JP5590906B2 (ja) * | 2010-02-09 | 2014-09-17 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法 |
DE102010046966B4 (de) * | 2010-09-29 | 2018-05-24 | Infineon Technologies Ag | Baustein und Verfahren zur Herstellung eines Bausteins |
JP2013197522A (ja) * | 2012-03-22 | 2013-09-30 | Ricoh Co Ltd | 圧電体薄膜素子とその製造方法、該圧電体薄膜素子を用いた液滴吐出ヘッドおよびインクジェット記録装置 |
US10141497B2 (en) * | 2012-07-31 | 2018-11-27 | Hewlett-Packard Development Company, L.P. | Thin film stack |
US9636902B2 (en) | 2013-04-30 | 2017-05-02 | Hewlett-Packard Development Company, L.P. | Film stack including adhesive layer |
FR3031940B1 (fr) * | 2015-01-27 | 2017-02-17 | Faurecia Interieur Ind | Tableau de commande pour vehicule et procede pour fabriquer un tel tableau de commande. |
JP7363067B2 (ja) * | 2019-03-19 | 2023-10-18 | 株式会社リコー | 圧電体薄膜素子、液体吐出ヘッド、ヘッドモジュール、液体吐出ユニット、液体を吐出する装置及び圧電体薄膜素子の製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5006421A (en) * | 1988-09-30 | 1991-04-09 | Siemens-Bendix Automotive Electronics, L.P. | Metalization systems for heater/sensor elements |
EP0415750B1 (de) | 1989-08-30 | 1994-11-09 | Nec Corporation | Dünnfilmkondensatoren und deren Herstellungsverfahren |
JPH0555656A (ja) * | 1991-08-29 | 1993-03-05 | Toyota Motor Corp | 圧電素子の電極構造 |
US5191510A (en) | 1992-04-29 | 1993-03-02 | Ramtron International Corporation | Use of palladium as an adhesion layer and as an electrode in ferroelectric memory devices |
JPH0620866A (ja) | 1992-07-02 | 1994-01-28 | Seiko Epson Corp | 誘電体素子 |
JP3349612B2 (ja) | 1994-01-13 | 2002-11-25 | ローム株式会社 | 誘電体キャパシタおよびその製造方法 |
US6052271A (en) * | 1994-01-13 | 2000-04-18 | Rohm Co., Ltd. | Ferroelectric capacitor including an iridium oxide layer in the lower electrode |
JP3461398B2 (ja) | 1994-01-13 | 2003-10-27 | ローム株式会社 | 誘電体キャパシタおよびその製造方法 |
US5825121A (en) * | 1994-07-08 | 1998-10-20 | Seiko Epson Corporation | Thin film piezoelectric device and ink jet recording head comprising the same |
DE4441129A1 (de) * | 1994-11-21 | 1996-05-23 | Junkalor Gmbh | Meßwertgeber für einen Wirbeldurchflußmesser |
JP3689913B2 (ja) * | 1994-12-27 | 2005-08-31 | セイコーエプソン株式会社 | 薄膜圧電体素子の製造法 |
EP0736385B1 (de) * | 1995-04-03 | 1998-02-25 | Seiko Epson Corporation | Tintenstrahldruckkopf und dessen Herstellungsverfahren |
JPH09280947A (ja) * | 1996-04-11 | 1997-10-31 | Matsushita Electric Ind Co Ltd | 強誘電体素子 |
JPH11205898A (ja) * | 1998-01-16 | 1999-07-30 | Mitsubishi Electric Corp | 誘電体薄膜素子用電極およびその製造方法とそれを用いた超音波振動子 |
-
1999
- 1999-03-04 WO PCT/JP1999/001058 patent/WO1999045598A1/ja active IP Right Grant
- 1999-03-04 EP EP99907867A patent/EP0991130B1/de not_active Expired - Lifetime
- 1999-03-04 JP JP54454799A patent/JP3882946B2/ja not_active Expired - Fee Related
- 1999-03-04 DE DE69937713T patent/DE69937713D1/de not_active Expired - Lifetime
- 1999-03-04 US US09/423,196 patent/US6398349B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0991130A1 (de) | 2000-04-05 |
JP3882946B2 (ja) | 2007-02-21 |
EP0991130A4 (de) | 2006-06-28 |
US6398349B1 (en) | 2002-06-04 |
WO1999045598A1 (en) | 1999-09-10 |
EP0991130B1 (de) | 2007-12-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |