DE69936075D1 - Piezoelektrisches Schichtelement und Tintenstrahldruckkopf, der dieses benutzt - Google Patents
Piezoelektrisches Schichtelement und Tintenstrahldruckkopf, der dieses benutztInfo
- Publication number
- DE69936075D1 DE69936075D1 DE69936075T DE69936075T DE69936075D1 DE 69936075 D1 DE69936075 D1 DE 69936075D1 DE 69936075 T DE69936075 T DE 69936075T DE 69936075 T DE69936075 T DE 69936075T DE 69936075 D1 DE69936075 D1 DE 69936075D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric layer
- inkjet printhead
- layer element
- printhead
- inkjet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1061198 | 1998-01-22 | ||
JP1061198A JP3948089B2 (ja) | 1998-01-22 | 1998-01-22 | 圧電体素子及びそれを用いたインクジェット式記録ヘッド |
JP8306198 | 1998-03-30 | ||
JP8306198A JP3837901B2 (ja) | 1998-03-30 | 1998-03-30 | 圧電体薄膜素子及びそれを用いたインクジェット式記録ヘッド及びこれらの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69936075D1 true DE69936075D1 (de) | 2007-06-28 |
DE69936075T2 DE69936075T2 (de) | 2007-09-13 |
Family
ID=26345912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69936075T Expired - Lifetime DE69936075T2 (de) | 1998-01-22 | 1999-01-22 | Piezoelektrisches Schichtelement und Tintenstrahldruckkopf, der dieses benutzt |
Country Status (3)
Country | Link |
---|---|
US (2) | US6328433B1 (de) |
EP (1) | EP0932210B1 (de) |
DE (1) | DE69936075T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000357826A (ja) * | 1999-04-13 | 2000-12-26 | Seiko Epson Corp | 圧電体素子の製造方法、圧電体素子、インクジェット式記録ヘッドおよびプリンタ |
US6494567B2 (en) * | 2000-03-24 | 2002-12-17 | Seiko Epson Corporation | Piezoelectric element and manufacturing method and manufacturing device thereof |
US6705708B2 (en) * | 2001-02-09 | 2004-03-16 | Seiko Espon Corporation | Piezoelectric thin-film element, ink-jet head using the same, and method for manufacture thereof |
JP4182329B2 (ja) * | 2001-09-28 | 2008-11-19 | セイコーエプソン株式会社 | 圧電体薄膜素子およびその製造方法、ならびにこれを用いた液体吐出ヘッド及び液体吐出装置 |
JP3903936B2 (ja) * | 2002-03-18 | 2007-04-11 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエータ、及び、液体噴射ヘッド |
US6617178B1 (en) * | 2002-07-02 | 2003-09-09 | Agilent Technologies, Inc | Test system for ferroelectric materials and noble metal electrodes in semiconductor capacitors |
JP3965579B2 (ja) * | 2003-07-03 | 2007-08-29 | セイコーエプソン株式会社 | 圧電体層の形成方法 |
WO2005056295A1 (ja) * | 2003-12-09 | 2005-06-23 | Seiko Epson Corporation | アクチュエータ装置の製造方法及び液体噴射装置 |
US7453188B2 (en) * | 2004-02-27 | 2008-11-18 | Canon Kabushiki Kaisha | Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same |
JP2006310746A (ja) * | 2005-03-30 | 2006-11-09 | Seiko Epson Corp | 圧電素子並びに圧電素子を用いた液体噴射ヘッド及び液体噴射装置 |
FR2893611B1 (fr) * | 2005-11-23 | 2007-12-21 | Commissariat Energie Atomique | Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief |
JP4761071B2 (ja) * | 2007-03-05 | 2011-08-31 | セイコーエプソン株式会社 | 圧電素子、インクジェット式記録ヘッド、およびインクジェットプリンター |
US20090061184A1 (en) | 2007-08-31 | 2009-03-05 | United Technologies Corporation | Processes for Applying a Conversion Coating with Conductive Additive(S) and the Resultant Coated Articles |
JP2011061118A (ja) * | 2009-09-14 | 2011-03-24 | Seiko Epson Corp | 圧電素子、液体噴射ヘッドおよび液体噴射装置 |
JP2011061117A (ja) * | 2009-09-14 | 2011-03-24 | Seiko Epson Corp | 圧電素子、圧電アクチュエーター、液体噴射ヘッドおよび液体噴射装置 |
JP6004640B2 (ja) * | 2011-01-07 | 2016-10-12 | キヤノン株式会社 | 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス |
JP5856105B2 (ja) * | 2013-06-28 | 2016-02-09 | 東芝テック株式会社 | インクジェットヘッド及びインクジェット記録装置 |
US9716581B2 (en) * | 2014-07-31 | 2017-07-25 | Akoustis, Inc. | Mobile communication device configured with a single crystal piezo resonator structure |
JP7024381B2 (ja) * | 2017-12-21 | 2022-02-24 | セイコーエプソン株式会社 | 圧電素子および液体吐出ヘッド |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5084317A (en) * | 1989-05-08 | 1992-01-28 | Avery Dennison Corporation | Pressure-sensitive adhesive release liner |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
US5500988A (en) * | 1990-11-20 | 1996-03-26 | Spectra, Inc. | Method of making a perovskite thin-film ink jet transducer |
JP3144949B2 (ja) | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3405498B2 (ja) * | 1995-02-20 | 2003-05-12 | セイコーエプソン株式会社 | 圧電体薄膜およびその製造法ならびにそれを用いたインクジェット記録ヘッド |
US6140746A (en) * | 1995-04-03 | 2000-10-31 | Seiko Epson Corporation | Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film |
JP2967052B2 (ja) * | 1995-09-08 | 1999-10-25 | キヤノン株式会社 | カラーフィルタの製造方法及び製造装置 |
JP3890634B2 (ja) * | 1995-09-19 | 2007-03-07 | セイコーエプソン株式会社 | 圧電体薄膜素子及びインクジェット式記録ヘッド |
JPH09254382A (ja) * | 1996-03-19 | 1997-09-30 | Fujitsu Ltd | 圧電素子及びその製造方法、並びにインクジェットプリンタヘッド及びその製造方法 |
DE69808164T2 (de) * | 1997-03-27 | 2003-01-30 | Seiko Epson Corp | Verfahren zur Herstellung eines piezoelektrischen Elements |
-
1999
- 1999-01-22 US US09/235,488 patent/US6328433B1/en not_active Expired - Lifetime
- 1999-01-22 DE DE69936075T patent/DE69936075T2/de not_active Expired - Lifetime
- 1999-01-22 EP EP99101223A patent/EP0932210B1/de not_active Expired - Lifetime
-
2001
- 2001-09-28 US US09/964,495 patent/US6698096B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6698096B2 (en) | 2004-03-02 |
EP0932210A3 (de) | 2004-11-17 |
US6328433B1 (en) | 2001-12-11 |
DE69936075T2 (de) | 2007-09-13 |
EP0932210A2 (de) | 1999-07-28 |
EP0932210B1 (de) | 2007-05-16 |
US20020149651A1 (en) | 2002-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |