DE69724333D1 - Beleuchtungssystem und Belichtungsapparat - Google Patents
Beleuchtungssystem und BelichtungsapparatInfo
- Publication number
- DE69724333D1 DE69724333D1 DE69724333T DE69724333T DE69724333D1 DE 69724333 D1 DE69724333 D1 DE 69724333D1 DE 69724333 T DE69724333 T DE 69724333T DE 69724333 T DE69724333 T DE 69724333T DE 69724333 D1 DE69724333 D1 DE 69724333D1
- Authority
- DE
- Germany
- Prior art keywords
- exposure apparatus
- lighting system
- lighting
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V5/00—Refractors for light sources
- F21V5/04—Refractors for light sources of lens shape
- F21V5/048—Refractors for light sources of lens shape the lens being a simple lens adapted to cooperate with a point-like source for emitting mainly in one direction and having an axis coincident with the main light transmission direction, e.g. convergent or divergent lenses, plano-concave or plano-convex lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16389196 | 1996-06-04 | ||
JP8163891A JPH09325275A (ja) | 1996-06-04 | 1996-06-04 | 照明装置及びそれを用いた投影露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69724333D1 true DE69724333D1 (de) | 2003-10-02 |
DE69724333T2 DE69724333T2 (de) | 2004-06-09 |
Family
ID=15782774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69724333T Expired - Fee Related DE69724333T2 (de) | 1996-06-04 | 1997-06-02 | Beleuchtungssystem und Belichtungsapparat |
Country Status (6)
Country | Link |
---|---|
US (1) | US5991088A (de) |
EP (1) | EP0811865B1 (de) |
JP (1) | JPH09325275A (de) |
KR (1) | KR100276797B1 (de) |
DE (1) | DE69724333T2 (de) |
TW (1) | TW417189B (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7130129B2 (en) | 1996-12-21 | 2006-10-31 | Carl Zeiss Smt Ag | Reticle-masking objective with aspherical lenses |
US6680803B2 (en) | 1996-12-21 | 2004-01-20 | Carl-Zeiss Smt Ag | Partial objective in an illuminating systems |
DE19809395A1 (de) | 1998-03-05 | 1999-09-09 | Zeiss Carl Fa | Beleuchtungssystem und REMA-Objektiv mit Linsenverschiebung und Betriebsverfahren dafür |
JP3459773B2 (ja) * | 1998-06-24 | 2003-10-27 | キヤノン株式会社 | 投影露光装置及びデバイスの製造方法 |
DE19901391A1 (de) * | 1999-01-15 | 2000-09-14 | Weigert Dedo Film Gmbh | Scheinwerfer mit veränderlichem Abstrahlwinkel und mit asphärischer Frontlinse |
DE10016176A1 (de) * | 2000-03-31 | 2001-10-04 | Zeiss Carl | Mikrolithographisches Beleuchtungssystem und Mikrolithographische Projektionsbelichtungsanlage damit |
US6868223B2 (en) * | 2001-05-11 | 2005-03-15 | Canon Kabushiki Kaisha | Illumination apparatus, exposure apparatus using the same and device fabrication method |
US20070285644A1 (en) * | 2004-09-13 | 2007-12-13 | Carl Zeiss Smt Ag | Microlithographic Projection Exposure Apparatus |
JP4765314B2 (ja) * | 2004-12-27 | 2011-09-07 | 株式会社ニコン | 照明光学装置 |
JP4511502B2 (ja) * | 2006-09-30 | 2010-07-28 | 日立ビアメカニクス株式会社 | 基板露光装置 |
TWI438471B (zh) | 2011-08-24 | 2014-05-21 | Largan Precision Co Ltd | 光學影像擷取鏡頭 |
US20150049488A1 (en) * | 2013-08-13 | 2015-02-19 | Baoliang Wang | Illumination assembly |
TWI477806B (zh) | 2014-01-08 | 2015-03-21 | Largan Precision Co Ltd | 光學攝像鏡頭、取像裝置及可攜裝置 |
TWI588526B (zh) | 2016-01-22 | 2017-06-21 | 大立光電股份有限公司 | 成像用光學鏡頭組、取像裝置及電子裝置 |
TWI616700B (zh) | 2017-04-17 | 2018-03-01 | 大立光電股份有限公司 | 光學影像擷取鏡頭組、取像裝置及電子裝置 |
KR102470449B1 (ko) * | 2017-12-28 | 2022-11-24 | 에스엘 주식회사 | 차량용 램프 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3552832A (en) * | 1969-10-27 | 1971-01-05 | Rank Organisation Ltd | Optical profile projection systems |
US4027944A (en) * | 1976-02-09 | 1977-06-07 | American Optical Corporation | Illuminated system for vertical fluorescent microscopy |
GB2143963A (en) * | 1983-07-25 | 1985-02-20 | Philips Electronic Associated | Projection lens system |
NL8500454A (nl) * | 1985-02-18 | 1986-09-16 | Philips Nv | Projektielenzenstelsel. |
NL8500453A (nl) * | 1985-02-18 | 1986-09-16 | Philips Nv | Projektielenzenstelsel. |
US4947030A (en) * | 1985-05-22 | 1990-08-07 | Canon Kabushiki Kaisha | Illuminating optical device |
JPS62266513A (ja) * | 1986-05-14 | 1987-11-19 | Canon Inc | 投影露光光学系 |
JPS6461716A (en) * | 1987-08-31 | 1989-03-08 | Canon Kk | Illuminator |
JPH04367213A (ja) * | 1991-06-13 | 1992-12-18 | Orc Mfg Co Ltd | 投影型露光装置 |
JPH06331941A (ja) * | 1993-05-19 | 1994-12-02 | Olympus Optical Co Ltd | 投影レンズ系 |
JP3429525B2 (ja) * | 1993-05-19 | 2003-07-22 | オリンパス光学工業株式会社 | 投影レンズ系 |
JPH07128590A (ja) * | 1993-10-29 | 1995-05-19 | Olympus Optical Co Ltd | 縮小投影レンズ |
EP0687956B2 (de) * | 1994-06-17 | 2005-11-23 | Carl Zeiss SMT AG | Beleuchtungseinrichtung |
JPH08179204A (ja) * | 1994-11-10 | 1996-07-12 | Nikon Corp | 投影光学系及び投影露光装置 |
JP3466002B2 (ja) * | 1995-07-13 | 2003-11-10 | 三菱電機株式会社 | レトロフォーカス型レンズ |
JPH0936026A (ja) * | 1995-07-14 | 1997-02-07 | Canon Inc | 投影露光装置及びそれを用いた半導体デバイスの製造方法 |
-
1996
- 1996-06-04 JP JP8163891A patent/JPH09325275A/ja active Pending
-
1997
- 1997-05-29 US US08/865,637 patent/US5991088A/en not_active Expired - Fee Related
- 1997-05-30 TW TW086107441A patent/TW417189B/zh not_active IP Right Cessation
- 1997-06-02 DE DE69724333T patent/DE69724333T2/de not_active Expired - Fee Related
- 1997-06-02 EP EP97303727A patent/EP0811865B1/de not_active Expired - Lifetime
- 1997-06-04 KR KR1019970023107A patent/KR100276797B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5991088A (en) | 1999-11-23 |
EP0811865B1 (de) | 2003-08-27 |
TW417189B (en) | 2001-01-01 |
EP0811865A3 (de) | 1998-09-02 |
KR980005336A (ko) | 1998-03-30 |
JPH09325275A (ja) | 1997-12-16 |
KR100276797B1 (ko) | 2001-01-15 |
DE69724333T2 (de) | 2004-06-09 |
EP0811865A2 (de) | 1997-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |