DE69728948D1 - Projektionsbelichtungsapparat - Google Patents
ProjektionsbelichtungsapparatInfo
- Publication number
- DE69728948D1 DE69728948D1 DE69728948T DE69728948T DE69728948D1 DE 69728948 D1 DE69728948 D1 DE 69728948D1 DE 69728948 T DE69728948 T DE 69728948T DE 69728948 T DE69728948 T DE 69728948T DE 69728948 D1 DE69728948 D1 DE 69728948D1
- Authority
- DE
- Germany
- Prior art keywords
- exposure apparatus
- projection exposure
- projection
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
- C08L53/02—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers of vinyl-aromatic monomers and conjugated dienes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7007—Alignment other than original with workpiece
- G03F9/7015—Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Integrated Circuits (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31865796 | 1996-11-14 | ||
JP31865796 | 1996-11-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69728948D1 true DE69728948D1 (de) | 2004-06-09 |
DE69728948T2 DE69728948T2 (de) | 2005-09-15 |
Family
ID=18101587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69728948T Expired - Lifetime DE69728948T2 (de) | 1996-11-14 | 1997-11-14 | Projektionsbelichtungsvorrichtung und Verfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US6160619A (de) |
EP (1) | EP0843221B1 (de) |
KR (1) | KR100517491B1 (de) |
DE (1) | DE69728948T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG102627A1 (en) * | 1996-11-28 | 2004-03-26 | Nikon Corp | Lithographic device |
JPH10209039A (ja) | 1997-01-27 | 1998-08-07 | Nikon Corp | 投影露光方法及び投影露光装置 |
US20030145353A1 (en) * | 1997-05-07 | 2003-07-31 | Lightner Jonathan E. | Starch biosynthetic enzymes |
JP3441966B2 (ja) * | 1998-06-02 | 2003-09-02 | キヤノン株式会社 | 走査型露光装置および方法、デバイス製造方法 |
TW554257B (en) * | 2000-07-10 | 2003-09-21 | Asml Netherlands Bv | Lithographic projection apparatus and device manufacturing method |
JP2002231622A (ja) * | 2000-11-29 | 2002-08-16 | Nikon Corp | ステージ装置及び露光装置 |
EP1390690A4 (de) * | 2001-03-13 | 2009-07-08 | Zygo Corp | Zyklische fehlerverminderung in gemittelten interferometrischen positionsmessungen |
WO2003019111A1 (en) * | 2001-08-23 | 2003-03-06 | Zygo Corporation | Dynamic interferometric controlling direction of input beam |
JP2003086492A (ja) * | 2001-09-12 | 2003-03-20 | Canon Inc | 露光装置及びその制御方法並びにデバイスの製造方法 |
WO2003040648A1 (en) | 2001-11-05 | 2003-05-15 | Zygo Corporation | Interferometric cyclic error compensation |
AU2002360461A1 (en) * | 2001-12-03 | 2003-06-17 | Zygo Corporation | Compensating for effects of non-isotropics gas mixtures in interferometers |
WO2003069286A2 (en) * | 2002-02-12 | 2003-08-21 | Zygo Corporation | Method and apparatus to measure fiber optic pickup errors in interferometry systems |
US6906784B2 (en) * | 2002-03-04 | 2005-06-14 | Zygo Corporation | Spatial filtering in interferometry |
AU2003247779A1 (en) | 2002-07-08 | 2004-01-23 | Zygo Corporation | Cyclic error compensation in interferometry systems |
US7616322B2 (en) * | 2002-07-08 | 2009-11-10 | Zygo Corporation | Cyclic error compensation in interferometry systems |
US7428685B2 (en) * | 2002-07-08 | 2008-09-23 | Zygo Corporation | Cyclic error compensation in interferometry systems |
US7262860B2 (en) * | 2002-07-29 | 2007-08-28 | Zygo Corporation | Compensation for errors in off-axis interferometric measurements |
US7274462B2 (en) * | 2002-09-09 | 2007-09-25 | Zygo Corporation | In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems |
WO2004042319A2 (en) * | 2002-11-04 | 2004-05-21 | Zygo Corporation | Compensation of refractivity perturbations in an intererometer path |
JP4546255B2 (ja) * | 2002-12-12 | 2010-09-15 | ザイゴ コーポレーション | フォトリソグラフィック露光サイクルの間のステージ・ミラー歪の工程内補正 |
JP4311713B2 (ja) * | 2003-03-10 | 2009-08-12 | キヤノン株式会社 | 露光装置 |
US7327465B2 (en) * | 2003-06-19 | 2008-02-05 | Zygo Corporation | Compensation for effects of beam misalignments in interferometer metrology systems |
JP2007526450A (ja) | 2003-06-19 | 2007-09-13 | ザイゴ コーポレーション | 平面ミラー干渉計測定システムにおけるビーム・ミスアライメントの幾何学的な影響に対する補償 |
WO2005045529A2 (en) * | 2003-11-04 | 2005-05-19 | Zygo Corporation | Characterization and compensation of errors in multi-axis interferometry system |
WO2005067815A1 (en) * | 2004-01-05 | 2005-07-28 | Zygo Corporation | Stage alignment in lithography tools |
US7283248B2 (en) * | 2004-01-06 | 2007-10-16 | Zygo Corporation | Multi-axis interferometers and methods and systems using multi-axis interferometers |
US7375823B2 (en) * | 2004-04-22 | 2008-05-20 | Zygo Corporation | Interferometry systems and methods of using interferometry systems |
WO2005106383A2 (en) * | 2004-04-22 | 2005-11-10 | Zygo Corporation | Interferometry systems and methods of using interferometry systems |
US7489407B2 (en) * | 2004-10-06 | 2009-02-10 | Zygo Corporation | Error correction in interferometry systems |
WO2006102234A2 (en) * | 2005-03-18 | 2006-09-28 | Zygo Corporation | Multi-axis interferometer with procedure and data processing for mirror mapping |
JP5089143B2 (ja) * | 2006-11-20 | 2012-12-05 | キヤノン株式会社 | 液浸露光装置 |
US7576868B2 (en) * | 2007-06-08 | 2009-08-18 | Zygo Corporation | Cyclic error compensation in interferometry systems |
JP6614880B2 (ja) * | 2015-09-10 | 2019-12-04 | キヤノン株式会社 | リソグラフィ装置および物品の製造方法 |
JP6207671B1 (ja) * | 2016-06-01 | 2017-10-04 | キヤノン株式会社 | パターン形成装置、基板配置方法及び物品の製造方法 |
CN112805623A (zh) * | 2018-09-24 | 2021-05-14 | Asml荷兰有限公司 | 工艺工具和检测方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61190546A (ja) * | 1985-02-20 | 1986-08-25 | Central Glass Co Ltd | 光学用樹脂組成物 |
JPS63159459A (ja) * | 1986-12-23 | 1988-07-02 | Central Glass Co Ltd | 樹脂組成物 |
JP2606285B2 (ja) * | 1988-06-07 | 1997-04-30 | 株式会社ニコン | 露光装置および位置合わせ方法 |
US5243195A (en) * | 1991-04-25 | 1993-09-07 | Nikon Corporation | Projection exposure apparatus having an off-axis alignment system and method of alignment therefor |
JP3282233B2 (ja) * | 1992-08-18 | 2002-05-13 | 株式会社ニコン | 距離測定装置、及びそれを用いた投影露光装置 |
JP3412704B2 (ja) * | 1993-02-26 | 2003-06-03 | 株式会社ニコン | 投影露光方法及び装置、並びに露光装置 |
JPH085848Y2 (ja) * | 1993-04-06 | 1996-02-21 | 松本金属株式会社 | キャスター |
JPH07103713A (ja) * | 1993-10-04 | 1995-04-18 | Canon Inc | 移動ステージ装置 |
JP3419960B2 (ja) * | 1995-06-09 | 2003-06-23 | 康博 小池 | 屈折率分布型光学樹脂材料 |
JPH08334601A (ja) * | 1995-06-09 | 1996-12-17 | Yasuhiro Koike | 屈折率分布型の光学樹脂材料 |
EP0841594A3 (de) * | 1996-11-07 | 1999-08-25 | Nikon Corporation | Marke für Positionsdetektion, Verfahren und Vorrichtung zur Detektion einer Marke, und Belichtungssystem |
-
1997
- 1997-11-14 EP EP97309179A patent/EP0843221B1/de not_active Expired - Lifetime
- 1997-11-14 DE DE69728948T patent/DE69728948T2/de not_active Expired - Lifetime
- 1997-11-17 KR KR1019970060591A patent/KR100517491B1/ko not_active IP Right Cessation
-
1999
- 1999-01-19 US US09/232,646 patent/US6160619A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR19980042558A (ko) | 1998-08-17 |
EP0843221A3 (de) | 1999-08-11 |
DE69728948T2 (de) | 2005-09-15 |
EP0843221A2 (de) | 1998-05-20 |
EP0843221B1 (de) | 2004-05-06 |
KR100517491B1 (ko) | 2006-03-09 |
US6160619A (en) | 2000-12-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: DERZEIT KEIN VERTRETER BESTELLT |