DE69714408D1 - Magnetischer Mikroschalter und Herstellungsverfahren - Google Patents

Magnetischer Mikroschalter und Herstellungsverfahren

Info

Publication number
DE69714408D1
DE69714408D1 DE69714408T DE69714408T DE69714408D1 DE 69714408 D1 DE69714408 D1 DE 69714408D1 DE 69714408 T DE69714408 T DE 69714408T DE 69714408 T DE69714408 T DE 69714408T DE 69714408 D1 DE69714408 D1 DE 69714408D1
Authority
DE
Germany
Prior art keywords
manufacturing process
magnetic microswitch
microswitch
magnetic
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714408T
Other languages
English (en)
Other versions
DE69714408T2 (de
Inventor
Francois Gueissaz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Application granted granted Critical
Publication of DE69714408D1 publication Critical patent/DE69714408D1/de
Publication of DE69714408T2 publication Critical patent/DE69714408T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
DE1997614408 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren Expired - Lifetime DE69714408T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19970106710 EP0874379B1 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren

Publications (2)

Publication Number Publication Date
DE69714408D1 true DE69714408D1 (de) 2002-09-05
DE69714408T2 DE69714408T2 (de) 2003-04-24

Family

ID=8226722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997614408 Expired - Lifetime DE69714408T2 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren

Country Status (2)

Country Link
EP (1) EP0874379B1 (de)
DE (1) DE69714408T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1235244B1 (de) * 1999-11-18 2006-03-01 NEC Corporation Mikromechanischer schalter
DE10043549C1 (de) * 2000-09-01 2002-06-20 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
DE10048880C2 (de) * 2000-09-29 2003-04-24 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
KR20040092228A (ko) * 2003-04-25 2004-11-03 엘지전자 주식회사 저전압 마이크로 스위치
EP1533270A1 (de) 2003-11-21 2005-05-25 Asulab S.A. Verfahren und Vorrichtung zur Dichtheitsprüfung einer hermetisch versiegelten MEMS Packung
FR2897349B1 (fr) * 2006-02-13 2008-06-13 Schneider Electric Ind Sas Microsysteme incluant un dispositif d'arret
FR2970111B1 (fr) 2011-01-03 2013-01-11 Commissariat Energie Atomique Procede de fabrication d'un micro-contacteur actionnable par un champ magnetique

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357585A (en) * 1979-12-10 1982-11-02 W. H. Brady Co. Laminated magnetic switch
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
EP0602538B1 (de) * 1992-12-15 1997-06-04 Asulab S.A. Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen
US5463233A (en) * 1993-06-23 1995-10-31 Alliedsignal Inc. Micromachined thermal switch
FR2721435B1 (fr) * 1994-06-17 1996-08-02 Asulab Sa Microcontacteur magnétique et son procédé de fabrication.

Also Published As

Publication number Publication date
EP0874379A1 (de) 1998-10-28
DE69714408T2 (de) 2003-04-24
EP0874379B1 (de) 2002-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition