EP0874379A1 - Magnetischer Mikroschalter und Herstellungsverfahren - Google Patents

Magnetischer Mikroschalter und Herstellungsverfahren Download PDF

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Publication number
EP0874379A1
EP0874379A1 EP97106710A EP97106710A EP0874379A1 EP 0874379 A1 EP0874379 A1 EP 0874379A1 EP 97106710 A EP97106710 A EP 97106710A EP 97106710 A EP97106710 A EP 97106710A EP 0874379 A1 EP0874379 A1 EP 0874379A1
Authority
EP
European Patent Office
Prior art keywords
micro
blade
blades
contactor according
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97106710A
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English (en)
French (fr)
Other versions
EP0874379B1 (de
Inventor
François Gueissaz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Priority to DE1997614408 priority Critical patent/DE69714408T2/de
Priority to EP19970106710 priority patent/EP0874379B1/de
Publication of EP0874379A1 publication Critical patent/EP0874379A1/de
Application granted granted Critical
Publication of EP0874379B1 publication Critical patent/EP0874379B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/50Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/64Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093Micromechanical switches actuated by a change of the magnetic field

Definitions

  • the present invention relates to a microswitch with blades whose particular conformation ensures a reliable operation, both for closing a circuit electric by bringing two blades together the influence of a magnetic field, that for opening when the magnetic field is removed.
  • the invention also relates to a method of manufacture of such a microswitch by a method of galvanic growth from a substrate.
  • the invention belongs to well-known field of so-called “rod” contactors, and by “blade” extension, actuated by a magnetic field exterior may be either parallel to the rods or blades, or perpendicular to them.
  • a contactor at parallel field stems is generally referred to as “reed” contactor.
  • the standard model of such a contactor “reed” consists of a cylindrical glass bulb in which penetrates at each end a magnetizable rod and flexible, the free ends of each rod being able to, by their initial rimpedement, attracting themselves under the influence an external magnetic field to close a circuit electric, and be recalled to their original position by the elastic force of the rods, respectively of the blades, when the magnetic field is removed.
  • the thickness b of the blade we will reduce the influence of residual stresses and obtain better positioning of the two blades relative to each other, but at the same time we will increase their rigidity.
  • the length L of the blade must then be increased, which does not correspond to the objective of miniaturization of the invention.
  • the deflection is approximately proportional to L 3 / b ⁇ r, L being the length of the blade, b its thickness and r the length of superposition of the two blades in the air gap e . All other parameters being equal, the contact pressure is approximately proportional to b 2 / r 2 .
  • L and / or decreasing b Greater deflection can be achieved by increasing L and / or decreasing b .
  • L the overall size of the micro-contactor increases, which does not correspond to the aims of the invention, and which also has the negative effect of increasing the dispersion of the magnetic field in the air gap.
  • a decrease in b has the unfavorable effect, on the one hand of considerably reducing the contact pressure, on the other hand as indicated previously, of making the blade more sensitive to residual stresses.
  • the object of the present invention is therefore to propose a solution in which, without modifying the size overall of the microswitch, an original geometry of at least less one blade increases the flexibility of said blade without modifying the maximum force obtained at its end.
  • the subject of the invention is a magnetic microswitch, produced by galvanic method from a substrate, comprising two conductive strips of length L and L 'and of width a , connected by their respective ends to means of electrical connection, and each comprising a distal part of respective section a ⁇ b and a ⁇ b ', the superposition of which over a length r determines an air gap of distance e , at least one of said blades being made of a magnetic material and consisting of an end integral with the substrate by means of a foot, of a median part and of a distal part of length L o , flexible with respect to the distal part of the second blade between an open position in the absence of a magnetic field and a closed position in which the two blades are in contact with each other under the influence of the magnetic field, said micro-contactor being characterized in that said middle part of the flexible blade is shaped with a total cross section smaller than that of the distal part so as to have a lower resistance to flexion
  • both blades are grown by growth galvanic of the same magnetic material.
  • the flexible blade has a constant thickness b from its attachment to the foot to its distal part, and the middle part which forms the junction between these two ends is formed by one or more isthmus making the total cross section of said middle portion is smaller than the section of the distal portion, thereby allowing the blade to have greater flexibility without increasing bulk.
  • isthmus can delimit one or more openings in the blade. In case there is only one single isthmus, it preferably occupies a position central by delimiting two notches on the edges of the blade.
  • the isthmus can also have a section variable between the end fixed to the foot and the part distal, for example by forming contiguous openings substantially rectangular or square, having surfaces decreasing values from the attachment to the foot.
  • the blade has neither opening nor notch, but its middle part has a thickness less than the thickness b of the distal part, by forming in a way a notch in the thickness of the blade, said notch which can be formed on either of the faces of the blade.
  • the middle part has only a slight influence on the magnetic behavior of the micro-contactor, especially when it is placed in a magnetic field parallel to the length of the blades.
  • the active zone is the distal part of length L o .
  • the length L 'of this second blade is equal to the covering length r , the material constituting it be magnetic or not, and its thickness b 'may be greater than the thickness b of the flexible blade.
  • the second blade can also be integral with said substrate by through another foot.
  • This second blade will then also flexible and can be structured according to one of the modes described above, without having necessarily the same structure as the first blade.
  • the microswitch according to the invention also makes it possible, without modifying the overall size thereof, to act on the values b , b ′ of the thickness of the blades and on the value e of the air gap. Indeed, an increase in b , b ' causes a decrease in flexibility and correspondingly better relative positioning of the two blades to reduce the value e of the air gap.
  • FIG. 1 there is shown a first example of a micro-contactor, once isolated from its manufacturing batch. We see that it has two blades 1, 2 supported by a substrate 10, from which it was built by galvanic growth like this will be explained later.
  • the micro-switch is intended to be subjected to a magnetic field parallel to the blades.
  • the material forming the two blades should be ferromagnetic, for example an iron-nickel alloy exhibiting low magnetic hysteresis to allow a reproducible opening when the magnetic field is deleted.
  • Each of the two blades comprises means for connection to an electrical circuit, not shown, shown diagrammatically by the conductors 21 and 22, the skilled person being able to perfectly design other connection means, in particular when said micro-contactor is intended to be integrated into a more complex electronic assembly.
  • the two blades have substantially the same width a , between 50 and 150 ⁇ m, for example 100 ⁇ m, and a thickness b, b ′ of the order of 10 ⁇ m.
  • the strip 1, secured to the substrate 10 via a foot 9, has a total length L, typically between 300 and 900 ⁇ m, for example 500 ⁇ m.
  • This blade 1 comprises three zones having substantially the same length and assuming different functions. One end 3 of the blade allows attachment to the base 9, the rest of the blade being suspended above the substrate 10.
  • the other end 5, of length Lo designated by “distal part” ensures the magnetic operation.
  • the middle part 4 ensures its mechanical operation by making it possible to adjust the flexibility of the blade 1, that is to say in fact the maximum deflection of the distal end 5 in a given magnetic field.
  • the middle part 4 has in its center a square opening 6 delimiting on the edges of the blade 1 two isthmus 8a and 8b connecting the end 3 integral with the foot to the distal part 5.
  • the section total transverse is therefore less than the section a ⁇ b of the distal part 5, which gives the blade greater flexibility for a material having a given modulus of elasticity.
  • the second strip 2 integral with the substrate has a thickness b ' and a length L' and has no particular structure.
  • its thickness b ′ will preferably be substantially equal to the thickness b of the flexible blade 1.
  • the two blades are positioned relative to each other so that they overlap over a length r , defining between their facing surfaces an air gap e of between 10 and 50 ⁇ m, for example 5 ⁇ m
  • the length r superposition of the two plates will preferably be equal to sometimes the thickness b , b ' chosen for the plates, so as to reduce the effects of dispersion of the magnetic field.
  • the micro-contactor can be encapsulated in air or controlled atmosphere, by example by means of a plastic cover not shown, glued or welded to the surface of the substrate, either by mounting in a suitable case.
  • a bonding layer 12a and 13a for example titanium or chromium
  • a layer of protection 12b and 13b for example in gold
  • etching of the surface according to known techniques.
  • layers successive 14, 15 and 16 of thick photoresist each photoresist layer being configured by means of a mask (not shown) to provide openings allowing growth to be carried out in stages galvanic.
  • the first layer 14 is configured with two openings allowing the galvanic growth of a first stage 9a of foot 9 and of blade 2.
  • the second layer 15 is configured with a single opening allowing to obtain by galvanic growth the second floor 9b of foot 9.
  • This third layer 16 is configured to leave free for growth galvanic an opening corresponding to the end 3 integral with foot 9, distal part 5 and isthmus 8a and 8b, as appears more clearly on the figure 8.
  • all the steps of galvanic growth can be conducted with the same ferromagnetic material, for example an FerNickel alloy 20-80. It is also possible to improve the electrical contact of the blades when they are subjected to a magnetic field, covering their surfaces with gold opposite, i.e. after the first galvanic deposition and before the last galvanic deposit.
  • microstructure thus obtained is then subjected to an attack reagent to eliminate, at one or more times, the photoresist and the intermediate metallization layer 17 and release the micro-contactor.
  • attack reagent to eliminate, at one or more times, the photoresist and the intermediate metallization layer 17 and release the micro-contactor.
  • FIGS. 1 and 2 there is shown another example of micro-switch intended to be placed in a magnetic field parallel to the blades and in which there is always a single flexible blade.
  • the middle part 4 of the flexible blade has two rectangular openings 6a and 6b, delimited by three isthmus 8a, 8b and 8c.
  • the microswitch shown in Figure 3 is intended to be placed in a magnetic field perpendicular to the blades.
  • the second strip 2 secured to the substrate can be reduced to a contact pad having a length L ′ at least equal to the covering length r of the two strips, and a thickness b ′ greater than the thickness b of the flexible blade.
  • the middle part has three openings 6a, 6b and 6c substantially rectangular and contiguous, forming a single opening delimited on each edge of the blade by isthmus 8a and 8b composed of three zones s, m and l whose width increases from foot
  • the microswitch represented intended to be placed in a parallel magnetic field with blades, has in the middle part of its blade flexible a single isthmus 8c delimiting notches 6d and 6th on the edges of the blade.
  • the increase in the flexibility of the movable blade relative to the blade 2 secured to the substrate 10 is obtained by configuring the middle part 4 with a thickness b '' less than the thickness b of the distal part 5.
  • this configuration corresponds to a notch 6f open towards the substrate.
  • FIG. 6 there is shown a micro-contactor intended to be placed in a parallel magnetic field to the blades and in which the two blades are movable one compared to each other.
  • a first blade 1 is integral of the substrate 10 via a foot 9 and comprises in its middle part an opening 6.
  • a second blade 2 is secured to the substrate 10 by means of a foot 11. In the example shown, this second blade also has an opening in a middle part rectangular 7.
  • This part can also have one any of the conformations previously described for the blade 1, or still have a constant total section of its end fixed to the foot 1 to its end distal.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Micromachines (AREA)
EP19970106710 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren Expired - Lifetime EP0874379B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE1997614408 DE69714408T2 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren
EP19970106710 EP0874379B1 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19970106710 EP0874379B1 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren

Publications (2)

Publication Number Publication Date
EP0874379A1 true EP0874379A1 (de) 1998-10-28
EP0874379B1 EP0874379B1 (de) 2002-07-31

Family

ID=8226722

Family Applications (1)

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EP19970106710 Expired - Lifetime EP0874379B1 (de) 1997-04-23 1997-04-23 Magnetischer Mikroschalter und Herstellungsverfahren

Country Status (2)

Country Link
EP (1) EP0874379B1 (de)
DE (1) DE69714408T2 (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1191559A2 (de) * 2000-09-01 2002-03-27 Little Things Factory GmbH Mikroschalter und Verfahren zu dessen Herstellung
EP1235244A1 (de) * 1999-11-18 2002-08-28 NEC Corporation Mikromechanischer schalter
DE10048880C2 (de) * 2000-09-29 2003-04-24 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
EP1471558A2 (de) * 2003-04-25 2004-10-27 LG Electronics Inc. Niederspannungsmikroschalter
EP1533270A1 (de) * 2003-11-21 2005-05-25 Asulab S.A. Verfahren und Vorrichtung zur Dichtheitsprüfung einer hermetisch versiegelten MEMS Packung
EP1818958A1 (de) * 2006-02-13 2007-08-15 Schneider Electric Industries SAS Mikrosystem mit Anschlagvorrichtung
US9153394B2 (en) 2011-01-03 2015-10-06 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method for fabricating a microswitch actuatable by a magnetic field

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357585A (en) * 1979-12-10 1982-11-02 W. H. Brady Co. Laminated magnetic switch
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
WO1989009477A1 (en) * 1988-03-22 1989-10-05 Fraunhofer-Gesellschaft Zur Förderung Der Angewand Micromechanical device
EP0602538A1 (de) * 1992-12-15 1994-06-22 Asulab S.A. Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen
US5463233A (en) * 1993-06-23 1995-10-31 Alliedsignal Inc. Micromachined thermal switch
EP0688033A1 (de) * 1994-06-17 1995-12-20 Asulab S.A. Magnetischer Mikroschalter und sein Herstellungsverfahren

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357585A (en) * 1979-12-10 1982-11-02 W. H. Brady Co. Laminated magnetic switch
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
WO1989009477A1 (en) * 1988-03-22 1989-10-05 Fraunhofer-Gesellschaft Zur Förderung Der Angewand Micromechanical device
EP0602538A1 (de) * 1992-12-15 1994-06-22 Asulab S.A. Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen
US5430421A (en) * 1992-12-15 1995-07-04 Asulab S.A. Reed contactor and process of fabricating suspended tridimensional metallic microstructure
US5463233A (en) * 1993-06-23 1995-10-31 Alliedsignal Inc. Micromachined thermal switch
EP0688033A1 (de) * 1994-06-17 1995-12-20 Asulab S.A. Magnetischer Mikroschalter und sein Herstellungsverfahren

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1235244A1 (de) * 1999-11-18 2002-08-28 NEC Corporation Mikromechanischer schalter
EP1235244A4 (de) * 1999-11-18 2004-03-03 Nec Corp Mikromechanischer schalter
US6784769B1 (en) 1999-11-18 2004-08-31 Nec Corporation Micro machine switch
EP1191559A2 (de) * 2000-09-01 2002-03-27 Little Things Factory GmbH Mikroschalter und Verfahren zu dessen Herstellung
DE10043549C1 (de) * 2000-09-01 2002-06-20 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
EP1191559A3 (de) * 2000-09-01 2005-03-02 Little Things Factory GmbH Mikroschalter und Verfahren zu dessen Herstellung
DE10048880C2 (de) * 2000-09-29 2003-04-24 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
EP1471558A2 (de) * 2003-04-25 2004-10-27 LG Electronics Inc. Niederspannungsmikroschalter
EP1533270A1 (de) * 2003-11-21 2005-05-25 Asulab S.A. Verfahren und Vorrichtung zur Dichtheitsprüfung einer hermetisch versiegelten MEMS Packung
WO2005049482A1 (fr) * 2003-11-21 2005-06-02 Asulab S.A. Procede de controle de l'hermeticite d'une cavite close d'un composant micrometrique, et composant micrometrique pour sa mise en oeuvre
US7601537B2 (en) 2003-11-21 2009-10-13 Asulab S.A. Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of same
US7833484B2 (en) 2003-11-21 2010-11-16 Asulab S.A. Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same
US7892839B2 (en) 2003-11-21 2011-02-22 Asulab S.A. Method of checking the hermeticity of a closed cavity of a micrometric component and micrometric component for the implementation of the same
EP1818958A1 (de) * 2006-02-13 2007-08-15 Schneider Electric Industries SAS Mikrosystem mit Anschlagvorrichtung
FR2897349A1 (fr) * 2006-02-13 2007-08-17 Schneider Electric Ind Sas Microsysteme incluant un dispositif d'arret
US9153394B2 (en) 2011-01-03 2015-10-06 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method for fabricating a microswitch actuatable by a magnetic field

Also Published As

Publication number Publication date
EP0874379B1 (de) 2002-07-31
DE69714408D1 (de) 2002-09-05
DE69714408T2 (de) 2003-04-24

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