DE69831999D1 - Magnetkopf und Herstellungsverfahren - Google Patents
Magnetkopf und HerstellungsverfahrenInfo
- Publication number
- DE69831999D1 DE69831999D1 DE69831999T DE69831999T DE69831999D1 DE 69831999 D1 DE69831999 D1 DE 69831999D1 DE 69831999 T DE69831999 T DE 69831999T DE 69831999 T DE69831999 T DE 69831999T DE 69831999 D1 DE69831999 D1 DE 69831999D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- magnetic head
- magnetic
- head
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/245—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for controlling the reluctance of the magnetic circuit in a head with single gap, for co-operation with one track
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1272—Assembling or shaping of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1871—Shaping or contouring of the transducing or guiding surface
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/23—Gap features
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10984597 | 1997-04-25 | ||
JP10984597 | 1997-04-25 | ||
JP35059397 | 1997-12-19 | ||
JP9350593A JPH117608A (ja) | 1997-04-25 | 1997-12-19 | 磁気ヘッド及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69831999D1 true DE69831999D1 (de) | 2005-12-01 |
DE69831999T2 DE69831999T2 (de) | 2006-06-22 |
Family
ID=26449561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69831999T Expired - Fee Related DE69831999T2 (de) | 1997-04-25 | 1998-01-07 | Magnetkopf und Herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (2) | US5966277A (de) |
EP (1) | EP0874355B1 (de) |
JP (1) | JPH117608A (de) |
KR (1) | KR100287612B1 (de) |
CN (1) | CN1152368C (de) |
DE (1) | DE69831999T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10334409A (ja) * | 1997-05-27 | 1998-12-18 | Tdk Corp | 薄膜磁気ヘッド |
US6130809A (en) * | 1998-04-10 | 2000-10-10 | International Business Machines Corporation | Write head before read head constructed merged magnetic head with track width and zero throat height defined by first pole tip |
JP3484343B2 (ja) * | 1998-04-28 | 2004-01-06 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JPH11339223A (ja) * | 1998-05-26 | 1999-12-10 | Tdk Corp | 磁性層のエッチング方法、薄膜磁気ヘッドの磁極の形成方法および薄膜磁気ヘッドの製造方法 |
US6584676B1 (en) * | 1998-07-24 | 2003-07-01 | International Business Machines Corporation | Method for manufacturing a pole tip trimmed read/write head structure |
JP2000099920A (ja) * | 1998-09-18 | 2000-04-07 | Fujitsu Ltd | 先端副磁極付き薄膜磁気ヘッド及びその製造方法 |
JP2000099919A (ja) * | 1998-09-18 | 2000-04-07 | Fujitsu Ltd | 薄膜磁気ヘッド及びその製造方法 |
JP3180906B2 (ja) * | 1998-11-12 | 2001-07-03 | 日本電気株式会社 | 磁気抵抗効果型複合ヘッドの製造方法 |
JP2000207707A (ja) | 1999-01-08 | 2000-07-28 | Hitachi Ltd | 薄膜磁気ヘッド及びこれを用いた磁気ディスク装置 |
US6791794B2 (en) * | 2000-09-28 | 2004-09-14 | Nec Corporation | Magnetic head having an antistripping layer for preventing a magnetic layer from stripping |
US6385008B1 (en) * | 1999-12-16 | 2002-05-07 | International Business Machines Corporation | Reduction of magnetic side writing in thin film magnetic heads using negative profiled pole tips |
JP3594864B2 (ja) | 2000-01-25 | 2004-12-02 | Tdk株式会社 | 薄膜磁気ヘッドの製造方法 |
US6651313B1 (en) | 2000-10-06 | 2003-11-25 | International Business Machines Corporation | Method for manufacturing a magnetic head |
US6778357B2 (en) | 2000-11-10 | 2004-08-17 | Seagate Technology Llc | Electrodeposited high-magnetic-moment material at writer gap pole |
US6678117B2 (en) * | 2001-06-18 | 2004-01-13 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic transducer with bilayer pole piece structure with improved milling endpoint detection |
US7199972B2 (en) * | 2001-08-31 | 2007-04-03 | Hitachi Global Storage Technologies Netherlands, B.V. | Narrow write head pole tip fabricated by sidewall processing |
JP2003187405A (ja) | 2001-12-19 | 2003-07-04 | Fujitsu Ltd | 磁気ヘッドおよびその製造方法 |
US20030127424A1 (en) * | 2002-01-08 | 2003-07-10 | Seagate Technology Llc | Method of fabricating magnetic recording heads using asymmetric focused-Ion-beam trimming |
US6732421B2 (en) * | 2002-03-22 | 2004-05-11 | Seagate Technology Llc | Method for producing magnetoresistive heads ion bombardment etch to stripe height |
WO2003083837A1 (fr) | 2002-04-01 | 2003-10-09 | Fujitsu Limited | Tete magnetique a couche mince et procede de production de cette derniere |
US20040045671A1 (en) * | 2002-09-10 | 2004-03-11 | Ed Rejda | Selective etching device |
US6960281B2 (en) * | 2003-03-21 | 2005-11-01 | Headway Technologies, Inc. | Method to make a wider trailing pole structure by self-aligned pole trim process |
JP2005018836A (ja) * | 2003-06-23 | 2005-01-20 | Hitachi Ltd | 磁気ヘッド及びその製造方法 |
JP2005285236A (ja) * | 2004-03-30 | 2005-10-13 | Fujitsu Ltd | 磁気ヘッド構造 |
US7086139B2 (en) * | 2004-04-30 | 2006-08-08 | Hitachi Global Storage Technologies Netherlands B.V. | Methods of making magnetic write heads using electron beam lithography |
US8919795B2 (en) | 2007-02-07 | 2014-12-30 | Rassini, S.A. De C.V. | Separated primary spring and secondary leaf suspension for vehicle |
US7983002B2 (en) * | 2007-06-26 | 2011-07-19 | Seagate Technology Llc | Wire-assisted magnetic write device with a gapped trailing shield |
JP2010118099A (ja) * | 2008-11-11 | 2010-05-27 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド・スライダ及び磁気ヘッド・スライダの製造方法 |
US10957347B1 (en) | 2020-01-10 | 2021-03-23 | International Business Machines Corporation | Thin film heating device in a write gap |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4436593A (en) * | 1981-07-13 | 1984-03-13 | Memorex Corporation | Self-aligned pole tips |
JPS61107515A (ja) * | 1984-10-30 | 1986-05-26 | Fujitsu Ltd | 薄膜磁気ヘツド |
JPH0622050B2 (ja) * | 1984-12-21 | 1994-03-23 | ソニー株式会社 | 薄膜磁気ヘツド |
JP2753306B2 (ja) * | 1988-03-18 | 1998-05-20 | 株式会社日立製作所 | イオンビーム加工方法及び集束イオンビーム装置 |
US5643472A (en) * | 1988-07-08 | 1997-07-01 | Cauldron Limited Partnership | Selective removal of material by irradiation |
JP2754804B2 (ja) * | 1989-11-20 | 1998-05-20 | 松下電器産業株式会社 | 薄膜磁気ヘッドの製造方法 |
US4992901A (en) * | 1990-02-15 | 1991-02-12 | Seagate Technology, Inc. | Self aligned magnetic poles using sacrificial mask |
US5200056A (en) * | 1990-02-15 | 1993-04-06 | Seagate Technology Inc. | Method for aligning pole tips in a thin film head |
FR2658646B1 (fr) * | 1990-02-21 | 1995-07-13 | Commissariat Energie Atomique | Procede de realisation d'une tete magnetique a deux materiaux magnetiques, et tete obtenue par ce procede. |
JP3639603B2 (ja) * | 1991-06-03 | 2005-04-20 | 株式会社日立製作所 | 磁気ディスク装置 |
EP0452846B1 (de) * | 1990-04-16 | 1996-02-28 | Hitachi, Ltd. | Dünnfilm-Magnetkopf mit schmaler Spurbreite und dessen Herstellungsverfahren |
JPH05303719A (ja) * | 1992-04-27 | 1993-11-16 | Fujitsu Ltd | 薄膜磁気ヘッドおよびその製造方法 |
JP3578471B2 (ja) * | 1993-06-08 | 2004-10-20 | アルプス電気株式会社 | 薄膜磁気ヘッド |
DE4421517A1 (de) * | 1993-06-28 | 1995-01-05 | Schlumberger Technologies Inc | Verfahren zum Abtrag oder Auftrag von Material mittels eines Partikelstrahls und Vorrichtung zu seiner Durchführung |
DE69418551T2 (de) * | 1993-08-27 | 1999-09-16 | Read-Rite Corp., Milpitas | Magnetkopfzusammenbau mit Schreibpol-/Abschirmstruktur |
US5559653A (en) * | 1993-12-10 | 1996-09-24 | Yamaha Corporation | Thin film magnetic head having a multilayer upper core |
US5438747A (en) * | 1994-03-09 | 1995-08-08 | International Business Machines Corporation | Method of making a thin film merged MR head with aligned pole tips |
JP3267046B2 (ja) * | 1994-04-21 | 2002-03-18 | 株式会社日立製作所 | 磁気記憶装置 |
JPH0850705A (ja) * | 1994-08-05 | 1996-02-20 | Fuji Elelctrochem Co Ltd | 薄膜磁気ヘッド及びその製造方法 |
JPH08102014A (ja) * | 1994-09-30 | 1996-04-16 | Hitachi Ltd | 薄膜磁気ヘッドの磁気コア形成方法 |
JP2001517348A (ja) * | 1995-06-05 | 2001-10-02 | 松下寿電子工業株式会社 | 磁気抵抗読取ヘッド上の共有されるシールドに関連する、磁束強化された書込トランスデューサおよびそれを製造するためのプロセス |
JPH0991623A (ja) * | 1995-09-19 | 1997-04-04 | Hitachi Ltd | 磁気抵抗効果型磁気ヘッド及びその製造方法 |
US5916424A (en) * | 1996-04-19 | 1999-06-29 | Micrion Corporation | Thin film magnetic recording heads and systems and methods for manufacturing the same |
US5874010A (en) * | 1996-07-17 | 1999-02-23 | Headway Technologies, Inc. | Pole trimming technique for high data rate thin film heads |
US5793578A (en) * | 1996-11-15 | 1998-08-11 | International Business Machines Corporation | Thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle |
US5804085A (en) * | 1997-01-30 | 1998-09-08 | Quantum Corporation | Process for producing a pole-trimmed writer in a magnetoresistive read/write head and a data transducer made thereby |
US5916423A (en) * | 1997-05-06 | 1999-06-29 | International Business Machines Corporation | P1 notched write head with minimum overmilled p1 and p2 |
-
1997
- 1997-12-19 JP JP9350593A patent/JPH117608A/ja active Pending
- 1997-12-29 US US08/999,285 patent/US5966277A/en not_active Expired - Lifetime
-
1998
- 1998-01-07 DE DE69831999T patent/DE69831999T2/de not_active Expired - Fee Related
- 1998-01-07 EP EP98100086A patent/EP0874355B1/de not_active Expired - Lifetime
- 1998-01-16 KR KR1019980001114A patent/KR100287612B1/ko not_active IP Right Cessation
- 1998-01-24 CN CNB981040284A patent/CN1152368C/zh not_active Expired - Fee Related
-
1999
- 1999-03-31 US US09/282,543 patent/US6199267B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH117608A (ja) | 1999-01-12 |
EP0874355A2 (de) | 1998-10-28 |
KR19980079618A (ko) | 1998-11-25 |
US5966277A (en) | 1999-10-12 |
CN1152368C (zh) | 2004-06-02 |
DE69831999T2 (de) | 2006-06-22 |
US6199267B1 (en) | 2001-03-13 |
KR100287612B1 (ko) | 2001-05-02 |
EP0874355A3 (de) | 1999-08-04 |
EP0874355B1 (de) | 2005-10-26 |
CN1197977A (zh) | 1998-11-04 |
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