DE69711131D1 - Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator - Google Patents
Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem ResonatorInfo
- Publication number
- DE69711131D1 DE69711131D1 DE69711131T DE69711131T DE69711131D1 DE 69711131 D1 DE69711131 D1 DE 69711131D1 DE 69711131 T DE69711131 T DE 69711131T DE 69711131 T DE69711131 T DE 69711131T DE 69711131 D1 DE69711131 D1 DE 69711131D1
- Authority
- DE
- Germany
- Prior art keywords
- resonator
- production
- electronic component
- piezoelectric
- piezoelectric resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22302896A JP3577170B2 (ja) | 1996-08-05 | 1996-08-05 | 圧電共振子とその製造方法およびそれを用いた電子部品 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69711131D1 true DE69711131D1 (de) | 2002-04-25 |
DE69711131T2 DE69711131T2 (de) | 2002-10-31 |
Family
ID=16791717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69711131T Expired - Lifetime DE69711131T2 (de) | 1996-08-05 | 1997-04-01 | Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator |
Country Status (6)
Country | Link |
---|---|
US (1) | US5900790A (de) |
EP (1) | EP0823781B1 (de) |
JP (1) | JP3577170B2 (de) |
CN (2) | CN1085442C (de) |
DE (1) | DE69711131T2 (de) |
NO (1) | NO971935L (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1198037A (zh) * | 1997-04-25 | 1998-11-04 | 株式会社村田制作所 | 压电谐振器和使用它的电子元件 |
JP3262048B2 (ja) * | 1997-10-01 | 2002-03-04 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP3368214B2 (ja) * | 1997-10-01 | 2003-01-20 | 株式会社村田製作所 | ラダーフィルタおよび通信機器 |
JP3262050B2 (ja) * | 1997-10-03 | 2002-03-04 | 株式会社村田製作所 | 電子部品およびラダーフィルタ |
JPH11112279A (ja) * | 1997-10-03 | 1999-04-23 | Murata Mfg Co Ltd | 圧電部品 |
JP3262076B2 (ja) * | 1997-10-03 | 2002-03-04 | 株式会社村田製作所 | 圧電共振子、圧電共振子の周波数調整方法および通信機器 |
JP3147834B2 (ja) * | 1997-10-03 | 2001-03-19 | 株式会社村田製作所 | 圧電共振子の製造方法 |
JP2000286526A (ja) * | 1999-03-30 | 2000-10-13 | Murata Mfg Co Ltd | 表面実装構造及びその表面実装構造に用いられる表面実装型電子部品 |
JP2000315932A (ja) * | 1999-04-30 | 2000-11-14 | Murata Mfg Co Ltd | 積層型圧電共振子とその特性調整方法およびそれを用いたラダー型フィルタ |
JP3760766B2 (ja) * | 2000-12-25 | 2006-03-29 | 株式会社村田製作所 | セラミック発振子の製造方法 |
JP3729103B2 (ja) | 2001-08-28 | 2005-12-21 | 株式会社村田製作所 | 圧電装置、ラダー型フィルタ及び圧電装置の製造方法 |
JP2003124766A (ja) * | 2001-10-17 | 2003-04-25 | Murata Mfg Co Ltd | 積層型圧電共振子の製造方法 |
TW573375B (en) | 2001-12-17 | 2004-01-21 | Intel Corp | Film bulk acoustic resonator structure and method of making |
US6822535B2 (en) * | 2001-12-17 | 2004-11-23 | Intel Corporation | Film bulk acoustic resonator structure and method of making |
JP3826875B2 (ja) * | 2002-10-29 | 2006-09-27 | セイコーエプソン株式会社 | 圧電デバイスおよびその製造方法 |
CN101507093B (zh) * | 2006-08-23 | 2012-05-23 | 日本碍子株式会社 | 用于超声电机的压电致动器元件 |
US8816567B2 (en) * | 2011-07-19 | 2014-08-26 | Qualcomm Mems Technologies, Inc. | Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression |
JP6171516B2 (ja) * | 2013-04-12 | 2017-08-02 | セイコーエプソン株式会社 | 電子デバイス、電子デバイスの製造方法、電子機器、および移動体 |
CN111246616B (zh) * | 2013-06-24 | 2024-07-02 | 上海本星电子科技有限公司 | 电致发光片生产工艺 |
CN108540105A (zh) * | 2018-04-11 | 2018-09-14 | 武汉大学 | 射频谐振器结构 |
CN110190826B (zh) * | 2019-05-31 | 2020-10-02 | 厦门市三安集成电路有限公司 | 谐振薄膜层、谐振器和滤波器 |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2157665A (en) * | 1935-10-16 | 1939-05-09 | Telefunken Gmbh | Crystal mounting with temperature compensation |
US3185869A (en) * | 1961-12-01 | 1965-05-25 | Endevco Corp | Transducer |
US3297889A (en) * | 1964-01-15 | 1967-01-10 | Breskend Sam | Clock driver |
US3378704A (en) * | 1966-01-05 | 1968-04-16 | Bourns Inc | Piezoelectric multilayer device |
US3401275A (en) * | 1966-04-14 | 1968-09-10 | Clevite Corp | Composite resonator |
GB1207974A (en) * | 1966-11-17 | 1970-10-07 | Clevite Corp | Frequency selective apparatus including a piezoelectric device |
CH607336A5 (de) * | 1975-09-22 | 1978-12-15 | Siemens Ag | |
GB2044527B (en) * | 1978-12-27 | 1983-05-25 | Murata Manufacturing Co | Piezoelectric unit and device |
JPS639141Y2 (de) * | 1980-10-22 | 1988-03-18 | ||
US4398117A (en) * | 1981-03-23 | 1983-08-09 | Sperry Corporation | Bellows support for surface acoustic wave device |
JPS59117814A (ja) * | 1982-12-24 | 1984-07-07 | Murata Mfg Co Ltd | 圧電磁器共振子 |
CA1214835A (en) * | 1982-12-28 | 1986-12-02 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator |
JPS601877A (ja) * | 1983-06-20 | 1985-01-08 | Nippon Soken Inc | 積層型圧電体 |
JPS6074709A (ja) * | 1983-09-29 | 1985-04-27 | Murata Mfg Co Ltd | 圧電装置 |
US4564782A (en) * | 1983-09-02 | 1986-01-14 | Murata Manufacturing Co., Ltd. | Ceramic filter using multiple thin piezoelectric layers |
JPS6086880A (ja) * | 1983-10-19 | 1985-05-16 | Nec Corp | 電歪効果素子 |
JPS60169927U (ja) * | 1984-04-17 | 1985-11-11 | 株式会社村田製作所 | ラダ−型フイルタ |
JPS60174312U (ja) * | 1984-04-27 | 1985-11-19 | 京セラ株式会社 | 水晶発振器 |
US4542315A (en) * | 1984-05-15 | 1985-09-17 | Murata Manufacturing Co., Ltd. | Chip-shaped piezoelectric vibrator mount |
JPS6194408A (ja) * | 1984-10-15 | 1986-05-13 | Nec Corp | セラミツクフイルタ |
JPS61139112A (ja) * | 1984-12-10 | 1986-06-26 | Murata Mfg Co Ltd | 周波数調整可能な積層型圧電素子 |
US4752712A (en) * | 1985-06-10 | 1988-06-21 | Nippon Soken, Inc. | Piezoelectric laminate stack |
US4885498A (en) * | 1985-06-19 | 1989-12-05 | Ngk Spark Plug Co., Ltd. | Stacked type piezoelectric actuator |
JPH0732273B2 (ja) * | 1986-05-22 | 1995-04-10 | 日本電気株式会社 | 電歪効果素子 |
US5045744A (en) * | 1988-12-23 | 1991-09-03 | Murata Mfg. Co. | Energy-trapping-by-frequency-lowering-type piezoelectric-resonance device |
US5118982A (en) * | 1989-05-31 | 1992-06-02 | Nec Corporation | Thickness mode vibration piezoelectric transformer |
JP3041952B2 (ja) * | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法 |
JP2965602B2 (ja) * | 1990-02-26 | 1999-10-18 | 日立金属株式会社 | 積層型変位素子 |
US5126618A (en) * | 1990-03-06 | 1992-06-30 | Brother Kogyo Kabushiki Kaisha | Longitudinal-effect type laminar piezoelectric/electrostrictive driver, and printing actuator using the driver |
JPH04214686A (ja) * | 1990-10-05 | 1992-08-05 | Nec Corp | 電歪効果素子 |
US5305507A (en) * | 1990-10-29 | 1994-04-26 | Trw Inc. | Method for encapsulating a ceramic device for embedding in composite structures |
JPH04179286A (ja) * | 1990-11-14 | 1992-06-25 | Nec Corp | 積層圧電アクチュエータ |
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
JP3185226B2 (ja) * | 1991-01-30 | 2001-07-09 | 株式会社村田製作所 | 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子 |
JP3064458B2 (ja) * | 1991-04-02 | 2000-07-12 | 日本電気株式会社 | 厚み縦振動圧電磁器トランスとその駆動方法 |
JPH04333295A (ja) * | 1991-05-09 | 1992-11-20 | Nec Corp | 電歪効果素子およびその製造方法 |
US5225731A (en) * | 1991-06-13 | 1993-07-06 | Southwest Research Institute | Solid body piezoelectric bender transducer |
JPH05160459A (ja) * | 1991-12-09 | 1993-06-25 | Hitachi Metals Ltd | 積層型変位素子 |
JPH05264391A (ja) * | 1992-03-19 | 1993-10-12 | Unisia Jecs Corp | 圧力センサ |
US5250870A (en) * | 1992-03-25 | 1993-10-05 | Motorola, Inc. | Ultra-thin surface mount crystal package |
JPH06209228A (ja) * | 1993-01-12 | 1994-07-26 | Murata Mfg Co Ltd | ラダー型フィルタ |
US5381067A (en) * | 1993-03-10 | 1995-01-10 | Hewlett-Packard Company | Electrical impedance normalization for an ultrasonic transducer array |
US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
JPH07106905A (ja) * | 1993-10-06 | 1995-04-21 | Matsushita Electric Ind Co Ltd | 発振子 |
US5585687A (en) * | 1994-02-23 | 1996-12-17 | Citizen Watch Co., Ltd. | Piezolelectric oscillator |
JPH07240660A (ja) * | 1994-02-25 | 1995-09-12 | Murata Mfg Co Ltd | ラダー型フィルタ |
JPH0818382A (ja) * | 1994-06-27 | 1996-01-19 | Murata Mfg Co Ltd | 圧電部品 |
JP3221253B2 (ja) * | 1994-09-13 | 2001-10-22 | 株式会社村田製作所 | 複合電子部品の製造方法 |
JP3114526B2 (ja) * | 1994-10-17 | 2000-12-04 | 株式会社村田製作所 | チップ型圧電共振部品 |
US5572082A (en) * | 1994-11-14 | 1996-11-05 | Sokol; Thomas J. | Monolithic crystal strip filter |
JP3141723B2 (ja) * | 1995-04-11 | 2001-03-05 | 株式会社村田製作所 | 幅モードを利用した共振子及び共振部品 |
JP3271517B2 (ja) * | 1996-04-05 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
-
1996
- 1996-08-05 JP JP22302896A patent/JP3577170B2/ja not_active Expired - Lifetime
-
1997
- 1997-04-01 DE DE69711131T patent/DE69711131T2/de not_active Expired - Lifetime
- 1997-04-01 EP EP97105423A patent/EP0823781B1/de not_active Expired - Lifetime
- 1997-04-25 NO NO971935A patent/NO971935L/no not_active Application Discontinuation
- 1997-04-29 CN CN97110865A patent/CN1085442C/zh not_active Expired - Lifetime
- 1997-04-30 US US08/845,953 patent/US5900790A/en not_active Expired - Lifetime
-
2001
- 2001-10-09 CN CN01135461.5A patent/CN1198390C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1198390C (zh) | 2005-04-20 |
NO971935D0 (no) | 1997-04-25 |
CN1395367A (zh) | 2003-02-05 |
US5900790A (en) | 1999-05-04 |
CN1173080A (zh) | 1998-02-11 |
EP0823781A2 (de) | 1998-02-11 |
JP3577170B2 (ja) | 2004-10-13 |
EP0823781B1 (de) | 2002-03-20 |
JPH1051261A (ja) | 1998-02-20 |
DE69711131T2 (de) | 2002-10-31 |
NO971935L (no) | 1998-02-06 |
CN1085442C (zh) | 2002-05-22 |
EP0823781A3 (de) | 1998-09-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69711131D1 (de) | Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator | |
DE69532184D1 (de) | Schlüssel mit elektronischem Bauelement und Verfahren zu seiner Herstellung | |
DE69719680D1 (de) | Mehrschichtiges elektronisches Bauelement und Verfahren zu seiner Herstellung | |
DE69930188D1 (de) | Piezoelektrischer Lautsprecher,Verfahren zu seiner Herstellung,und Lautsprecherssystem mit diesem Lautsprecher | |
DE69814454D1 (de) | Verbundwerkstoff mit elastischen abschnitten und verfahren zu seiner herstellung | |
DE69514048D1 (de) | Polyaniline-Lösung, damit beschichtete Gegenstände und Verfahren zur Herstellung derselben | |
DE69839964D1 (de) | Einseitige leiterplatte und verfahren zu deren herstellung | |
DE69610666D1 (de) | Faserverstärktes Bauteil und Verfahren zu seiner Herstellung | |
DE59603734D1 (de) | Integrales plattenförmiges bauteil und verfahren zu seiner herstellung | |
DE59800305D1 (de) | Formteil und verfahren zu seiner herstellung | |
DE69909663D1 (de) | Elektronisches Vielschichtbauteil und Verfahren zu seiner Herstellung | |
DE69723148D1 (de) | Piezoelektrischer Resonator und Verfahren zu seiner Herstellung | |
DE69632388D1 (de) | Elektronisches gerät und verfahren zu seiner herstellung | |
DE69710724D1 (de) | Farbstoffaufnehmendes substrat und verfahren zu seiner herstellung | |
DE69611892D1 (de) | Dielektrisches porzellan, verfahren zu seiner herstellung und elektronische teile daraus | |
DE69404588D1 (de) | Elektronisches Bauelement und Verfahren zu seiner Herstellung | |
DE69833756D1 (de) | Elektronisches bauelement und verfahren zu seiner herstellung | |
DE69203893D1 (de) | Zusammengesetztes, vorgespanntes Bauteil und Verfahren zu seiner Herstellung. | |
DE69941258D1 (de) | Polyisocyanat und verfahren zu seiner herstellung | |
DE69918995D1 (de) | Chelat-bildender filter und verfahren zu seiner herstellung | |
DE69829941D1 (de) | Bilaminares piezoelektrisches bauelement für beschleunigungsmessaufnehmer sowie verfahren zu seiner herstellung | |
DE69509563D1 (de) | Elektronisches Bauelement und Verfahren zu seiner Herstellung | |
DE69510526D1 (de) | Gleitbauteil und Verfahren zu seiner Herstellung | |
DE69938787D1 (de) | Molekularsiebe und verfahren zu deren herstellung | |
DE59610140D1 (de) | Cyclisches dodecapeptid und verfahren zu seiner herstellung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |