DE69535502D1 - Dielektrische Zwischenschicht für eine Halbleitervorrichtung - Google Patents

Dielektrische Zwischenschicht für eine Halbleitervorrichtung

Info

Publication number
DE69535502D1
DE69535502D1 DE69535502T DE69535502T DE69535502D1 DE 69535502 D1 DE69535502 D1 DE 69535502D1 DE 69535502 T DE69535502 T DE 69535502T DE 69535502 T DE69535502 T DE 69535502T DE 69535502 D1 DE69535502 D1 DE 69535502D1
Authority
DE
Germany
Prior art keywords
semiconductor device
dielectric interlayer
interlayer
dielectric
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69535502T
Other languages
English (en)
Other versions
DE69535502T2 (de
Inventor
Toshiaki Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE69535502D1 publication Critical patent/DE69535502D1/de
Publication of DE69535502T2 publication Critical patent/DE69535502T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/5329—Insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69535502T 1994-10-03 1995-10-03 Dielektrische Zwischenschicht für eine Halbleitervorrichtung Expired - Fee Related DE69535502T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP23882194 1994-10-03
JP23882194 1994-10-03
JP7003727A JPH08162528A (ja) 1994-10-03 1995-01-13 半導体装置の層間絶縁膜構造
JP372795 1995-01-13

Publications (2)

Publication Number Publication Date
DE69535502D1 true DE69535502D1 (de) 2007-07-12
DE69535502T2 DE69535502T2 (de) 2008-01-24

Family

ID=26337363

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69535502T Expired - Fee Related DE69535502T2 (de) 1994-10-03 1995-10-03 Dielektrische Zwischenschicht für eine Halbleitervorrichtung

Country Status (5)

Country Link
US (1) US5646440A (de)
EP (1) EP0706216B1 (de)
JP (1) JPH08162528A (de)
KR (1) KR960015788A (de)
DE (1) DE69535502T2 (de)

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JPH0936226A (ja) * 1995-07-18 1997-02-07 Nec Corp 半導体装置およびその製造方法
KR0182006B1 (ko) * 1995-11-10 1999-04-15 김광호 반도체 패키지 장치 및 몰딩물질에 의해 발생하는 기생용량의 산출방법
JPH1041382A (ja) * 1996-04-29 1998-02-13 Texas Instr Inc <Ti> 集積回路レベル間絶縁構造
WO1997041592A1 (en) * 1996-05-02 1997-11-06 Advanced Micro Devices, Inc. A fluorinated oxide low permittivity dielectric stack for reduced capacitive coupling
US6157083A (en) * 1996-06-03 2000-12-05 Nec Corporation Fluorine doping concentrations in a multi-structure semiconductor device
US5843830A (en) * 1996-06-26 1998-12-01 Micron Technology, Inc. Capacitor, and methods for forming a capacitor
JP2910713B2 (ja) 1996-12-25 1999-06-23 日本電気株式会社 半導体装置の製造方法
JPH10189723A (ja) * 1996-12-25 1998-07-21 Nec Corp 半導体装置およびその製造方法
JP3159093B2 (ja) 1996-12-25 2001-04-23 日本電気株式会社 半導体装置およびその製造方法
US6437441B1 (en) 1997-07-10 2002-08-20 Kawasaki Microelectronics, Inc. Wiring structure of a semiconductor integrated circuit and a method of forming the wiring structure
JP3305251B2 (ja) 1998-02-26 2002-07-22 松下電器産業株式会社 配線構造体の形成方法
JP3123512B2 (ja) * 1998-06-02 2001-01-15 日本電気株式会社 半導体装置及びその製造方法
US6232235B1 (en) * 1998-06-03 2001-05-15 Motorola, Inc. Method of forming a semiconductor device
US6265779B1 (en) * 1998-08-11 2001-07-24 International Business Machines Corporation Method and material for integration of fuorine-containing low-k dielectrics
US6239026B1 (en) 1998-09-28 2001-05-29 Conexant Systems, Inc. Nitride etch stop for poisoned unlanded vias
US6777320B1 (en) * 1998-11-13 2004-08-17 Intel Corporation In-plane on-chip decoupling capacitors and method for making same
US6444564B1 (en) 1998-11-23 2002-09-03 Advanced Micro Devices, Inc. Method and product for improved use of low k dielectric material among integrated circuit interconnect structures
US6586847B1 (en) * 1999-03-11 2003-07-01 Skyworks Solutions, Inc. Method and structure for temperature stabilization in semiconductor devices
US6593077B2 (en) 1999-03-22 2003-07-15 Special Materials Research And Technology, Inc. Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrate
US6080683A (en) * 1999-03-22 2000-06-27 Special Materials Research And Technology, Inc. Room temperature wet chemical growth process of SiO based oxides on silicon
US6524974B1 (en) 1999-03-22 2003-02-25 Lsi Logic Corporation Formation of improved low dielectric constant carbon-containing silicon oxide dielectric material by reaction of carbon-containing silane with oxidizing agent in the presence of one or more reaction retardants
JP2000286262A (ja) * 1999-03-30 2000-10-13 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP2007281513A (ja) * 1999-06-25 2007-10-25 Toshiba Corp Ｌｓｉの配線構造
US6756674B1 (en) 1999-10-22 2004-06-29 Lsi Logic Corporation Low dielectric constant silicon oxide-based dielectric layer for integrated circuit structures having improved compatibility with via filler materials, and method of making same
US6391795B1 (en) 1999-10-22 2002-05-21 Lsi Logic Corporation Low k dielectric composite layer for intergrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning
US6423628B1 (en) 1999-10-22 2002-07-23 Lsi Logic Corporation Method of forming integrated circuit structure having low dielectric constant material and having silicon oxynitride caps over closely spaced apart metal lines
EP1123991A3 (de) 2000-02-08 2002-11-13 Asm Japan K.K. Materialen mit niedrieger Dielektrizitätskonstante und Verfahren
US6346490B1 (en) 2000-04-05 2002-02-12 Lsi Logic Corporation Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning steps
US6365528B1 (en) 2000-06-07 2002-04-02 Lsi Logic Corporation Low temperature process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric-material characterized by improved resistance to oxidation and good gap-filling capabilities
US6492731B1 (en) 2000-06-27 2002-12-10 Lsi Logic Corporation Composite low dielectric constant film for integrated circuit structure
US6346488B1 (en) 2000-06-27 2002-02-12 Lsi Logic Corporation Process to provide enhanced resistance to cracking and to further reduce the dielectric constant of a low dielectric constant dielectric film of an integrated circuit structure by implantation with hydrogen ions
US6368979B1 (en) 2000-06-28 2002-04-09 Lsi Logic Corporation Process for forming trenches and vias in layers of low dielectric constant carbon-doped silicon oxide dielectric material of an integrated circuit structure
US6350700B1 (en) 2000-06-28 2002-02-26 Lsi Logic Corporation Process for forming trenches and vias in layers of low dielectric constant carbon-doped silicon oxide dielectric material of an integrated circuit structure
US6774489B2 (en) * 2000-08-29 2004-08-10 Texas Instruments Incorporated Dielectric layer liner for an integrated circuit structure
US6489242B1 (en) 2000-09-13 2002-12-03 Lsi Logic Corporation Process for planarization of integrated circuit structure which inhibits cracking of low dielectric constant dielectric material adjacent underlying raised structures
US6391768B1 (en) 2000-10-30 2002-05-21 Lsi Logic Corporation Process for CMP removal of excess trench or via filler metal which inhibits formation of concave regions on oxide surface of integrated circuit structure
US6537923B1 (en) 2000-10-31 2003-03-25 Lsi Logic Corporation Process for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines
US6420277B1 (en) 2000-11-01 2002-07-16 Lsi Logic Corporation Process for inhibiting crack formation in low dielectric constant dielectric films of integrated circuit structure
US6905981B1 (en) 2000-11-24 2005-06-14 Asm Japan K.K. Low-k dielectric materials and processes
US6649219B2 (en) 2001-02-23 2003-11-18 Lsi Logic Corporation Process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric material characterized by improved resistance to oxidation
US6858195B2 (en) 2001-02-23 2005-02-22 Lsi Logic Corporation Process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric material
US6572925B2 (en) 2001-02-23 2003-06-03 Lsi Logic Corporation Process for forming a low dielectric constant fluorine and carbon containing silicon oxide dielectric material
US6503840B2 (en) 2001-05-02 2003-01-07 Lsi Logic Corporation Process for forming metal-filled openings in low dielectric constant dielectric material while inhibiting via poisoning
US6559048B1 (en) 2001-05-30 2003-05-06 Lsi Logic Corporation Method of making a sloped sidewall via for integrated circuit structure to suppress via poisoning
US6562700B1 (en) 2001-05-31 2003-05-13 Lsi Logic Corporation Process for removal of resist mask over low k carbon-doped silicon oxide dielectric material of an integrated circuit structure, and removal of residues from via etch and resist mask removal
US6583026B1 (en) 2001-05-31 2003-06-24 Lsi Logic Corporation Process for forming a low k carbon-doped silicon oxide dielectric material on an integrated circuit structure
US6566171B1 (en) 2001-06-12 2003-05-20 Lsi Logic Corporation Fuse construction for integrated circuit structure having low dielectric constant dielectric material
US6930056B1 (en) 2001-06-19 2005-08-16 Lsi Logic Corporation Plasma treatment of low dielectric constant dielectric material to form structures useful in formation of metal interconnects and/or filled vias for integrated circuit structure
US6613697B1 (en) 2001-06-26 2003-09-02 Special Materials Research And Technology, Inc. Low metallic impurity SiO based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereof
US6559033B1 (en) 2001-06-27 2003-05-06 Lsi Logic Corporation Processing for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines
US6673721B1 (en) 2001-07-02 2004-01-06 Lsi Logic Corporation Process for removal of photoresist mask used for making vias in low k carbon-doped silicon oxide dielectric material, and for removal of etch residues from formation of vias and removal of photoresist mask
RU2218365C2 (ru) * 2001-07-27 2003-12-10 Федеральное государственное унитарное предприятие "Научно-исследовательский физико-химический институт им. Л.Я.Карпова" Пористая пленка из полипараксилилена и его замещенных, способ ее получения и полупроводниковый прибор с её использованием
US6723653B1 (en) 2001-08-17 2004-04-20 Lsi Logic Corporation Process for reducing defects in copper-filled vias and/or trenches formed in porous low-k dielectric material
US6881664B2 (en) 2001-08-28 2005-04-19 Lsi Logic Corporation Process for planarizing upper surface of damascene wiring structure for integrated circuit structures
US6762494B1 (en) * 2002-09-24 2004-07-13 Applied Micro Circuits Corporation Electronic package substrate with an upper dielectric layer covering high speed signal traces
JP2004128256A (ja) 2002-10-03 2004-04-22 Oki Electric Ind Co Ltd 多層構造半導体素子の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150830A (en) * 1980-04-25 1981-11-21 Hitachi Ltd Semiconductor device
JPS56167333A (en) * 1980-05-26 1981-12-23 Fujitsu Ltd Semiconductor device
JPH07120706B2 (ja) * 1986-06-27 1995-12-20 日本電信電話株式会社 半導体集積回路の配線構造
JPH0612790B2 (ja) * 1987-02-24 1994-02-16 日本電気株式会社 半導体装置
JPH0654774B2 (ja) * 1987-11-30 1994-07-20 株式会社東芝 半導体装置及びその製造方法
JPH0230138A (ja) * 1988-07-19 1990-01-31 Seiko Epson Corp 半導体装置
JPH0289346A (ja) * 1988-09-27 1990-03-29 Toshiba Corp 半導体装置及びその製造方法
NL8900989A (nl) * 1989-04-20 1990-11-16 Philips Nv Halfgeleiderinrichting met een in een kunststof omhulling ingebed halfgeleiderlichaam.
JPH04174541A (ja) * 1990-03-28 1992-06-22 Nec Corp 半導体集積回路及びその製造方法
JPH04147651A (ja) * 1990-04-02 1992-05-21 Toshiba Corp 半導体装置およびその製造方法
JP2593965B2 (ja) * 1991-01-29 1997-03-26 三菱電機株式会社 半導体装置
JPH04323854A (ja) * 1991-04-23 1992-11-13 Oki Electric Ind Co Ltd 半導体装置
JPH05283542A (ja) * 1992-03-31 1993-10-29 Mitsubishi Electric Corp 半導体集積回路装置及びその製造方法
KR0131439B1 (ko) * 1992-11-24 1998-04-14 나카무라 타메아키 반도체장치 및 그 제조방법

Also Published As

Publication number Publication date
DE69535502T2 (de) 2008-01-24
EP0706216A2 (de) 1996-04-10
JPH08162528A (ja) 1996-06-21
EP0706216A3 (de) 1997-12-03
KR960015788A (ko) 1996-05-22
EP0706216B1 (de) 2007-05-30
US5646440A (en) 1997-07-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee