DE69507877T2 - Drucksteuerventil - Google Patents

Drucksteuerventil

Info

Publication number
DE69507877T2
DE69507877T2 DE69507877T DE69507877T DE69507877T2 DE 69507877 T2 DE69507877 T2 DE 69507877T2 DE 69507877 T DE69507877 T DE 69507877T DE 69507877 T DE69507877 T DE 69507877T DE 69507877 T2 DE69507877 T2 DE 69507877T2
Authority
DE
Germany
Prior art keywords
control valve
pressure control
pressure
valve
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69507877T
Other languages
English (en)
Other versions
DE69507877D1 (de
Inventor
Kunihiko Daido
Kazuhiro Yoshikawa
Shuhei Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69507877D1 publication Critical patent/DE69507877D1/de
Publication of DE69507877T2 publication Critical patent/DE69507877T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/02—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1262—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being spring loaded

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Temperature-Responsive Valves (AREA)
DE69507877T 1995-05-10 1995-11-17 Drucksteuerventil Expired - Fee Related DE69507877T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7111497A JPH08303630A (ja) 1995-05-10 1995-05-10 制御器

Publications (2)

Publication Number Publication Date
DE69507877D1 DE69507877D1 (de) 1999-03-25
DE69507877T2 true DE69507877T2 (de) 1999-07-22

Family

ID=14562796

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69507877T Expired - Fee Related DE69507877T2 (de) 1995-05-10 1995-11-17 Drucksteuerventil

Country Status (7)

Country Link
US (1) US5634627A (de)
EP (1) EP0750148B1 (de)
JP (1) JPH08303630A (de)
KR (1) KR100361064B1 (de)
CA (1) CA2163613C (de)
DE (1) DE69507877T2 (de)
TW (1) TW287220B (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5749227A (en) * 1995-06-07 1998-05-12 Electric Boat Corporation Steam seal air removal system
DE19840169A1 (de) * 1998-09-03 2000-03-09 Schaeffler Waelzlager Ohg Vorrichtung zum Relativverstellen einer Nockenwelle
EP1046809B1 (de) * 1999-04-20 2005-08-10 Siemens Aktiengesellschaft Fluiddosiervorrichtung
JP3556565B2 (ja) * 2000-04-14 2004-08-18 川重冷熱工業株式会社 高精度安全弁
JP3618286B2 (ja) * 2000-09-07 2005-02-09 Ｓｍｃ株式会社 スムース排気弁
JP3445569B2 (ja) * 2000-09-18 2003-09-08 Ｓｍｃ株式会社 パイロット式２ポート真空バルブ
US6394418B1 (en) * 2000-11-14 2002-05-28 Abb, Inc. Bellows actuator for pressure and flow control
KR100448701B1 (ko) * 2001-04-12 2004-09-16 삼성전자주식회사 에어밸브
US6543748B1 (en) * 2001-10-03 2003-04-08 Vat Holding Ag Linear motion leadthrough
JP4300345B2 (ja) * 2002-09-02 2009-07-22 株式会社フジキン 制御器
EP1431639B1 (de) * 2002-12-19 2007-11-14 Techspace Aero S.A. Ventil mit integriertem Antrieb
JP2006526125A (ja) * 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド 処理チャンバの開口を封止するための方法および装置
US7467778B2 (en) * 2003-09-15 2008-12-23 Exxonmobil Upstream Research Company Slurry tolerant pilot operated relief valve
JP4398837B2 (ja) * 2004-09-30 2010-01-13 ダイハツディーゼル株式会社 空気漏れ検知逃がし弁および内燃機関のエアースタータシステム
US20070057214A1 (en) * 2005-09-09 2007-03-15 Vat Holding Ag Valve for essentially gastight closing a flow path
JP2007162873A (ja) * 2005-12-15 2007-06-28 Mitsumi Electric Co Ltd エアオペレートバルブ
US7803218B2 (en) * 2007-02-26 2010-09-28 Honeywell International Inc. Drain valve assembly
US8328410B1 (en) * 2008-03-14 2012-12-11 E I Du Pont De Nemours And Company In-line multi-chamber mixer
US20080315141A1 (en) * 2007-06-25 2008-12-25 Greene, Tweed Of Delaware, Inc. Slit Valve Door
JP5247298B2 (ja) * 2008-08-18 2013-07-24 サーパス工業株式会社 サックバックバルブ
TWI377307B (en) * 2009-03-26 2012-11-21 Smc Kk Flow rate control valve and assembly method therefor
KR101662095B1 (ko) * 2011-11-04 2016-10-05 생-고뱅 퍼포먼스 플라스틱스 코포레이션 제거 가능한 샘플링 밸브를 갖는 배관 고정구용 시스템, 방법 및 장치
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
KR20170064222A (ko) * 2015-12-01 2017-06-09 티에스케이 주식회사 벨로우즈형 스팀 트랩
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
DE202017104079U1 (de) * 2017-07-07 2017-08-21 Samson Ag Stellantrieb für Prozessventile
WO2021085159A1 (ja) * 2019-10-28 2021-05-06 イーグル工業株式会社 膨張弁
CN112212014B (zh) * 2020-09-18 2022-08-19 中国航发沈阳发动机研究所 一种自适应调节航空发动机通风方式的活门设计方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1992902A (en) * 1934-02-01 1935-02-26 Imp Brass Mfg Co Valve
CH464628A (de) * 1968-05-17 1968-10-31 Froelich Martin Druckmittelgesteuertes Ventil
FR2166480A5 (en) * 1971-12-27 1973-08-17 Monrocq Raymond Low temp valve - protected against icing by vacuum enclosure of stem
DE2553163A1 (de) * 1975-11-27 1977-06-02 Ver Flugtechnische Werke Fernbetaetigtes absperrventil fuer cryogene medien
US4201366A (en) * 1978-03-13 1980-05-06 Danko Oliver L Bellows valve
JPS55145873A (en) * 1979-04-26 1980-11-13 Power Reactor & Nuclear Fuel Dev Corp Bellows seal valve
US4309022A (en) * 1980-04-14 1982-01-05 Consolidated Controls Corporation Poppet valve actuator apparatus
FR2500108B1 (fr) * 1981-02-17 1986-01-24 Gemignani Francois Robinet d'isolement ou d'arret
US4583710A (en) * 1982-05-10 1986-04-22 Cornell Research Foundation, Inc. Electromagnetic valve for pulsed molecular beam
US4687017A (en) * 1986-04-28 1987-08-18 Nupro Company Inverted bellows valve
JP2762094B2 (ja) * 1989-01-30 1998-06-04 清原 まさ子 高精度調整器
DE4106761A1 (de) * 1991-03-04 1992-09-10 Leybold Ag Verfahren zur herstellung von ventilinnenteilen fuer vakuumventile mit ventilteller und faltenbalg sowie nach diesem verfahren hergestellte innenteile
JPH0747989B2 (ja) * 1992-12-28 1995-05-24 富士精工株式会社 超高純度ガス制御用耐食性バルブ
JP3256753B2 (ja) * 1993-05-07 2002-02-12 清原 まさ子 制御弁

Also Published As

Publication number Publication date
CA2163613A1 (en) 1996-11-11
EP0750148A1 (de) 1996-12-27
CA2163613C (en) 2004-09-28
JPH08303630A (ja) 1996-11-22
KR960041809A (ko) 1996-12-19
EP0750148B1 (de) 1999-02-17
DE69507877D1 (de) 1999-03-25
KR100361064B1 (ko) 2003-04-03
US5634627A (en) 1997-06-03
TW287220B (en) 1996-10-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee