DE69400414D1 - Piezolelektrisch betätigtes Druckregelventil - Google Patents
Piezolelektrisch betätigtes DruckregelventilInfo
- Publication number
- DE69400414D1 DE69400414D1 DE69400414T DE69400414T DE69400414D1 DE 69400414 D1 DE69400414 D1 DE 69400414D1 DE 69400414 T DE69400414 T DE 69400414T DE 69400414 T DE69400414 T DE 69400414T DE 69400414 D1 DE69400414 D1 DE 69400414D1
- Authority
- DE
- Germany
- Prior art keywords
- piezolelectrically
- control valve
- pressure control
- operated pressure
- operated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/005—Piezoelectric benders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
- B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
- B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
- B60G17/01941—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof characterised by the use of piezoelectric elements, e.g. sensors or actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
- B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
- B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
- B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
- B60T8/363—Electromagnetic valves specially adapted for anti-lock brake and traction control systems in hydraulic systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
- B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
- B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
- B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
- B60T8/3655—Continuously controlled electromagnetic valves
- B60T8/366—Valve details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
- B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
- B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
- B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
- B60T8/369—Valves using piezoelectric elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H61/00—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing
- F16H61/02—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing characterised by the signals used
- F16H61/0202—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing characterised by the signals used the signals being electric
- F16H61/0251—Elements specially adapted for electric control units, e.g. valves for converting electrical signals to fluid signals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
- F16K99/0007—Lift valves of cantilever type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/50—Arrangements of springs for valves used in fuel injectors or fuel injection pumps
- F02M2200/502—Springs biasing the valve member to the open position
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/009—Fluid power devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/86622—Motor-operated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/8667—Reciprocating valve
- Y10T137/86686—Plural disk or plug
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- Transportation (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/043,127 US5267589A (en) | 1993-04-05 | 1993-04-05 | Piezoelectric pressure control valve |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69400414D1 true DE69400414D1 (de) | 1996-10-02 |
Family
ID=21925640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69400414T Expired - Lifetime DE69400414D1 (de) | 1993-04-05 | 1994-03-21 | Piezolelektrisch betätigtes Druckregelventil |
Country Status (4)
Country | Link |
---|---|
US (1) | US5267589A (de) |
EP (1) | EP0619210B1 (de) |
JP (1) | JPH06323457A (de) |
DE (1) | DE69400414D1 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5445185A (en) * | 1993-04-05 | 1995-08-29 | Ford Motor Company | Piezoelectric fluid control valve |
US5593134A (en) * | 1995-02-21 | 1997-01-14 | Applied Power Inc. | Magnetically assisted piezo-electric valve actuator |
US5630440A (en) * | 1995-02-21 | 1997-05-20 | Applied Power Inc. | Piezo composite sheet actuated valve |
US6026847A (en) * | 1995-10-11 | 2000-02-22 | Reinicke; Robert H. | Magnetostrictively actuated valve |
US5868375A (en) * | 1995-10-11 | 1999-02-09 | Marotta Scientific Controls, Inc. | Magnetostrictively actuated valve |
US6533366B1 (en) | 1996-05-29 | 2003-03-18 | Kelsey-Hayes Company | Vehicle hydraulic braking systems incorporating micro-machined technology |
US6019437A (en) * | 1996-05-29 | 2000-02-01 | Kelsey-Hayes Company | Vehicle hydraulic braking systems incorporating micro-machined technology |
FR2759962B1 (fr) * | 1997-02-25 | 1999-05-14 | Renault Vehicules Ind | Vanne pneumatique notamment pour dispositif de freinage d'un vehicule automobile |
US6244398B1 (en) | 1997-05-15 | 2001-06-12 | K2 Bike Inc. | Shock absorber with variable bypass damping |
US6164424A (en) * | 1997-05-15 | 2000-12-26 | K2 Bike Inc. | Shock absorber with bypass damping |
US6026939A (en) * | 1997-05-15 | 2000-02-22 | K2 Bike Inc. | Shock absorber with stanchion mounted bypass damping |
US5996745A (en) * | 1997-05-15 | 1999-12-07 | K-2 Corporation | Piezoelectric shock absorber valve |
WO1999004182A1 (en) * | 1997-07-14 | 1999-01-28 | Active Control Experts, Inc. | Adaptive damper |
DE29718306U1 (de) * | 1997-10-15 | 1998-01-22 | Bürkert Werke GmbH & Co., 74653 Ingelfingen | Piezoventil |
US7011378B2 (en) | 1998-09-03 | 2006-03-14 | Ge Novasensor, Inc. | Proportional micromechanical valve |
WO2000014415A2 (en) | 1998-09-03 | 2000-03-16 | Lucas Novasensor | Proportional micromechanical device |
US6523560B1 (en) | 1998-09-03 | 2003-02-25 | General Electric Corporation | Microvalve with pressure equalization |
US6540203B1 (en) | 1999-03-22 | 2003-04-01 | Kelsey-Hayes Company | Pilot operated microvalve device |
US6170526B1 (en) | 1999-05-18 | 2001-01-09 | Caterpillar Inc. | Piezoelectric actuated poppet valve to modulate pilot pressures and control main valve activation |
US6293632B1 (en) | 1999-06-11 | 2001-09-25 | John F. Grote | Vehicular brake-by-wire system |
US6321845B1 (en) | 2000-02-02 | 2001-11-27 | Schlumberger Technology Corporation | Apparatus for device using actuator having expandable contractable element |
US6433991B1 (en) | 2000-02-02 | 2002-08-13 | Schlumberger Technology Corp. | Controlling activation of devices |
US6694998B1 (en) | 2000-03-22 | 2004-02-24 | Kelsey-Hayes Company | Micromachined structure usable in pressure regulating microvalve and proportional microvalve |
US6845962B1 (en) * | 2000-03-22 | 2005-01-25 | Kelsey-Hayes Company | Thermally actuated microvalve device |
EP1158182B1 (de) * | 2000-05-25 | 2004-12-08 | FESTO AG & Co | Ventileinrichtung |
US6494804B1 (en) | 2000-06-20 | 2002-12-17 | Kelsey-Hayes Company | Microvalve for electronically controlled transmission |
US6505811B1 (en) | 2000-06-27 | 2003-01-14 | Kelsey-Hayes Company | High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate |
US6589229B1 (en) | 2000-07-31 | 2003-07-08 | Becton, Dickinson And Company | Wearable, self-contained drug infusion device |
US6581640B1 (en) | 2000-08-16 | 2003-06-24 | Kelsey-Hayes Company | Laminated manifold for microvalve |
US6526864B2 (en) | 2001-04-17 | 2003-03-04 | Csa Engineering, Inc. | Piezoelectrically actuated single-stage servovalve |
US8011388B2 (en) | 2003-11-24 | 2011-09-06 | Microstaq, INC | Thermally actuated microvalve with multiple fluid ports |
US7803281B2 (en) | 2004-03-05 | 2010-09-28 | Microstaq, Inc. | Selective bonding for forming a microvalve |
US7168680B2 (en) * | 2004-07-22 | 2007-01-30 | Harris Corporation | Embedded control valve using electroactive material |
US7156365B2 (en) | 2004-07-27 | 2007-01-02 | Kelsey-Hayes Company | Method of controlling microvalve actuator |
US7093818B2 (en) * | 2004-08-03 | 2006-08-22 | Harris Corporation | Embedded control valve using homopolar motor |
US7331781B1 (en) * | 2005-04-28 | 2008-02-19 | Bandeen Roger L | Orthodontic expander for increasing maxillary transverse dimension and method |
CN101617155B (zh) * | 2006-12-15 | 2012-03-21 | 麦克罗斯塔克公司 | 微阀装置 |
DE112008000862T5 (de) | 2007-03-30 | 2010-03-11 | Microstaq, Inc., Austin | Vorgesteuertes Mikroschieberventil |
US8387659B2 (en) | 2007-03-31 | 2013-03-05 | Dunan Microstaq, Inc. | Pilot operated spool valve |
US20100326530A1 (en) * | 2007-11-01 | 2010-12-30 | Honeywell International, Inc. | Piezoelectric flow control valve |
US7841579B2 (en) * | 2007-11-01 | 2010-11-30 | Honeywell International Inc. | Piezoelectric actuator with a gimballed valve |
US9585574B2 (en) * | 2008-02-28 | 2017-03-07 | Koninklijke Philips N.V. | Magnetic resonance system and method including an automated non-magnetic medical monitor |
CN102164846B (zh) | 2008-08-09 | 2016-03-30 | 盾安美斯泰克公司(美国) | 改进的微型阀装置 |
US8113482B2 (en) | 2008-08-12 | 2012-02-14 | DunAn Microstaq | Microvalve device with improved fluid routing |
US8540207B2 (en) | 2008-12-06 | 2013-09-24 | Dunan Microstaq, Inc. | Fluid flow control assembly |
WO2010117874A2 (en) | 2009-04-05 | 2010-10-14 | Microstaq, Inc. | Method and structure for optimizing heat exchanger performance |
WO2011022267A2 (en) | 2009-08-17 | 2011-02-24 | Microstaq, Inc. | Micromachined device and control method |
WO2011094300A2 (en) | 2010-01-28 | 2011-08-04 | Microstaq, Inc. | Process and structure for high temperature selective fusion bonding |
CN102812538B (zh) | 2010-01-28 | 2015-05-13 | 盾安美斯泰克股份有限公司 | 用以促进接合的重调节半导体表面的方法 |
US8996141B1 (en) | 2010-08-26 | 2015-03-31 | Dunan Microstaq, Inc. | Adaptive predictive functional controller |
US8925793B2 (en) | 2012-01-05 | 2015-01-06 | Dunan Microstaq, Inc. | Method for making a solder joint |
US9140613B2 (en) | 2012-03-16 | 2015-09-22 | Zhejiang Dunan Hetian Metal Co., Ltd. | Superheat sensor |
DE102012006658A1 (de) * | 2012-04-03 | 2013-10-10 | Burkhard Büstgens | Mikro-Pilotventil |
CN103953774A (zh) * | 2013-09-18 | 2014-07-30 | 中国电子科技集团公司第十四研究所 | 一种基于现场总线的高可靠智能化比例阀控制装置 |
US9188375B2 (en) | 2013-12-04 | 2015-11-17 | Zhejiang Dunan Hetian Metal Co., Ltd. | Control element and check valve assembly |
DE112015002776B4 (de) * | 2014-06-10 | 2020-06-04 | Fas Medic S.A. | Fluidsteuervorrichtung mit elektroaktivem Material |
US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
EP3203079B1 (de) | 2016-01-29 | 2021-05-19 | Microjet Technology Co., Ltd | Piezoelektrischer aktuator |
US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US9976673B2 (en) * | 2016-01-29 | 2018-05-22 | Microjet Technology Co., Ltd. | Miniature fluid control device |
EP3203077B1 (de) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Piezoelektrischer aktuator |
US10371136B2 (en) | 2016-01-29 | 2019-08-06 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10378529B2 (en) | 2016-01-29 | 2019-08-13 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
CN108061025A (zh) | 2016-11-09 | 2018-05-22 | 英业达(重庆)有限公司 | 气流产生装置及气流产生方法 |
US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
TWI624593B (zh) * | 2016-11-17 | 2018-05-21 | 英業達股份有限公司 | 氣流產生裝置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6081527A (ja) * | 1983-10-07 | 1985-05-09 | Hitachi Ltd | 制動装置 |
JPS60139563A (ja) * | 1983-12-28 | 1985-07-24 | Jidosha Kiki Co Ltd | ブレ−キ装置 |
US4617952A (en) * | 1984-07-31 | 1986-10-21 | Yamatake-Honeywell Co. Limited | Switching valve and an electro-pneumatic pressure converter utilizing the same |
DE3545800A1 (de) * | 1984-12-25 | 1986-07-10 | Nippon Soken, Inc., Nishio, Aichi | Steuervorrichtung fuer fahrzeugbremsen |
JPS61268558A (ja) * | 1985-05-22 | 1986-11-28 | Nippon Soken Inc | 車両用ブレ−キ装置のアンチスキツド・油圧モジユレ−タ |
DE3526559A1 (de) * | 1985-07-25 | 1987-01-29 | Wabco Westinghouse Fahrzeug | Antiblockiersystem |
DE3608550A1 (de) * | 1986-03-14 | 1987-09-17 | Festo Kg | Piezo-elektrisch betaetigbares ventil |
JPS63106475A (ja) * | 1986-10-23 | 1988-05-11 | Agency Of Ind Science & Technol | 圧電素子を用いた流体制御弁 |
CA1319331C (en) * | 1987-04-17 | 1993-06-22 | Kouhei Yamatoh | Brake device |
DE3719320A1 (de) * | 1987-06-10 | 1988-12-29 | Pfister Gmbh | Verfahren und einrichtung zum bestimmen der tatsaechlichen geschwindigkeit eines fahrzeuges |
EP0314285B1 (de) * | 1987-10-19 | 1993-09-22 | Ford Motor Company Limited | Silikon-Ventileinrichtung zur Kontrolle des Durchflusses |
US4768751A (en) * | 1987-10-19 | 1988-09-06 | Ford Motor Company | Silicon micromachined non-elastic flow valves |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
DE3919876A1 (de) * | 1989-06-19 | 1990-12-20 | Bosch Gmbh Robert | Mikroventil |
US5067778A (en) * | 1990-11-19 | 1991-11-26 | Testardi David A | High performance anti-lock brake system for original equipment and after-market applications |
-
1993
- 1993-04-05 US US08/043,127 patent/US5267589A/en not_active Expired - Fee Related
-
1994
- 1994-03-21 EP EP94302004A patent/EP0619210B1/de not_active Expired - Lifetime
- 1994-03-21 DE DE69400414T patent/DE69400414D1/de not_active Expired - Lifetime
- 1994-04-04 JP JP6066266A patent/JPH06323457A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0619210A3 (de) | 1994-12-14 |
US5267589A (en) | 1993-12-07 |
EP0619210A2 (de) | 1994-10-12 |
JPH06323457A (ja) | 1994-11-25 |
EP0619210B1 (de) | 1996-08-28 |
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Legal Events
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