DE60032568D1 - Positionierungsapparat und damit versehener lithographischer Apparat - Google Patents
Positionierungsapparat und damit versehener lithographischer ApparatInfo
- Publication number
- DE60032568D1 DE60032568D1 DE60032568T DE60032568T DE60032568D1 DE 60032568 D1 DE60032568 D1 DE 60032568D1 DE 60032568 T DE60032568 T DE 60032568T DE 60032568 T DE60032568 T DE 60032568T DE 60032568 D1 DE60032568 D1 DE 60032568D1
- Authority
- DE
- Germany
- Prior art keywords
- provided therewith
- positioning
- lithographic
- apparatus provided
- lithographic apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99204051 | 1999-12-01 | ||
EP99204051 | 1999-12-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60032568D1 true DE60032568D1 (de) | 2007-02-08 |
DE60032568T2 DE60032568T2 (de) | 2007-10-04 |
Family
ID=8240943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60032568T Expired - Fee Related DE60032568T2 (de) | 1999-12-01 | 2000-11-22 | Positionierungsapparat und damit versehener lithographischer Apparat |
Country Status (5)
Country | Link |
---|---|
US (2) | US6635887B2 (de) |
JP (1) | JP3947652B2 (de) |
KR (1) | KR100573663B1 (de) |
DE (1) | DE60032568T2 (de) |
TW (1) | TW594427B (de) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60032568T2 (de) * | 1999-12-01 | 2007-10-04 | Asml Netherlands B.V. | Positionierungsapparat und damit versehener lithographischer Apparat |
US6666611B2 (en) * | 2000-08-18 | 2003-12-23 | Nikon Corporation | Three degree of freedom joint |
DE10142489A1 (de) * | 2000-09-15 | 2002-04-04 | Leica Microsys Lithography Ltd | Sechsachsiges Positioniersystem mit magnetfeldfreiem Raum |
JP3679767B2 (ja) | 2002-02-26 | 2005-08-03 | キヤノン株式会社 | ステージ位置決め装置及びその制御方法、露光装置、半導体デバイスの製造方法 |
EP1477852A1 (de) * | 2003-05-16 | 2004-11-17 | ASML Netherlands B.V. | Lithographischer Apparat, Verfahren zur Herstellung eines Artikels und dabei hergestellter Artikel |
TWI245170B (en) * | 2003-07-22 | 2005-12-11 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
JP4314091B2 (ja) * | 2003-10-03 | 2009-08-12 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
TWI288306B (en) * | 2003-11-05 | 2007-10-11 | Asml Netherlands Bv | Lithographic apparatus and method for manufacturing a lithographic device |
WO2005048325A1 (ja) * | 2003-11-17 | 2005-05-26 | Nikon Corporation | ステージ駆動方法及びステージ装置並びに露光装置 |
JP3950861B2 (ja) * | 2004-02-25 | 2007-08-01 | キヤノン株式会社 | 位置決め装置及び露光装置 |
US7456527B2 (en) * | 2004-03-04 | 2008-11-25 | Asml Netherlands B.V. | Moveable object carrier, lithographic apparatus comprising the moveable object carrier and device manufacturing method |
KR100573771B1 (ko) * | 2004-06-25 | 2006-04-25 | 삼성전자주식회사 | 갠트리장치 |
JP2006287098A (ja) * | 2005-04-04 | 2006-10-19 | Nsk Ltd | 位置決め装置 |
US7707907B2 (en) * | 2005-11-17 | 2010-05-04 | Socovar, Société En Commandite | Planar parallel mechanism and method |
US8109395B2 (en) * | 2006-01-24 | 2012-02-07 | Asm Technology Singapore Pte Ltd | Gantry positioning system |
US8104752B2 (en) * | 2006-03-20 | 2012-01-31 | Boaz Eidelberg | Integrated large XY rotary positioning table with virtual center of rotation |
JP2007329435A (ja) * | 2006-06-09 | 2007-12-20 | Canon Inc | ステージ装置、露光装置及びデバイス製造方法 |
CN2938172Y (zh) * | 2006-07-18 | 2007-08-22 | 上海微电子装备有限公司 | 双台轮换曝光精密定位*** |
US20080093319A1 (en) * | 2006-10-19 | 2008-04-24 | Universal Display & Fixtures Company | Storage Rack Sliding Frame Apparatus |
KR100847509B1 (ko) * | 2006-11-03 | 2008-07-22 | 마이크로모션테크놀러지(주) | 스테이지 시스템의 워킹 프레임 |
EP1947675B1 (de) * | 2007-01-22 | 2009-03-25 | FEI Company | Manipulator zum Drehen und Verschieben eines Probenhalters |
US7884326B2 (en) * | 2007-01-22 | 2011-02-08 | Fei Company | Manipulator for rotating and translating a sample holder |
DE102007011399A1 (de) * | 2007-03-08 | 2008-09-11 | Siemens Ag | Partikeltherapie-Anlage |
JP4903648B2 (ja) * | 2007-08-01 | 2012-03-28 | 大塚電子株式会社 | サイズ可変ステージ及び液晶基板の検査装置 |
EP2051280A1 (de) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorisierter Manipulator zur Positionierung einer TEM-Probe |
US8797509B2 (en) * | 2008-05-29 | 2014-08-05 | Asml Netherlands B.V. | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
NL2002935A1 (nl) * | 2008-06-27 | 2009-12-29 | Asml Netherlands Bv | Object support positioning device and lithographic apparatus. |
US20100032397A1 (en) * | 2008-08-09 | 2010-02-11 | Chien-Cheng Lin | Gantry with Adjustable Torsion Leaf Springs |
CN102522300B (zh) * | 2008-08-18 | 2014-10-15 | 迈普尔平版印刷Ip有限公司 | 带电粒子束光刻***以及目标定位装置 |
KR101024319B1 (ko) * | 2008-09-30 | 2011-03-23 | 에이피시스템 주식회사 | 겐트리 장치 및 겐트리 장치의 틸트 보정 방법과 이를 이용한 기판처리장치 |
DE112010000012T5 (de) * | 2009-03-06 | 2011-07-07 | ULVAC, Inc., Kanagawa | Drehjustiervorrichtung für Tintenstrahl-Beschichtungskopf |
US8285418B2 (en) * | 2009-07-23 | 2012-10-09 | Kla-Tencor Corporation | Dual scanning stage |
US8973768B1 (en) * | 2009-10-09 | 2015-03-10 | Par Systems, Inc. | Gantry robot system |
CN102279529B (zh) * | 2010-06-11 | 2015-03-25 | 上海微电子装备有限公司 | 柔性双边驱动设备的位置控制装置、及相关参数的整定方法 |
US9529353B2 (en) * | 2010-09-08 | 2016-12-27 | Nikon Corporation | Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same |
JP5677025B2 (ja) * | 2010-10-22 | 2015-02-25 | 株式会社トプコン | 載置ステージ |
CN102736435B (zh) * | 2011-04-15 | 2014-09-17 | 上海微电子装备有限公司 | 一种光刻机直线运动驱动装置 |
JP5449263B2 (ja) * | 2011-06-30 | 2014-03-19 | 國立虎尾科技大學 | 製造工程装置 |
JP5807841B2 (ja) * | 2011-08-30 | 2015-11-10 | 株式会社ニコン | 移動体装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 |
EP2756354B1 (de) | 2011-09-12 | 2018-12-19 | Mapper Lithography IP B.V. | Zielverarbeitungswerkzeug |
JP5773825B2 (ja) * | 2011-09-29 | 2015-09-02 | スターテクノ株式会社 | 水平及び回転位置決め装置 |
JP5918518B2 (ja) * | 2011-11-30 | 2016-05-18 | 川崎重工業株式会社 | 搬送ワークのヨーイング補正機構とその補正方法 |
JP5946659B2 (ja) * | 2012-03-12 | 2016-07-06 | 株式会社アイエイアイ | 直交ロボット |
CN102615514B (zh) * | 2012-04-10 | 2013-08-14 | 清华大学 | 一种平面两自由度冗余驱动并联机构及采用该机构的机床 |
US9921494B2 (en) | 2012-04-27 | 2018-03-20 | Asml Netherlands B.V. | Lithographic apparatus comprising an actuator, and method for protecting such actuator |
US8485740B1 (en) * | 2012-06-19 | 2013-07-16 | Chapman/Leonard Studio Equipment, Inc. | Camera head with pan, roll and tilt movement |
JP6068877B2 (ja) * | 2012-08-31 | 2017-01-25 | 京セラ株式会社 | ステージ装置 |
US20140166203A1 (en) * | 2012-12-14 | 2014-06-19 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Blocking device, sealant curing device, and sealant curing method |
CN103056863A (zh) * | 2012-12-21 | 2013-04-24 | 大连理工大学 | 龙门架式船体分段划线机 |
JP6662089B2 (ja) * | 2016-02-22 | 2020-03-11 | ウシオ電機株式会社 | ステージ装置 |
JP6761279B2 (ja) | 2016-05-16 | 2020-09-23 | キヤノン株式会社 | 位置決め装置、リソグラフィー装置および物品製造方法 |
CN107561869B (zh) * | 2016-06-30 | 2019-10-25 | 上海微电子装备(集团)股份有限公司 | 一种工件台锁定限位装置和采用该装置的工件台 |
CN108969119A (zh) * | 2018-09-07 | 2018-12-11 | 郑州大学第附属医院 | 一种整形美容颌面部固定装置 |
EP3670067B1 (de) * | 2018-12-20 | 2022-07-27 | Etel S.A. | Positioniereinrichtung in portalbauweise |
KR102225960B1 (ko) * | 2019-06-24 | 2021-03-10 | 세메스 주식회사 | 기판 이송 장치 |
EP3876036A1 (de) | 2020-03-04 | 2021-09-08 | ASML Netherlands B.V. | Schwingungsisolationssystem und zugehörige anwendungen in der lithographie |
US11938677B2 (en) * | 2020-05-14 | 2024-03-26 | John Martin Harra | Positioning system |
JP2022061834A (ja) * | 2020-10-07 | 2022-04-19 | キヤノン株式会社 | 位置決め装置、リソグラフィ装置及び物品の製造方法 |
KR102547187B1 (ko) * | 2021-02-16 | 2023-06-26 | 재단법인대구경북과학기술원 | 갠트리 스테이지장치 |
CN113488950B (zh) * | 2021-07-12 | 2022-09-16 | 上海隐冠半导体技术有限公司 | 线缆台机构及移动装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8204450A (nl) * | 1982-11-17 | 1984-06-18 | Philips Nv | Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat. |
NL8500930A (nl) * | 1985-03-29 | 1986-10-16 | Philips Nv | Verplaatsingsinrichting met voorgespannen contactloze lagers. |
US5163651A (en) * | 1990-03-13 | 1992-11-17 | Ntn Corporation | Movable table |
NL9100202A (nl) * | 1991-02-05 | 1992-09-01 | Asm Lithography Bv | Lithografische inrichting met een hangende objecttafel. |
US5528118A (en) * | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
US5760564A (en) | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
DE69717975T2 (de) * | 1996-12-24 | 2003-05-28 | Asml Netherlands B.V., Veldhoven | In zwei richtungen ausgewogenes positioniergerät, sowie lithographisches gerät mit einem solchen positioniergerät |
US5815246A (en) * | 1996-12-24 | 1998-09-29 | U.S. Philips Corporation | Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device |
USRE40043E1 (en) * | 1997-03-10 | 2008-02-05 | Asml Netherlands B.V. | Positioning device having two object holders |
JP3483452B2 (ja) * | 1998-02-04 | 2004-01-06 | キヤノン株式会社 | ステージ装置および露光装置、ならびにデバイス製造方法 |
JPH11300557A (ja) * | 1998-04-15 | 1999-11-02 | Thk Co Ltd | 移動テーブル装置 |
DE60032568T2 (de) * | 1999-12-01 | 2007-10-04 | Asml Netherlands B.V. | Positionierungsapparat und damit versehener lithographischer Apparat |
US6467960B1 (en) * | 2000-08-18 | 2002-10-22 | Nikon Corporation | Air bearing linear guide for use in a vacuum |
-
2000
- 2000-11-22 DE DE60032568T patent/DE60032568T2/de not_active Expired - Fee Related
- 2000-11-29 TW TW089125351A patent/TW594427B/zh not_active IP Right Cessation
- 2000-11-29 JP JP2000403669A patent/JP3947652B2/ja not_active Expired - Fee Related
- 2000-11-29 US US09/725,299 patent/US6635887B2/en not_active Expired - Lifetime
- 2000-11-29 KR KR1020000071727A patent/KR100573663B1/ko not_active IP Right Cessation
-
2003
- 2003-08-27 US US10/648,270 patent/US6852989B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20010050341A1 (en) | 2001-12-13 |
JP2002025902A (ja) | 2002-01-25 |
US6635887B2 (en) | 2003-10-21 |
US20040036035A1 (en) | 2004-02-26 |
KR100573663B1 (ko) | 2006-04-24 |
JP3947652B2 (ja) | 2007-07-25 |
KR20010061993A (ko) | 2001-07-07 |
TW594427B (en) | 2004-06-21 |
US6852989B2 (en) | 2005-02-08 |
DE60032568T2 (de) | 2007-10-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |