DE60032373D1 - Mikromechanisch hergestellter stimmgabelkreisel und zugehöriges dreiachsiges inertialmesssystem zur messung von drehungen ausserhalb der ebene - Google Patents

Mikromechanisch hergestellter stimmgabelkreisel und zugehöriges dreiachsiges inertialmesssystem zur messung von drehungen ausserhalb der ebene

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Publication number
DE60032373D1
DE60032373D1 DE60032373T DE60032373T DE60032373D1 DE 60032373 D1 DE60032373 D1 DE 60032373D1 DE 60032373 T DE60032373 T DE 60032373T DE 60032373 T DE60032373 T DE 60032373T DE 60032373 D1 DE60032373 D1 DE 60032373D1
Authority
DE
Germany
Prior art keywords
micromechanic
level
tuning fork
measuring
measuring system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032373T
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English (en)
Other versions
DE60032373T2 (de
Inventor
S Weinberg
J Bernstein
A Kirkos
W Lee
Anthony Petrovich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
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Charles Stark Draper Laboratory Inc
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Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Publication of DE60032373D1 publication Critical patent/DE60032373D1/de
Application granted granted Critical
Publication of DE60032373T2 publication Critical patent/DE60032373T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
DE60032373T 1999-09-24 2000-09-07 Mikromechanisch hergestellter stimmgabelkreisel und zugehöriges dreiachsiges inertialmesssystem zur messung von drehungen ausserhalb der ebene Expired - Lifetime DE60032373T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/405,721 US6257059B1 (en) 1999-09-24 1999-09-24 Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US405721 1999-09-24
PCT/US2000/040841 WO2001022094A2 (en) 1999-09-24 2000-09-07 Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation

Publications (2)

Publication Number Publication Date
DE60032373D1 true DE60032373D1 (de) 2007-01-25
DE60032373T2 DE60032373T2 (de) 2007-10-25

Family

ID=23604945

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60032373T Expired - Lifetime DE60032373T2 (de) 1999-09-24 2000-09-07 Mikromechanisch hergestellter stimmgabelkreisel und zugehöriges dreiachsiges inertialmesssystem zur messung von drehungen ausserhalb der ebene

Country Status (9)

Country Link
US (1) US6257059B1 (de)
EP (2) EP1744121B1 (de)
JP (1) JP5123455B2 (de)
AU (1) AU1106501A (de)
CA (1) CA2385873C (de)
DE (1) DE60032373T2 (de)
GB (1) GB2371363B (de)
HK (1) HK1048659B (de)
WO (1) WO2001022094A2 (de)

Families Citing this family (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6578420B1 (en) * 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
IL139695A0 (en) * 2000-11-15 2002-02-10 Technion R & D Foundation Ltd Method and apparatus for micro-machined sensors using enhanced modulated integrative differential optical sensing
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
US6598475B2 (en) * 2001-09-20 2003-07-29 Honeywell International Inc. Micromechanical inertial sensor having increased pickoff resonance damping
JP3724403B2 (ja) * 2001-10-02 2005-12-07 株式会社村田製作所 振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置
US6862934B2 (en) * 2001-10-05 2005-03-08 The Charles Stark Draper Laboratory, Inc. Tuning fork gyroscope
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
WO2003067190A1 (en) * 2002-02-06 2003-08-14 Analog Devices, Inc. Micromachined gyroscope
FR2838423B1 (fr) * 2002-04-12 2005-06-24 Thales Sa Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante
US6487864B1 (en) 2002-04-23 2002-12-03 Honeywell International Inc. Cyrogenic inertial micro-electro-mechanical system (MEMS) device
US6865944B2 (en) * 2002-12-16 2005-03-15 Honeywell International Inc. Methods and systems for decelerating proof mass movements within MEMS structures
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US6718825B1 (en) 2003-01-17 2004-04-13 Honeywell International Inc. Methods and systems for reducing stick-down within MEMS structures
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6966224B2 (en) * 2003-03-06 2005-11-22 Bei Technologies, Inc. Micromachined vibratory gyroscope with electrostatic coupling
US6843127B1 (en) 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US20050062362A1 (en) * 2003-08-28 2005-03-24 Hongyuan Yang Oscillatory gyroscope
FR2860865B1 (fr) * 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer
US6928873B2 (en) * 2003-11-01 2005-08-16 Chung-Shan Institute Of Science And Technology Silicon dual inertial sensors
US6940433B2 (en) * 2003-11-14 2005-09-06 Northrop Grumman Corporation Modulation method for signal crosstalk mitigation in electrostatically driven devices
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
US7065888B2 (en) * 2004-01-14 2006-06-27 Aai Corporation Gyroscopic system for boresighting equipment
US6964195B2 (en) * 2004-01-30 2005-11-15 Bei Technologies, Inc. Micromachined vibratory gyroscope and method with electronic coupling
US7464590B1 (en) * 2004-03-12 2008-12-16 Thomson Licensing Digitally programmable bandwidth for vibratory rate gyroscope
US6938483B1 (en) 2004-03-28 2005-09-06 Hai Yan Phase-locked mechanical resonator pair and its application in micromachined vibration gyroscope
CN100559122C (zh) * 2004-04-14 2009-11-11 模拟设备公司 带有传感元件的线性阵列的惯性传感器
US7036373B2 (en) * 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
EP1617178B1 (de) * 2004-07-12 2017-04-12 STMicroelectronics Srl Mikroelektromechanische Struktur mit elektrisch isolierten Gebieten und Verfahren zu ihrer Herstellung
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
JP2006119001A (ja) * 2004-10-22 2006-05-11 Sony Corp 角速度検出装置およびその製造方法
JP4654667B2 (ja) * 2004-11-25 2011-03-23 パナソニック電工株式会社 ジャイロセンサおよび角速度検出方法
US7300814B2 (en) * 2004-12-16 2007-11-27 The Charles Stark Draper Laboratory, Inc. Method for fabricating micro-mechanical devices
CN100449265C (zh) * 2005-02-28 2009-01-07 北京大学 一种水平轴微机械陀螺及其制备方法
US7302848B2 (en) 2005-03-10 2007-12-04 The Charles Stark Draper Laboratory, Inc. Force compensated comb drive
CN100338470C (zh) * 2005-03-25 2007-09-19 中北大学 单片双惯性参数加速度计陀螺仪
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
US7545945B2 (en) * 2005-08-05 2009-06-09 The Research Foundation Of The State University Of New York Comb sense microphone
US8129801B2 (en) * 2006-01-06 2012-03-06 Honeywell International Inc. Discrete stress isolator attachment structures for MEMS sensor packages
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US7992283B2 (en) * 2006-01-31 2011-08-09 The Research Foundation Of State University Of New York Surface micromachined differential microphone
JP4830757B2 (ja) * 2006-02-28 2011-12-07 株式会社デンソー 角速度センサおよびその製造方法
US8004021B2 (en) * 2006-04-21 2011-08-23 Bioscale, Inc. Microfabricated devices and method for fabricating microfabricated devices
FR2905457B1 (fr) * 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
US20080121042A1 (en) * 2006-11-27 2008-05-29 Bioscale, Inc. Fluid paths in etchable materials
US7999440B2 (en) * 2006-11-27 2011-08-16 Bioscale, Inc. Micro-fabricated devices having a suspended membrane or plate structure
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US7934423B2 (en) * 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8061201B2 (en) 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
ATE520960T1 (de) 2007-09-18 2011-09-15 Atlantic Inertial Systems Ltd Verbesserungen in bezug auf winkelgeschwindigkeitssensoren
EP2040032A1 (de) 2007-09-19 2009-03-25 Atlantic Inertial Systems Limited Verbesserungen bei oder im Zusammenhang mit Winkelgeschwindigkeitssensoren
FI119895B (fi) 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
KR101433590B1 (ko) * 2007-12-12 2014-08-26 허니웰 인터내셔널 인코포레이티드 커패시턴스 변조에 의한 mems 자이로스코프의 파라미터증폭
US8037757B2 (en) * 2007-12-12 2011-10-18 Honeywell International Inc. Parametric amplification of a MEMS gyroscope by capacitance modulation
WO2009119470A1 (ja) * 2008-03-24 2009-10-01 アルプス電気株式会社 角速度センサ
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
TWI374268B (en) * 2008-09-05 2012-10-11 Ind Tech Res Inst Multi-axis capacitive accelerometer
US8205498B2 (en) * 2008-11-18 2012-06-26 Industrial Technology Research Institute Multi-axis capacitive accelerometer
DE102008044053B4 (de) 2008-11-25 2022-07-14 Robert Bosch Gmbh Quadraturkompensation für einen Drehratensensor
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
US8664951B2 (en) * 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US7736931B1 (en) * 2009-07-20 2010-06-15 Rosemount Aerospace Inc. Wafer process flow for a high performance MEMS accelerometer
US9970764B2 (en) 2009-08-31 2018-05-15 Georgia Tech Research Corporation Bulk acoustic wave gyroscope with spoked structure
US8513746B2 (en) * 2010-10-15 2013-08-20 Rohm Co., Ltd. MEMS sensor and method for producing MEMS sensor, and MEMS package
TWI453371B (zh) 2011-12-30 2014-09-21 Ind Tech Res Inst 一種具振盪模組的微機電系統裝置
TWI616395B (zh) 2012-01-12 2018-03-01 村田電子公司 加速度感測器結構和其之使用
US8860114B2 (en) * 2012-03-02 2014-10-14 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method for a fishbone differential capacitor
US9293521B2 (en) 2012-03-02 2016-03-22 Taiwan Semiconductor Manufacturing Co., Ltd. Concentric capacitor structure
JP6143430B2 (ja) * 2012-05-08 2017-06-07 三菱プレシジョン株式会社 バイアス補正機能を備えた振動型ジャイロ
JP5772873B2 (ja) * 2012-06-13 2015-09-02 株式会社デンソー 静電容量式物理量センサ
US9181086B1 (en) 2012-10-01 2015-11-10 The Research Foundation For The State University Of New York Hinged MEMS diaphragm and method of manufacture therof
CN105731353A (zh) * 2014-12-12 2016-07-06 立锜科技股份有限公司 微机电装置
US10545167B2 (en) 2015-10-20 2020-01-28 Analog Devices, Inc. Multiple-axis resonant accelerometers
US10514259B2 (en) 2016-08-31 2019-12-24 Analog Devices, Inc. Quad proof mass MEMS gyroscope with outer couplers and related methods
US10627235B2 (en) 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
US10415968B2 (en) 2016-12-19 2019-09-17 Analog Devices, Inc. Synchronized mass gyroscope
US10697774B2 (en) 2016-12-19 2020-06-30 Analog Devices, Inc. Balanced runners synchronizing motion of masses in micromachined devices
CN106500732A (zh) * 2016-12-22 2017-03-15 四川纳杰微电子技术有限公司 一种微机械陀螺仪正交误差补偿结构
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
CN109163717B (zh) * 2018-11-03 2020-04-24 中北大学 一种基于轮-环形式的单片三轴mems陀螺仪
US20200292313A1 (en) * 2019-03-11 2020-09-17 Honeywell International Inc. In-plane non-degenerate coriolis vibratory gyroscope
CN112209332B (zh) * 2019-07-10 2023-09-05 清华大学 一种单片六轴imu的双面电极制作及圆片级真空封装方法
US11193771B1 (en) 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
EP4162282A1 (de) 2020-06-08 2023-04-12 Analog Devices, Inc. Antriebs- und erfassungsspannungsentlastungsvorrichtung
US11686581B2 (en) 2020-06-08 2023-06-27 Analog Devices, Inc. Stress-relief MEMS gyroscope
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
JP3077077B2 (ja) * 1994-01-28 2000-08-14 ザ・チャールズ・スターク・ドレイパー・ラボラトリー・インコーポレイテッド 慣性レートセンサー
JP3212804B2 (ja) * 1994-06-08 2001-09-25 三菱電機株式会社 角速度センサおよび角速度検出装置
DE19500800A1 (de) * 1994-06-16 1995-12-21 Bosch Gmbh Robert Beschleunigungssensor
DE4442033C2 (de) * 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
KR100374803B1 (ko) * 1995-05-25 2003-05-12 삼성전자주식회사 튜닝포크형자이로스코프
DE19519488B4 (de) * 1995-05-27 2005-03-10 Bosch Gmbh Robert Drehratensensor mit zwei Beschleunigungssensoren
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
JPH09196680A (ja) * 1996-01-16 1997-07-31 Tokimec Inc ジャイロ装置及びその製造方法
JP3039364B2 (ja) * 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
JP3327150B2 (ja) * 1996-12-13 2002-09-24 株式会社豊田中央研究所 共振型角速度センサ
EP0911606A1 (de) * 1997-10-23 1999-04-28 STMicroelectronics S.r.l. Integrierter Winkelgeschwindigkeitssensor und Verfahren zu seiner Herstellung
WO1999019734A2 (en) * 1997-10-14 1999-04-22 Irvine Sensors Corporation Multi-element micro gyro
JPH11237247A (ja) * 1998-02-19 1999-08-31 Matsushita Electric Ind Co Ltd 角速度センサ及びその製造方法
JP3123503B2 (ja) * 1998-03-16 2001-01-15 株式会社村田製作所 角速度センサ
JP3106395B2 (ja) * 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ

Also Published As

Publication number Publication date
EP1216397A2 (de) 2002-06-26
EP1744121A1 (de) 2007-01-17
EP1216397A4 (de) 2003-02-05
HK1048659B (zh) 2004-09-10
GB2371363A (en) 2002-07-24
CA2385873C (en) 2009-03-24
CA2385873A1 (en) 2001-03-29
EP1216397B1 (de) 2006-12-13
EP1744121B1 (de) 2011-05-11
US6257059B1 (en) 2001-07-10
WO2001022094A3 (en) 2001-11-08
JP2003510573A (ja) 2003-03-18
GB2371363B (en) 2004-03-03
GB0207952D0 (en) 2002-05-15
DE60032373T2 (de) 2007-10-25
AU1106501A (en) 2001-04-24
WO2001022094A2 (en) 2001-03-29
HK1048659A1 (en) 2003-04-11
JP5123455B2 (ja) 2013-01-23

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